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Fabrication of Nanoscale Step Height Structure Using Atomic Layer Deposition Combined with Wet Etching

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Chinese Journal of Mechanical Engineering 2016年第1期29卷 91-97页

作者： WANG Chenying YANG Shuming JING Weixuan REN Wei lin qijing ZHANG Yijun JIANG Zhuangde State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Electronic Materials Research Laboratory Key Laboratory of the Ministry of Education & International Center for Dielectric Research Xi'an Jiaotong University

The current techniques used for the fabrication of nanosteps are normally done by layer growth and then ion beam thinning. There are also extra films grown on the step surfaces in order to reduce the roughness. So the whole process is time consuming. In this paper, a nanoscale step height structure is fabricated by atomic layer deposition （ALD） and wet etching techniques. According to the traceable of the step height value, the fabrication process is controllable. Because ALD technology can grow a variety of materials, aluminum oxide （Al2O3） is used to fabricate the nanostep. There are three steps of Al2O3 in this structure including 8 nm, 18 nm and 44 inn. The thickness of Al2O3 film and the height of the step are measured by anellipsometer. The experimental results show that the thickness of Al2O3 film is consistent with the height of the step. The height of the step is measured by AFM. The measurement results show that the height is related to the number of cycles of ALD and the wet etching time. The bottom and the sidewall surface roughness are related to the wet etching time. The step height is calibrated by Physikaliseh-Technische Bundesanstalt （PTB） and the results were 7.5±1.5 nm, 15.5±2.0 nm and 41.8±2.1 nm, respectively. This research provides a method for the fabrication of step height at nanoscale and the nanostep fabricated is potential used for standard references.

关键词： atomic layer deposition (ALD) wet etching step height

A flexible and wearable NO_(2)gas detection and early warning device based on a spraying process and an interdigital electrode at room temperature

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Microsystems & Nanoengineering 2022年第2期8卷 97-106页

作者： Fuzheng Zhang qijing lin Feng Flan Zuowei Wang Bian Tian Libo Zhao Tao Dong Zhuangde Jiang State Key Laboratory for Mechanical Manufacturing Systems Engineering Xi'an Jiaotong University710049 Xi'anChina Chongqing Key Laboratory of Micro-Nano Systems and Intelligent Sensing Chongqing Academician WorkstationChongqing 2011 Collaborative Innovation Center of Micro/Nano Sensing and Intelligent Ecological Internet of ThingsChongqing Technology and Business University400067 ChongqingChina Department of Microsystems Faculty of TechnologyNatural Sciences and Maritime SciencesUniversity of South-Eastern Norway(USN)Raveien 2153184 BorreNorway

Flexible sensors used to detect NO_(2) gas generally have problems such as poor repeatability,high operating temperature,poor selectivity,and small detection *** this work,a new spraying platform with a simple structure,low cost,and good film-forming consistency was designed and built to make a sensitive film(rGO/SnO_(2))for NO_(2) gas *** relationship between the solid content of rGO and SnO_(2)nanoparticles,annealing temperature,and sensor performance was *** results show that the interdigital electrode-sensitive film formed by spraying 0.25 ml of a 0.4 wt%rGO/SnO_(2)mixture and annealing at 250℃exhibited the best comprehensive performance for NO_(2) *** sensor's response value for 100 ppm NO_(2) gas was 0.2640 at room temperature(25℃),and the response time and recovery time were 412.4 s and 587.3 s,*** the range of 20-100 ppm,the relationship between the response and NO_(2) concentration was linear,and the correlation coefficient was *** addition,a soft-monitoring node module with an overlimit warning function for NO_(2) gas was designed and manufactured based on flexible ***,the flexible sensor and node module were embedded into woven fabric that could be used to make a mask or a watch that could detect NO_(2) gas,realizing the practical application of flexible NO_(2) gas sensors in the field of wearable electronics.

关键词： wear electrode spraying

Flexible temperature sensor with high sensitivity ranging from liquid nitrogen temperature to 1200℃

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International Journal of Extreme Manufacturing 2023年第1期5卷 355-366页

作者： Zhaojun Liu Bian Tian Zhuangde Jiang Shuimin Li Jiaming Lei Zhongkai Zhang Jiangjiang Liu Peng Shi qijing lin State Key Laboratory for Mechanical Manufacturing Systems Engineering Xi’an Jiaotong UniversityXi’an 710049People’s Republic of China Department of Electrical&Computer Engineering National University of SingaporeSingapore 117576Singapore

Flexible temperature sensors have been extensively investigated due to their prospect of wide application in various flexible electronic ***,most of the current flexible temperature sensors only work well in a narrow temperature range,with their application at high or low temperatures still being a big *** work proposes a flexible thermocouple temperature sensor based on aerogel blanket substrate,the temperature-sensitive layer of which uses the screen-printing technology to prepare indium oxide and indium tin *** has good temperature sensitivity,with the test sensitivity reaching 226.7μV℃^(−1).Most importantly,it can work in a wide temperature range,from extremely low temperatures down to liquid nitrogen temperature to high temperatures up to 1200℃,which is difficult to be achieved by other existing flexible temperature *** temperature sensor has huge application potential in biomedicine,aerospace and other fields.

关键词： flexible sensor temperature thermocouple

A large-area bionic skin for high-temperature energy harvesting applications

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Nano Research 2023年第7期16卷 10245-10255页

作者： Zhaojun Liu Bian Tian Yao Li Jiaming Lei Zhongkai Zhang Jiangjiang Liu qijing lin Chengkuo Lee Zhuangde Jiang State Key Laboratory for Mechanical Manufacturing Systems Engineering School of Mechanical EngineeringXi’an Jiaotong UniversityXi’an 710049China Department of Electrical&Computer Engineering National University of SingaporeSingapore 117576Singapore Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing Yantai 265503China

For the large amount of waste heat wasted in daily life and industrial production,we propose a new type of flexible thermoelectric generators(F-TEGs)which can be used as a large area bionic skin to achieve energy harvesting of thermal *** reference to biological structures such as pinecone,succulent,and feathers,we have designed and fabricated a biomimetic flexible TEG that can be applied in a wide temperature range which has the highest temperature energy harvesting capability *** laminated free structure of the bionic F-TEG dramatically increases the efficiency and density of energy *** F-TEGs(single TEG only 101.2 mg in weight),without an additional heat sink,demonstrates the highest output voltage density of 286.1 mV/cm^(2)and the maximum power density is 66.5 mW/m^(2) at a temperature difference of nearly 1000℃.The flexible characteristics of F-TEGs make it possible to collect the diffused thermal energy by flexible attachment to the outer walls of high-temperature pipes and vessels of different diameters and *** work shows a new design and application concept for flexible thermal energy collectors,which fills the gap of flexible energy harvesting in high-temperature environment.

关键词： bionic structure high-temperature flexible thermoelectric generators(TEGs)

Piezoelectric-AIN resonators at two-dimensional flexural modes for the density and viscosity decoupled determination of liquids

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Microsystems & Nanoengineering 2022年第2期8卷 23-34页

作者： linya Huang Wei Li Guoxi Luo Dejiang Lu Libo Zhao Ping Yang Xiaozhang Wang Jiuhong Wang qijing lin Zhuangde Jiang State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesOverseas Expertise Introduction Center for Micro/Nano Manufacturing and Nano Measurement Technologies Discipline InnovationXi'an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and SystemXi'an Jiaotong UniversityXi'an 710049China School of Mechanical Engineering Xi'an Jiaotong UniversityXi'an 710049China The Eleventh Research Institute of The Sixth Academy of CASC Xi'an 710100China

A micromachined resonator immersed in liquid provides valuable resonance parameters for determining the fluidic ***,the liquid operating environment poses a challenge to maintaining a fine sensing performance,particularly through electrical *** paper presents a piezoelectric micromachined cantilever with a stepped shape for liquid monitoring *** modes of the proposed cantilever are available with full electrical characterization for realizing self-actuated and seif-sensing *** focus is on higher flexural resonances,which nonconventionally feature two-dimensional vibration *** analyses are conducted for the developed cantilever under flexural vibrations at different *** explains not only the basic length-dominant mode but also higher modes that simultaneously depend on the length and width of the *** study determines that the analytical predictions for resonant frequency in liquid media exhibit good agreement with the experimental ***,the experiments on cantilever resonators are performed in various test liquids,demonstrating that higher-order flexural modes allow for the decoupled measurements of density and *** measurement differences achieve 0.39%in density and 3.50%in viscosity,and the frequency instability is below 0.05%*** the basis of these results,design guidelines for piezoelectric higher-mode resonators are proposed for liquid sensing.

关键词： flexural cantilever viscosity

Fabrication and characterization of high-sensitivity,wide-range,and flexible MEMS thermal flow velocity sensors

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Microsystems & Nanoengineering 2024年第4期10卷 139-151页

作者： Min Li Guangzhao Qin Chen Jia Danyu Zhang Zhikang Li Xiangguang Han Shusheng Xu Libo Zhao Guoxi Luo Cunlang Liu Ping Yang qijing lin State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and SystemXi’an Jiaotong UniversityXi’an 710049China School of Instrument Science and Technology Xi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai Yantai 264000China Brightstone Innovation(Yantai)Research Institute for Micronano Sensing Technology Yantai 264006China Xi’an Jingwei Sensing Technology Co. Ltd.Xi’an 712000China

With the rapid development of various fields,including aerospace,industrial measurement and control,and medical monitoring,the need to quantify flow velocity measurements is *** is difficult for traditional flow velocity sensors to fulfill accuracy requirements for velocity measurements due to their small ranges,susceptibility to environmental impacts,and ***,to optimize sensor performance,a flexible microelectromechanical system(MEMS)thermal flow sensor is proposed that combines the working principles of thermal loss and thermal temperature difference and utilizes a flexible cavity substrate made of a low-thermal-conductivity polyimide/SiO_(2)(PI/SiO_(2))composite porous film to broaden the measurement range and improve the *** measurement results show that the maximum measurable flow velocity can reach 30 m/s with a resolution of 5.4mm/*** average sensitivities of the sensor are 59.49 mV/(m s−1)in the medium-to-low wind velocity range of 0–2 m/s and 467.31 mV/(m s^(−1))in the wind velocity range of 2–30 m/*** sensor proposed in this work can enable new applications of flexible flow sensors and wearable devices.

关键词： flow thermal utilize

Ultrasensitive SERF atomic magnetometer with a miniaturized hybrid vapor cell

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Microsystems & Nanoengineering 2024年第4期10卷 367-376页

作者： Yintao Ma Yao Chen Mingzhi Yu Yanbin Wang Shun Lu Ju Guo Guoxi Luo Libo Zhao Ping Yang qijing lin Zhuangde Jiang State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and SystemsXi’an Jiaotong UniversityXi’an 710049China School of Mechanical Engineering Xi’an Jiaotong UniversityXi’an 710049China School of Instrument Science and Technology Xi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing YantaiYantai 265503China

The chip-scale hybrid optical pumping spin-exchange relaxation-free(SERF)atomic magnetometer with a single-beam arrangement has prominent applications in biomagnetic measurements because of its outstanding features,including ultrahigh sensitivity,an enhanced signal-to-noise ratio,homogeneous spin polarization and a much simpler optical configuration than other *** this work,a miniaturized single-beam hybrid optical pumping SERF atomic magnetometer based on a microfabricated atomic vapor cell is *** the optically thin Cs atoms are spinpolarized,the dense Rb atoms determine the experimental *** enhanced signal strength and narrowed resonance linewidth are experimentally proven,which shows the superiority of the proposed magnetometer *** using a differential detection scheme,we effectively suppress optical noise with an approximate five-fold ***,the cell temperature markedly affects the performance of the *** systematically investigate the effects of temperature on the magnetometer *** theoretical basis for these effects is explained in *** developed miniaturized magnetometer has an optimal magnetic sensitivity of 20 fT/Hz^(1/2).The presented work provides a foundation for the chip-scale integration of ultrahighly sensitive quantum magnetometers that can be used for forward-looking magnetocardiography(MCG)and magnetoencephalography(MEG)applications.

关键词： pumping polarization magnetometer

Highly sensitive flexible heat flux sensor based on a microhole array for ultralow to high temperatures

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Microsystems & Nanoengineering 2023年第5期9卷 345-356页

作者： Le Li Bian Tian Zhongkai Zhang Meng Shi Jiangjiang Liu Zhaojun Liu Jiaming Lei Shuimin Li qijing lin Libo Zhao Zhuangde Jiang School of Mechanical Engineering Xi’an Jiaotong University710049 Xi’anChina State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and SystemXi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing Yantai 265503China

With the growing demand for thermal management of electronic devices,cooling of high-precision instruments,and biological cryopreservation,heat flux measurement of complex surfaces and at ultralow temperatures has become highly ***,current heat flux sensors(HFSs)are commonly used in high-temperature scenarios and have problems when applied in low-temperature conditions,such as low sensitivity and *** this study,we developed a flexible and highly sensitive HFS that can operate at ultralow to high temperatures,ranging from−196°C to 273°*** sensitivities of HFSs with thicknesses of 0.2 mm and 0.3 mm,which are efficiently manufactured by the screen-printing method,reach 11.21μV/(W/m2)and 13.43μV/(W/m2),*** experimental results show that there is a less than 3%resistance change from bending to ***,the HFS can measure heat flux in both exothermic and absorptive cases and can measure heat flux up to 25 kW/***,we demonstrate the application of the HFS to the measurement of minuscule heat flux,such as heat dissipation of human skin and cold *** technology is expected to be used in heat flux measurements at ultralow temperatures or on complex surfaces,which has great importance in the superconductor and cryobiology field.

关键词： high stretching superconductor

A thin-film temperature sensor based on a flexible electrode and substrate

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Microsystems & Nanoengineering 2021年第3期7卷 125-138页

作者： Zhaojun Liu Bian Tian Bingfei Zhang Jia ngjiang Liu Zhongkai Zhang Song Wang Yunyun Luo Li bo Zhao Peng Shi qijing lin Zhuangde Jiang State Key Laboratory for Mechanical Manufacturing Systems Engineering Xi'an Jiaotong University710049 Xi'anChina

Accurate temperature measurements can efficiently solve numerous critical problems and provide key ***,a flexible micro-three-dimensional sensor,with a combination of platinum and indium oxide to form thermocouples,is designed and fabricated by a microfabrication process to achieve in situ real-time temperature *** stability and reliability of the sensor are greatly improved by optimizing the process parameters,structural design,and preparation methods.A novel micro-three-dimensional structure with better malleability is designed,which also takes advantage of the fast response of a two-dimensional thin *** as-obtained flexible temperature sensor with excellent stability and reliability is expected to greatly contribute to the development of essential components in various emerging research fields,including bio-robot and healthcare *** model of the application sensor in a mask is further proposed and designed to realize the collection of health information,reducing the number of deaths caused by the lack of timely detection and treatment of patients.

关键词： robot electrode stability