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Fast source mask co-optimization method for high-NA EUV lithography

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Opto-Electronic Advances 2024年第4期7卷 44-54页

作者： Ziqi li lisong Dong Xu Ma Yayi wei EDA Center Institute of Microelectronics of Chinese Academy of SciencesBeijing 100029China Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China School of Optics and PhotonicsBeijing Institute of TechnologyBeijing 100081China University of Chinese Academy of Sciences Beijing 100049China Guangdong Greater Bay Area Applied Research Institute of Integrated Circuit and Systems Guangzhou 510700China

Extreme ultraviolet(EUV)lithography with high numerical aperture(NA)is a future technology to manufacture the integrated circuit in sub-nanometer ***,source mask co-optimization(SMO)is an extensively used approach for advanced lithography process beyond 28 nm technology *** work proposes a novel SMO method to improve the image fidelity of high-NA EUV lithography system.A fast high-NA EUV lithography imaging model is established first,which includes the effects of mask three-dimensional structure and anamorphic ***,this paper develops an efficient SMO method that combines the gradient-based mask optimization algorithm and the compressivesensing-based source optimization algorithm.A mask rule check(MRC)process is further proposed to simplify the optimized mask *** illustrate that the proposed SMO method can significantly reduce the lithography patterning error,and maintain high computational efficiency.

关键词： computational lithography high-NA EUV lithography source-mask co-optimization lithography imaging model

Phase field modeling of ferroelastic variant switching in yttria-stabilized t'zirconia with strain gradient elasticity and interface tension

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Science China(Technological Sciences) 2024年第5期67卷 1443-1457页

作者： ZHOU QianQian wei YueGuang ZHOU YiChun YANG li College of Engineering BIC-ESATPeking UniversityBeijing100871China School of Advanced Materials and Nanotechnology Xidian UniversityXi’an710126China Frontier Research Center of Thin Films and Coatings for Device Applications Academy of Advanced Interdisciplinary ResearchXidian UniversityXi’an710126China

The 6–8 wt%yttria-stabilized zirconia with a tetragonal structure(t’-YSZ)is extensively employed in thermal barrier *** exceptional fracture toughness of t’-YSZ can be attributed to its distinctive ferroelastic toughening *** and interface tension play a critical role in ferroelastic variant switching at the micro-and *** paper presents an original thermodynamically consistent phase field(PF)theory for analyzing ferroelastic variant switching at the micro-and nano-scale of t’-*** theory incorporates strain gradient elasticity using higher-order elastic energy and interface tension tensor via geometric nonlinearity to represent biaxial tension resulting from interface ***,a mixed-type formulation is employed to implement the higher-order theory through the finite element *** an interface in equilibrium,the effects of strain gradient elasticity result in a more uniform distribution of stresses,whereas the presence of interface tension tensor significantly amplifies the stress magnitude at the *** introduction of an interface tension tensor increases the maximum value of stress at the interface by a factor of 4 to *** nucleation and evolution of variants at a pre-existing crack tip in a mono-phase t’-YSZ have also been *** strain gradient elasticity is capable of capturing the size effect of ferroelastic variant switching associated with microstructures in ***,when the grain size approaches that of the specimen,the critical load required for variant switching at the crack tip increases,resulting in greater dissipation of elastic energy during ferroelastic variant ***,the interface tension accelerates the evolution of *** presented framework exhibits significant potential in modeling ferroelastic variant switching at the micro-and nano-scale.

关键词： thermodynamics strain gradient elasticity interface tension phase field method ferroelastic variant switching

Customer Joining Behavior and Regulation Strategy in Visible Multi-Server Queues with Synchronous Vacations of Partial Servers

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Journal of Systems Science & Complexity 2024年第3期37卷 1209-1232页

作者： SUN wei WANG Hao XIE Xumeng li Shiyong School of Economics and Management Yanshan UniversityQinhuangdao 066004China

This paper studies customer joining behavior and system regulation strategy in nonexhaustive visible M/M/m queues with synchronous vacations of a part of the *** this part of the servers are idle,they take multiple vacations simultaneously(vacation period).Until there are customers waiting in the queue,they are reactivated and all servers are busy or idle(busy period).The authors call this part of the servers as“partial servers”.In view of the fully visible queue and the almost visible queue,the authors obtain customers’equilibrium joining threshold strategies and their socially optimal joining threshold strategies,respectively,and observe that customer joining behavior in equilibrium generally makes the system overcrowded,which makes the equilibrium social welfare lower than the optimal social *** regulation,interestingly,for optimizing social welfare,the system manager hopes not only customers arriving in vacation period pay attention to the number of partial servers,but also customers arriving in busy period should care about it rather than ***,arranging more servers for vacation does not necessarily lead to the decrease of social welfare on condition that the number of partial servers is close to *** for the information advantage of the fully visible case,it is not obvious for increasing social welfare and even unfavorable to servers’profit unless the number of partial servers is big ***,given the different composition of social welfare,there exists the optimal number of partial servers and the optimal arrival rate of customers for maximizing social welfare.

关键词： Customer behavior non-exhaustive service partial servers regulation strategy synchronous vacations visible queue

Force-position collaborative optimization of rope-driven snake manipulator for capturing non-cooperative space targets

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Chinese Journal of Aeronautics 2024年第9期37卷 369-384页

作者： Xiaofeng li Jian TIAN Cheng wei Xibin CAO School of Astronautics Harbin Institute of TechnologyHarbin 150001China Beijing Instiuteof Spacecraft System Engineering China Academy of Space TechnolgyBeijing 100094Chia

With the rapid development of space activities,non-cooperative space targets increase swiftly,such as failed satellites and upper stages,threating normal spacecrafts *** there are some problems in the capture process,such as excessive collision and fast tumbling of targets,manipulator with redundant Degrees of Freedom(DOFs)can be used to improve the compliance and therefore solve these *** Rope-Driven Snake Manipulator(RDSM)is a combina-tion of hyper-redundant DOFs and better compliance,and therefore it is suitable for capturing *** this paper,a snake manipulator mechanism is designed,and the complete kinematic model and system dynamic model considering RDSM,target and contact is ***,to obtain the configuration of joint with hyper-redundant DOFs,an improved motion dexterity index is pro-posed as the joint motion optimization ***,the force-position collaborative optimization index is designed to adjust active stiffness,and the impedance control method based on the modified index is used to capture the space ***,the proposed force-position collaborative opti-mization method is verified by virtual prototype *** results demonstrate that based on the proposed method,the collision force is reduced by about 25%compared to normal impe-dance control,showing higher safety.

关键词： Capturing non-cooperative spacetargets Rope-driven snakemanipu-lator Force-position collaborative optimization Redundant degrees of free-dom Active stiffness adjustment

Coupled simulation of fluid-particle interaction for large complex granules:A resolved CFD-DEM method for modelling the airflow in a vertical fixed bed of irregular sinter particles

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Particuology 2024年第7期90卷 292-306页

作者： Chengzhi li Yu Zhang Jiahe Shen wei Zhang The State Key Laboratory of Refractories and Metallurgy Wuhan University of Science and TechnologyWuhan 430081China Key Laboratory for Ferrous Metallurgy and Resources Utilization of Ministry of Education Wuhan University of Science and TechnologyWuhan 430081China School of Transportation and Logistics Engineering Wuhan University of TechnologyWuhan 430063China Centre for Bulk Solids and Particulate Technologies The University of NewcastleCallaghan NSW 2308Australia

A resolved CFD-DEM method is proposed to simulate the fluid-particle interaction for large complex *** airflow in a vertical sinter fixed bed is numerically studied using this *** multi-sphere clumped method is used to create irregular sinter particles in *** immersed boundary method and dynamic cell refinement are applied to describe the fluid flow around particles with higher resolution,by which the fluid-particle interaction can be simulated more *** simulation results presented the packing voidage distributions and the airflow fields in the sinter beds of different single and mixed particle size *** bed pressure drops were simulated and the results were compared with the corresponding experimental *** good agreement indicated that the proposed resolved CFD-DEM method is an effective tool to model the fluid-particle interaction for irregular large granules in the gas-solid multi-phase systems.

关键词： Resolved CFD-DEM method Irregular sinter particles Multi-sphere clumped method Immersed boundary method Dynamic cell refinement

Flow Field Simulation and Parameter Analysis of Hydraulic Unbalanced Bionic Self-recovery Actuator for Rotary Equipment

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Journal of Bionic Engineering 2024年第1期21卷 325-343页

作者： wei li Xin Pan Dehong Ge Jinji Gao Key Laboratory of Engine Health Monitoring-Control and Networking of Ministry of Education Beijing University of Chemical TechnologyBeijing 100029China Beijing Key Laboratory of High-End Mechanical Equipment Health Monitoring and Self-Recovery Beijing University of Chemical TechnologyBeijing 100029China

The rotor is the most important component of rotating machinery,and the vibration produced by its mass unbalance has a serious influence on the secure and steady operation of the machine,so an effective online suppression technology is urgently needed.A new hydraulic unbalanced bionic self-recovery system is introduced,imitating the way of manually repairing faulty *** accomplish the effect of actuator mass redistribution,the technology employs pressurized air to drive the quantitative transfer of liquid in the reservoir cavity at opposite *** can complete the online adjustment of the equipment's balancing state and suppress the unbalanced vibration of equipment in real time,which gives the equipment the ability to maintain an autonomous health state and improve equipment *** composition and working principle of the system are introduced in detail,and the key performance parameters,such as the minimum running speed and the balancing liquid transfer speed,are analyzed *** fluid-solid coupling model of the actuator was established,and the two-phase flow from inside the hydraulic unbalanced bionic self-recovery actuator was simulated under multiple working conditions and the performance parameters were quantitatively analyzed.A balancing simulation test bed was built,and its effectiveness was verified by performance parameter tests and unbalanced bionic self-recovery *** experimental results show that the mass distribution adjustment of the balancing disk can be achieved using different viscosity balancing liquid,and the response of liquid viscosity 10 cSt is faster than that of liquid viscosity 100 cSt in the process of balancing liquid transfer,and the time is reduced by more than 75%;the system can reduce the simulated rotor amplitude from 18.3μm to 10.6μm online in real time,which provides technical support for the subsequent development of a new generation of bionic intelligent equipment.

关键词： Engineering self-recovery-Bionics Simulation analysis Self-recovery regulation

Robust Interval State Estimation for Distribution Systems Considering Pseudo-measurement Interval Prediction

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Journal of Modern Power Systems and Clean Energy 2024年第1期12卷 179-188页

作者： Xu Zhang wei Yan Meiqing Huo Hui li the School of Electrical Engineering Chongqing UniversityChongqing 400044China

Interval state estimation(ISE)can estimate state intervals of power systems according to confidence intervals of predicted pseudo-measurements,thereby analyzing the impact of uncertain pseudo-measurements on ***,predicted pseudo-measurements have prediction errors,and their confidence intervals do not necessarily contain the truth values,leading to estimation biases of the *** solve this problem,this paper proposes a pseudo-measurement interval prediction framework based on the Gaussian process regression(GPR)model,thereby improving the prediction accuracy of pseudo-measurement confidence ***,a weight assignment strategy for improving the robustness of weighted least squares(WLS)ISE is *** strategy quantifies the deviation between the pseudo-measurement intervals and their estimated intervals and assigns smaller weights to the pseudo-measurement intervals with larger deviations,thereby improving the estimation accuracy and robustness of the *** paper adopts the data from the supervisory control and data acquisition(SCADA)system of the New York Independent System Operator(NYISO).It verifies the advantages of the GPR method for pseudo-measurement interval prediction by comparing it with the quantile regression and neural network *** addition,this paper demonstrates the effectiveness of the proposed weight assignment strategy through the IEEE 14-bus ***,the differences in the estimation accuracy and the bad data identification between the robust interval state estimation and deterministic state estimation are discussed.

关键词： Interval state estimation interval analysis pseudo-measurement Gaussian process regression(GPR)

Effect of oxide inclusions on MnS precipitates and tensile mechanical property of high-strength low-alloy steel

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Journal of Iron and Steel Research International 2024年第5期31卷 1210-1220页

作者： Xiao-yong Gao Hong wei li-feng Zhang School of Mechanical Engineering Yanshan UniversityQinhuangdao066004HebeiChina School of Materials Science and Engineering Yanshan UniversityQinhuangdao066004HebeiChina School of Mechanical and Materials Engineering North China University of TechnologyBeijing100144China

The key role of oxide inclusions on the microstructure and mechanical property of a high-strength low-alloy steel was *** field emission scanning electron microscope equipped with energy-dispersive spectrometry was used to characterize MnS *** inclusions play an important role in the shape control of MnS *** oxides fovored to decrease the size and the aspect ratio of MnS *** less oxide inclusions in the steel,approximately over 16.7%MnS precipitates were with aspect ratio a>5 and pure MnS precipitates accounted for 75.9%in ***,with more oxide inclusions in the steel,only 7.4%MnS precipitates were with a>5 and pure MnS precipitates accounted for 60.1%in *** of MnS by oxide inclusions improved the strength and inhibited the *** oxide inclusions in the steel increased the yield strength and tensile strength of the steel in both longitudinal and transverse directions,and lowered the anisotropy of the mechanical property.

关键词： High-strength low-alloy steel MnS Oxide inclusion Mechanical property Anisotropy

Distributed user pairing and effective computation offloading in aerial edge networks

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Chinese Journal of Aeronautics 2024年第4期37卷 378-390页

作者： wei liANG Shuhui WEN lixin li Jingjing CUI School of Electronics and Information Northwestern Polytechnical UniversityXi’an CN710072China The State Key Laboratory of Integrated Services Networks Xidian UniversityXi’an CN710126China School of Electronics and Computer Science University of SouthamptonSouthampton SO167NSUK

Future Sixth-Generation (6G) mobile communication networks extremely require the global connectivity and the ground Base Stations (BSs) are difficult to develop in some specific areas,such as mountainous ***,the aerial networks are the key framework for the future communications,in which the aerial vehicle could act as the access ***,Mobile Edge Computing (MEC) is also essential to enhance the data processing capabilities of aerial *** this paper,we study a comprehensive communication-computation resource management problem for jointly optimizing user pairing,power and time allocation in the MEC aided Cognitive Radio (CR) aerial networks,namely CR-MEC aerial ***,this multilevel optimization problem could be decomposed into the user pairing and power allocation as well as time allocation *** the conceived CR-MEC aerial networks,we propose a User Pairing and Computation Offloading Management Algorithm (UPCOMA) based on three-sided matching theory,aiming to minimize the system’s energy *** the first step of UPCOMA,multiple Primary Users (PUs) and Cognitive Users (CUs) on the ground negotiate to each other with the suitable power allocation coefficients and construct the stable user ***,the stable user pairs would match to a high altitude platform who act as the base station,which is for appropriately allocating Transmission Time Slots (TSs) at the second step of ***,a hybrid offloading mode is proposed in our conceived networks in order to support ground users to offload their tasks adaptively according to their individual ***,the simulation results reveal that the relative performance of UPCOMA is close to that of the Brute-Force Search Algorithm (BFSA) with low ***,the hybrid offloading mode with less energy consumption supports much more ground user pairs to offload tasks compared to the binary mode.

关键词： Aerial edge computing Binary offloading Cognitive radio Hybrid offloading Resource management