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Mechanism of titanium-nitride chemical mechanical polishing

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Chinese Physics B 2021年第2期30卷 549-556页

作者： Dao-Huan Feng ruo-bing wang Ao-Xue Xu Fan Xu Wei-Lei wang Wei-Li Liu Zhi-Tang Song State Key Laboratory of Functional Materials for Informatics Laboratory of NanotechnologyShanghai Institute of Micro-system and Information TechnologyChinese Academy of SciencesShanghai 200050China University of the Chinese Academy of Sciences Beijing 100049China

During the preparation of the phase change memory,the deposition and chemical mechanical polishing(CMP)of titanium nitride(TiN)are indispensable.A new acidic slurry added with sodium hypochlorite(NaClO)as an oxidizer is developed for the CMP of TiN *** has achieved a material removal rate of 76 nm/min,a high selectivity between TiN film and silica(SiO_(2))films of 128:1,a selectivity between TiN film and tungsten film of 84:1 and a high surface *** understand the mechanism of TiN CMP process,x-ray photoelectron(XPS)spectroscope and potentiodynamic polarization measurement are *** is found that the mechanism of TiN CMP process is cyclic reaction polishing *** addition,both static corrosion rate and the inductively coupled plasma results indicate TiN would not be dissolved,which means that the mechanical removal process of oxide layer plays a decisive role in the material removal ***,the mechanism of TiN polishing process is given based on the analysis of surface potential and the description of blocking function.

关键词： TiN chemical mechanical polishing mechanism

Unique double-layer solid electrolyte interphase formed with fluorinated ether-based electrolytes for high-voltage lithium metal batteries

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Journal of Energy Chemistry 2024年第1期88卷 532-542,I0012页

作者： ruo wang Jiawei Li bing Han Qingrong wang ruohong Ke Tong Zhang Xiaohu Ao Guangzhao Zhang Zhongbo Liu Yunxian Qian Fangfang Pan Iseult Lynch Jun wang Yonghong Deng Department of Materials Science&Engineering School of Innovation and EntrepreneurshipSouthern University of Science and TechnologyShenzhen 518055GuangdongChina School of Geography Earth and Environmental SciencesUniversity of BirminghamEdgbastonBirmingham B152TTUK Key Laboratory of Marine Environmental Corrosion and Bio-Fouling Institute of OceanologyChinese Academy of SciencesQingdao 266071ShandongChina Shenzhen CAPCHEM Technology Co. Ltd.Shenzhen 518118GuangdongChina CALB Group Co. Ltd.Changzhou 213200JiangsuChina

Li metal batteries using high-voltage layered oxides cathodes are of particular interest due to their high energy ***,they suffer from short lifespan and extreme safety concerns,which are attributed to the degradation of layered oxides and the decomposition of electrolyte at high voltage,as well as the high reactivity of metallic *** key is the development of stable electrolytes against both highvoltage cathodes and Li with the formation of robust interphase films on the ***,we report a highly fluorinated ether,1,1,1-trifluoro-2-[(2,2,2-trifluoroethoxy)methoxy]ethane(TTME),as a cosolvent,which not only functions as a diluent forming a localized high concentration electrolyte(LHCE),but also participates in the construction of the inner solvation *** TTME-based electrolyte is stable itself at high voltage and induces the formation of a unique double-layer solid electrolyte interphase(SEI)film,which is embodied as one layer rich in crystalline structural components for enhanced mechanical strength and another amorphous layer with a higher concentration of organic components for enhanced *** Li||Cu cells display a noticeably high Coulombic efficiency of 99.28%after 300 cycles and Li symmetric cells maintain stable cycling more than 3200 h at 0.5 mA/cm^(2) and 1.0m Ah/cm^(2).In addition,lithium metal cells using LiNi_(0.8)Co_(0.1)Mn_(0.1)O_(2) and Li CoO_(2) cathodes(both loadings~3.0 m Ah/cm^(2))realize capacity retentions of>85%over 240 cycles with a charge cut-off voltage of 4.4 V and 90%for 170 cycles with a charge cut-off voltage of 4.5 V,*** study offers a bifunctional ether-based electrolyte solvent beneficial for high-voltage Li metal batteries.

关键词： Lithium metal batteries High-voltage layered oxides Fluorinated ether-based electrolytes Solid electrolyte interphase Cathode electrolyte interphase

Toward Artificial Peptide Nanocapsules

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Nano-Micro Letters 2024年第10期16卷 240-243页

作者： Yuan wang bing Chen Laboratory for Biomaterials and Drug Delivery Department of AnesthesiologyDivision of Critical Care MedicineBoston Children's HospitalHarvard Medical SchoolBostonMA 02115USA College of Electronic and Optical Engineering and College of Flexible Electronics(Future Technology) Nanjing University of Posts and TelecommunicationsNanjing 210023People's Republic of China

HIGHLIGHTS The formation of peptide nanocapsules is facilitated by a gradient interface,where the differential solvent concentration drives the peptides to preferentially localize and *** peptide nanocapsules,characterized by their hollow structures,demonstrated potential as carriers for targeted drug delivery.1 Introduction Peptide nanocapsules are a type of nanoscale delivery system that encapsulates active substances within a shell composed of peptides,leveraging the unique properties of peptides such as biocompatibility and biodegradability[1].Historically,the development of peptide nanocapsules was inspired primordially by the natural biological processes.

关键词： Peptide nanocapsules Self-assembly Drug delivery Nanomedicine

A Study on the Impact of Chemical Structure on the Evolution of Aggregate Structure in Fiber-shaped High Density Polyethylene Vitrimer

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Chinese Journal of Polymer Science 2024年第10期42卷 1557-1565,I0013页

作者： bing wang Yuan-Chu Gao Hai wang Hui Niu State Key Laboratory of Fine Chemicals School of Chemical EngineeringDalian University of TechnologyDalian116024China

Vitrimers have emerged as a prominent research area in the field of polymer *** of the studies have focused on synthesizing polymers with versatile dynamic crosslinking structures,while the impact of chemical structure on aggregate structure of vitrimers,particularly during polymer processing,remains insufficiently *** present study employed commercial maleic anhydride-grafted-high density polyethylene(M-g-HDPE)as the matrix and hexanediol as the crosslinker to facilely obtain fiber-shaped HDPE vitrimers through a reaction extrusion and post-drawing *** chemical structure characterization,morphology observation,thermal and mechanical properties investigation,as well as aggregate structure analysis,this work revealed the influence of dynamic bonds on the formation of aggregate structures during fiber-shaped vitrimers processing.A small amount of dynamic bonds in HDPE restricts the motion of PE chain during melt-extruding and post-drawing,resulting in a lower orientation of the PE ***,lamellar growth and fibril formation during post-drawing at high temperature are enhanced to some extent due to the competition between dynamic bond and chain *** uneven morphology of fibershaped HDPE vitrimers can be attributed to the stronger elastic effect brought by dynamic bonding,which plays a more dominant role in determining the mechanical properties of fiber-shaped vitrimers compared to aggregate *** Vitrimers have emerged as a prominent research area in the field of polymer *** of the studies have focused on synthesizing polymers with versatile dynamic crosslinking structures,while the impact of chemical structure on aggregate structure of vitrimers,particularly during polymer processing,remains insufficiently *** present study employed commercial maleic anhydride-grafted-high density polyethylene(M-g-HDPE)as the matrix and hexanediol as the crosslinker to facilely obtain fiber-shap

关键词： High density polyethylene vitrimer Fiber-shaped Aggregate structures Transesterification reaction

Identifying Three New AGNs among Fermi Unidentified Gigaelectronvolt Sources

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Research in Astronomy and Astrophysics 2024年第7期24卷 257-267页

作者： Shun-Hao Ji Zhong-Xiang wang Qiang-Meng Huang ruo-Heng Yang Department of Astronomy School of Physics and AstronomyYunnan UniversityKunming 650091China Shanghai Astronomical Observatory Chinese Academy of SciencesShanghai 200030China

We report our identification of three gigaelectronvoltγ-ray sources,4FGL J0502.6+0036,4FGL J1055.9+6507,and 4FGL J1708.2+5519,as Active Galactic Nuclei(AGNs).They are listed in the latest Fermi-Large Area Telescope source catalog as unidentified *** find that the sources all showedγ-ray flux variations in recent *** different survey catalogs,we are able to find a radio source within the error circle of each source's *** analysis of optical sources in the fields allows us to determine the optical counterparts,which showed similar variation patterns to those seen inγ-*** optical counterparts have reported redshifts of 0.6,1.5,and 2.3,respectively,estimated from photometric *** addition,we also obtain an X-ray spectrum of 4FGL J0502.6+0036 and a flux upper limit on the X-ray emission of 4FGL J1055.9+6507 by analyzing the archival *** broadband spectral energy distributions of the three sources from radio toγ-rays are *** mainly theγ-ray properties of the three sources with those of different sub-classes of AGNs,we tentatively identify them as *** optical spectroscopy is highly warranted for obtaining their spectral features and thus verifying the identification.

关键词： gamma-rays galaxies-(galaxies)BL Lacertae objects general-(galaxies)quasars general

Dual-Porosity Apparent Permeability Models of Unconventional Gas Migration Based on Biot’s Porous Media

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Acta Mechanica Solida Sinica 2024年第3期37卷 406-415页

作者： Bin Gu Hongyuan Liu Yiuwing Mai bing wang School of Manufacturing Science and Engineering Key Laboratory of Testing for Manufacturing ProcessMinistry of EducationSouthwest University of Science and TechnologyMianyang621010China School of Aerospace Mechanical and Mechatronic EngineeringThe University of SydneySydneyNSW2006Australia Department of Mechanical Engineering The Hong Kong Polytechnic UniversityHung HomKowloonHong KongChina

Stress-dependent permeability models are developed for the organic pores and inorganic cleats/fractures in unconventional gas reservoirs,which are modeled as Biot’s porous media of *** considering multiple flow mechanisms such as dynamic effects of gas flow and surface diffusion,apparent permeability models are obtained to investigate the characteristics of unconventional gas *** to the gas transfer in single-porosity reservoirs,the gas migration ability of cleats in dual-porosity stratums rarely changes while that of organic pores is greatly improved because cleats sustain major geomechanical shrinkage deformation when the pore pressure ***,the mass flux of reservoirs is dominated by the mass flux of cleats,which has a lower peak value,but a much longer production term than those in single-porosity reservoirs due to the interaction between organic pores and *** analysis is conducted to identify key factors significantly impacting mass flux in unconventional *** for the mass flux variation are also explored in terms of gas migration ability and pore pressure distribution.

关键词： Unconventional gas migration Apparent permeability Dual-porosity Stress dependence Multiple flow mechanisms

An Online Q-Learning Method for Linear-Quadratic Nonzero-Sum Stochastic Differential Games with Completely Unknown Dynamics

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Journal of Systems Science & Complexity 2024年第5期37卷 1907-1922页

作者： ZHANG Bao-Qiang wang bing-Chang CAO Ying School of Control Science and Engineering Shandong UniversityJinan 250000China

In this paper,the authors design a reinforcement learning algorithm to solve the adaptive linear-quadratic stochastic n-players non-zero sum differential game with completely unknown *** each player,a critic network is used to estimate the Q-function,and an actor network is used to estimate the control input.A model-free online Q-learning algorithm is obtained for solving this kind of *** is proved that under some mild conditions the system state and weight estimation errors can be uniformly ultimately bounded.A simulation with five players is given to verify the effectiveness of the algorithm.

关键词： Actor-critic algorithm model-free adaptive control nonzero-sum stochastic game reinforcement learning

Hierarchical multihead self-attention for time-series-based fault diagnosis

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Chinese Journal of Chemical Engineering 2024年第6期70卷 104-117页

作者： Chengtian wang Hongbo Shi bing Song Yang Tao Key Laboratory of Smart Manufacturing in Energy Chemical Process of the Ministry of Education East China University of Science and TechnologyShanghai 200237China

Fault diagnosis is important for maintaining the safety and effectiveness of chemical *** the multivariate,nonlinear,and dynamic characteristic of chemical process,many time-series-based data-driven fault diagnosis methods have been developed in recent ***,the existing methods have the problem of long-term dependency and are difficult to train due to the sequential way of *** overcome these problems,a novel fault diagnosis method based on time-series and the hierarchical multihead self-attention(HMSAN)is proposed for chemical ***,a sliding window strategy is adopted to construct the normalized time-series ***,the HMSAN is developed to extract the time-relevant features from the time-series process *** improves the basic self-attention model in both width and *** the multihead structure,the HMSAN can pay attention to different aspects of the complicated chemical process and obtain the global dynamic ***,the multiple heads in parallel lead to redundant information,which cannot improve the diagnosis *** the hierarchical structure,the redundant information is reduced and the deep local time-related features are further ***,a novel many-to-one training strategy is introduced for HMSAN to simplify the training procedure and capture the long-term ***,the effectiveness of the proposed method is demonstrated by two chemical *** experimental results show that the proposed method achieves a great performance on time-series industrial data and outperforms the state-of-the-art approaches.

关键词： Self-attention mechanism Deep learning Chemical process Time-series Fault diagnosis

A proposal for detecting weak electromagnetic waves around 2.6μm wavelength with Sr optical clock

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Chinese Physics B 2024年第4期33卷 452-457页

作者：韩弱水王伟汪涛 Department of Physics and Chongqing Key Laboratory for Strongly Coupled PhysicsChongqing UniversityChongqing 401331China Center of Modern Physics Institute for Smart City of Chongqing University in LiyangLiyang 213300China State Key Laboratory of Quantum Optics and Quantum Optics Devices Shanxi UniversityTaiyuan 030006China

Infrared signal detection is widely used in many *** to the detection principle,however,the accuracy and range of detection are *** to the ultra stability of the^(87)Sr optical lattice clock,external infrared electromagnetic wave disturbances can be responded *** the ac Stark shift of the clock transition,we propose a new method to detect infrared *** to our calculations,the theoretical detection accuracy in the vicinity of its resonance band of 2.6μm can reach the order of 10-14W,while the minimum detectable signal of common detectors is on the order of 10^(-10)W.

关键词： infrared signal detection ^(87)Sr optical lattice clock ac Stark shift ultra stability