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Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones

Microsystems & Nanoengineering 2024年第1期10卷 267-275页

作者： Roberto Pezone Sebastian Anzinger gabriele Baglioni Hutomo Suryo Wasisto Pasqualina M.Sarro peter.g.steeneken Sten Vollebregt Laboratory of Electronic Components Technology and Materials(ECTM)Department of MicroelectronicsDelft University of TechnologyDelftThe Netherlands Infineon Technologies Ag Am Campeon 1-15Neubiberg 85579Germany Kavli Institue of Nanoscience Department of Quantum NanoscienceDelft University of TechnologyDelftthe Netherlands Department of Precision and Microsystems Engineering(PME) Delft University of TechnologyDelftThe Netherlands

Since the performance of micro-electro-mechanical system(MEMS)-based microphones is approaching fundamental physical,design,and material limits,it has become challenging to improve *** works have demonstrated graphene’s suitability as a microphone *** potential for achieving smaller,more sensitive,and scalable onchip MEMS microphones is yet to be *** address large graphene sizes,graphene-polymer heterostructures have been proposed,but they compromise performance due to added polymer mass and *** work demonstrates the first wafer-scale integrated MEMS condenser microphones with diameters of 2R=220-320μm,thickness of 7 nm multi-layer graphene,that is suspended over a back-plate with a residual gap of 5μ*** microphones are manufactured with MEMS compatible wafer-scale technologies without any transfer steps or polymer layers that are more prone to contaminate and wrinkle the *** designs,all electrically integrated are fabricated and characterized allowing us to study the effects of the introduction of a back-plate for capacitive *** devices show high mechanical compliances C_(m)=0.081-1.07μmPa^(−1)(10-100×higher than the silicon reported in the state-of-the-art diaphragms)and pull-in voltages in the range of 2-9.5 *** addition,to validate the proof of concept,we have electrically characterized the graphene microphone when subjected to sound *** estimated sensitivity of S_(1kHz)=24.3-321 mV Pa^(−1)for a V_(bias)=1.5 V was determined,which is 1.9-25.5×higher than of state-of-the-art microphone devices while having a~9×smaller area.

关键词： transfer plate approaching

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Ultrasound Pulse Emission Spectroscopy Method to Characterize Xylem Conduits in Plant Stems

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Research 2023年第1期2022卷 139-152页

作者： Satadal Dutta Zhiyi Chen Elias Kaiser Priscilla Malcolm Matamoros peter.g.steeneken gerard J.Verbiest Department of Precision and Microsystems Engineering Faculty of 3METU DelfMekelweg 22628CD DelfNetherlands Horticulture and Product Physiology Department of Plant SciencesWageningen University and ResearchDroevendaalsesteeg 6708PB WageningenNetherlands

Although it is well known that plants emit acoustic pulses under drought stress,the exact origin of the waveform of these ultrasound pulses has remained ***,we present evidence for a correlation between the characteristics of the waveform of these pulses and the dimensions of xylem conduits in *** a model that relates the resonant vibrations of a vessel to its dimension and viscoelasticity,we extract the xylem radi from the waveforms of ultrasound pulses and show that these are correlated and in good agreement with optical *** demonstrate the versatility of the method by applying it to shoots of ten different vascular plant *** particular,for Hydrangea quercifolia,we further extract vessel element lengths with our model and compare them with scanning electron *** ultrasonic,noninvasive characterization of internal conduit dimensions enables a breakthrough in speed and accuracy in plant phenotyping and stress detection.

关键词： dimensions breakthrough Pulse

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High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2

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Nano Research 2015年第9期8卷 2842-2849页

作者： Santiago J. CartamiI-Bueno peter.g. steeneken Frans D. Tichelaar Efren Navarro-Moratalla Warner J. Venstra Ronald van Leeuwen Eugenio Coronado Herre S.J. van der Zant gary A. Steele Andres Castellanos-gomez Kavli Institute of Nanoscience Delft University of Technology Lorentzweg 1 2628 CJ Delft The Netherlands Kavli Institute of Nanoscience Delft University of Technology National Centre for HREM Lorentzweg 1 2628 CJ Delft The Netherlands Instituto Ciencia Molecular (ICMol) Univ. Valencia C/Catedrdtico Jos@ Beltrdn 2 E-46980 Paterna Spain

Controlling the strain in two-dimensional （2D） materials is an interesting avenue to tailor the mechanical properties of nanoelectromechanical systems. Here, we demonstrate a technique to fabricate ultrathin tantalum oxide nanomechanical resonators with large stress by the laser oxidation of nano-drumhead resonators composed of tantalum diselenide （TaSe2）, a layered 2D material belonging to the metal dichalcogenides. Before the study of their mechanical properties with a laser interferometer, we verified the oxidation and crystallinity of the freely suspended tantalum oxide using high-resolution electron microscopy. We demonstrate that the stress of tantalum oxide resonators increases by 140 MPa （with respect to pristine TaSe2 resonators）, which causes an enhancement in the quality factor （14 times larger） and resonance frequency （9 times larger） of these resonators.

关键词： TaSe2,tantalum oxide,mechanical resonators,laser oxidation,optical interferometer,high quality factor

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Nanoelectromechanical Sensors Based on Suspended 2D Materials

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Research 2020年第1期2020卷 1612-1636页

作者： Max C.Lemme Stefan Wagner Kangho Lee Xuge Fan gerard J.Verbiest Sebastian Wittmann Sebastian Lukas Robin J.Dolleman Frank Niklaus Herre S.Jvan der Zant georg S.Duesberg peter.g.steeneken Chair of Electronic Devices RWTH Aachen UniversityOtto-Blumenthal-Str.252074 AachenGermany AMO gmbH Advanced Microelectronic Center Aachen(AMICA)Otto-Blumenthal-Str.2552074 AachenGermany Institute of Physics Faculty of Electrical Engineering and Information TechnologyUniversität der Bundeswehr MünchenWerner-Heisenberg-Weg 3985577 NeubibergGermany Division of Micro and Nanosystems KTH Royal Institute of TechnologyMalvinas Vag 1010044 StockholmSweden Department of Precision and Microsystems Engineering Delft University of TechnologyMekelweg 22628 CD DelftNetherlands Infineon Technologies Ag Wernerwerkstraße 293049 RegensburgGermany nd Institute of Physics RWTH Aachen UniversityOtto-Blumenthal-Str.52074 AachenGermany Kavli Institute of Nanoscience Delft University of TechnologyLorentzweg 12628 CJ DelftNetherlands

The unique properties and atomic thickness of two-dimensional(2D)materials enable smaller and better nanoelectromechanical sensors with novel *** the last decade,many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors,microphones,accelerometers,and mass and gas *** this review,we explain the different sensing concepts and give an overview of the relevant material properties,fabrication routes,and device operation ***,we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.

关键词： Sensors enable accelerometer

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Sensitive capacitive pressure sensors based on graphene membrane arrays

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Microsystems & Nanoengineering 2020年第1期6卷 176-184页

作者： Makars Siskins Martin Lee Dominique Wehenkel Richard van Rijn Tijmen W.de Jong Johannes R.Renshof Berend C.Hopman Willemijn S.J.M.peters Dejan Davidovikj Herre S.J.van der Zant peter.g.steeneken Kavli Institute of Nanoscience Delft University of TechnologyLorentzweg 12628 CJ DelftThe Netherlands Applied Nanolayers B.V. Feldmannweg 172628 CT DelftThe Netherlands Department of Precision and Microsystems Engineering Delft University of TechnologyMekelweg 22628 CD DelftThe Netherlands

The high flexibility,impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical ***,for capacitive pressure sensors,the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial ***,we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small,freestanding double-layer graphene *** fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene,even after high-temperature *** sensors are readout using a low-cost battery-powered circuit board,with a responsivity of up to 47:8aF Pa^(−1) mm^(−2),thereby outperforming the commercial sensors.

关键词： graphene arrays thereby

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