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Fast source mask co-optimization method for high-NA EUV lithography

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Opto-Electronic Advances 2024年第4期7卷 44-54页

作者： Ziqi Li Lisong Dong Xu ma Yayi Wei EDA Center Institute of Microelectronics of Chinese Academy of SciencesBeijing 100029China Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China School of Optics and PhotonicsBeijing Institute of TechnologyBeijing 100081China University of Chinese Academy of Sciences Beijing 100049China Guangdong Greater Bay Area Applied Research Institute of Integrated Circuit and Systems Guangzhou 510700China

Extreme ultraviolet(EUV)lithography with high numerical aperture(NA)is a future technology to manufacture the integrated circuit in sub-nanometer ***,source mask co-optimization(SMO)is an extensively used approach for advanced lithography process beyond 28 nm technology *** work proposes a novel SMO method to improve the image fidelity of high-NA EUV lithography system.A fast high-NA EUV lithography imaging model is established first,which includes the effects of mask three-dimensional structure and anamorphic ***,this paper develops an efficient SMO method that combines the gradient-based mask optimization algorithm and the compressivesensing-based source optimization algorithm.A mask rule check(MRC)process is further proposed to simplify the optimized mask *** illustrate that the proposed SMO method can significantly reduce the lithography patterning error,and maintain high computational efficiency.

关键词： computational lithography high-NA EUV lithography source-mask co-optimization lithography imaging model

Photoinduced superlubricity on TiO_(2) surfaces

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Friction 2024年第3期12卷 428-438页

作者： Ke HAN Liran ma Yu TIAN Jianbin LUO State Key Laboratory of Tribology in Advanced Equipment Tsinghua UniversityBeijing 100084China Received:16 September 2022/Revised:28 October 2022/Accepted:27 December 2022The author(s)2022.

Superlubricity control is of great interest in both industry and scientific research,and several methods have been proposed to achieve this *** this work,ultraviolet(UV)light was introduced into titanium dioxide(TiO_(2))and silicon nitride(Si_(3)N_(4))tribosystems to accomplish photoinduced *** friction coefficients(COFs)between Si_(3)N_(4) balls and TiO_(2) plates in the mixtures of sulfuric acid(H^(2)SO_(4))solution and glycerol solution were obviously reduced,and the system entered the superlubricity region(COFmation of silica(SiO_(2))layers on the surfaces of Si_(3)N_(4) balls and the elastohydrodynamic effects were determined to be fundamental to the low friction in this experiment,and the enhancement of the combination between the TiO_(2) surface and the hydroxy group of glycerol by UV illumination was the key to the photoinduced superlubricity in this *** findings showed one method for achieving superlubricity by introducing a light field that could be further applied to special working conditions.

关键词： light control friction superlubricity glycerol titanium dioxide(TiO_(2))

Wearable multilead ECG sensing systems using on-skin stretchable and breathable dry adhesives

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Bio-Design and manufacturing 2024年第2期7卷 167-180页

作者： Yingxi Xie Longsheng Lu Wentao Wang Huan ma School of Mechanical and Automotive Engineering South China University of TechnologyGuangzhou 510641China College of Automotive and Mechanical Engineering Changsha University of Science and TechnologyChangsha 410114China Guangdong Cardiovascular Institute Guangdong Provincial People’s HospitalGuangzhou 510080China

Electrocardiogram(ECG)monitoring is used to diagnose cardiovascular diseases,for which wearable electronics have attracted much attention due to their lightweight,comfort,and long-term *** study developed a wearablemultilead ECG sensing system with on-skin stretchable and conductive silver(Ag)-coated fiber/silicone(AgCF-S)dry *** and normal adhesion to pigskin(0.43 and 0.20 N/cm2,respectively)was optimized by the active control of fiber density and mixing ratio,resulting in close contact in the electrode–skin *** breathableAgCF-S dry electrodewas nonallergenic after continuous fit for 24 h and can be reused/cleaned(>100 times)without loss of *** AgCF encapsulated inside silicone elastomers was overlapped to construct a dynamic network under repeated stretching(10%strain)and bending(90°)deformations,enabling small intrinsic impedance(0.3,0.1 Hz)and contact impedance variation(0.7 k)in high-frequency vibration(70 Hz).All hard/soft modules of the multilead ECG system were integrated into lightweight clothing and equipped with wireless transmission for signal *** synchronous acquisition of I–III,aVR,aVL,aVF,and V4 lead data,the multilead ECG sensing system was suitable for various scenarios,such as exercise,rest,and sleep,with extremely high signal-to-noise ratios.

关键词： Multilead electrocardiogram Dry electrodes Wearable electronics Wireless transmission

Integration of earth-abundant cocatalysts for high-performance photoelectrochemical energy conversion

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Journal of Energy Chemistry 2024年第1期88卷 336-355,I0008页

作者： Joonhee ma Sang Hyun Ahn Soo Young Kim Department of materials Science and Engineering Korea UniversitySeoul 02841Republic of Korea School of Chemical Engineering and materials Science Chung-Ang University84 Heukseok-roDongjak-guSeoul 06974Republic of Korea

Photoelectrochemical(PEC)energy conversion has emerged as a promising and efficient approach to sustainable energy harvesting and *** utilizing semiconductor photoelectrodes,PEC devices can harness solar energy and drive electrochemical reactions such as water splitting or carbon dioxide(CO_(2))reduction to generate clean fuels and value-added ***,PEC energy conversion faces several challenges such as high overpotential,sluggish reaction kinetics,charge carrier recombination,and stability issues,which limit its practical ***,significant research has been conducted to improve the overall conversion efficiency of PEC *** particularly promising approach is the use of cocatalysts,which involves introducing specific cocatalysts onto the photoelectrode surface to promote charge separation,improve reaction kinetics,and reduce the overpotential,thereby enhancing the overall performance of PEC energy *** review provides a comprehensive overview of the recent developments in the earth-abundant cocatalysts for PEC water splitting and CO_(2) *** main earth-abundant catalysts for the PEC water splitting include transition-metal dichalcogenide(TMD)-based materials,metal phosphides/carbides,and metal oxides/***,PEC-CO_(2)RR was divided into C_(1) and C_(2+)based on the final product since various products could be produced,focusing on diverse earth-abundant materials-based *** addition,we provide and highlight key advancements achieved in the very recent reports on novel PEC system design engineering with ***,the current problems associated with PEC systems are discussed along with a suggested direction to overcome these obstacles.

关键词： Solar energy Photo-electrochemical Water splitting CO_(2)reduction Cocatalysts

Protection of steel hooks embedded in glass-fiber-reinforced concrete against macrocell corrosion

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Petroleum Research 2024年第2期9卷 317-326页

作者： Husnu Gerengi Muhammed maraşlı marziya Rizvi Beni Kohen Ismail taşkıran Corrosion Research Laboratory Department of Mechanical EngineeringDuzce University81620DuzceTurkey Department of Engineering and Applied Sciences University of BergamoBGItaly Fibrobeton Company R&D Center DuzceTurkey Department of Chemistry Babasaheb Bhimrao Ambedkar UniversityLucknow226003U.PIndia

This study evaluated the corrosion behavior of steel hooks embedded in GFRC,which were protected by a zinc-rich(96%Zn)galvanizing *** coating provided the hooks with active cathodic protection and a passive physical *** corrosion may form when the anode is smaller than the total steel ***,the steel hooks at the embedment juncture were additionally sealed against water ingress and air exchange using a construction *** study was conducted in three phases in a salt-spray ***,the electrogalvanized steel hooks embedded in GFRC were allowed to freely corrode for 7 *** the second phase,the electrogalvanized steel hooks were painted with the zinc-rich coating and observed over 7 *** the third phase,the steel hooks were protected by the zinc-rich coating together with a primer and construction sealant,and observed over 7 *** evaluate the electrogalvanized hooks and the corrosion products formed,the thickness of the material was *** on the metal surface was inferred by studying the surface morphology of the hooks at various points of contact and after different periods of time.

关键词： Steel rebars Concrete corrosion GFRC Galvanization Sealant

Analysis of piezoelectric semiconductor fibers under gradient temperature changes

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Applied mathematics and Mechanics(English Edition) 2024年第2期45卷 311-320页

作者： Shuangpeng LI Ruoran CHENG Nannan ma Chunli ZHANG Department of Engineering Mechanics Zhejiang UniversityHangzhou 310027China

Piezoelectric semiconductors(PSs)possess both semiconducting properties and piezoelectric coupling effects,making them optimal building blocks for semiconductor *** fiber-like structures have wide applications in multi-functional semiconductor *** this paper,a one-dimensional(1D)theoretical model is established to describe the piezotronic responses of a PS fiber under gradient temperature *** theoretical model aims to explain the mechanism behind the resistance change caused by such gradient temperature *** results demonstrate that a gradient temperature change significantly affects the physical fields within the PS fiber,and can induce changes in its surface *** provides important theoretical guidance on the development of piezotronic devices that are sensitive to temperature effects.

关键词： piezoelectric semiconductor(PS)fiber one-dimensional(1D)model piezotronic effect gradient temperature change

Sequestration of helium and xenon via iron-halide compounds in early Earth

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matter and Radiation at Extremes 2024年第3期9卷 83-88页

作者： Jurong Zhang Hanyu Liu Changfeng Chen Yanming ma Key Laboratory of material Simulation Methods and Software of Ministry of Education and State Key Laboratory of Superhard materials College of PhysicsJilin UniversityChangchun 130012China School of Physics and Electronics Shandong Normal UniversityJinan 250014China International Center of Future Science Jilin UniversityChangchun 130012China Department of Physics and Astronomy University of NevadaLas VegasNevada 89154USA

The terrestrial abundance anomalies of helium and xenon suggest the presence of deep-Earth reservoirs of these elements,which has led to great interest in searching for materials that can host these usually unreactive ***,using an advanced crystal structure search approach in conjunction with first-principles calculations,we show that several Xe/He-bearing iron halides are thermodynamically stable in a broad region of P–T phase space below 60 *** results present a compelling case for sequestration of He and Xe in the early Earth and may suggest their much wider distribution in the present Earth than previously *** findings offer insights into key material-based and physical mechanisms for elucidating major geological phenomena.

关键词： halide searching insight

Random Raman Fiber Laser as a Liquid Refractive Index Sensor

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Photonic Sensors 2024年第1期14卷 13-22页

作者： Bing HAN Yuxi ma Han WU Yong ZHAO College of Information Science and Engineering Northeastern UniversityShenyang 110819China Hebei Key Laboratory of Micro-Nano Precision Optical Sensing and Measurement Technology Qinhuangdao 066004China College of Electronics and Information Engineering Sichuan UniversityChengdu 610064China

In this paper,a new concept of forward-pumped random Raman fiber laser(RRFL)-based liquid refractive index sensing is proposed for the first *** liquid refractive index sensing,the flat fiber end immersed in the liquid can act as the point reflector for generating random fiber lasing and also as the sensing *** to the high sensitivity of the output power of the RRFL to the reflectivity provided by the point reflector in the ultralow reflectivity regime,the proposed RRFL is capable of achieving liquid refractive index sensing by measuring the random lasing output *** theoretically investigate the effects of the operating pump power and fiber length on the refractive index sensitivity for the proposed *** a proof-of-concept demonstration,we experimentally realize high-sensitivity half-open short-cavity RRFL-based liquid refractive index sensing with the maximum sensitivity and the sensing resolution of-39.88W/RIU and 2.5075×10^(-5) RIU,*** also experimentally verify that the refractive index sensitivity can be enhanced with the shorter fiber length of the *** work extends the application of the random fiber laser as a new platform for highly-sensitive refractive index sensing in chemical,biomedical,and environmental monitoring applications,etc.

关键词： Fiber optic sensors refractive index measurements fiber lasers Rayleigh scattering stimulated Raman scattering

Modified dynamic event-triggered scaled formation control for multi-agent systems via a sparrow search algorithm based co-design algorithm

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Frontiers of Information Technology & Electronic Engineering 2024年第2期25卷 197-213页

作者： Yanping YANG Siyu ma Dawei LI Jinghui SUO College of Information Science and Technology Donghua UniversityShanghai201620China Engineering Research Center of Digitized Textile&Apparel Technology Donghua UniversityShanghai201620China State Key Laboratory for Modification of Chemical Fibers and Polymer materials College of Information Science and TechnologyDonghua UniversityShanghai201620China

This paper is concerned with the scaled formation control problem for multi-agent systems(maSs)over fixed and switching ***,a modified resilient dynamic event-triggered(DET)mechanism involving an auxiliary dynamic variable(ADV)based on sampled data is *** the proposed DET mechanism,a random variable obeying the Bernoulli distribution is introduced to express the idle and busy situations of communication ***,the operation of absolute value is introduced into the triggering condition to effectively reduce the formation ***,a scaled formation control protocol with the proposed resilient DET mechanism is designed over fixed and switching *** scaled formation error system is modeled as a time-varying delay ***,several sufficient stability criteria are derived by constructing appropriate Lyapunov-Krasovskii functionals(LKFs).A co-design algorithm based on the sparrow search algorithm(SSA)is presented to design the control gains and triggering parameters ***,numerical simulations of multiple unmanned aerial vehicles(UAVs)are presented to validate the designed control method.

关键词： Scaled consensus Formation control Dynamic event-triggered scheme Switching topology