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High-speed PGC demodulation model and method with subnanometer displacement resolution in a fiber-optic micro-probe laser interferometer

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Photonics Research 2024年第5期12卷 921-931页

作者： YISI DONG WENWEN LI JiNRAN ZHANG WENRUI LUo HAIJIN FU XU XING PENGCHENG HU YONGKANG DONG jiubin tan Center of Ultra-precision Optoelectronic Instrument Harbin Institute of TechnologyHarbin 150080China Key Laboratory of Ultra-precision Intelligent Instrumentation(Harbin Institute of Technology) Ministry of Industry and Information TechnologyHarbin 150080China National Key Laboratory of Science and Technology on Tunable Laser Harbin Institute of TechnologyHarbin 150001China

As the key of embedded displacement measurement,a fiber-optic micro-probe laser interferometer(FMI)is of great interest in developing high-end equipment as well as precision metrology.However,conventional phasegenerated carrier(PGC)approaches are for low-speed scenes and local error analysis,usually neglecting the global precision analysis and dynamic effect of system parameters under high-speed measurement,thus hindering their broad applications.We present a high-speed PGC demodulation model and method to achieve subnanometer displacement measurement precision in FMI.This model includes a global equivalent resolution analysis and revelation of the demodulation error mechanism.Utilizing this model,the failure issues regarding the PGC demodulation method under high speed and large range are addressed.Furthermore,an ultra-precision PGC demodulation algorithm based on the combination of static and dynamic delay adaptive regulation is proposed to enable high-speed and large-range displacement measurement.In this paper,the proposed model and algorithm are validated through simulation and experimental tests.The results demonstrate a displacement resolution of 0.1 nm with a standard deviation of less than 0.5 nm when measuring at a high velocity of 1.5 m/s—nearly a tenfold increase of the latest study.

关键词： interferometer fiber displacement

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Finite-Time Stabilization of Linear Systems With Input Constraints by Event-Triggered Control

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IEEE/CAA Journal of Automatica Sinica 2022年第8期9卷 1516-1519页

作者： Kai Zhang Yang Liu jiubin tan Key Laboratory of Ultra-Precision Intelligent Instrumentation Ministry of Industry and Information Technologyand also with the Center of Ultra-Precision Optoelectronic Instrument EngineeringHarbin Institute of TechnologyHarbin 150001China of Industry and Information Technology and the Center of Ultra-Precision Optoelectronic Instrument EngineeringHarbin Institute of TechnologyHarbin 150001 State Key Laboratory of Digital Manufacturing Equipment&Technology Huazhong University of Science and TechnologyWuhan 430074China

Dear editor,This letter designs the event-triggered control(ETC)to achieve finite-time stabilization(FTS)of linear systems with input constraints.The key idea of the established algorithm is that the designed time-var... 详细信息

关键词： mechanism stabilization letter

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Editorial for the Special Issue on High-End Measuring Instruments

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Engineering 2022年第9期16卷 1-2页

作者： jiubin tan Kenneth Thomas Victor Grattan Key Laboratory of Ultra-Precision Intelligent Instrumentation Ministry of Industry and Information TechnologyHarbin Institute of TechnologyHarbin 150080China School of Science&Technology City University of LondonLondon EC1V 0HBUK

In recent years, two major challenges have arisen in the field of measurement and instrument technology. One is the redefinition of the seven basic units in the international system of units(Système International d’Unités or SI). The SI is now based on fundamental physical constants, with full implementation having occurred in 2019.

关键词： technology. instrument arise

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Power output correction model of narrow linewidth ring fiber laser filtered with whispering gallery mode resonator

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Chinese Optics Letters 2024年第3期22卷 60-64页

作者：王子云徐在斌崔继文谭久彬 Center of Ultra-precision Optoelectronic Instrument Harbin Institute of TechnologyHarbin 150080China Key Laboratory of Ultra-precision Intelligent Instrumentation Ministry of Industry and Information TechnologyHarbin Institute of TechnologyHarbin 150080China

A whispering gallery mode resonator(WGMR)filter can narrow laser linewidth while significantly changing the output power characteristics of fiber laser system.It is found that traditional laser output power model is invalid.We report a correction model of a narrow linewidth fiber laser filtered with a WGMR to analyze its power.We believe that the loss of the laser system and the threshold gain increase caused by the WGMR filter lead to the predominate amplified spontaneous emission during the original laser period.According to that,we assume the correction coefficient is an exponential decay related to the Er-doped fiber length in the large loss situation,and we verify it experimentally.As a result,the correction model is valid for WGMR-filtered fiber laser.

关键词： whispering gallery resonator filter narrow linewidth fiber laser power output correction model

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Ultrahigh strain in textured BCZT-based lead-free ceramics with CuO sintering agent

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Journal of Materials Science & Technology 2022年第22期117卷 207-214页

作者： Yingchun Liu Hongjun Zhang Wenming Shi Qian Wang Guicheng jiang Bin Yang Wenwu Cao jiubin tan Functional Materials and Acoustooptic Instruments Institute School of Instrumentation Science and EngineeringHarbin Institute of TechnologyHarbin 150080China Department of Mathematics and Materials Research Institute The Pennsylvania State Ultra-precision Optical&Electronic Instrument Engineering Center Harbin Institute of TechnologyHarbin 150001China

Textured BaTiO_(3)(BT)-based lead-free ceramics have gained significant attention due to their high piezoelectric coefficient(d)and very large field induced strain(S).However,costly nano-size raw materials,excessively high sintering temperature and low Curie temperature(T_(c))hinder their device applications.In this work,highly[001]_(c)-oriented(Ba_(0.95)Ca_(0.05))(Zr_(0.04)Ti_(0.96))O_(3) ceramics with x mol%CuO(x=0.25,0.5,1.0,2.5)denoted as BCZT-x were synthesized by templated grain growth using micro-sized raw powders.The introduction of CuO sintering agent lowered the sintering temperature by 125℃ to 1450℃,and the BCZT-1.0 achieved a high texture degree of∼99%.In addition,the CuO-based liquid phases eliminated boundaries between BT templates and BCZT matrix powders.Such liquid-phase sintering reduced sintering stresses,decreased the average grain size of BCZT-1.0 from 16μm down to 13μm,and increased the dielectric dispersion coefficientγto 1.63.The almost smoothed out T_(O-T) anomaly in the temperature dependence of dielectric permittivity and comparably high T_(c)(>102℃)lead to better temperature stability.The narrower grain orientation distribution with full width at half maximum(FWHM)of∼5.9°and smaller domains with the size of 0.1–0.5μm in width and 3–8μm in length were obtained,a high field induced maximum strain S_(max) of 0.38%and low H_(s) of 5.2%have been achieved in BCZT-1.0 textured ceramics together with a high and homogeneous piezoelectric stress coefficient d_(33)∼780 pC/N and very large d_(33)∗∼2950 pm/V.

关键词： Lead-free BCZT Textured ceramics Piezoelectric Strain hysteresis

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Transparent Thermally Tunable Microwave Absorber Prototype Based on Patterned VO2 Film

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Engineering 2023年第10期29卷 198-206页

作者： Zhengang Lu Yilei Zhang Heyan Wang Chao Xia Yunfei Liu Shuliang Dou Yao Li jiubin tan Ultra-Precision Optical and Electronic Instrument Engineering Center Harbin Institute of TechnologyHarbin 150001China Key Laboratory of Ultra-Precision Intelligent Instrumentation(Harbin Institute of Technology) Ministry of Industry and Information TechnologyHarbin 150001China Center for Composite Material and Structure Harbin Institute of TechnologyHarbin 150001China

Transparent microwave absorbers that exhibit high optical transmittance and microwave absorption capability are ideal,although having a fixed absorption performance limits their applicability.Here,a simple,transparent,and thermally tunable microwave absorber is proposed,based on a patterned vanadium dioxide(VO_(2))film.Numerical calculations and experiments demonstrate that the proposed VO_(2)absorber has a high optical transmittance of 84.9%at 620 nm;its reflection loss at 15.06 GHz can be thermally tuned from–4.257 to–60.179 dB,and near-unity absorption is achieved at 523.750 K.Adjusting only the patterned VO_(2)film duty cycle can change the temperature of near-unity absorption.Our VO_(2)absorber has a simple composition,a high optical transmittance,a thermally tunable microwave absorption performance,a large modulation depth,and an adjustable temperature tuning range,making it promising for application in tunable sensors,thermal emitters,modulators,thermal imaging,bolometers,and photovoltaic devices.

关键词： Tunable microwave absorber VO_(2)film Optical transparent Near unity absorption Large modulation depth

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Fused-like angles:replacement for roll-pitch-yaw angles for a six-degree-of-freedom grating interferometer

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Frontiers of Information Technology & Electronic Engineering 2021年第12期22卷 1677-1684页

作者： Di CHANG Pengcheng HU jiubin tan Center of Ultra-precision Optoelectronic Instrument Engineering Harbin Institute of TechnologyHarbin 150080China Key Lab of Ultra-precision Intelligent Instrumentation(Harbin Institute of Technology) Ministry of Industry and Information TechnologyHarbin 150080China

Representation of orientation is important in a six-degree-of-freedom grating interferometer but only a few studies have focused on this topic.Roll-pitch-yaw angles,widely used in aviation,navigation,and robotics,are now being brought to the field of multi-degree-of-freedom interferometric measurement.However,the roll-pitch-yaw angles are not the exact definitions the metrologists expected in interferometry,because they require a certain sequential order of rotations and may cause errors in describing complicated rotations.The errors increase as the tip and tilt angles of the grating increase.Therefore,a replacement based on fused angles in robotics is proposed and named“fused-like angles.”The fused-like angles are error-free,so they are more in line with the definitions in grating interferometry and more suitable for six-degree-of-freedom measurements.Fused-like angles have already been used in research on the kinematic model and decoupling algorithm of the six-degree-of-freedom grating interferometer.

关键词： Fused-like angles Grating interferometer Six-degree-of-freedom measurement Representation of orientation

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An adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system

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Frontiers of Information Technology & Electronic Engineering 2021年第10期22卷 1390-1401页

作者： Bo ZHAO Weijia SHI Bingquan WANG jiubin tan Center of Ultra-precision Optoelectronic Instrument Engineering Harbin Institute of TechnologyHarbin 150080China Key Lab of Ultra-precision Intelligent Instrumentation(Harbin Institute of Technology) Ministry of Industry and Information TechnologyHarbin 150080China

In the semiconductor manufacturing industry,the dynamic model of a controlled object is usually obtained from a frequency sweeping method before motion control.However,the existing isolators cannot properly isolate the disturbance of the inertial force on the platform base during frequency sweeping(the frequency is between 0 Hz and the natural frequency).In this paper,an adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system(DSASAVIS)is proposed.This system has a significant anti-resonance characteristic;that is,the vibration amplitude can drop to nearly zero at a particular frequency,which is called the anti-resonance frequency.The proposed controller is designed to add an adjustable anti-resonance frequency to fully use this unique anti-resonance characteristic.Experimental results show that the closed-loop transmissibility is less than−15 dB from 0 Hz to the initial anti-resonance frequency.Furthermore,it is less than−30 dB around an added anti-resonance frequency which can be adjusted from 0 Hz to the initial anti-resonance frequency by changing the parameters of the proposed controller.With the proposed controller,the disturbance amplitude of the payload decays from 4 to 0.5 mm/s with a reduction of 87.5%for the impulse disturbance applied to the platform base.Simultaneously,the system can adjust the anti-resonance frequency point in real time by tracking the frequency sweeping disturbances,and a good vibration isolation performance is achieved.This indicates that the DSA-SAVIS and the proposed controller can be applied in the guarantee of an ultra-low vibration environment,especially at frequency sweeping in the semiconductor manufacturing industry.

关键词： Semi-active vibration isolation Dual-stage actuation Dynamic vibration absorption Adjustable anti-resonance frequency controller

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Comprehensive evaluation factor of optoelectronic properties for transparent conductive metallic mesh films

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Frontiers of Information Technology & Electronic Engineering 2021年第11期22卷 1532-1540页

作者： Yilei ZHANG Jinxuan CAO Zhengang LU Heyan WANG jiubin tan Center of Ultra-precision Optoelectronic Instrument Engineering Harbin Institute of TechnologyHarbin150080China Key Lab of Ultra-precision Intelligent Instrumentation(Harbin Institute of Technology) Ministry of Industry and Information TechnologyHarbin150080China

Finding the optimal optoelectronic properties(zero-order optical transmittance,shielding effectiveness,and stray light uniformity)of metallic mesh is significant for its application in electromagnetic interference shielding areas.However,there are few relevant studies at present.Based on optoelectronic properties,we propose a comprehensive evaluation factor Q,which is simple in form and can be used to evaluate the mesh with different parameters in a simple and efficient way.The effectivity of Q is verified by comparing the trend of Q values with the evaluation results of the technique for order preference by similarity to ideal solution(TOPSIS).The evaluation factor Q can also be extended to evaluate the optoelectronic properties of different kinds of metallic meshes,which makes it extremely favorable for metallic mesh design and application.

关键词： Metallic mesh Technique for order preference by similarity to ideal solution(TOPSIS) Entropy weight(EW) Comprehensive evaluation Transparent conductive films

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Long range dynamic displacement:precision PGC with sub-nanometer resolution in an LWSM interferometer

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Photonics Research 2022年第1期10卷 59-67页

作者： YISI DONG PENG-CHENG HU HAIJIN FU HONGXING YANG RUITAO YANG jiubin tan Center of Ultra-precision Optoelectronic Instrument Harbin Institute of TechnologyHarbin 150080China Key Laboratory of Ultra-precision Intelligent Instrumentation(Harbin Institute of Technology) Ministry of Industry and Information TechnologyHarbin 150080China

We propose a precision phase-generated-carrier(PGC) demodulation method with sub-nanometer resolution that avoids nonlinear errors in a laser wavelength sinusoidal modulation fiber-optic interferometer for long range dynamic displacement sensing.Using orthogonal detection and an AC-DC component extraction scheme,the PGC carrier phase delay(CPD) and laser intensity modulation phase delay can be obtained simultaneously to eliminate the nonlinear error from accompanied optical intensity modulation and CPD.Further,to realize long range displacement sensing,PGC phase modulation depth(PMD),determined by the laser wavelength modulation amplitude and the working distance of the interferometer,is required to maintain an optimal value during measurement,including initial position and dynamic movement.By combining frequency sweeping interference and modified PGC-arctan demodulation to measure real-time working distance,adaptive PMD technology is realized based on proportion control.We construct a fiber-optic Michelson and SIOS commercial interferometer for comparison and perform experiments to verify the feasibility of the proposed method.Experimental results demonstrate that an interferometer with sub-nanometer resolution and nanometer precision over a large range of 400 mm can be realized.

关键词： interferometer fiber displacement

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