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对uLoop进行电压对比测试,及时有效对接触层进行在线缺陷分析

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集成电路应用 2006年第7期23卷 35-38页

作者： oliver D.Patterson Horatio Wildman AIexAche.IBM KevinT.Wu kla-tencor

本文介绍了在在线电压比较检测中可采用未接地链测试结构对诱发通孔和接触孔开路缺陷的机制进行监控和调试。它为如何利用在线电压对比检测技术的优点带来众多新的机会。同时,本文还提出一种有关开路链的 VC信号表现的解释理论,并进行... 详细信息

本文介绍了在在线电压比较检测中可采用未接地链测试结构对诱发通孔和接触孔开路缺陷的机制进行监控和调试。它为如何利用在线电压对比检测技术的优点带来众多新的机会。同时,本文还提出一种有关开路链的 VC信号表现的解释理论,并进行了实验验证。此外,本文还介绍了在 IBM 的300毫米代工厂中对这一现象的应用方法以及部分使用案例。

关键词：缺陷分析电压比较对比测试在线对接检测技术测试结构使用案例接触孔线电压

Tribonacci Partition Formulas Modulo m

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Acta Mathematica Sinica,English Series 2010年第3期26卷 465-476页

作者： Ji■í kla■KA Institute of Mathematics Brno University of Technology

Each Tribonacci sequence starting with an arbitrary triple of integers is periodic modulo m for any modulus m 〉 1. For a given m, the mapping between the set S of all m^3 triples of initial values and the set of their coresponding periods define a partition of the set S. In this paper we shall investigate some basic questions related to these partitions from the point of view of enumerative combinatorics.

关键词： Tribonacci sequence modular periodicity partition formulas

一个水青冈生态系统的土壤化学强度的研究(英文)

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植物生态学报 2001年第2期25卷 218-224页

作者： Jan KU kla 斯洛伐克科学院森林生态研究所

应用扁平溶度计考察了一个水青冈林 (Fageta paupera)的重力土壤溶液 ,该森林位于克里尼奇克·沃奇山脉 (斯洛伐克中部 )的生态实验站 (EES)。逐月采集土壤表层以及 10 cm和 15 cm土壤矿质层的土壤渗透液化学特征的样品。同时 ,采集各... 详细信息

应用扁平溶度计考察了一个水青冈林 (Fageta paupera)的重力土壤溶液 ,该森林位于克里尼奇克·沃奇山脉 (斯洛伐克中部 )的生态实验站 (EES)。逐月采集土壤表层以及 10 cm和 15 cm土壤矿质层的土壤渗透液化学特征的样品。同时 ,采集各层的土壤样品 ,并分析其中的 Ca,Mg,K和 Na等 4个化学元素 ,并测定 p H值和传导力。一年中矿质土层中阳离子积累量如下 :Ca分别为 2 .6 kg· hm- 2 和 14.2 kg· hm- 2 ,Mg分别为 2 .1kg· hm- 2 和1.1kg· hm- 2 ,K分别为 42 .1kg· hm- 2 和 2 .3 kg· hm- 2 ,Na分别为 5 .5 kg· hm- 2 和 2 .0 kg· hm- 2 。

关键词：土壤溶液土壤化学过程水青冈林生态系统

Stabilization of Clay Soil for the Durability of Structures: Case Study of the Soils of the Locality of Zalimé, Commune of Zogbodomey in the Republic of Benin

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Open Journal of Civil Engineering 2023年第1期13卷 103-112页

作者： Koffi Judicaël Agbelele Ernesto Cabral Houehanou Abalo P’kla Isaac Ai Dossou Houngan Comlan Aristide Higher Normal School of Technical Education (ENSET) National University of Sciences Technologies Engineering and Mathematics (UNSTIM) Abomey Benin Laboroty of Energy and Applied Mechanics (LEMA) Polytechnic School of Abomey-Calavi (EPAC) Abomey-Calavi Benin National Higher Institute of Industrial Technology (INSTI) National University of Science Technology Engineering and Mathematics (UNSTIM) Abomey Benin Polytechnic School of Lomé University of Lomé (UL) Lomé Togo Verechaguine AK Civil Engineering School (ESGC-VAK) Gbegamey Benin

Structures erected on swelling clay soils are subjected to several stresses which are at the origin of the premature deterioration of the infrastructures. The soils being supports for the works, the improvement of their weak characteristics with cotton fibers will not only increase the bearing capacities of these soils and the resolution of the environmental problem, by eliminating the CO2 produced by the burning of the stems after harvest. The objective of this study is to contribute to the improvement of the characteristics by cotton stalk powder of the swelling clay soils used as the foundation of the infrastructures in order to guarantee their durability. Identification and mechanical parameterization tests were carried out on raw soil samples taken at 1.5 meters deep and on samples improved with cotton stalk powder at different levels (3%, 6% and 10%). The results from the physical tests reveal that the soil studied is very plastic silt. As for the mechanical tests, it appears that by adding 3% cotton stalk powder to dry density which goes from 1.435 t/m3 compared to the control sample with a dry density of 1.50 t/m3;which reflects an improvement in the compaction characteristics of the soil studied. The dry densities are 1.445 t/m3 and 1.29 t/m3 for the samples improved with 6% and 10% cotton stalk powder.

关键词： Improvement Swelling Clay Cotton Stalk Powder Silt Dry Density

Study of Durability of Siliceous Sand Based Mortars in Togo, and of Binder of Plastic Bags of the Kind “Voltic”: Hydrocarbons’ Effect

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Journal of Minerals and Materials Characterization and Engineering 2018年第1期6卷 25-37页

作者： Kossi Bollanigni Amey Ouro-Djobo Samah Kouma Neglo Abalo P’kla Komi Mawutodzi Sounsah Komlan Amoussou A. Vianou Ecole Nationale Supérieure d’Ingénieurs (ENSI) Université de Lomé (UL) Lomé Togo Centre de la Construction et du Logement (CCL) Lomé Togo Equipe de Recherche et Développement (ERDF) FORMATEC Lomé Togo Laboratory of Study and Research Industrial Technologies University of Abomey Cotonou Benin

The present study aims at environmental protection through the use of plastic wastes in the production of mortar. The behavior of siliceous sand-based mortars from Togo and binders of plastic bags of the kind “voltic” is analyzed. Mortar samples from a mixture of siliceous sand and binder of plastic bags are prepared and subjected to physical and mechanical tests after immersion in the hydrocarbon from 0 hour to 504 hours. The result demonstrates that hydrocarbons have no influence on mechanical properties of mortars for an immersion time below 3 hours. Between 3 hours and 24 hours the presence of hydrocarbon increases their physical and mechanical properties. After 24 hours mortars generally lose the mechanical properties of around 8% to 24% due to the loss of viscosity and cohesiveness of the binder caused by the fuel. The behavior in the face of hydrocarbons shows that the material can be used in the surface of roads by carefully avoiding that hydrocarbons remain on the roads for a period of time beyond 24 hours.

关键词： Mortar Plastic Bags Siliceous Sand Hydrocarbon Physical and Mechanical Properties

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套刻成像技术中波长可调性的准确度优化

中国集成电路 2019年第3期28卷 48-53页

作者： SK现代有限公司 kla公司 SK现代有限公司 kla公司

随着半导体制造技术的发展和集成电路元件尺寸的缩减,套刻预算也相应被削减。由于测量系统自身的光学瑕疵,以及光束与测量目标的几何不对称之间的相互作用,套刻预算已经接近测量误差的范围。测量误差对元件良率的影响显著,因而不能将其... 详细信息

随着半导体制造技术的发展和集成电路元件尺寸的缩减,套刻预算也相应被削减。由于测量系统自身的光学瑕疵,以及光束与测量目标的几何不对称之间的相互作用,套刻预算已经接近测量误差的范围。测量误差对元件良率的影响显著,因而不能将其忽略。在本文中,我们研究了一种基于图像套刻(IBO)测量的新方法。其中采用了波长可调套刻图像量测技术,并优化准确度而非对比精确度,以及研究其对总目标性能的影响。我们展示了基于理论推导的新准确度指标,并将其识别测量准确度与CD-SEM套刻测量的效果进行了比较。本文包括理论论证、模拟结果以及测量数据,这些数据显示了可调性结合新的准确度指标可以提高准确度性能。

关键词：基于图像的套刻波长可调性量测套刻目标准确度 AIM

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对DRAM结构中影响良率的缺陷进行监控

集成电路应用 2006年第9期23卷 38-41页

作者： UweStreller CarlosMata QimondaAG MartinTuckermann kla-tencorGmbH Martin Tuckermann KLA-Tencor GmbH

使用新型高分辨率暗视场检测概念可以成功地对高深-宽比结构中的残余物和浅沟槽隔离氧化物孔洞进行监控。通过与精确工艺步骤的紧密结合,可实现对潜在误差的快速响应并缩短学习周期。

关键词：孔洞缺陷 DRAM 器件结构监控缺陷检测设计规则设计概念外形特征工艺控制特征尺寸

消除隐藏的良率杀手——电子束检查是铜逻辑和晶圆代工厂^1的最佳方法

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电子工业专用设备 2005年第F3期34卷 65-68,62页

作者： kla-tencorCorp DavidW．Price ToddHenry RobertFiordalice

监控和消除隐藏的电路缺陷已成为130nm和130nm以下器件的关键。这使得电子束检查正在广泛应用于开发、试生产和量产的监控过程。本文中我们将描述当前铜逻辑和晶圆代工厂电子束检查技术的执行情况，其中包括详细的案例研究，它说明了从... 详细信息

监控和消除隐藏的电路缺陷已成为130nm和130nm以下器件的关键。这使得电子束检查正在广泛应用于开发、试生产和量产的监控过程。本文中我们将描述当前铜逻辑和晶圆代工厂电子束检查技术的执行情况，其中包括详细的案例研究，它说明了从开发到量产过程中应用电子束检查技术的好处。我们也描述了过去克服通用工具障碍的方法。

关键词：晶圆代工厂量产执行情况障碍过程好处用电隐藏监控电子束

Identification of Empirical Models for the Prediction of the Plasticity Index:Case of the KhôDepression in South Benin

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材料科学与工程（中英文A版） 2022年第2期12卷 55-66页

作者： Koffi Judicaël AGBELELE Yvette Sèdjro TANKPINOU KIKI Abalo P’kla Gbênihon Céleste-Amour KENOUKON Normal Higher School of Technical Education(ENSET) National University of Science Technology Engineering and Mathematics(UNSTIM)BP 133AbomeyBenin Higher National Institute of Industrial Technology(INSTI) National University of Science Technology Engineering and Mathematics(UNSTIM)01 BP 551AbomeyBenin Laboratory of Energy and Applied Mechanics(LEMA) EPACUAC01 BP 2009 CotonouBenin Higher National Engineering School(ENSI)of the University of Lomé(UL) BP 1515 LoméTogo National School of Public Works(ENSTP) National University of Science Technology Engineering and Mathematics(UNSTIM)BP 2282AbomeyBenin

The plasticity index is an essential design parameter used as a standard input in fine-grained soil investigation *** is used to estimate the plasticity and physical properties of soils,and indirectly their strength *** index is determined from the Atterberg limit tests,starting from the limits of liquidity and ***,the realization of the test considered as basic and simple,is not so *** effects of the operator,the calibration of the apparatus and the environmental aspects during the tests affect the reliability and accuracy of the *** this paper,the objective is to overcome these difficulties by evaluating the plasticity index of clay and loam soils by considering only the values of the liquid *** samples were collected from 0 to 5 m depth in the localities of the Khôdepression in *** these samples,Atterberg limit tests were performed in the *** MATLAB’s Curve Fitting Toolbox,linear,exponential and power prediction models were *** results showed that there is indeed a good correlation between the plasticity index and the liquid limit of the *** the linear model,it was observed R2 equal to *** the exponential model,R2 is 0.98871 and for the power model 0.9802.A study of the residual plot validated the models found,as well as comparisons with well-known literature *** the equations obtained,it is now possible to study the plasticity of soils in the Khôdepression only from the liquid limit,without determining the plasticity limit.

关键词： Plasticity index liquidity limit prediction regression model Lama depression Khôdepression