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Journal of Thermal Science 2004年第3期13卷 283-288页

作者： kazuyoshi matsuzaki Hideki OHBA Mizue MUNEKATA Mechanical Engineering and Materials Science Kumamoto University 2-39-1 Kurokami Kumamoto 860-8555 JapanMechanical Engineering and Materials Science Kumamoto University 2-39-1 Kurokami Kumamoto 860-8555 JapanMechanical Engineering and Materials Science Kumamoto University 2-39-1 Kurokami Kumamoto 860-8555 Japan

In order to develop the practical approximation models suitable to flow fields at low Mach number with large temperature difference, the influence of difference in approximation models on numerical solutions was investigated by solving the natural convection in the 3-D enclosures with vertical sidewalls differentially heated and the heated bottom wall using 3 approximation models, that is Boussinesq approximation, low Mach Number approximation and approximation model proposed by Mlaouah. As results of the simulation, the effects of the differences in the three approximation models on the numerical solutions become clear.

关键词： thermal convection approximation model numerical analysis 3-D cavity.

A Study on Viscoelastic Fluid Flow in a Square-Section 90-Degrees Bend

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Journal of Thermal Science 2003年第4期12卷 337-343页

作者： Mizue Munekata kazuyoshi matsuzaki Hideki Ohba Dept. of Mechanical Engineering and Materials Science Kumamoto University Kurokami 2-39-1 Kumamoto JapanDept. of Mechanical Engineering and Materials Science Kumamoto University Kurokami 2-39-1 Kumamoto JapanDept. of Mechanical Engineering and Materials Science Kumamoto University Kurokami 2-39-1 Kumamoto Japan

It is well known that the drag-reducing effect is obtained in a surfactant solution flow in a straight pipe. We investigate about a viscoelastic fluid flow such as a surfactant solution flow in a square-section 90° bend. In the experimental study, drag-reducing effect and velocity field in a surfactant solution flow are investigated by measurements of wall pressure loss and LDV measurements. For the numerical method, LES with FENE-P model is used in the viscoelastic fluid flow in the bend. The flow characteristics of viscoelastic fluid are discussed compared with that of a Newtonian fluid.

关键词： non-Newtonian flow viscoelastic fluid drag reduction bend flow LES LDV.

Effect of Non-Newtonian Viscosity for Surfactant Solutions on Vortex Characteristics in a Swirling Pipe Flow

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Journal of Thermal Science 2005年第4期14卷 357-361,356页

作者： Mizue MUNEKATA Hidefumi TAKAKI Hideki OHBA kazuyoshi matsuzaki Kumamoto University 2-39-1 KurokamiKumamoto 860-8555Japan Tokyo Electron LTD. 650 Mitsuzawa Hosaka-cho NirasakiYamanashi 407-0192Japan

Effects of non-Newtonian viscosity for surfactant solution on the vortex characteristics and drag-reducing rate in a swirling pipe flow are investigated by pressure drop measurements, velocity profile measurements and viscosity measurements. Non-Newtonian viscosity is represented by power-law model （t= kD^π）. Surfactant solution used has shear-thinning viscosity with n 〈 1.0. The swirling flow in this study has decay of swirl and vortex-type change from Rankin＇s combined vortex to forced vortex. It is shown that the effect of shear-thinning viscosity on the decay of swirl intensity is different by vortex category and the critical swirl number with the vortex-type change depends on shear-thinning viscosity.

关键词： swirling flow drag reduction surfactant solution non-Newtonian fluid vortex LDV.

Numerical Study on Particle Motions in Swirling Flows in a Cyclone Separator

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Journal of Thermal Science 2006年第2期15卷 181-185页

作者： kazuyoshi matsuzaki Hideaki USHIJIMA Mizue MUNEKATA Hideki OHBA Tokyo Electron LTD. 650 Mitsuzawa Hosaka-cho Nirasaki Yamanashi 407-0192 Japan Kumamoto University 2-39-1 Kurokami Kumamoto 860-8555 Japan

The purpose of this study is to establish the high-accurate prediction method of particle separation in a cyclone separator. Numerical simulation of the swirling flows in a cyclone separator is performed by using a large eddy simulation （LES） based on a Smagorinsky model. The validity of the simulation and the complicated flow characteristics are discussed by comparison with experimental results. Moreover, particle motions are treated by a Lagrangian method and are calculated with a one-way method. A performance for particle separation is predicted from the results of the particle tracing. As results of our investigation, the influences of the inserted height of the outlet pipe on the performance for particle separation of cyclone separator are shown.

关键词： cyclone separator swirling flow particle motion large eddy simulation

Relation between the Three-dimensional Flow Structure and Aerodynamic Sound Generated from Inclined Circular Cylinder

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Journal of Thermal Science 2004年第2期13卷 127-132页

作者： Mitsuru SHINGAI Yasutake HARAMOTO kazuyoshi matsuzaki Mizue MUNEKATA Hideki OHBA Dept. of Mechanical Engineering and Materials Science Kumamoto University Kurokami 2-39-1 Kumamoto 860-8555 Japan Mitsui Miike Machinery Co. LTD Asahi-machi 2-28 Ohmuta Fukuoka 836-8588 Japan

The major causes of the sound pressure level (SPL) variation due to the changes of the inclined angle of a circular cylinder and the aspect ratio (ratio of distance between endplates to cylinder diameter) were investigated. The velocity fluctuation of the wake and the surface pressure fluctuation of the cylinder were measured in a low noise wind tunnel to find the correlation length, coherent output power and Strouhal number. The results show that the changes of these values qualitatively correspond with the change of SPL. Flow visualization tests are performed to clarify the variation of wake in relation with inclined angle and aspect ratio. It is found that the spanwise structure of Karman’s vortex street is broken down by the upward flows generated around the bottom endplate, and the degree of the interference between the upward flow and Karman’s vortex street is smaller when the aspect ratio is larger.

关键词： aerodynamic sound correlation length coherent output power Strouhal number flow visualization.

Influences of the Exhaust Flow on the Boundary Layer Flow on the Wafer Surface in Spin Coating System

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Journal of Thermal Science 2005年第2期14卷 130-135页

作者： Seiichi KIMURA Mizue MUNEKATA Hiroaki KURISHIMA kazuyoshi matsuzaki Hideki OHBA Graduate School of Science and Technology Kumamoto University Mechanical Engineering and Materials Science Kumamoto UniversityTokyo Electron Kyushu LTDTokyo Electron AT LTDMechanical Engineering and Materials Science Kumamoto University

Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor become more sophisticated. Spin coating is usually used for spreading photoresist on a wafer surface. However, since rotating speed of the disk is very high in spin coating, the dropped resist scatters outward and reattaches to the film surface. So, the scattered resist is removed by the exhaust flow generated at the gap between the wafer edge and the catch cup. It is seriously concerned that the stripes called Ekman spiral vortices appears on the disk in the case of high rotating speed and the film thickness increases near the wafer edge in the case of low rotating speed, because it prevent the formation of uniform film. The purpose of this study is to make clear the generation mechanism of Ekman spiral vortices and the influence of exhaust flow on it Moreover the influence of the catch cup geometry on the wafer surface boundary layer flow is investigated.

关键词： rotating disk flow spin coating boundary layer flow hot-wire measurement

Effect of Catch Cup Geometry on 3D Boundary Layer Flow over the Wafer Surface in a Spin Coating

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Journal of Thermal Science 2008年第1期17卷 56-60页

作者： Mizue MUNEKATA Seiichi KIMURA Hiroaki KURISHIMA Jinsuke TANAKA Sohei YAMAMOTO Hiroyuki YOSHIKAWA kazuyoshi matsuzaki Hideki OHBA Department of Mechanical System Engineering 2-39-1 KurokamiKumamoto860-8555 Japan Assistant Professor Graduate School of Science and Technology Kumamoto University2-39-1 KurokamiKumamoto860-8555 Japan Tokyo Electron Kyushu LTD. 1-1 FukuharaKoushi-shiKumamoto861-1116 Japan Department of Mechanical System Engineering 2-39-1 KurokamiKumamoto860-8555 Japan Tokyo Electron LTD. 650 MitsuzawaHosaka-choNirasaki-shiYamanashi407-0192 Japan

Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor instruments become more sophisticated. Spin coating is usually used for spreading photoresist on a wafer surface. However, since rotating speed of the disk is very high in spin coating, the dropped photoresist scarers outward and reattaches on the film surface. A catch cup is set up outside the wafer in spin coating, and scattered photoresist mist is removed from the wafer edge by the exhaust flow generated at the gap between the wafer edge and the catch cup. In the dry process of a spin coating, it is a serious concern that the film thickness increases near the wafer edge in the case of low rotating speed. The purpose of this study is to make clear the effect of the catch cup geometry on the 3D boundary layer flow over the wafer surface and the drying rate of liquid film.

关键词： Rotating disk Spin coating Boundary layer flow Laser Doppler velocimeter Infrared camera

A Study on Reynolds Shear Stress Measurement by LDV

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Journal of Thermal Science 2001年第1期10卷 20-25页

作者： Mizue Munekata, Hideki Ohba, kazuyoshi matsuzaki (Department of Mechanical Engineering and Materials Science, Kumamoto University, 2-39-l, Kurokami, Kumamoto, 860-8555, Japan) Department of Mechanical Engineering and Materials Science Kumamoto University Kumamoto Japan

The measurement results by Laser Doppler Velocimetry (LDV) are compared with the direct numerical simulation result by Eggels et al.[1] for a cylindrical pipe flow. In the case of a pipe flow, the bias error for mean velocity is very small, because the local turbulent intensity is very small all over the pipe cross section. However the difference of the combination of u’ and v’ have considerable effects on Reynolds shear stress. From our investigation, it is found that the selection of coincidence time that is a necessary parameter for combination of u’ and v’ is more important in obtaining the accurate Reynolds shear stress. The suitable coincidence time is selectal for a jet flow and the effectiveness of coincident bine method or equal time interval method with coincidence data is shown.

关键词： LDV flow measurement Reynolds shear stress pipe flow jet flow

A Study on Swirling Flows in a Rectangular Channel(LDV Measurement, Flow Visualization and Large Eddy Simulation)

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Journal of Thermal Science 2001年第3期10卷 205-210页

作者： kazuyoshi matsuzaki ,Yasutake HARAMOTO ,Mizue MUNEKATA Hideki OHBA Dept. of Mechanical Engineering and Materials Science, Kumamoto University, Kurokami 2-39-1,Kumamoto, 860-8555, Japan Dept. of Mechanical Engineering and Materials Science Kumamoto University Kumamoto Japan

The purpose of this study is to make clear the behavior of swirling pipe flows with non-circular section. We have investigated experimentally and numerically the swirling flows in a rectangular channel with aspect ratio of 1.3, which is one of the typical pipe flow with non-circular section. In this paper, experimental apparatus with water circulation system is produced, and LDV measurement of the swirling flows is performed in order to clarify the mean velocities and turbulent quantity with higher accuracy. In addition, flow visualization for movement of vortex core region in the swirling flows is carried out using tracer method. Moreover, large eddy simulation (LES) of the flow field is made and compared with the experimental results. As results of these investigations, the behavior of the swirling flows in the rectangular channel is totally discussed.

关键词： swirling flow LDV measurement flow visualization large eddy simulation.