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Amorphous FeZr metal for multi-functional sensor in electronic skin

npj Flexible Electronics 2019年第1期3卷 64-71页

作者： Minhyun Jung Eunha Lee Dongseuk kim kyungkwan kim Changjin Yun Hyangsook Lee Heegoo kim Kungwon Rhie Sanghun Jeon Department of Electrical Engineering Korea Advanced Institute of Science and TechnologyDaehak-Ro 291Yuseong-GuDaejeonRepublic of Korea Analytical Engineering Group Platform Technology LaboratorySamsung Advanced Institue of TechnologySuwon 16678Republic of Korea Spin Convergence Research Team Korea Research Institute of Standards and ScienceDaejeon 34113Republic of Korea Department of Applied Physics Korea UniversitySejong 30019Republic of Korea

The composition of an amorphous metal,which is well known for having no slip plane or slip direction,can be tailored for enhanced strength and a lower Young’s modulus under mechanical *** crystalline metals,elastic amorphous metals can,in principle,be used as a flexible electrode in soft,wearable electronics.A metal with a lattice structure absorbs external energy,which causes structural deformations,while an amorphous metal does not absorb ***,amorphous metals have excellent mechanical properties that can overcome the limitations of crystalline ***,voids inside such metals are easily formed according to Thornton’s model,which results in the formation of mesoporous(10–50 nm)rods due to the spatial separation of metal *** eliminated the porosity in amorphous metals by controlling the kinetic energy of sputtered metal atoms and *** Fe_(33)Zr_(67) has an amorphous structure with a strength of 2.88 GPa and a Young’s modulus of 76.6 *** this amorphous metal,we fabricated a stretchable and multi-functional sensor for electronic skin that enables the detection of pressure,temperature and light and also serves as a *** this work,we demonstrate the feasibility of the amorphous metal Fe33Zr67 in soft electronics for use in various industrial applications.

关键词： amorphous metals electronic

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