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IMPROVEMENT IN PARAMETRIC AND RELIABILITY PERFORMANCE OF 90NM DUAL-DAMAsCENE INTERCONNECTs UsING AR+PUNCHTHRU PVD BARRIER PROCEss Reprinted with permission as presented at sEMICON China 2005

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集成电路应用 2005年第9期22卷 43-49页

作者： N.Kumar s.chu D.L.Diehl K.Maekawa K.Mori K.Kobayashi M.Yoneda Applied Materials Inc. Thin Films Group Applied Materials Japan Inc. Thin Films Group Process Development Department Process Technology Development DivisionProduction and Technology UnitRenesas Technology Corp.

As interconnects shrink beyond 90nm node, the presence of etch residues can createhigh via resistance and void nucleation during stress migration (sM) testing. Physical Ar+ preclean is effectivein removing residues, but early sM failures have been seen due to Cu resputter from underlying *** preclean methods show promise in reducing CuOx and cleaning si, N, F, C,O etch residues inpresence of H+, H* species. In this paper, reactive preclean and PVD PunchThru process (deposit-etch-deposit) is proposed as solution to conventional *** PunchThru process reduces via resistance, improves sM and protects dual-damascene beveland unlanded vias from Cu diffusion by presence of thin Ta deposition step. In addition, the U-shaped interface,which minimizes electron crowding and localized heating effects, increases the mean time to failureby electromigration. Consistent, repeatable blanket film property and good parametric electrical test resultshave proven the production worthiness of this process.

关键词：集成电路芯片制造工艺封装技术

Bilinear magnetoelectric resistance induced by spin Hall effect

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science China Materials 2025年第2期68卷 687-688页

作者： Ruiyue chu Cheng song school of Materials science and Engineering Tsinghua UniversityBeijing 100084China

Magnetoresistance(MR)is a fundamental transport phenomenon crucial for reading magnetic *** also plays a key role in understanding how time-reversal symmetry breaking affects electrical *** discoveries of anisotropic MR[1],giant MR[2],tunneling MR[3],and spin Hall magnetoresistance[4]have driven the development of diverse spintronic devices used in data storage,computing,and sensing ***,these MR effects do not scale linearly with the electric field(and thus,electric current).Recently,nonlinear MR,which scales specifically with the electric current(Ic),has been *** magnetic/non-magnetic bilayers,unidirectional spin Hall magnetoresistance(UsMR)[5]shows a linear dependence on Ic,with voltage scaling quadratically with the applied electric field,due to interfacial spin-dependent and electron-magnon scattering mechanisms.

关键词： breaking symmetry linearly

使用氩离子击穿PVD阻挡层工艺提高90nm双大马真士革互联的参变量和可靠性(英文)

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电子工业专用设备 2005年第8期34卷 29-36页

作者： N．Kumar s．chu D．L．Diehl K．Maekawa K．Mon K．Kobayashi M．Yoneda Applied Materials Inc． Thin Films GroupCalifornia USA Applied Materials Japan Inc． Thin Films GroupJapan Process Development Department Renesas Technology Corp．Japan

随着金属导线线宽的不断缩小,在90nm 技术以下,刻蚀残留物的存在会在应力迁移测试中形成高通孔电阻和空洞成核现象。物理氩离子预清洗是一种去除残留物的有效方法。但在应力迁移测试中发现,底部沟槽铜的二次溅射会导致器件的早期失效。... 详细信息

随着金属导线线宽的不断缩小,在90nm 技术以下,刻蚀残留物的存在会在应力迁移测试中形成高通孔电阻和空洞成核现象。物理氩离子预清洗是一种去除残留物的有效方法。但在应力迁移测试中发现,底部沟槽铜的二次溅射会导致器件的早期失效。反应性预清洗方法由于含有H +、H 类粒子而在减少C uO x 和清洗si,N ,F,C ,O ,等蚀刻残留物时表现出其优越性。提出了针对传统PV D 工艺的反应性预清洗及PV D 击穿(沉积,刻蚀,沉积)工艺的解决方案。阻挡层击穿工艺减少了通孔电阻,提高了应力迁移性能,并通过薄钽沉积工序防止了铜的扩散从而保护了双嵌入斜面和错位通孔。此外,使电子阻塞和局部加热效应最小化的U 型界面,提高了电子迁移失效的平均时间,一致的、可重复的覆盖膜特性和良好的电参量测试结果已经证实了这种工艺的生产价值。

关键词：应力转移阻挡层击穿残留物去除反应性预清洗

Prediction and optimization of flue pressure in sintering process based on sHAP

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International Journal of Minerals,Metallurgy and Materials 2025年第2期32卷 346-359页

作者： Mingyu Wang Jue Tang Mansheng chu Quan shi Zhen Zhang school of Metallurgy Northeastern UniversityShenyang 110819China Liaoning Low-Carbon steelmaking Technology Engineering Research Center Northeastern UniversityShenyang 110819China Engineering Research Center of Frontier Technologies for Low-Carbon steelmaking(Ministry of Education) Shenyang 110819China

sinter is the core raw material for blast *** pressure,which is an important state parameter,affects sinter *** this paper,flue pressure prediction and optimization were studied based on the shapley additive explanation(sHAP)to predict the flue pressure and take targeted adjustment ***,the sintering process data were collected and processed.A flue pressure prediction model was then constructed after comparing different feature selection methods and model algorithms using sHAP+extremely random-ized trees(ET).The prediction accuracy of the model within the error range of±0.25 kPa was 92.63%.sHAP analysis was employed to improve the interpretability of the prediction *** effects of various sintering operation parameters on flue pressure,the relation-ship between the numerical range of key operation parameters and flue pressure,the effect of operation parameter combinations on flue pressure,and the prediction process of the flue pressure prediction model on a single sample were analyzed.A flue pressure optimization module was also constructed and analyzed when the prediction satisfied the judgment *** operating parameter combination was then *** flue pressure was increased by 5.87%during the verification process,achieving a good optimization effect.

关键词： sintering process flue pressure shapley additive explanation prediction optimization

Electrocatalytic nitrite reduction to ammonia on isolated bismuth alloyed ruthenium

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Journal of Energy Chemistry 2025年第1期100卷 369-376页

作者： shiyao shang Fuzhou Wang Zeyi sun Chaofan Qiang Ke chu school of Materials science and Engineering Lanzhou Jiaotong UniversityLanzhou 730070GansuChina

Electrochemical reduction of NO_(2)-to NH_(3)(NO_(2)-RR) is recognized as an appealing approach for achieving renewable NH_(3)synthesis and waste NO_(2)-***,we report isolated Bi alloyed Ru (Bi1Ru) as an efficient NO_(2)-RR *** calculations and in situ electrochemical measurements reveal the creation of Bi1-Ru dual sites which can remarkably promote NO_(2)-activation and suppress proton adsorption,while accelerating the NO_(2)-RR protonation energetics to render a high NO_(2)--to-NH_(3)conversion ***,Bi1Ru assembled in a flow cell delivers an NH_(3)yield rate of 1901.4μmol h^(-1)cm^(-2)and an NH_(3)-Faradaic efficiency of 94.3%at an industrial-level current density of 324.3 mA cm^(-2).This study offers new perspectives for designing and constructing p-block single-atom alloys as robust and high-current-density NO_(2)-RR catalysts toward the ammonia electrosynthesis.

关键词： Electrocatalytic reduction of NO_(2)-to NH_(3) Theoretical computations In situel ectrochemical measurements p-Block single-atom alloys

Morphology engineering of ZnO micro/nanostructures under mild conditions for optoelectronic application

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International Journal of Minerals,Metallurgy and Materials 2025年第2期32卷 498-503页

作者： Liang chu Haoyu shen Hudie Wei Hongyu Chen Guoqiang Ma Wensheng Yan Institute of Carbon Neutrality and New Energy&school of Electronics and Information Hangzhou Dianzi UniversityHangzhou 310018China school of Applied Physics and Materials Wuyi UniversityJiangmen 529020China

Zinc oxide(ZnO)serves as a crucial functional semiconductor with a wide direct bandgap of approximately 3.37 *** reaction is commonly used in the synthesis of ZnO micro/nanostructures,given its low cost,simplicity,and easy ***,ZnO morphology engineering has become desirable through the alteration of minor conditions in the reaction process,particularly at room *** this work,ZnO micro/nanostructures were synthesized in a solution by varying the amounts of the ammonia added at low temperatures(including room temperature).The formation of Zn^(2+)complexes by ammonia in the precursor regulated the reaction rate of the morphology engineering of ZnO,which resulted in various structures,such as nanoparticles,nanosheets,microflowers,and single ***,the obtained ZnO was used in the optoelectronic application of ultraviolet detectors.

关键词： morphology engineering low temperature ZnO nanosheets microflowers ultraviolet detector

The factors affecting mineralization potential of arc magma:Insights from silicate melt inclusions and zircon composition of igneous lava at Eastern Taiwan Island

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science China Earth sciences 2025年第3期68卷 768-780页

作者： Jianping LI shitao ZHANG Gaobin chu Huayong CHEN Key Laboratory of Mineralogy and Metallogeny Guangzhou Institute of Geochemistry Chinese Academy of Sciences Department of Earth and Planetary sciences Mc Gill University state Key Laboratory of Ore Deposit Geochemistry Institute of Geochemistry Chinese Academy of Sciences Guangzhou Tuoyan Analytical Technology Co.Ltd Guangdong Provincial Key Laboratory of Mineral Physics and Materials University of Chinese Academy of sciences

subduction-related Cu-(Au) deposits which represent giant geochemical anomalies of metals and s in the upper crust are commonly associated with arc magmas. However, the fundamental differences between barren and fertile magma producing these deposits still remain highly controversial. In this study, we report the chemical compositions of zircon and silicate melt inclusions(sMIs) from barren arc lavas at eastern Taiwan Island aiming to increase our knowledge on the factors that affect the mineralization potential of arc magma systems. The zircon U-Pb dating shows the magmatism occurred at ～0.7 Ma and the andesitic lava formed at ～900–950°C with a reduced magmatic environment. The plagioclase-hosted sMIs show an andesitic melt composition and variable Cu content features. The calculated H2O content of parental melt is ～3–4 wt.%. The evidence presented above suggests that oxidation state(f O2) and H2O content are probably the key controls of Cu-(Au) fertility of arc magmas. We interpret that a reduced and relatively dry magma may be a potential hinderance to cause the absence of porphyry Cu deposits at the eastern Taiwan Island.

关键词： silicate melt inclusions Zircon, Redox state Arc magma Cu-(Au) mineralization potential

Alpha-decay properties of nuclei around neutron magic numbers

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Nuclear science and Techniques 2025年第1期36卷 140-149页

作者： Ming Li chu-Xin Chen Lan-Fang Xiao Yi Zhang song Luo Xiao-Hua Li school of Nuclear science and Technology University of South ChinaHengyang 421001China PET‑CT Center Chenzhou First People’s HospitalChenzhou 423000China Hengyang Ecological Environment Monitor Center Hengyang 421001China China Certification and Inspection Group Hefei 230000China National Exemplary Base for International science and Technology Collaboration of Nuclear Energy and Nuclear safety University of South ChinaHengyang 421001China Cooperative Innovation Center for Nuclear Fuel Cycle Technology and Equipment University of South ChinaHengyang 421001China Key Laboratory of Low Dimensional Quantum structures and Quantum Control Hunan Normal UniversityChangsha 410081China

By combining experimental α-decay energies and half-lives, the α-particle preformation factor for nuclei around neutron magic numbers N of 126, 152, and 162 were extracted using the two-potential approach. The nuclei around the shell closure were more tightly bound than adjacent nuclei. Additionally, based on the Ws4 mass model (Wang et al., Phys. Lett.B 734, 215 (2014)), we extended the two-potential approach to predict the α-decay half-lives of nuclei around N values of178 and 184 with Z of 119 and 120. We believe that our findings will serve as guidelines for future experimental studies.

关键词： adecay Preformation factor Neutron magic number Heavy and superheavy nuclei

Efficient photocatalytic reduction of CO_(2)to formate by a molecular noble metal-free system

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science China Chemistry 2025年第1期68卷 152-156页

作者： Lihua Zhang Lingjing Chen Huatian shi Yue Wei Gui Chen Tai-chu Lau school of Environment and Civil Engineering Research Center for Eco-environmental EngineeringDongguan University of TechnologyDongguan 523808China Department of Chemistry and Institute of Molecular Functional Materials City University of Hong KongHong Kong 999077China

Reducing CO_(2)to carbon-neutral solar fuels can not only alleviate the energy demand but also mitigate the greenhouse *** present,developing an efficient non-noble metal photo/electrocatalytic system for converting CO_(2)to a specific product beyond CO is still a big ***,we report a new cobalt complex bearing 2,2′-bi-1,10-phenanthroline ligand that can photocatalytically reduce CO_(2)to formate(HCOO^(-)).Turnover number(TON)for HCOO^(-)up to 677 with 99%selectivity can be achieved using organic dyes purpurin as photosensitizer and 1,3-dimethyl-2-phenyl-2,3-dihydro-1H-benzo[d]imidazole(BIH)as sacrificial reductant in a CO_(2)-saturated NMP/TEA(v/v,3:1)solution under visible light *** potential electrolysis at-1.41 V(***/Ag Cl)in the presence of 12 mM Et_(3)NHBF_(4)also produced HCOO^(-)with Faradaic efficiency of 39%.spectroscopic and electrochemical studies suggest that a[CoI-H]species is the key intermediate for CO_(2)reduction.

关键词： photocatalysis noble metal-free CO_(2)reduction formate cobalt hydride