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Azimuthal rotation-controlled nanoinscribing for continuous patterning of period-and shapetunable asymmetric nanogratings

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Microsystems & Nanoengineering 2024年第3期10卷 207-218页

作者： Useung Lee Hyein Kim Dong Kyo Oh Nayeong Lee jonggab park Jaewon park Hyunji Son Hyunchan Noh Junsuk Rho Jong G.Ok Department of Mechanical and Automotive Engineering Seoul National University of Science and TechnologySeoul 01811Republic of Korea Department of Mechanical Engineering Pohang University of Science and Technology(POSTECH)Pohang 37673Republic of Korea Department of Chemical Engineering Pohang University of Science and Technology(POSTECH)Pohang 37673Republic of Korea POSCO-POSTECH-RIST Convergence Research Center for Flat Optics and Metaphotonics Pohang 37673Republic of Korea National Institute of Nanomaterials Technology(NINT) Pohang 37673Republic of Korea Present address:Department of Mechanical Engineering Korea University145 Anam-roSeongbuk-guSeoul 02841Republic of Korea Research Team Hyundai Motor Group150 Hyundaiyeonguso-roHwaseong-siGyeonggi 18280Republic of Korea

We present an azimuthal-rotation-controlled dynamic nanoinscribing(ARC-DNI)process for continuous and scalable fabrication of asymmetric nanograting structures with tunable periods and shape profiles.A sliced edge of a nanograting mold,which typically has a rectangular grating profile,slides over a polymeric substrate to induce its burrfree plastic deformation into a linear *** this continuous nanoinscribing process,the“azimuthal angle,”that is,the angle between the moving direction of the polymeric substrate and the mold’s grating line orientation,can be controlled to tailor the period,geometrical shape,and profile of the inscribed *** modulating the azimuthal angle,along with other important ARC-DNI parameters such as temperature,force,and inscribing speed,we demonstrate that the mold-opening profile and temperature-and time-dependent viscoelastic polymer reflow can be controlled to fabricate asymmetric,blazed,and slanted nanogratings that have diverse geometrical profiles such as trapezoidal,triangular,and ***,period-and profile-tunable ARC-DNI can be utilized for the practical fabrication of diverse optical devices,as is exemplified by asymmetric diffractive optical elements in this study.

关键词： tunable asymmetric rotation

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