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Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review

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International Journal of Mechanical system Dynamics 2021年第1期1卷 35-51页

作者： Yi song Chengqun Gui Zongliang Huo s.w.ricky lee sheng Liu The Institute of Technological sciences Wuhan UniversityWuhanChina Yangtze Memory Technologies Co. Ltd.WuhanChina Department of Mechanical and Aerospace Engineering Hong Kong University of Science and TechnologyHong KongChina

As one of the most advanced and precise equipment in the world,a photo-lithography scanner is able to fabricate nanometer‐scale devices on a *** realize such a small dimension,the optical system is the fundamental,but the me-chanical system often becomes the *** the photolithography,the ex-posure is a dynamic *** accuracy and precision of the movement are determined by the mechanical system,which is even more difficult to control compared with the optical *** the mechanical system,there are four crucial components:the reticle and wafer stages,the linear motor,the metrology system,and the control *** work together to secure the reticle and substrate locating at the correct position,which determines the overlay and alignment per-formance in the *** this paper,the principles of these components are reviewed,and the development history of the mechanical system is introduced.

关键词： control dynamic mechanical system metrology photolithography

Emerging trend for LED wafer level packaging

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Frontiers of Optoelectronics 2012年第2期5卷 119-126页

作者： s.w.ricky lee Rong ZHANG K.CHEN Jeffery C.C.LO Center for Advanced Microsystems Packaging The Hong Kong University of Science&Technology(HKUST)Hong KongChina HKUsT LED-FPD Technology R&D Center at Foshan Guangdong 528200 China

Currently most light emitting diode （LED） components are made with individual chip packaging technology. The main manufacturing processes follow conventional chip-based IC packaging. In the past several years, there has been an uprising trend in the IC industry to migrate from chip-based packaging to wafer level packaging （wLP）. Therefore, there is a need for LEDs to catch up. This paper introduces advanced LED wLP technologies. The contents cover key enabling processes such as preparation of silicon sub-mount wafer, implementation of interconnection, deposition of phosphor, wafer level encapsulation, and their integration. The emphasis is placed on how to achieve high throughput, low cost manufacturing through wLE

关键词： light emitting diode (LED) wafer levelpackaging (wLP)

Phosphor-free microLEDs with ultrafast and broadband features for visible light communications

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Photonics Research 2021年第4期9卷 452-459页

作者： Zhenhuan Tian Qiang Li Xuzheng wang Mingyin Zhang Xilin su Ye Zhang Yufeng Li Feng Yun s.w.ricky lee shaanxi Provincial Key Laboratory of Photonics&Information Technology Xi’an Jiaotong UniversityXi’an 710049China solid-state Lighting Engineering Research Center Xi’an Jiaotong UniversityXi’an 710049China Department of Mechanical and Aerospace Engineering The Hong Kong University of Science and TechnologyClear Water BayKowloonHong KongChina HKUsT LED-FPD Technology R&D Center at Foshan Foshan 528200China

Modulation bandwidth and the emission region are essential features for the widespread use of visible light communications(VLC).This paper addresses the contradictory requirements to achieve broadband and proposes ultrafast,asymmetric pyramids grown on adjacent deep concave holes via lateral *** emission with an emission region between 420 nm and 600 nm is obtained by controlling the growth rate at different positions on the same face,which also can provide multiple subcarrier frequency points for the employment of wavelength division multiplexing *** spontaneous emission rate distinction is narrowed by lowering the number of the crystal plane,ensuring a high modulation bandwidth over *** importantly,the residual stress and dislocation density were minimized by employing a patterned substrate,and lateral overgrowth resulted in a further enhancement of the recombination ***,the total modulation bandwidth of multiple subcarriers of the asymmetric pyramids is beyond *** ultrafast,multicolor microLEDs are viable for application in VLC systems and may also enable applications for intelligent lighting and display.

关键词： visible features light

Effect of Eu3+,Bi3+,and Li+ doping on luminescent property of GdNbO4

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Journal of Rare Earths 2024年第1期42卷 66-75页

作者： s.w.wi Y.s.lee Department of Physics and Integrative Institute of Basic sciences Soongsil University

we investigated the emission properties of Eu3+-doped GdNbO4-based oxide phosphors,aiming at improving the Eu3+emission by codoping of Bi3+and Li+.Eu3+singly doped,Eu3+and Bi3+doubly doped,and Eu3+,Bi3+,and Li+triply doped GdNbO4were prepared using a high-temperature solid-state reaction *** red-orange emissions from Eu3+in the singly doped samples are significantly improved by the codoping of Bi3+,mainly due to the energy transfer from Bi3+to Eu3+.The additional codoping of Li+is found to increase the Eu3+emission *** improvement might be attributed to the increase in the photoluminescent quantum yield originating from larger grain sizes and better crystallinity.A detailed analysis of the X-ray diffraction pattern and the asymmetric ratio estimated from the photoluminescence spectra show that the local lattice environment around Eu3+in GdNbO4does not change significantly with the codoping of Bi3+and Li+.Our results indicate that Li+doping is a promising way to improve the emission properties of rare-earth ion-doped GdNbO4phosphors.

关键词： Eu 3+ GdNbO 4 Codoping of Li + Photoluminescence sensitizer Rare earths

superplasticity of fine-grained Mg-10Li alloy prepared by severe plastic deformation and understanding its deformation mechanisms

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Journal of Magnesium and Alloys 2024年第1期12卷 316-331页

作者： H.T.Jeong s.w.lee w.J.Kim Department of Materials science and Engineering Hongik UniversityMapo-guSangsu-dong 72-1Seoul 121-791Republic of Korea

The superplastic behavior and associated deformation mechanisms of a fine-grained Mg-10.1 Li-0.8Al-0.6Zn alloy(LAZ1011)with a grain size of 3.2μm,primarily composed of the BCCβphase and a small amount of the HCPαphase,were examined in a temperature range of 473 K to 623 *** microstructural refinement of this alloy was achieved by employing high-ratio differential speed *** best superplasticity was achieved at 523 K and at strain rates of 10^(-4)-5×10^(-4)s^(-1),where tensile elongations of 550±600%were *** the heating and holding stage of the tensile samples prior to tensile loading,a significant increase in grain size was observed at temperatures above 573 ***,it was important to consider this effect when analyzing and understanding the superplastic deformation behavior and *** the investigated strain rate range,the superplastic flow at low strain rates was governed by lattice diffusion-controlled grain boundary sliding,while at high strain rates,lattice diffusion-controlled dislocation climb creep was the rate-controlling deformation *** was concluded that solute drag creep is unlikely to *** the late stages of deformation at 523 K,it was observed that grain boundary sliding led to the agglomeration of theαphase,resulting in significant strain *** mechanism maps were constructed forβ-Mg-Li alloys in the form of 2D and 3D formats as a function of strain rate,stress,temperature,and grain size,using the constitutive equations for various deformation mechanisms derived based on the data of the current tests.

关键词： Magnesium-lithium alloy superplasticity severe plastic deformation Grain size Grain growth

Generalized polynomial chaos expansion by reanalysis using static condensation based on substructuring

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Applied Mathematics and Mechanics(English Edition) 2024年第5期45卷 819-836页

作者： D.lee s.CHANG J.lee Department of Automotive Engineering Hanyang UniversitySeoul 04763Republic of Korea school of Mechanical Engineering Chungnam National UniversityDaejeon 34134Republic of Korea Department of Mechanical Robotics and Energy EngineeringDongguk UniversitySeoul 04620Republic of Korea

This paper presents a new computational method for forward uncertainty quantification(UQ)analyses on large-scale structural systems in the presence of arbitrary and dependent random *** method consists of a generalized polynomial chaos expansion(GPCE)for statistical moment and reliability analyses associated with the stochastic output and a static reanalysis method to generate the input-output data *** the reanalysis,we employ substructuring for a structure to isolate its local regions that vary due to random *** allows for avoiding repeated computations of invariant substructures while generating the input-output data *** substructuring with static condensation further improves the computational efficiency of the reanalysis without losing ***,the GPCE with the static reanalysis method can achieve significant computational saving,thus mitigating the curse of dimensionality to some degree for UQ under high-dimensional *** numerical results obtained from a simple structure indicate that the proposed method for UQ produces accurate solutions more efficiently than the GPCE using full finite element analyses(FEAs).we also demonstrate the efficiency and scalability of the proposed method by executing UQ for a large-scale wing-box structure under ten-dimensional(all-dependent)random inputs.

关键词： forward uncertainty quantification(UQ) generalized polynomial chaos expansion(GPCE) static reanalysis method static condensation substructuring

Mathematical modeling and simulations of stress mitigation by coating polycrystalline particles in lithium-ion batteries

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Applied Mathematics and Mechanics(English Edition) 2024年第6期45卷 947-962页

作者： N.IQBAL J.CHOI s.F.sHAH C.lee s.lee Department of Mechanical Roboticsand Energy EngineeringDongguk University-SeoulSeoul 04620Republic of Korea

A chemo-mechanical model is developed to investigate the effects on the stress development of the coating of polycrystalline Ni-rich LiNixMnyCo_(z)O_(2)(x≥0.8)(NMC)particles with poly(3,4-ethylenedioxythiophene)(PEDOT).The simulation results show that the coating of primary NMC particles significantly reduces the stress generation by efficiently accommodating the volume change associated with the lithium diffusion,and the coating layer plays roles both as a cushion against the volume change and a channel for the lithium transport,promoting the lithium distribution across the secondary particles more ***,the lower stiffness,higher ionic conductivity,and larger thickness of the coating layer improve the stress *** paper provides a mathematical framework for calculating the chemo-mechanical responses of anisotropic electrode materials and fundamental insights into how the coating of NMC active particles mitigates stress levels.

关键词： lithium-ion battery(LIB) polycrystalline particle coating finite element simulation Ni-rich LiNixMnyCo_(z)O_(2)(x>0.8)(NMC)

Effect of Eu^(3+),Bi^(3+),and Li^(+) doping on luminescent property of GdNbO_(4)

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Journal of Rare Earths 2024年第1期42卷 66-75,I0003页

作者： s.w.wi Y.s.lee Department of Physics and Integrative Institute of Basic sciences Soongsil UniversitySeoul06978Republic of Korea

we investigated the emission properties of Eu^(3+)-doped GdNbO_(4)-based oxide phosphors,aiming at improving the Eu^(3+)emission by codoping of Bi^(3+)and Li^(+).Eu^(3+)singly doped,Eu^(3+)and Bi^(3+)doubly doped,and Eu^(3+),Bi^(3+),and Li^(+)triply doped GdNbO_(4)were prepared using a high-temperature solid-state reaction *** red-orange emissions from Eu^(3+)in the singly doped samples are significantly improved by the codoping of Bi^(3+),mainly due to the energy transfer from Bi^(3+)to Eu^(3+).The additional codoping of Li^(+)is found to increase the Eu^(3+)emission *** improvement might be attributed to the increase in the photoluminescent quantum yield originating from larger grain sizes and better crystallinity.A detailed analysis of the X-ray diffraction pattern and the asymmetric ratio estimated from the photoluminescence spectra show that the local lattice environment around Eu^(3+)in GdNbO_(4)does not change significantly with the codoping of Bi^(3+)and Li^(+).Our results indicate that Li^(+)doping is a promising way to improve the emission properties of rare-earth ion-doped GdNbO_(4)phosphors.

关键词： Eu^(3+) GdNbO_(4) Codoping of Li^(+) Photoluminescence sensitizer Rare earths

Highly enhanced UV absorption and light emission of monolayer ws_(2)through hybridization with Ti_(2)N MXene quantum dots and g-C_(3)N_(4)quantum dots

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Opto-Electronic Advances 2024年第6期7卷 31-39页

作者： Anir s.sharbirin Rebekah E.Kong wendy B.Mato Trang Thu Tran Eunji lee Jolene w.P.Khor Afrizal L.Fadli Jeongyong Kim Department of Energy science Sungkyunkwan UniversitySuwon 16419Republic of Korea

Two-dimensional(2D)transition metal dichalcogenides(TMD)are atomically thin semiconductors with promising optoelectronic applications across the visible ***,their intrinsically weak light absorption and the low photoluminescence quantum yield(PLQY)restrict their performance and potential use,especially in ultraviolet(UV)wavelength light *** dots(QD)derived from 2D materials(2D/QD)provide efficient light absorption and emission of which energy can be tuned for desirable light *** this study,we greatly enhanced the photon absorption and PLQY of monolayer(1L)tungsten disulfide(ws_(2))in the UV range via hybridization with 2D/QD,particularly titanium nitride MXene QD(Ti_(2)N MQD)and graphitic carbon nitride QD(GCNQD).with the hybridization of MQD or GCNQD,1Lws_(2)showed a maximum PL enhancement by 15 times with 300 nm wavelength excitation,while no noticeable enhancement was observed when the excitation photon energy was less than the bandgap of the QD,indicating that UV absorption by the QD played a crucial role in enhancing the light emission of 1L-ws_(2)in our 0D/2D hybrid *** findings present a convenient method for enhancing the photo-response of 1L-ws_(2)to UV light and offer exciting possibilities for harvesting UV energy using 1L-TMD.

关键词： monolayer TMD ws_(2) 2D-derived quantum dots UV absorption energy transfer