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3D micro-devices for enhancing the lateral resolution in optical microscopy

Light(Advanced Manufacturing) 2024年第2期5卷 50-63页

作者： Gordon Zyla Goran Maconi Anton Nolvi Jan Marx Dimitra Ladika Ari Salmi Vasileia Melissinaki Ivan Kassamakov maria farsari Institute of Electronic Structure and Laser Foundation for Research and Technology-HellasHeraklionGreece Electronics Research Laboratory Department of PhysicsUniversity of HelsinkiHelsinkiFinland Applied Laser Technologies Ruhr University BochumBochumGermany

Although optical microscopy is a widely used technique across various multidisciplinary fields for inspecting small-scale objects,surfaces or organisms,it faces a significant limitation:the lateral resolution of optical microscopes is fundamentally constrained by light *** micro-spheres,however,offer a promising solution to this issue as they are capable of significantly enhancing lateral resolution through extraordinary phenomena,such as a photonic *** upon the potential of dielectric micro-spheres,this paper introduces a novel approach for fabricating 3D micro-devices designed to enhance lateral resolution in optical *** proposed 3D micro-device comprises a modified coverslip and a micro-sphere,facilitating easy handling and integration into any existing optical *** manufacture the device,two advanced femtosecond laser techniques are employed:femtosecond laser ablation and multi-photon *** laser ablation was employed to create a micro-hole in the coverslip,which allows light to be focused through this ***-photon lithography was used to fabricate a micro-sphere with a diameter of 20μm,along with a cantilever that positions the above the processed micro-hole and connect it with the *** this context,advanced processing strategies for multi-photon lithography to produce a micro-sphere with superior surface roughness and almost perfect geometry(λ/8)from a Zr-based hybrid photoresist are *** performance of the micro-device was evaluated using Mirau-type coherence scanning interferometry in conjunction with white light illumination at a central wavelength of 600 nm and a calibration grid(Λ=0.28μm,h>50 nm).Here,the 3D micro-device proved to be capable of enhancing lateral resolution beyond the limits achievable with conventional lenses or microscope objectives when used in ***,it maintained the high axial resolution characteristic of Mirau-type coherenc

关键词： Photonic nanojet Multi-photon lithography Optical microscopy Micro-optics Multi-photon grayscale lithography Extreme manufacturing

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