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Microsphere-assisted hyperspectral imaging:super-resolution,non-destructive metrology for semiconductor devices

Light(Science & Applications) 2024年第6期13卷 1098-1111页

作者： Jangryul Park Youngsun Choi Soonyang Kwono Youngjun lee Jiwoong Kim Jae-joon Kim Jihye lee Jeongho Ahn Hidong Kwak Yusin Yang Taeyong Jo Myungjun lee Kwangrak Kim Metrology and Inspection Equipment R&D Team Mechatronics ResearchSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department DRAM Process Development TeamSemiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department Semiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea

As semiconductor devices shrink and their manufacturing processes advance,accurately measuring in-cell critical dimensions(CD)becomes increasingly *** test element group(TEg)measurements are becoming inadequate for representing the fine,repetitive patterns in cell *** non-destructive metrology technologies like optical critical dimension(OCD)are limited due to their large spot diameter of approximately 25μm,which impedes their efficacy for detailed in-cell structural ***,there is a pressing need for small-spot and non-destructive metrology *** address this limitation,we demonstrate a microsphere-assisted hyperspectral imaging(MAHSI)system,specifically designed for small spot optical metrology with *** microsphere-assisted super-resolution imaging,this system achieves an optical resolution of 66 nm within a field of view of 5.6μm×5.6μ*** approach effectively breaks the diffraction limit,significantly enhancing the magnification of the *** MAHSI system incorporating hyperspectral imaging with a wavelength range of 400–790 nm,enables the capture of the reflection spectrum at each camera *** achieved pixel resolution,which is equivalent to the measuring spot size,is 14.4 nm/pixel and the magnification is *** MAHSI system enables measurement of local uniformity in critical areas like corners and edges of DRAM cell blocks,areas previously challenging to inspect with conventional OCD *** our knowledge,this approach represents the first global implementation of microsphere-assisted hyperspectral imaging to address the metrology challenges in complex 3D structures of semiconductor devices.

关键词： metrology resolution enable

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Effect of Eu3+,Bi3+,and Li+ doping on luminescent property of gdNbO4

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Journal of Rare Earths 2024年第1期42卷 66-75页

作者： S.W.Wi Y.S.lee Department of Physics and Integrative Institute of Basic Sciences Soongsil University

We investigated the emission properties of Eu3+-doped gdNbO4-based oxide phosphors,aiming at improving the Eu3+emission by codoping of Bi3+and Li+.Eu3+singly doped,Eu3+and Bi3+doubly doped,and Eu3+,Bi3+,and Li+triply doped gdNbO4were prepared using a high-temperature solid-state reaction *** red-orange emissions from Eu3+in the singly doped samples are significantly improved by the codoping of Bi3+,mainly due to the energy transfer from Bi3+to Eu3+.The additional codoping of Li+is found to increase the Eu3+emission *** improvement might be attributed to the increase in the photoluminescent quantum yield originating from larger grain sizes and better crystallinity.A detailed analysis of the X-ray diffraction pattern and the asymmetric ratio estimated from the photoluminescence spectra show that the local lattice environment around Eu3+in gdNbO4does not change significantly with the codoping of Bi3+and Li+.Our results indicate that Li+doping is a promising way to improve the emission properties of rare-earth ion-doped gdNbO4phosphors.

关键词： Eu 3+ gdNbO 4 Codoping of Li + Photoluminescence Sensitizer Rare earths

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Novel Perovskite Oxide Hybrid Nanofibers Embedded with Nanocatalysts for Highly Efficient and Durable Electrodes in Direct CO_(2) Electrolysis

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Nano-Micro Letters 2024年第5期16卷 214-230页

作者： Akromjon Akhmadjonov Kyung Taek Bae Kang Taek lee Department of Mechanical Engineering KAISTDaejeon 34141Republic of Korea KAIST graduate School of green growth and Sustainability Daejeon 34141Republic of Korea

The unique characteristics of nanofibers in rational electrode design enable effec-tive utilization and maximizing material properties for achieving highly efficient and sustainable CO_(2) reduction reactions( CO_(2)RRs)in solid oxide elec-trolysis cells(SOECs).However,practical appli-cation of nanofiber-based electrodes faces chal-lenges in establishing sufficient interfacial contact and adhesion with the dense *** tackle this challenge,a novel hybrid nanofiber electrode,La_(0.6)Sr_(0.4)Co_(0.15)Fe_(0.8)Pd_(0.05)O_(3-δ)(H-LSCFP),is developed by strategically incorporating low aspect ratio crushed LSCFP nanofibers into the excess porous interspace of a high aspect ratio LSCFP nanofiber framework synthesized via electrospinning *** consecutive treatment in 100% H_(2) and CO_(2) at 700°C,LSCFP nanofibers form a perovskite phase with in situ exsolved Co metal nanocatalysts and a high concentration of oxygen species on the surface,enhancing CO_(2) *** SOEC with the H-LSCFP electrode yielded an outstanding current density of 2.2 A cm^(-2) in CO_(2) at 800°C and 1.5 V,setting a new benchmark among reported nanofiber-based *** twinning of the H-LSCFP reveals improved contact adhesion and increased reaction sites for CO_(2)*** present work demonstrates a highly catalytically active and robust nanofiber-based fuel electrode with a hybrid structure,paving the way for further advancements and nanofiber applications in CO_(2)-SOECs.

关键词： Nanofibers Fuel electrodes Digital twinning CO_(2)reduction reaction Solid oxide electrolysis cells

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Effect of Meteorological Data Assimilation on Regional Air Quality Forecasts over the Korean Peninsula

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Journal of Meteorological Research 2024年第2期38卷 262-284页

作者： Yunjae CHO Hyun Mee KIM Eun-gyeong YANg Yonghee lee Jae-Bum lee Soyoung HA Department of Atmospheric Sciences Yonsei UniversitySeoul 03722Republic of Korea Air Quality Forecasting Center National Institute of Environmental ResearchIncheon 22689Republic of Korea National Center for Atmospheric Research BoulderCO 80305USA University of Maryland Baltimore County BaltimoreMD 21250USA global Modeling and Assimilation Office NASA Goddard Space Flight CenterGreenbeltMD 20771USA

The Weather Research and Forecasting model coupled with Chemistry(WRF-Chem),a type of online coupled chemistry-meteorology model(CCMM),considers the interaction between air quality and meteorology to improve air quality *** data assimilation(DA)can be used to reduce uncertainty in meteorological field,which is one factor causing prediction uncertainty in the *** this study,WRF-Chem and three-dimensional variational DA were used to examine the impact of meteorological DA on air quality and meteorological forecasts over the Korean *** nesting model domains were configured over East Asia(outer domain)and the Korean Peninsula(inner domain).Three experiments were conducted by using different DA domains to determine the optimal model domain for the meteorological *** the meteorological DA was performed in the outer domain or both the outer and inner domains,the root-mean-square error(RMSE),bias of the predicted particulate matter(PM)concentrations,and the RMSE of predicted meteorological variables against the observations were smaller than those in the experiment where the meteorological DA was performed only in the inner *** indicates that the improvement of the synoptic meteorological fields by DA in the outer domain enhanced the meteorological initial and boundary conditions for the inner domain,subsequently improving air quality and meteorological *** to the experiment without meteorological DA,the RMSE and bias of the meteorological and PM variables were smaller in the experiments with *** effect of meteorological DA on the improvement of PM predictions lasted for approximately 58-66 h,depending on the ***,the uncertainty reduction in the meteorological initial condition by the meteorological DA contributed to a reduction of the forecast errors of both meteorology and air quality.

关键词： meteorological data assimilation regional air quality forecast particulate matter concentration optimal model domain forecast error WRF-Chem

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A Simple Embedding Method for the Laplace-Beltrami Eigenvalue Problem onImplicit Surfaces

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Communications on Applied Mathematics and Computation 2024年第2期6卷 1189-1216页

作者： Young Kyu lee Shingyu Leung Department of Mathematics The Hong Kong University of Science and TechnologyClear Water BayHong KongChina

We propose a simple embedding method for computing the eigenvalues and eigenfunctions of the Laplace-Beltrami operator on implicit *** approach follows an embedding approach for solving the surface eikonal *** replace the differential operator on the interface with a typical Cartesian differential operator in the surface *** proposed algorithm is easy to implement and *** will give some two-and three-dimensional numerical examples to demonstrate the effectiveness of our proposed approach.

关键词： Laplace-Beltrami operator Level set method Implicit representation Eigenvalues Numerical PDEs

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Evaluating bacterial contamination and surgical site infection risks in intracorporeal anastomosis: Role of bowel preparation

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World Journal of gastrointestinal Surgery 2024年第6期16卷 1953-1955页

作者： Junho lee Department of Surgery Hanyang UniversityCollege of MedicineSeoul 04763South Korea

We recently read the study by Kayano et al on intracorporeal anastomosis(IA)for colon cancer,which assessed bacterial contamination and medium-term onco-logical outcomes and affirmed that IA is analogous to extracorporeal anastomosis in reducing intraperitoneal bacterial risk and achieving similar oncological *** commentary addresses gaps,particularly concerning bowel preparation and surgical site infections(SSIs),and highlights the need for comprehensive details on the bowel preparation methods that are currently employed,including mecha-nical bowel preparation,oral antibiotics(OA),their combination,and specific OA *** emphasize the necessity for further analyses that investigate these me-thods and their correlation with SSI rates,to enhance clinical protocol guidance and optimize surgical *** meticulous analyses are essential for refi-ning strategies to effectively mitigate SSI risk in colorectal surgeries.

关键词： Intracorporeal anastomosis Surgical site infection Mechanical bowel preparation Oral antibiotics Bacterial contamination Colon cancer

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Age-specific heterogeneity of genetic susceptibility to cardiovascular disease might have opposite outcomes depending on the presence of prediabetes

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World Journal of Diabetes 2024年第6期15卷 1381-1383页

作者： Chaeyoung lee Department of Bioinformatics and Life Science Soongsil UniversitySeoul 06978South Korea

Examining age-specific heterogeneity of susceptibility to cardiovascular disease is also essential in individuals without prediabetes to determine its relative size and direction compared to those with *** particular interest,age-specific heterogeneity in genetic susceptibility may exhibit opposite directions depending on the presence or absence of prediabetes.

关键词： Age-specific difference Cardiovascular disease genetic heterogeneity by age genetic susceptibility Prediabetes

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Circulation Pattern Controls of Summer Temperature Anomalies in Southern Africa

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Advances in Atmospheric Sciences 2024年第2期41卷 341-354页

作者： Chibuike Chiedozie IBEBUCHI Cameron C.lee Department of geography Kent State UniversityKentOhio 44242USA ClimRISE Lab Kent State UniversityKentOhio 44242USA

This study investigates the relationship between circulation patterns and austral summer temperature anomalies in southern Africa. The results show that the formation of continental lows tends to increase the thickness of the lower atmosphere. Further, the distinct variabilities of high and low pressure under the circulation types, influence air mass advection from the adjacent oceans, as well as atmospheric stability over land. Stronger anticyclonic circulation at the western branch of the Mascarene high-pressure system enhances the low-level cold air advection by southeast winds,decreases the thickness, and lowers the temperature over a majority of the land in southern Africa. Conversely, a weaker Mascarene High, coupled with enhanced cyclonic activity in the southwest Indian Ocean increases low-level warm air advection and increases temperature anomalies over vast regions in southern Africa. The ridging of a closed South Atlantic anticyclone at the southern coast of southern Africa results in colder temperatures near the tip of southern Africa due to enhanced low-level cold air advection by southeast winds. However, when the ridge is weak and westerly winds dominate the southern coast of southern Africa, these areas experience temperature increases. The northward track of the Southern Hemisphere mid-latitude cyclone, which can be linked to the negative Southern Annular Mode, reduces the temperature in the southwestern part of southern Africa. Also, during the analysis period, El Ni?o was associated with temperature increases over the central parts of southern Africa;while the positive Indian Ocean dipole was linked to a temperature increase over the northeastern, northwestern, and southwestern parts of southern Africa.

关键词： temperature circulation types Subtropical Indian Ocean dipole Southern Annular Mode El Ni?o Indian Ocean dipole Mascarene High South Atlantic anticyclone

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Vomiting-induced pharyngeal perforation during bowel preparation for colonoscopy:A case report

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World Journal of Clinical Cases 2024年第18期12卷 3615-3621页

作者： geonhee Kim won Hyuk lee Seokin Kang Jung Rock Moon Yoon Suk lee Jun Hyuk Son Nam-Hoon Kim Jong Wook Kim Department of Internal Medicine Ilsan Paik HospitalInje University College of MedicineGoyang 10380South Korea

BACKgROUND Effective bowel cleansing is essential for a successful ***,such as polyethylene glycol,are commonly used for bowel *** is a frequent complication during bowel preparation,and forceful vomiting can potentially lead to esophageal perforation,as reported in several previous ***,pharyngeal perforation during bowel preparation has not been previously ***,we present a case of pharyngeal perforation induced by forceful vomiting during bowel *** SUMMARY A 38-year-old man with a history of hypertension,dyslipidemia,diabetes mellitus,and end-stage renal disease on hemodialysis was admitted for evaluation of recurrent abdominal *** patient complained of sudden pain in the neck,throat,and anterior chest following forceful vomiting during bowel *** examination revealed crepitus under the skin of the neck and anterior chest on palpation,and upper gastrointestinal endoscopy revealed pharyngeal *** perforation site was located above the upper esophageal sphincter,which distinguished it from Boerhaave’s *** medical management was chosen after consultation with a thoracic surgeon and an otolaryngologist,considering the patient's mild symptoms,stable vital signs,and the small size of the lesion;the perforation resolved without endoscopic or surgical *** patient was discharged from hospital two weeks after the *** Despite its rarity,pharyngeal perforation should be considered a potential complication of bowel preparation for colonoscopy.

关键词： Colonoscopy Pharynx Polyethylene glycols Spontaneous perforation Case report

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Omni-functional simultaneous interfacial treatment for enhancing stability and outgassing suppression of lithium-ion batteries

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Journal of Energy Chemistry 2024年第7期94卷 677-687页

作者： Youbean lee Chanjoo Park Kyoungmin Min Kwangjin Park Department of Mechanical Engineering Gachon UniversityGyeonggi-do 13120Republic of Korea Department of Battery Engineering Gachon UniversityGyeonggi-do 13120Republic of Korea School of Mechanical Engineering Soongsil UniversitySeoul 06978Republic of Korea

Ni-rich layered oxides in lithium-ion batteries have problems with gas generation and electrochemical performance reduction due to residual lithium's reaction on the surface with the *** address this issue,in this study,the Acid solvent evaporation(AsE)method has been proposed as a potential method to remove residual lithium while promoting the formation of a new LiNO_(3)-derived coating layer on the cathode *** reduction of residual lithium using the ASE method and the construction of a LiNO_(3)-derived coating layer suppresses gas evolution caused by the side effects of the electrolyte,improves electrochemical performance,and improves thermal stability by facilitating the smooth movement of lithium ***,the structural stability and resistance change due to the LiNO_(3)-derived coating layer effects is guaranteed through cycling and DCIR of the pouch *** a result,compared to Pristine,the capacity retention of coin cells increased by 8%after 100 cycles,and pouch cells increased by 25%after 160 *** addition,after cycling the pouch cell,CO_(2) gas has significantly reduced by about 30%compared to Pristine using gas *** ASE method effectively forms a robust LiNO_(3)-derived coating layer on the cathode active material,which helps minimize electrolyte reactivity,suppress ,CO_(2) emissions,enhance surface structure stability,improve thermal stability,and improveoverallbatteryperformance.

关键词： Lithium-ion batteries Ni-rich NCM Acid solvent evaporation LiNO_(3)-derived coating gasevolution

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