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Substrate-decoupled,bulk-acoustic wave gyroscopes:Design and evaluation of next-generation environmentally robust devices

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Microsystems & Nanoengineering 2016年第1期2卷 239-248页

作者： Diego E.Serrano Mohammad F.Zaman Amir Rahafrooz peter hrudey Ron Lipka Duane Younkin Shin Nagpal Ijaz Jafri Farrokh Ayazi QualtréInc. 225 Cedar Hill StreetSuite 112MarlboroughMA 01752USA Department of Electrical and Computer Engineering Georgia Institute of Technology777 Atlantic Drive NWAtlantaGA 303332USA

This paper reports on a new type of high-frequency mode-matched gyroscope with significantly reduced dependencies on environmental stimuli such as temperature,vibration,and shock.A novel stress-isolation system is used to effectively decouple an axis-symmetric bulk-acoustic wave(BAW)vibratory gyro from its substrate,minimizing the effect that external sources of error have on the offset and scale factor of the ***-decoupled(SD)BAW gyros with a resonance frequency of 4.3 MHz and Q values near 60000 were implemented using the high aspect ratio poly and single-crystal silicon(HARPSS)process to achieve ultra-narrow capacitive ***-level packaged sensors were interfaced with a customized application-specific integrated circuit(ASIC)to achieve low variations in the offset across temperature(±26°s^(−1) from−40 to 85℃),supreme random-vibration immunity(0.012°s^(−1) gRMS−1)and excellent shock *** a scale factor of 800μV(°s^(−1))^(−1),the SD-BAW gyro system attains a large full-scale range(±1250°s^(−1))with a non-linearity of less than 0.07%.A measured angle-random walk(ARW)of 0.39°/√h and a bias instability of 10.5°h^(−1) are dominated by the thermal and flicker noise of the integrated circuit(IC),*** measurements using external electronics show bias-instability values as low as 3.5°h−1,which are limited by feed-through signals coupled from the drive loop to the sense channel,which can be further reduced through proper re-routing of the gyroscope pin-out configuration.

关键词： Bulk-acoustic wave environmental stability MEMS gyroscope support loss vibration rejection

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