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Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review

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International Journal of Mechanical system Dynamics 2021年第1期1卷 35-51页

作者： Yi song Chengqun Gui Zongliang Huo s.w.ricky lee sheng Liu The Institute of Technological sciences Wuhan UniversityWuhanChina Yangtze Memory Technologies Co. Ltd.WuhanChina Department of Mechanical and Aerospace Engineering Hong Kong University of Science and TechnologyHong KongChina

As one of the most advanced and precise equipment in the world,a photo-lithography scanner is able to fabricate nanometer‐scale devices on a *** realize such a small dimension,the optical system is the fundamental,but the me-chanical system often becomes the *** the photolithography,the ex-posure is a dynamic *** accuracy and precision of the movement are determined by the mechanical system,which is even more difficult to control compared with the optical *** the mechanical system,there are four crucial components:the reticle and wafer stages,the linear motor,the metrology system,and the control *** work together to secure the reticle and substrate locating at the correct position,which determines the overlay and alignment per-formance in the *** this paper,the principles of these components are reviewed,and the development history of the mechanical system is introduced.

关键词： control dynamic mechanical system metrology photolithography

Emerging trend for LED wafer level packaging

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Frontiers of Optoelectronics 2012年第2期5卷 119-126页

作者： s.w.ricky lee Rong ZHANG K.CHEN Jeffery C.C.LO Center for Advanced Microsystems Packaging The Hong Kong University of Science&Technology(HKUST)Hong KongChina HKUsT LED-FPD Technology R&D Center at Foshan Guangdong 528200 China

Currently most light emitting diode （LED） components are made with individual chip packaging technology. The main manufacturing processes follow conventional chip-based IC packaging. In the past several years, there has been an uprising trend in the IC industry to migrate from chip-based packaging to wafer level packaging （wLP）. Therefore, there is a need for LEDs to catch up. This paper introduces advanced LED wLP technologies. The contents cover key enabling processes such as preparation of silicon sub-mount wafer, implementation of interconnection, deposition of phosphor, wafer level encapsulation, and their integration. The emphasis is placed on how to achieve high throughput, low cost manufacturing through wLE

关键词： light emitting diode (LED) wafer levelpackaging (wLP)

Phosphor-free microLEDs with ultrafast and broadband features for visible light communications

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Photonics Research 2021年第4期9卷 452-459页

作者： Zhenhuan Tian Qiang Li Xuzheng wang Mingyin Zhang Xilin su Ye Zhang Yufeng Li Feng Yun s.w.ricky lee shaanxi Provincial Key Laboratory of Photonics&Information Technology Xi’an Jiaotong UniversityXi’an 710049China solid-state Lighting Engineering Research Center Xi’an Jiaotong UniversityXi’an 710049China Department of Mechanical and Aerospace Engineering The Hong Kong University of Science and TechnologyClear Water BayKowloonHong KongChina HKUsT LED-FPD Technology R&D Center at Foshan Foshan 528200China

Modulation bandwidth and the emission region are essential features for the widespread use of visible light communications(VLC).This paper addresses the contradictory requirements to achieve broadband and proposes ultrafast,asymmetric pyramids grown on adjacent deep concave holes via lateral *** emission with an emission region between 420 nm and 600 nm is obtained by controlling the growth rate at different positions on the same face,which also can provide multiple subcarrier frequency points for the employment of wavelength division multiplexing *** spontaneous emission rate distinction is narrowed by lowering the number of the crystal plane,ensuring a high modulation bandwidth over *** importantly,the residual stress and dislocation density were minimized by employing a patterned substrate,and lateral overgrowth resulted in a further enhancement of the recombination ***,the total modulation bandwidth of multiple subcarriers of the asymmetric pyramids is beyond *** ultrafast,multicolor microLEDs are viable for application in VLC systems and may also enable applications for intelligent lighting and display.

关键词： visible features light

Tailoring Light–Matter Interactions in Overcoupled Resonator for Biomolecule Recognition and Detection

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Nano-Micro Letters 2025年第1期17卷 262-280页

作者： Dongxiao Li Hong Zhou Zhihao Ren Cheng Xu Chengkuo lee Department of Electrical and Computer Engineering National University of SingaporeSingapore 117583Singapore Center for Intelligent sensors and MEMs(CIsM) National University of SingaporeSingapore 117608Singapore

Plasmonic nanoantennas provide unique opportunities for precise control of light–matter coupling in surface-enhanced infrared absorption(sEIRA)spectroscopy,but most of the resonant systems realized so far suffer from the obstacles of low sensitivity,narrow bandwidth,and asymmetric Fano resonance ***,we demonstrated an overcoupled resonator with a high plasmon-molecule coupling coefficient(μ)(OC-Hμresonator)by precisely controlling the radiation loss channel,the resonator-oscillator coupling channel,and the frequency detuning *** observed a strong dependence of the sensing performance on the coupling state,and demonstrated that OC-Hμresonator has excellent sensing properties of ultra-sensitive(7.25%nm^(−1)),ultra-broadband(3–10μm),and immune asymmetric Fano *** characteristics represent a breakthrough in sEIRA technology and lay the foundation for specific recognition of biomolecules,trace detection,and protein secondary structure analysis using a single array(array size is 100×100μm^(2)).In addition,with the assistance of machine learning,mixture classification,concentration prediction and spectral reconstruction were achieved with the highest accuracy of 100%.Finally,we demonstrated the potential of OC-Hμresonator for sARs-CoV-2 *** findings will promote the wider application of sEIRA technology,while providing new ideas for other enhanced spectroscopy technologies,quantum photonics and studying light–matter interactions.

关键词： Plasmonic nanoantennas Light-matter interaction surface-enhanced infrared absorption Overcoupled Biosensing

A Rapid Adaptation Approach for Dynamic Air‑writing Recognition Using wearable wristbands with self‑supervised Contrastive Learning

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Nano-Micro Letters 2025年第2期17卷 417-431页

作者： Yunjian Guo Kunpeng Li wei Yue Nam‑Young Kim Yang Li Guozhen shen Jong‑Chul lee Department of Electronic Convergence Engineering Kwangwoon UniversitySeoul 01897South Korea Radio Frequency Integrated Circuit(RFIC)Bio Centre Kwangwoon UniversitySeoul 01897South Korea Department of Electronic Engineering Kwangwoon UniversitySeoul 01897South Korea school of Microelectronics Shandong UniversityJinan 250101People’s Republic of China state Key Laboratory of Integrated Chips and systems Fudan UniversityShanghai 200433People’s Republic of China school of Integrated Circuits and Electronics Beijing Institute of TechnologyBeijing 100081People’s Republic of China

wearable wristband systems leverage deep learning to revolutionize hand gesture recognition in daily *** existing approaches that often focus on static gestures and require extensive labeled data,the proposed wearable wristband with selfsupervised contrastive learning excels at dynamic motion tracking and adapts rapidly across multiple *** features a four-channel sensing array composed of an ionic hydrogel with hierarchical microcone structures and ultrathin flexible electrodes,resulting in high-sensitivity capacitance *** wireless transmission from a wi-Fi module,the proposed algorithm learns latent features from the unlabeled signals of random wrist ***,only few-shot labeled data are sufficient for fine-tuning the model,enabling rapid adaptation to various *** system achieves a high accuracy of 94.9%in different scenarios,including the prediction of eight-direction commands,and air-writing of all numbers and *** proposed method facilitates smooth transitions between multiple tasks without the need for modifying the structure or undergoing extensive task-specific *** utility has been further extended to enhance human–machine interaction over digital platforms,such as game controls,calculators,and three-language login systems,offering users a natural and intuitive way of communication.

关键词： wearable wristband self-supervised contrastive learning Dynamic gesture Air-writing Human-machine interaction

Regulation of sleep by astrocytes in the hypothalamic ventrolateral preoptic nucleus

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Neural Regeneration Research 2025年第4期20卷 1098-1100页

作者： Jae-Hong Kim Ruqayya Afridi Il-sung Jang Maan Gee lee Kyoungho suk Brain Korea 21 four KNU Convergence Educational Program of Biomedical sciences for Creative Future Talents School of MedicineKyungpook National UniversityDaeguRepublic of Korea Department of Pharmacology School of MedicineKyungpook National UniversityDaeguRepublic of Korea Department of Pharmacology School of DentistryKyungpook National UniversityDaeguRepublic of Korea Brain science&Engineering Institute Kyungpook National UniversityDaeguRepublic of Korea

Astrocytes are functionally dynamic cells that support neurons in multiple ways throughout an organism’s *** astrocytic regulation of neuronal activity has been increasingly recognized in recent *** are now recognized as playing a more complex role than mere bystanders in the central nervous ***,their role in regulating the sleep neurocircuitry is not well *** this perspective,we highlight the role of astrocytes in sleep modulation,with a particular focus on regulatory mechanisms related to the ventrolateral preoptic nucleus(VLPO)of the *** briefly discuss recent literature reporting the role of VLPO astrocytes in regulating sleep-associated behaviors.

关键词： sleep ventrolateral astrocytes

Effect of Eu^(3+),Bi^(3+),and Li^(+) doping on luminescent property of GdNbO_(4)

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Journal of Rare Earths 2024年第1期42卷 66-75,I0003页

作者： s.w.wi Y.s.lee Department of Physics and Integrative Institute of Basic sciences Soongsil UniversitySeoul06978Republic of Korea

we investigated the emission properties of Eu^(3+)-doped GdNbO_(4)-based oxide phosphors,aiming at improving the Eu^(3+)emission by codoping of Bi^(3+)and Li^(+).Eu^(3+)singly doped,Eu^(3+)and Bi^(3+)doubly doped,and Eu^(3+),Bi^(3+),and Li^(+)triply doped GdNbO_(4)were prepared using a high-temperature solid-state reaction *** red-orange emissions from Eu^(3+)in the singly doped samples are significantly improved by the codoping of Bi^(3+),mainly due to the energy transfer from Bi^(3+)to Eu^(3+).The additional codoping of Li^(+)is found to increase the Eu^(3+)emission *** improvement might be attributed to the increase in the photoluminescent quantum yield originating from larger grain sizes and better crystallinity.A detailed analysis of the X-ray diffraction pattern and the asymmetric ratio estimated from the photoluminescence spectra show that the local lattice environment around Eu^(3+)in GdNbO_(4)does not change significantly with the codoping of Bi^(3+)and Li^(+).Our results indicate that Li^(+)doping is a promising way to improve the emission properties of rare-earth ion-doped GdNbO_(4)phosphors.

关键词： Eu^(3+) GdNbO_(4) Codoping of Li^(+) Photoluminescence sensitizer Rare earths

Aligned Ion Conduction Pathway of Polyrotaxane‑Based Electrolyte with Dispersed Hydrophobic Chains for solid‑state Lithium–Oxygen Batteries

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Nano-Micro Letters 2025年第2期17卷 169-186页

作者： Bitgaram Kim Myeong‑Chang sung Gwang‑Hee lee Byoungjoon Hwang sojung seo Ji‑Hun seo Dong‑wan Kim Department of Materials science and Engineering Korea University145 Anam‑RoSeongbuk‑GuSeoul 02841Republic of Korea school of Civil Environmental and Architectural EngineeringKorea University145 Anam‑RoSeongbuk‑GuSeoul 02841Republic of Korea Materials science and Chemical Engineering Center Institute for Advanced Engineering(IAE)Yongin 17180Republic of Korea

A critical challenge hindering the practical application of lithium–oxygen batteries(LOBs)is the inevitable problems associated with liquid electrolytes,such as evaporation and safety *** study addresses these problems by proposing a modified polyrotaxane(mPR)-based solid polymer electrolyte(sPE)design that simultaneously mitigates solvent-related problems and improves ***-sPE exhibits high ion conductivity(2.8×10^(−3)s cm^(−1)at 25℃)through aligned ion conduction pathways and provides electrode protection ability through hydrophobic chain *** this mPR-sPE into solid-state LOBs resulted in stable potentials over 300 *** situ Raman spectroscopy reveals the presence of an LiO_(2)intermediate alongside Li_(2)O_(2)during oxygen *** situ X-ray diffraction confirm the ability of the sPE to hinder the permeation of oxygen and moisture,as demonstrated by the air permeability *** present study suggests that maintaining a low residual solvent while achieving high ionic conductivity is crucial for restricting the sub-reactions of solid-state LOBs.

关键词： solid polymer electrolyte Lithium-oxygen batteries Polyrotaxane ion conductivity Hydrophobic chain

Effect of coating material and lubricant on forming force and surface defects in wire drawing process

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Transactions of Nonferrous Metals society of China 2011年第A01期21卷 104-110页

作者： s.M.BYON s.J.lee D.w.lee Y.H.lee Y.lee Department of Mechanical Engineering Dong-A University Department of Mechanical Engineering Chung-Ang University wire Rod Research Group POSCO Technical Research Laboratories

A pilot wire drawing machine as well as wire end-pointing roller was developed. Using these machines, a wire drawing test for four different coating materials and two different lubricants was performed as the reduction ratio increased from 10% to 30%. Materials used for a substrate in this study are plain carbon steel （AIs11045） and ultra low carbon bainite steel. To compute the friction coefficient between the coating layer of wire and the surface of die lbr a specific lubricant, a series of finite element analyses were carried out. sEM observations were also conducted to investigate the surface defects of wire deformed. Results show that the behavior of drawing force varies with the lubricant-type at the initial stage of drawing. The powder-typed lubricant with a large particle causes the retardation of lull lubrication on the entire contact surface and the local delamination of coating layer on the wire surface. As the flow stress of a substrate increases, the delamination becomes severe.

关键词： coating lubricant wire drawing delamination