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Displacement Talbot lithography for nanoengineering of III-nitride materials

Microsystems & Nanoengineering 2019年第1期5卷 38-49页

作者： Pierre-Marie Coulon Benjamin Damilano Blandine Alloing Pierre Chausse Sebastian Walde Johannes Enslin Robert Armstrong Stephane Vezian Sylvia Hagedorn Tim Wernicke Jean Massies Jesus Zuniga‐Perez Markus Weyers Michael Kneissl philip a.shields Department of Electrical&Electronic Engineering University of BathBath BA27AYUK Universite Cote d’Azur CNRSCRHEArue B.Gregory06560 ValbonneFrance Ferdinand-Braun-Institut Leibniz-Institut fur HochstfrequenztechnikGustav-Kirchhoff-Str.412489 BerlinGermany Technische Universität Berlin Institute of Solid State Physics10623 BerlinGermany

Nano-engineering III-nitride semiconductors offers a route to further control the optoelectronic properties,enabling novel functionalities and *** a variety of lithography techniques are currently employed to nanoengineer these materials,the scalability and cost of the fabrication process can be an obstacle for large-scale *** this paper,we report on the use of a fast,robust and flexible emerging patterning technique called Displacement Talbot lithography(DTL),to successfully nano-engineer III-nitride ***,along with its novel and unique combination with a lateral planar displacement(D^(2)TL),allow the fabrication of a variety of periodic nanopatterns with a broad range of filling factors such as nanoholes,nanodots,nanorings and nanolines;all these features being achievable from one single *** illustrate the enormous possibilities opened by DTL/D2TL,dielectric and metal masks with a number of nanopatterns have been generated,allowing for the selective area growth of InGaN/GaN core-shell nanorods,the top-down plasma etching of III-nitride nanostructures,the top-down sublimation of GaN nanostructures,the hybrid top-down/bottom-up growth of AlN nanorods and GaN nanotubes,and the fabrication of nanopatterned sapphire substrates for AlN *** with their planar counterparts,these 3D nanostructures enable the reduction or filtering of structural defects and/or the enhancement of the light extraction,therefore improving the efficiency of the final *** results,achieved on a wafer scale via DTL and upscalable to larger surfaces,have the potential to unlock the manufacturing of nano-engineered III-nitride materials.

关键词： Talbot planar nitride

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Snowball Earth is dead! Long live Snowball Earth!

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Episodes 2006年第4期29卷 287-288页

作者： Graham A. shields Institut für Geologie und Palaeontologie Westfaeilische-Wilhelms Universitaet Correnstr. 24 48149 Münster Germany

Ticino in southern Switzerland played host this summer to a most extraordinary meeting of minds. About eighty scientists from all over the world came together in the exquisite setting of Monte Verita to discuss possibly the coldest spell in our planet＇s long history： the Cryogenian Period. ‘Snowball Earth 2006＇ was organized by a research group at the ETH in Zurich under the leadership of Professor philip Allen, now at Imperial College, London, and was the first conference to focus solely on this topic. The Cryogenian global freeze of about 7204535 million years ago closely preceded--some would say ominously so--the first fossil evidence for animal life on Earth, and as such has attracted the attention of natural scientists worldwide. Such a resurgence of interest in deep Earth history has not been witnessed since the great K/T boundary debate of the early 1980s. On the first day of the conference, on a hot and sultry evening during the hottest July on record, it was ice of a different kind that was being broken high above Lago Maggiore. The first hesitant introductions over chilled white wine made it clear that a tluly multidisciplinary throng had been invited for what promised to be a vigorous debate on the causes and effects of Neoproterozoic climate change. Gathered for the ＇snowball fight＇ were geologists, palaeobiologists, geochemists, geophysicists and climate modellers, all of whom would, one-by-one over the coming five days, borrow centre stage to offer their unique perspective on this most polarizing of topics.

关键词：瑞士雪球气候变化二氧化碳全球变暖环境气候问题

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