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Long range implantation by MEVVA metal ion source

nuclear science and Techniques 2001年第1期12卷 16-20页

作者： ZHANG Tong-He WU Yu-Guang MA Fu-Rong LIANG Hong (key laboratory in university for Radiation {3. Technology and material modification, institute of low energy nuclear physics, beijing normal university beijing Radiation Center, beijing 100875) 北京师范大学低能核物理所教育部射线束技术与材料改性开放实验室北京 100875

Metal vapor vacuum arc (MEVVA) source ion implantation is a new technology used for achieving long range ion *** is very important for research and application of the ion beammodification of materials. The results showthat the implanted atom diffusion coefficient increases in Mo implanted Al with high ion flux andhigh dose. The implanted depth is 3.1.6 times greater than that ofthe corresponding ion range. The ionspecies, doses and ion fluxes play an important part in the long-range implantation. Especially,thermal atom chemistry have specific effect on the long-range implantation during high ion fluximplantation at transient high target temperature.

关键词： MEVVA离子源离子移植扩散技术

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Mo SILTCIDE SYNTHISIS BY DUAL ION beam DEPOSITION

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Acta Metallurgica Sinica(English Letters) 2002年第2期15卷 187-190页

作者： T.H. Zhang, Z.Z. Yi, X. Y. Wu, S.J. Zhang, Y. G. Wu, X. Zhang, H.X. Zhang, A.D. Liu and X.J. Zhang key laboratory for Radiation beam Technology and {3. modification, institute of low energy nuclear physics, beijing normal university, beijing Radiatio

Mo silicides Mo_5Si_3.with high quality were prepared using ion beamdeposition equipment with two Filter Metal Vacuum Are Deposition (FMEVAD). When the number ofalternant deposition times was 198, total thickness of the coating is 40nm. The coatings withdroplet free can be readily obtained, so the surface is smooth. TEM observation shows that Mo and Sialternant deposition coating is compact structure. The fine Mo silicide grains densely distributedin the coating. The coating adherence on silicon is excellent.

关键词： Mo silicide ion alternant deposition silicon

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Composition and structure of ceramic coatings prepared on pure titanium by alternating-current microarc oxidation

Composition and structure of ceramic coatings prepared on pu...

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International Symposium of Young Scholars on Mechanics and material engineering for science and Experiments

作者： Wenbin Xue11^ Chao Wang1 U] Ruyi ChenI1>2] Zhiwei Deng Yongchun Lai key laboratory for Radiation beam Technology and {3.s modification institute of low energy nuclear physics beijing normal university) beijing 100875 china m beijing Radiation Center beijing 100875 china key laboratory for Radiation beam Technology and {3.s modification Institute of Low Energy Nuclear Physics Beijing Normal University Beijing 100875 China

ISBN: (纸本)1880132796

＜正＞ A ceramic oxide coating of 3.μm was prepared on TA2 pure titanium by alternating-current microarc oxidation in aluminate solution. Its microstructure and phase component were characterized by scanning electron microscopy, X-ray diffractometry, Raman spectroscopy. The Al, Ti, O concentration profiles across the coating were determined by energy dispersive spectroscope. The coating contains two layers, an outer layer and an internal layer. The outer layer is composed of a large amount of TiAl2O5 and a little rutile type TiO2 compounds. But the rutile content in the inner layer is much higher than in the outer layer while the TiAl2O5 content decreases obviously in the inner layer. All of these oxides derive from a rapid solidification of the local molten coating in microarc discharge zone.

关键词： Microarc oxidation pure titanium phase structure ceramic coating

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