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[Y(dbm)_(3)(H_(2)O)]:Synthesis,thermal behavior and spin-coating precursor for Y_(2)O_(3)layer formation

Journal of Rare Earths 2017年第12期35卷 1248-1254页

作者： Elaheh Pousaneh Andrea Preuβ Khaybar Assim julian noll Alexander Jakob Tobias Rüffer Heinrich Lang Technische Universitat Chemnitz Faculty of Natural SciencesInstitute of ChemistryInorganic Chemistry

The synthesis,structure and thermal behavior of [Y（dbm）3（H2 O）]（3）（dbm = 1,3-diphenyl-1,3-propandionate） and its use as a spin-coating precursor for Y2 O3 deposition is reported. Complex 3 was prepared by the reaction of [Y（NO3）3·6 H2 O]（1） with 3 equiv of Hdbm（2） in presence of NaOH. The molecular structure of 3 in the solid-state was determined by single X-ray crystal diffraction. Both C1 symmetric crystallographically independent species of 3 possess a YO7 coordination setup with minor deviation from an ideal capped octahedron coordination geometry（∧ enantiomer）. Complex 3 forms a1 D chain, due to intermolecular hydrogen bonds between the coordinated H2 O molecule and the 0 atom of the dbm ligand, respectively. The thermal decomposition behavior of 3 was investigated by thermogravimetric studies in the temperature range of 40-800 ℃ and 40-1300 ℃ under an oxygen and argon atmosphere, respectively. Powder X-ray diffraction（PXRD） measurements of the residues confirmed the formation of Y2 O3. Complex 3 was applied as a spin-coating precursor for yttrium oxide film formation on either Si wafers with a continuous 100 nm thick SiO2 film, or with a native oxide layer.The as-deposited Y2 O3 layers are smooth, conformal, dense and transparent and are of a thickness of 27 and 30 nm, respectively.

关键词： Yttrium β-Diketonate Yttrium oxide Spin-coating Solid-state structure Vapor pressure

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Synthesis and thermal behavior of [Li(thf)3(μ-Cl)La{N(SiMe3)2}3] and its investigation as spin-coating precursor for lanthanum-based layer formation

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Journal of Rare Earths 2018年第5期36卷 537-543页

作者： Andrea PreuB Elaheh Pousaneh julian noll Tobias Rüffer Alexaner Jakob Lutz Mertens Michael Mehring Heinrich Lang Technische Universitat Chemnitz Faculty of Natural Sciences Institute of Chemistry Inorganic Chemistry 09107 Chemnitz Germany Technische Universitat Chemnitz Faculty of Natural Sciences Institute of Chemistry Coordination Chemistry 09107 Chemnitz Germany

The lanthanum（Ⅲ） complex [Li（thf）3（μ-CI）La{N（SiMe3）2}3]（3） was obtained by the reaction of LaCl3 with three equiv of Li[N（SiMe3）2]3 in a tetrahydrofuran solution. The molecular structure of 3 in the solid state was characterized by a tetracoordinated anionic lanthanide（Ⅲ） amide in form of an adduct with LiCl（thf）3 as evidenced by single crystal X-ray structure analysis. In order to study the suitability of 3 as a precursor for the deposition of La2O3/LiLaSiO4 by thin layer deposition techniques,its thermal behavior was investigated by thermogravimetry（TG） and TG-MS-coupled studies. TG studies show a two-step decomposition process, whereby volatile decomposition products can be detected during the second decomposition step. TG measurements under an atmosphere of oxygen produced La2O3, Calcination processes of 3 under ambient atmosphere for 10 h at 1000 ℃ gave La2O3 and LiLaSiO4,which was confirmed by PXRD studies. Metal-organic 3 was applied as spin-coating precursor for La2O3 thin film formation giving the as-deposited layers nearly crack-free.

关键词： Lanthanum Amide Thermogravimetry Solid state structure Spin-coating Rare earths

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