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microsphere-assisted,nanospot,non-destructive metrology for semiconductor devices

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Light(Science & Applications) 2022年第2期11卷 262-275页

作者： Soonyang Kwon Jangryul park Kwangrak Kim Yunje Cho myungjun Lee Equipment R&D Team 4 Mechatronics ResearchSamsung Electronics Co.Ltd.1-1 Samsungjeonja-roHwaseong-siGyeonggi-do 18848Republic of Korea

As smaller structures are being increasingly adopted in the semiconductor industry,the performance of memory and logic devices is being continuously improved with innovative 3D integration schemes as well as shrinking and stacking *** to the increasing complexity of the design architectures,optical metrology techniques including spectroscopic ellipsometry(SE)and reflectometry have been widely used for efficient process development and yield ramp-up due to the capability of 3D structure ***,there has been an increasing demand for a significant reduction in the physical spot diameter used in the SE technique;the spot diameter should be at least 10 times smaller than the cell dimension(~30×40μm2)of typical dynamic random-access memory to be able to measure in-cell critical dimension(CD)*** this end,this study demonstrates a novel spectrum measurement system that utilizes the microsphere-assisted super-resolution effect,achieving extremely small spot spectral metrology by reducing the spot diameter to~210 nm,while maintaining a sufficiently high signal-to-noise *** addition,a geometric model is introduced for the microsphere-based spectral metrology system that can calculate the virtual image plane magnification and depth of focus,providing the optimal distance between the objective lens,microsphere,and sample to achieve the best possible imaging *** proof of concept was fully verified through both simulations and experiments for various ***,owing to its ultra-small spot metrology capability,this technique has great potential for solving the current metrology challenge of monitoring in-cell CD variations in advanced logic and memory devices.

关键词： metrology dimension utilize

Soil texture affects the conversion factor of electrical conductivity from 1:5 soil-water to saturated paste extracts

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Pedosphere 2022年第6期32卷 905-915页

作者： Bo-Seong SEO Young-Jae JEONG Nu-Ri BAEK Hyun-Jin park Hye In YANG Se-In park Woo-Jung CHOI Department of Rural and Bio-systems Engineering(BK21) Chonnam National UniversityGwangju 61186(Republic of Korea) Department of Renewable Resources University of AlbertaEdmontonAlberta T6G 2E3(Canada) max Planck Institute for Biogeochemistry Jena 07745(Germany) National Institute of Environmental Research Incheon 22689(Republic of Korea) AgriBio Institute of Climate Change management Chonnam National UniversityGwangju 61186(Republic of Korea)

Electrical conductivity(EC)of soil-water extracts is commonly used to assess soil ***,its conversion to the EC of saturated soil paste extracts(ECe),the standard measure of soil salinity,is currently required for practical *** many regression models can be used to obtain ECe from the EC of soil-water extracts,the application of a site-specific model to different sites is not straightforward due to confounding soil factors such as soil *** study was conducted to develop a universal regression model to estimate a conversion factor(CF)for predicting EC_(e) from EC of soil-water extracts at a 1:5 ratio(EC_(1:5)),by employing a site-specific soil texture(i.e.,sand content).A regression model,CF=8.9105e^(0.0106sand)/1.2984(r^(2)=0.97,Pments using artificial saline soils with different textures(n=6,sand content=10%-65%)and salinity levels(n=7,salinity=1-24 dS m^(-1)).model performance was validated using an independent dataset and demonstrated that EC_(e) prediction using the developed model is more suitable for highly saline soils than for low saline *** feasibility of the regression model should be tested at other *** soil factors affecting EC conversion factor also need to be explored to revise and improve the model through further studies.

关键词： coastal saline soils electrical conductivity prediction reclaimed tideland regression model sand content saturation percentage soil salinity

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Endovascular treatment of a ruptured pseudoaneurysm of the internal carotid artery in a patient with nasopharyngeal cancer:A case report

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World Journal of Clinical Cases 2022年第25期10卷 9121-9126页

作者： Jung-Soo park Hyoung Gyu Jang Department of Neurosurgery Jeonbuk National University Medical School and HospitalJeonju 54907South Korea

BACKGROUND Radiation therapy(RT)for nasopharyngeal cancer can cause several *** rare cases,an internal carotid artery pseudoaneurysm can occur,which can be *** report the experience of a nasopharyngeal cancer patient who underwent radiation therapy and subsequently developed a fatal pseudoaneurysm of the petrous internal carotid *** SUmmARY A 39-year-old man was diagnosed with nasopharyngeal cancer 2 years ago(American Joint Committee on Cancer Stage T3N2m0)and received concurrent chemoradiation *** subsequently relapsed and received *** week after the 4th cycle of chemotherapy,he was admitted to the emergency room of our hospital because of massive epistaxis accompanied by a headache.A pseudoaneurysm of the petrous internal carotid artery was confirmed by digital subtraction angiography(DSA).Stent-assisted endovascular coil embolization was performed and complete occlusion was *** pseudoaneurysm was observed on DSA after coil embolization;however,intermittent epistaxis was maintained even after coil *** seven days,a diagnostic laryngoscopy was *** bleeding occurred after aspiration of the blood clot during the laryngoscopy and the patient died of hypovolemic *** this case,epistaxis may have been a sign of pseudoaneurysm;therefore,treatment such as embolization should be performed promptly,and careful management should be undertaken after *** This case highlights a rare,serious complication of RT in nasopharyngeal cancer and how it should be recognized and treated.

关键词： Pseudoaneurysm Nasopharyngeal cancer Radiation therapy Epistaxis Carotid artery pseudoaneurysm Case report

采用动态磁敏感对比增强技术测量氧合和微血管通过时间异质性来预测胶质母细胞瘤治疗后的假性进展

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国际医学放射学杂志 2024年第4期 497-497页

作者： J.E.park H.S.Kim N.Y.Kim R.Borra K.mouridsen m.B.Hansen 胡佳圆

摘要目的评估mR动态磁敏感对比（DSC）灌注加权成像（PWI）的肿瘤微血管和氧代谢信息对脑血容量（CBV）鉴别胶质母细胞瘤治疗后的假性进展和真性进展（TP）的附加价

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Liquid-metal micro-networks with strain-induced conductivity for soft electronics and robotic skin

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npj Flexible Electronics 2022年第1期6卷 799-808页

作者： Yeongmin park Jaewoong Jung Younghoon Lee Dongwoo Lee Joost J.Vlassak Yong-Lae park Department of mechanical Engineering Institute of Advanced Machines and DesignInstitute of Engineering ResearchSeoul National UniversitySeoul 08826Korea Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology(MIT)CambridgeMA 02139USA School of mechanical Engineering Sungkyunkwan UniversitySuwon 16419Korea John A.Paulson School of Engineering and Applied Sciences Harvard UniversityCambridgeMA 02138USA

Thin-film devices made of room-temperature liquid metals(Lms)have contributed to the development of electronic skin for human-robot/machine interfaces but still have limitations,including degradations of performance and robustness under repeated *** this paper,we describe an interesting phenomenon of the formation of Lm microscale networks(LmmNs)and propose to use the LmmNs for fabricating thin-film conductors.A simple layer-by-layer(LBL)deposition process enables the growth of a hierarchical structure of Lm microdroplets that forms a conductive network(i.e.,LmmN)when *** strain-history behavior of LmmNs allows conductivity enhancement up to 2.37×10^(6) S m^(-1) in response to increased tensile *** adjusting the number of Lm layers in LBL deposition,the gauge factor(0.2≤GF≤1),the linearity,and the sheet resistance of LmmN films can be easily controlled,providing high potentials in various applications,including skin-mountable circuits,energy harvesters,and soft artificial skin.

关键词： strain networks conductivity

Replica higher-order topology of Hofstadter butterflies in twisted bilayer graphene

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npj Computational materials 2023年第1期9卷 783-791页

作者： Sun-Woo Kim Sunam Jeon moon Jip park Youngkuk Kim Department of Physics KAISTDaejeonRepublic of Korea Department of materials Science and metallurgy University of CambridgeCambridgeUK Department of Energy Science Sungkyunkwan UniversitySuwonRepublic of Korea Center for Theoretical Physics of Complex Systems Institute for Basic Science(IBS)DaejeonRepublic of Korea Department of Physics Hanyang UniversitySeoulRepublic of Korea Department of Physics Sungkyunkwan UniversitySuwonRepublic of Korea

The Hofstadter energy spectrum of twisted bilayer graphene(TBG)is found to have recursive higher-order topological *** demonstrate that higher-order topological insulator(HOTI)phases,characterized by localized corner states,occur as replicas of the original HOTIs to fulfill the self-similarity of the Hofstadter *** show the existence of exact flux translational symmetry in TBG at all commensurate *** on this result,we identify that the original HOTI phase at zero flux is re-entrant at a half-flux periodicity,where the effective twofold rotation is *** addition,numerous replicas of the original HOTIs are found for fluxes without protecting *** the original HOTIs,replica HOTIs feature both localized corner states and edge-localized real-space topological *** replica HOTIs originate from the different interaction scales,namely,intralayer and interlayer couplings,in *** topological aspect of Hofstadter butterflies revealed in our results highlights symmetry-protected topology in quantum fractals.

关键词： properties spectrum topological

Cell-type continuous electromagnetic radiation system generating millimeter waves for active denial system applications

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Defence Technology（防务技术） 2022年第10期18卷 1895-1913页

作者： Sun-Hong min Ohjoon Kwon matlabjon Sattorov Seontae Kim In-Keun Baek Seunghyuk park Ranjan Kumar Barik Anirban Bera Dongpyo Hong Seonmyeong Kim Bong Hwan Hong Chawon park Sukhwal ma minho Kim Kyo Chul Lee Yong Jin Lee Han Byul Kwon Young Joon Yoo Sang Yoon park Gun-Sik park Korea Institute of Radiological and medical Sciences(KIRAmS) Seoul01812South Korea Institute for Basic Science Center for Axion and Precision Physics ResearchDaejeon34141South Korea Center for THz-Driven Biomedical Systems Department of Physics and AstronomyCollege of Natural SciencesSeoul National UniversitySeoul08826South Korea Center for Applied Electromagnetic Research Advanced Institute of Convergence TechnologySuwonGyeonggi-do16229South Korea R&D Department Seoul-TeracomInc.Suwon16229South Korea mechatronics R&D Center Samsung Electronics Co.Ltd.Hwasung18448South Korea Hanwha Corporation Gumi730-030South Korea Council of Scientific and Industrial Research Central Electronics Engineering Research InstitutePilani333031India Home Economics Education/Biosystems and Biomedical Sciences Korea UniversitySeoul02841South Korea Current affiliation of Seontae Kim:Young IN ACE 1 F60Anyangcheondong-roDongan-guAnyang-siGyeonggi-do14042South Korea.

The cell-type continuous electromagnetic radiation system is a demonstration device capable of generating high-power millimeter electromagnetic waves of a specific wavelength and observing their effects on living *** irradiates a biological sample placed in a 30×30×50 cm^(3)cell with electromagnetic waves in the 3.15-mm-wavelength region(with an output of≥1 W)and analyzes the temperature change of the sample.A vacuum electronic device-based coupled-cavity backward-wave oscillator converts the electron energy of the electron beam into radiofrequency(RF)energy and radiates it to the target through an antenna,increasing the temperature through the absorption of RF energy in the *** system causes pain and ultimately reduces combat power.A cell-type continuous electromagnetic radiation system consisting of four parts—an electromagnetic-wave generator,a highvoltage power supply,a test cell,and a system controller—generates an RF signal of≥1 W in a continuous waveform at a 95-GHz center frequency,as well as a chemical solution with a dielectric constant similar to that of the skin of a living *** increase of 5°C lasting approximately 10 s was confirmed through an experiment.

关键词： millimeter waves Terahertz waves Coupled-cavity backward wave oscillator(CCBWO) Cell-type continuous electromagnetic radiation Active denial system(ADS) Directed-energy weapon(DEW)

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Lubricant skin on diverse biomaterials with complex shapes via polydopamine-mediated surface functionalization for biomedical applications

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Bioactive materials 2023年第7期25卷 555-568页

作者： Kijun park Seunghoi Kim Yejin Jo Jae park Inwoo Kim Sooyoung Hwang Yeontaek Lee So Yeon Kim Jungmok Seo School of Electronic and Electronic Engineering Yonsei UniversitySeoul03722Republic of Korea Center for Biomaterials Biomedical Research InstituteKorea Institute of Science and TechnologiesSeoul02792Republic of Korea Center for Theragnosis Biomedical Research InstituteKorea Institute of Science and TechnologiesSeoul02792Republic of Korea

Implantable biomedical devices require an anti-biofouling,mechanically robust,low friction surface for a prolonged lifespan and improved ***,there exist no methods that could provide uniform and effective coatings for medical devices with complex shapes and materials to prevent immune-related side effects and thrombosis when they encounter biological ***,we report a lubricant skin(L-skin),a coating method based on the application of thin layers of bio-adhesive and lubricant-swellable perfluoropolymer that impart anti-biofouling,frictionless,robust,and heat-mediated self-healing *** demonstrate biocompatible,mechanically robust,and sterilization-safe L-skin in applications of bioprinting,microfluidics,catheter,and long and narrow medical *** envision that diverse applications of L-skin improve device longevity,as well as anti-biofouling attributes in biomedical devices with complex shapes and material compositions.

关键词： Anti-biofouling Lubricant-infused Biomedical applications Biomaterials Biointerface

基于双能CT深度学习预测取栓术后的脑出血转化

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国际医学放射学杂志 2024年第4期 502-502页

作者： J.Heo Y.Yoon H.J.Han J.J.Kim K.Y.park B.m.Kim 常嫣格

摘要目的利用双能CT开发和验证一个深度学习模型，预测血管内取栓术后的脑出血转化。方法该项基于急性缺血性卒中前瞻性登记的回顾性研究，纳入2019年5月—

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