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Flexible pressure sensors with ultrahigh stress tolerance enabled by periodic microslits

Microsystems & Nanoengineering 2024年第1期10卷 301-311页

作者： Song Wang Chenying Wang Yifan Zhao Yujing Zhang Yaxin Zhang Xiangyue Xu qijing lin Kai Yao Yuheng Wang Feng Han Yu Sun Zhuangde Jiang State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesSchool of Mechanical EngineeringXi’an Jiaotong UniversityXi’anChina State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesSchool of Instrument Science and TechnologyXi’an Jiaotong UniversityXi’anChina The Faculty of Electrical Engineering and Computer Science Ningbo UniversityNingboChina Department of Mechanical and Industrial Engineering University of TorontoTorontoCanada

Stress tolerance plays a vital role in ensuring the effectiveness of piezoresistive sensing films used in flexible pressure sensors.However,existing methods for enhancing stress tolerance employ dome-shaped,wrinkle-shaped,and pyramidal-shaped microstructures in intricate molding and demolding processes,which introduce significant fabrication challenges and limit the sensing performance.To address these shortcomings,this paper presents periodic microslits in a sensing film made of multiwalled carbon nanotubes and polydimethylsiloxane to realize ultrahigh stress tolerance with a theoretical maximum of 2.477 MPa and a sensitivity of 18.092 kPa−1.The periodic microslits permit extensive deformation under high pressure(e.g.,400 kPa)to widen the detection range.Moreover,the periodic microslits also enhance the sensitivity based on simultaneously exhibiting multiple synapses within the sensing interface and between the periodic sensing cells.The proposed solution is verified by experiments using sensors based on the microslit strategy for wind direction detection,robot movement sensing,and human health monitoring.In these experiments,vehicle load detection is achieved for ultrahigh pressure sensing under an ultrahigh pressure of over 400 kPa and a ratio of the contact area to the total area of 32.74%.The results indicate that the proposed microslit strategy can achieve ultrahigh stress tolerance while simplifying the fabrication complexity of preparing microstructure sensing films.

关键词： robot shaped stress

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基于创新性内侧壁成型工艺的多光学通道微型碱金属原子气室

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Engineering 2024年第4期35卷 46-55页

作者： Mingzhi Yu Yao Chen Yongliang Wang Xiangguang Han Guoxi Luo Libo Zhao Yanbin Wang Yintao Ma Shun Lu Ping Yang qijing lin Kaifei Wang Zhuangde Jiang International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies Xi’an Jiaotong UniversityXi’an 710049China School of Mechanical Engineering Xi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing Yantai 265503China Moon Environment Technology Co. Ltd.Yantai 264000China Emergency Department The First Affiliated Hospital of Xi’an Jiaotong UniversityXi’an 710061China

Existing microfabricated atomic vapor cells have only one optical channel,which is insufficient for supporting the multiple orthogonal beams required by atomic devices.In this study,we present a novel wafer-level manufacturing process for fabricating multi-optical-channel atomic vapor cells and an innovative method for batch processing the inner sidewalls of millimeter glass holes to meet optical channel requirements.Surface characterization and transmittance tests demonstrate that the processed inner sidewalls satisfy the criteria for an optical channel.In addition,the construction of an integrated processing platform enables multilayer non-isothermal anode bonding,the filling of inert gases,and the recovery and recycling of noble gases.Measurements of the absorption spectra and free-induction decay signals of xenon-129(^(129)Xe)and xenon-131(^(131)Xe)under different pump-probe schemes demonstrate the suitability of our vapor cell for use in atomic devices including atomic gyroscopes,dual-beam atomic magnetometers,and other optical/atomic devices.The proposed micromolding technology has broad application prospects in the field of optical-device processing.

关键词： Microfabricated atomic vapor cells Inner-sidewall molding Multiple optical channels Quantum sensing

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A flexible and wearable NO_(2)gas detection and early warning device based on a spraying process and an interdigital electrode at room temperature

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Microsystems & Nanoengineering 2022年第2期8卷 97-106页

作者： Fuzheng Zhang qijing lin Feng Flan Zuowei Wang Bian Tian Libo Zhao Tao Dong Zhuangde Jiang State Key Laboratory for Mechanical Manufacturing Systems Engineering Xi'an Jiaotong University710049 Xi'anChina Chongqing Key Laboratory of Micro-Nano Systems and Intelligent Sensing Chongqing Academician WorkstationChongqing 2011 Collaborative Innovation Center of Micro/Nano Sensing and Intelligent Ecological Internet of ThingsChongqing Technology and Business University400067 ChongqingChina Department of Microsystems Faculty of TechnologyNatural Sciences and Maritime SciencesUniversity of South-Eastern Norway(USN)Raveien 2153184 BorreNorway

Flexible sensors used to detect NO_(2) gas generally have problems such as poor repeatability,high operating temperature,poor selectivity,and small detection range.In this work,a new spraying platform with a simple structure,low cost,and good film-forming consistency was designed and built to make a sensitive film(rGO/SnO_(2))for NO_(2) gas sensors.The relationship between the solid content of rGO and SnO_(2)nanoparticles,annealing temperature,and sensor performance was studied.The results show that the interdigital electrode-sensitive film formed by spraying 0.25 ml of a 0.4 wt%rGO/SnO_(2)mixture and annealing at 250℃exhibited the best comprehensive performance for NO_(2) detection.The sensor's response value for 100 ppm NO_(2) gas was 0.2640 at room temperature(25℃),and the response time and recovery time were 412.4 s and 587.3 s,respectively.In the range of 20-100 ppm,the relationship between the response and NO_(2) concentration was linear,and the correlation coefficient was 0.9851.In addition,a soft-monitoring node module with an overlimit warning function for NO_(2) gas was designed and manufactured based on flexible electronics.Finally,the flexible sensor and node module were embedded into woven fabric that could be used to make a mask or a watch that could detect NO_(2) gas,realizing the practical application of flexible NO_(2) gas sensors in the field of wearable electronics.

关键词： wear electrode spraying

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Wheel Setting Error Modeling and Compensation for Arc Envelope Grinding of Large-Aperture Aspherical Optics

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Chinese Journal of Mechanical Engineering 2022年第5期35卷 87-99页

作者： Changsheng Li lin Sun Zhaoxiang Chen Jianfang Chen qijing lin Jianjun Ding Zhuangde Jiang State Key Laboratory for Manufacturing Systems Engineering Xi’an Jiaotong UniversityXi’an 710049China School of Mechanical Engineering Xi’an Jiaotong UniversityXi’an 710049China Shaanxi Qinchuan Precision CNC Machine Tool Engineering Research Co Xi’an 710018China

Precision grinding is a key process for realizing the use of large-aperture aspherical optical elements in laser nuclear fusion devices,large-aperture astronomical telescopes,and high-resolution space cameras.In this study,the arc envelope grinding process of large-aperture aspherical optics is investigated using a CM1500 precision grinding machine with a maximum machinable diameter ofΦ1500 mm.The form error of the aspherical workpiece induced by wheel setting errors is analytically modeled for both parallel and cross grinding.Results show that the form error is more sensitive to the wheel setting error along the feed direction than that along the lateral direction.It is a bilinear function of the feed-direction wheel setting error and the distance to the optical axis.Based on the error function above,a method to determine the wheel setting error is proposed.Subsequently,grinding tests are performed with the wheels aligned accurately.Using a newly proposed partial error compensation method with an appropriate compensation factor,a form error of 3.4μm peak-to-valley(PV)for aΦ400 mm elliptical K9 glass surface is achieved.

关键词： Aspherical optics Wheel setting Arc envelope grinding Form error Large aperture

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A large-area bionic skin for high-temperature energy harvesting applications

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Nano Research 2023年第7期16卷 10245-10255页

作者： Zhaojun Liu Bian Tian Yao Li Jiaming Lei Zhongkai Zhang Jiangjiang Liu qijing lin Chengkuo Lee Zhuangde Jiang State Key Laboratory for Mechanical Manufacturing Systems Engineering School of Mechanical EngineeringXi’an Jiaotong UniversityXi’an 710049China Department of Electrical&Computer Engineering National University of SingaporeSingapore 117576Singapore Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing Yantai 265503China

For the large amount of waste heat wasted in daily life and industrial production,we propose a new type of flexible thermoelectric generators(F-TEGs)which can be used as a large area bionic skin to achieve energy harvesting of thermal energy.With reference to biological structures such as pinecone,succulent,and feathers,we have designed and fabricated a biomimetic flexible TEG that can be applied in a wide temperature range which has the highest temperature energy harvesting capability currently.The laminated free structure of the bionic F-TEG dramatically increases the efficiency and density of energy harvesting.The F-TEGs(single TEG only 101.2 mg in weight),without an additional heat sink,demonstrates the highest output voltage density of 286.1 mV/cm^(2)and the maximum power density is 66.5 mW/m^(2) at a temperature difference of nearly 1000℃.The flexible characteristics of F-TEGs make it possible to collect the diffused thermal energy by flexible attachment to the outer walls of high-temperature pipes and vessels of different diameters and shapes.This work shows a new design and application concept for flexible thermal energy collectors,which fills the gap of flexible energy harvesting in high-temperature environment.

关键词： bionic structure high-temperature flexible thermoelectric generators(TEGs)

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A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow force measurement

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机械工程前沿:英文版 2023年第2期18卷 297-317页

作者： Wendi GAO Bian TIAN Cunlang LIU Yingbiao MI Chen JIA Libo ZHAO Tao LIU Nan ZHU Ping YANG qijing lin Zhuangde JIANG Dong SUN State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesOverseas Expertise Introduction Center for Micro/Nano Manufacturing and Nano Measurement Technologies Discipline InnovationXi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and SystemSchool of Mechanical EngineeringXi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing Yantai 265599China State Key Laboratory of Robotics and Systems(HIT) Harbin 150006China Beijing Advanced Innovation Center for Intelligent Robots and Systems Beijing Institute of TechnologyBeijing 100081China Department of Biomedical Engineering City University of Hong KongHong KongChina

Capacitive sensors are efficient tools for biophysical force measurement,which is essential for the exploration of cellular behavior.However,attention has been rarely given on the influences of external mechanical and internal electrical interferences on capacitive sensors.In this work,a bionic swallow structure design norm was developed for mechanical decoupling,and the influences of structural parameters on mechanical behavior were fully analyzed and optimized.A bionic feather comb distribution strategy and a portable readout circuit were proposed for eliminating electrostatic interferences.Electrostatic instability was evaluated,and electrostatic decoupling performance was verified on the basis of a novel measurement method utilizing four complementary comb arrays and applicationspecific integrated circuit readouts.An electrostatic pulling experiment showed that the bionic swallow structure hardly moved by 0.770 nm,and the measurement error was less than 0.009% for the area-variant sensor and 1.118% for the gap-variant sensor,which can be easily compensated in readouts.The proposed sensor also exhibited high resistance against electrostatic rotation,and the resulting measurement error dropped below 0.751%.The rotation interferences were less than 0.330 nm and(1.829×10^(-7))°,which were 35 times smaller than those of the traditional differential one.Based on the proposed bionic decoupling method,the fabricated sensor exhibited overwhelming capacitive sensitivity values of 7.078 and 1.473 pF/μm for gap-variant and area-variant devices,respectively,which were the highest among the current devices.High immunity to mechanical disturbances was maintained simultaneously,i.e.,less than 0.369% and 0.058% of the sensor outputs for the gap-variant and area-variant devices,respectively,indicating its great performance improvements over existing devices and feasibility in ultralow biomedical force measurement.

关键词： micro-electro-mechanical system capacitive sensor bionics operation instability mechanical and electrical decoupling biomedical force measurement

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Piezoelectric-AIN resonators at two-dimensional flexural modes for the density and viscosity decoupled determination of liquids

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Microsystems & Nanoengineering 2022年第2期8卷 23-34页

作者： linya Huang Wei Li Guoxi Luo Dejiang Lu Libo Zhao Ping Yang Xiaozhang Wang Jiuhong Wang qijing lin Zhuangde Jiang State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesOverseas Expertise Introduction Center for Micro/Nano Manufacturing and Nano Measurement Technologies Discipline InnovationXi'an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and SystemXi'an Jiaotong UniversityXi'an 710049China School of Mechanical Engineering Xi'an Jiaotong UniversityXi'an 710049China The Eleventh Research Institute of The Sixth Academy of CASC Xi'an 710100China

A micromachined resonator immersed in liquid provides valuable resonance parameters for determining the fluidic parameters.However,the liquid operating environment poses a challenge to maintaining a fine sensing performance,particularly through electrical characterization.This paper presents a piezoelectric micromachined cantilever with a stepped shape for liquid monitoring purposes.Multiple modes of the proposed cantilever are available with full electrical characterization for realizing self-actuated and seif-sensing capabilities.The focus is on higher flexural resonances,which nonconventionally feature two-dimensional vibration modes.Modal analyses are conducted for the developed cantilever under flexural vibrations at different orders.Modeling explains not only the basic length-dominant mode but also higher modes that simultaneously depend on the length and width of the cantilever.This study determines that the analytical predictions for resonant frequency in liquid media exhibit good agreement with the experimental results.Furthermore,the experiments on cantilever resonators are performed in various test liquids,demonstrating that higher-order flexural modes allow for the decoupled measurements of density and viscosity.The measurement differences achieve 0.39%in density and 3.50%in viscosity,and the frequency instability is below 0.05%o.On the basis of these results,design guidelines for piezoelectric higher-mode resonators are proposed for liquid sensing.

关键词： flexural cantilever viscosity

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Flexible temperature sensor with high sensitivity ranging from liquid nitrogen temperature to 1200℃

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International Journal of Extreme Manufacturing 2023年第1期5卷 355-366页

作者： Zhaojun Liu Bian Tian Zhuangde Jiang Shuimin Li Jiaming Lei Zhongkai Zhang Jiangjiang Liu Peng Shi qijing lin State Key Laboratory for Mechanical Manufacturing Systems Engineering Xi’an Jiaotong UniversityXi’an 710049People’s Republic of China Department of Electrical&Computer Engineering National University of SingaporeSingapore 117576Singapore

Flexible temperature sensors have been extensively investigated due to their prospect of wide application in various flexible electronic products.However,most of the current flexible temperature sensors only work well in a narrow temperature range,with their application at high or low temperatures still being a big challenge.This work proposes a flexible thermocouple temperature sensor based on aerogel blanket substrate,the temperature-sensitive layer of which uses the screen-printing technology to prepare indium oxide and indium tin oxide.It has good temperature sensitivity,with the test sensitivity reaching 226.7μV℃^(−1).Most importantly,it can work in a wide temperature range,from extremely low temperatures down to liquid nitrogen temperature to high temperatures up to 1200℃,which is difficult to be achieved by other existing flexible temperature sensors.This temperature sensor has huge application potential in biomedicine,aerospace and other fields.

关键词： flexible sensor temperature thermocouple

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Highly sensitive flexible heat flux sensor based on a microhole array for ultralow to high temperatures

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Microsystems & Nanoengineering 2023年第5期9卷 345-356页

作者： Le Li Bian Tian Zhongkai Zhang Meng Shi Jiangjiang Liu Zhaojun Liu Jiaming Lei Shuimin Li qijing lin Libo Zhao Zhuangde Jiang School of Mechanical Engineering Xi’an Jiaotong University710049 Xi’anChina State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and SystemXi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing Yantai 265503China

With the growing demand for thermal management of electronic devices,cooling of high-precision instruments,and biological cryopreservation,heat flux measurement of complex surfaces and at ultralow temperatures has become highly imperative.However,current heat flux sensors(HFSs)are commonly used in high-temperature scenarios and have problems when applied in low-temperature conditions,such as low sensitivity and embrittlement.In this study,we developed a flexible and highly sensitive HFS that can operate at ultralow to high temperatures,ranging from−196°C to 273°C.The sensitivities of HFSs with thicknesses of 0.2 mm and 0.3 mm,which are efficiently manufactured by the screen-printing method,reach 11.21μV/(W/m2)and 13.43μV/(W/m2),respectively.The experimental results show that there is a less than 3%resistance change from bending to stretching.Additionally,the HFS can measure heat flux in both exothermic and absorptive cases and can measure heat flux up to 25 kW/m2.Additionally,we demonstrate the application of the HFS to the measurement of minuscule heat flux,such as heat dissipation of human skin and cold water.This technology is expected to be used in heat flux measurements at ultralow temperatures or on complex surfaces,which has great importance in the superconductor and cryobiology field.

关键词： high stretching superconductor

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基于多节点阵列结构的高精度薄膜温度传感器研究

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机械工程学报 2024年第4期60卷 92-100页

作者：田边刘江江张仲恺刘兆钧马荣林启敬蒋庄德西安交通大学机械制造系统工程国家重点实验室西安710043

针对液压系统中的智能感知需求,提出一种新型微机电系统(Micro-electro-mechanical system,MEMS)薄膜温度传感器,其具有微小体积的同时兼具较高的测温精度,可实现液压元件及系统中油液温度信号的精确感知。开发出基于高分子聚合物-金属... 详细信息

针对液压系统中的智能感知需求,提出一种新型微机电系统(Micro-electro-mechanical system,MEMS)薄膜温度传感器,其具有微小体积的同时兼具较高的测温精度,可实现液压元件及系统中油液温度信号的精确感知。开发出基于高分子聚合物-金属-陶瓷材料的新型测温材料体系;提出一种多节点的三维阵列式电极结构。针对三维立体曲面高分子聚合物基底上的热电薄膜沉积难题,基于MEMS磁控溅射技术,实现曲面基底上薄膜的图形化转移。测试结果表明,所制备的多节点型薄膜温度传感器在-60~200℃量程内的灵敏度系数可达42μV/℃,从-60~100℃的静态测试中,温度时间漂移率为0.012℃/min,重复性误差为0.32%,最大迟滞为1.3%,满量程误差小于0.5%FS。同时采用脉冲激光法测得传感器的动态响应时间优于0.24 ms。在综合性能测试中,传感器在高速热气流冲击下仍有较高的温度分辨率,同时在不同工质中均可长时间正常工作24 h以上,可满足实际液压系统中长时间保持密封性与稳定性的测温需求。

关键词：液压系统薄膜热电偶多节点结构曲面成膜性能研究

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