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Hybrid microsystem with functionalized silicon substrate and PDMS sample operating microchannel: A reconfigurable microfluidics scheme

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Science China(Technological Sciences) 2010年第8期53卷 2272-2277页

作者： lei yinhua 1 ,xie fei 1 ,{{2.,{2.,wang haibin 3.&li zhihong 1,2.1 institute of microelectronics,peking university,Beijing 100871,China {2.ational Key Laboratory of Science and Technology on Micro/Nano Fabrication,Beijing 100871,China 3.No.3.{2.Hospital,Beijing 10003.,China 1. institute of microelectronics Peking University Beijing 100871 China2. National Key Laboratory of Science and Technology on Micro/Nano Fabrication Beijing 100871 China3. No. 302 Hospital Beijing 100039 China

A hybrid microsystem with separately functioned temperature controlling substrate and sample operating fluidic microchannel was developed to demonstrate a reconfigurable microfluidics *** temperature controlling substrate integrated a micro heater and a temperature sensor by using traditional silicon-based micromechanical system(MEMS)technique,which guaranteed high performance and robust reliability for repeatable *** sample operating fluidic microchannel was prepared by poly-(dimethylsiloxane) (PDMS)based soft lithography technique,which made it cheap enough for disposable *** PDMS microchannel chip was attached to the temperature controlling substrate for reconfigurable thermal applications.A thin PDMS film was used to seal the microchannel and bridge the functionalized substrate and the sample inside the channel,which facilitated heat transferring and prevented sample contaminating the temperature controlling *** by a one dimensional thermal resistance model,the thin PDMS film was important for the present reconfiguration *** performance of this hybrid microsystem was examined,and the experimental results demonstrated that the chip system could work stably over hours with temperature variation less than *** PDMS microchannel chips were tested on one heating substrate sequentially with a maximum intra-chip temperature difference of *** extracted from serum of a chronic hepatitis B virus(HBV)patient was amplified by this hybrid microsystem and the gel electrophoresis result indicated that the present reconfigurable microfluidic scheme worked successfully.

关键词： reconfigurable microfluidics hybrid microdevice thin PDMS film

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Parylene-MEMS technique-based flexible electronics

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Science China(Information Sciences) 2018年第6期61卷 110-118页

作者： Xiao DONG Meixuan ZHANG yinhua lei {{2. {3. Yufeng JIN wei {2. institute of microelectronics Peking University peking university Shenzhen Graduate School

This paper reports a novel fabrication strategy for flexible electronics based on the paryleneMEMS(micro-electromechanical system) technique. A set of parylene-filled trenches is used to mechanically connect silicon-based functional units and realize a flexible 4×6 temperature controlling array as a preliminary demonstration. The trench-filling performance of the parylene deposition is carefully studied, and an optimized process is established to minimize the keyhole inside the parylene-filled trench. The effect of trench width on the flexibility and bendability of the prepared flexible electronics devices is analyzed by finite element modeling. Performances of the thermal/electrical isolation and the mechanical connection of the prepared parylene-filled trenches have been tested. The experimental results indicate that the highest thermal isolation efficiency is approximately 72.5% with the 10 paralleled, 7 μm wide and 50 μm deep parylene-filled trenches. The leakage current of the 10 paralleled, 5 μm wide and 100 μm deep parylene-filled trenches is less than 2.p A under a voltage of 100 V. Besides, these parylene-filled trenches acting as the flexible linkage of connected silicon-based functional units exhibit high connection performance without rupture when the loading pressure is under 2.0 k Pa. Due to the powerful silicon microfabrication capability and excellent compatibility of the parylene-MEMS technique, the present flexible electronics strategy holds a promising potential for applications in various areas.

关键词： flexible electronics parylene MEMS trench filling temperature controlling array

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