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Microsphere-assisted hyperspectral imaging:super-resolution,non-destructive metrology for semiconductor devices

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Light(Science & Applications) 2024年第6期13卷 1098-1111页

作者： Jangryul Park Youngsun choi Soonyang Kwon Youngjun Lee Jiwoong Kim jae-joon Kim Jihye Lee Jeongho Ahn Hidong Kwak Yusin Yang Taeyong Jo Myungjun Lee Kwangrak Kim Metrology and Inspection Equipment R&D Team Mechatronics ResearchSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department DRAM Process Development TeamSemiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department Semiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea

As semiconductor devices shrink and their manufacturing processes advance,accurately measuring in-cell critical dimensions(CD)becomes increasingly *** test element group(TEG)measurements are becoming inadequate for representing the fine,repetitive patterns in cell *** non-destructive metrology technologies like optical critical dimension(OCD)are limited due to their large spot diameter of approximately 25μm,which impedes their efficacy for detailed in-cell structural ***,there is a pressing need for small-spot and non-destructive metrology *** address this limitation,we demonstrate a microsphere-assisted hyperspectral imaging(MAHSI)system,specifically designed for small spot optical metrology with *** microsphere-assisted super-resolution imaging,this system achieves an optical resolution of 66 nm within a field of view of 5.6μm×5.6μ*** approach effectively breaks the diffraction limit,significantly enhancing the magnification of the *** MAHSI system incorporating hyperspectral imaging with a wavelength range of 400–790 nm,enables the capture of the reflection spectrum at each camera *** achieved pixel resolution,which is equivalent to the measuring spot size,is 14.4 nm/pixel and the magnification is *** MAHSI system enables measurement of local uniformity in critical areas like corners and edges of DRAM cell blocks,areas previously challenging to inspect with conventional OCD *** our knowledge,this approach represents the first global implementation of microsphere-assisted hyperspectral imaging to address the metrology challenges in complex 3D structures of semiconductor devices.

关键词： metrology resolution enable

Citizens’Mental Health Issues and Psychological Trauma Experience due to a Crowd-Crush Disaster in Korea

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International Journal of Mental Health Promotion 2024年第6期26卷 439-447页

作者： Yun-Jung choi jae-Won Kwak Hae-In Namgung Red Cross College of Nursing Chung-Ang UniversitySeoul06974South Korea Graduate School of Nursing and Professions Chung-Ang UniversitySeoul06974South Korea Nursing Department Graduate School of Chung-Ang UniversitySeoul06974South Korea

This study evaluated the state of anxiety, depression, post-traumatic stress disorder, general mental health, and mental well-beingamong citizens after a crowd-crush disaster in Korea. Individuals who experienced the crowd crush had significantly higheranxiety, depression, and post-traumatic stress disorder (PTSD) scores than those who did not (p < 0.001). Additionally,people who avoided the disaster area had significantly higher depression and PTSD scores than those who did not avoid thearea (p < 0.001). Those who directly witnessed the Seoul Halloween crowd crush had a significant difference in PTSD levels ineither group than those who experienced it indirectly (p = 0.005). There was a significant difference in PTSD scores in cases ofdirect damage or death of an acquaintance (p < 0.001). The Seoul Halloween crowd crush caused psychological damagethrough indiscriminate exposure to the public, and symptoms of PTSD appeared over a long period. It is crucial to provideessential resources for ongoing treatment and case management.

关键词： Anxiety avoidance depression disaster experience mental health PTSD psychological trauma

Surface-functionalized hole-selective monolayer for high efficiency single-junction wide-bandgap and monolithic tandem perovskite solar cells

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Journal of Energy Chemistry 2024年第1期88卷 317-326,I0008页

作者： Devthade Vidyasagar Yeonghun Yun jae Yu Cho Hyemin Lee Kyung Won Kim Yong Tae Kim Sung Woong Yang Jina Jung Won Chang choi Seonu Kim Rajendra Kumar Gunasekaran Seok Beom Kang Kwang Heo Dong Hoe Kim jaeyeong Heo Sangwook Lee School of Materials Science and Engineering Kyungpook National UniversityDaegu 41566Republic of Korea Department of Materials Science and Engineering and Optoelectronics Convergence Research CenterChonnam National UniversityGwangju 61186Republic of Korea Department of Materials Science and Engineering Korea UniversitySeoul 02841Republic of Korea Department of Nanotechnology and Advanced Materials Engineering Sejong UniversitySeoul 05006Republic of Korea

Carbazole moiety-based 2PACz([2-(9H-carbazol-9-yl)ethyl]phosphonic acid)self-assembled monolayers(SAMs)are excellent hole-selective contact(HSC)materials with abilities to excel the charge-transferdynamics of perovskite solar cells(PSCs).Herein,we report a facile but powerful method to functionalize the surface of 2PACz-SAM,by which reproducible,highly stable,high-efficiency wide-bandgap PSCs can be *** 2PACz surface treatment with various donor number solvents improves assembly of 2PACz-SAM and leave residual surface-bound solvent molecules on 2PACz-SAM,which increases perovskite grain size,retards halide segregation,and accelerates hole *** surface functionalization achieves a high power conversion efficiency(PCE)of 17.62%for a single-junction wide-bandgap(~1.77 e V)*** also demonstrate a monolithic all-perovskite tandem solar cell using surfaceengineered HSC,showing high PCE of 24.66%with large open-circuit voltage of 2.008 V and high fillfactor of 81.45%.Our results suggest this simple approach can further improve the tandem device,when coupled with a high-performance narrow-bandgap sub-cell.

关键词： Perovskite solar cells 2PACz Monolithic tandem solar cells Wide bandgap

电沉积Mo和Mo-Co合金纳米线用于互联电阻的电阻率改性

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Engineering 2024年第1期32卷 127-137页

作者： Jun Hwan Moon Taesoon Kim Youngmin Lee Seunghyun Kim Yanghee Kim jae-Pyoung Ahn Jungwoo choi Hyuck Mo Lee Young Keun Kim Department of Materials Science and Engineering Korea UniversitySeoul 02841Republic of Korea Department of Materials Science and Engineering Korea Advanced Institute of Science and EngineeringDaejeon 34141Republic of Korea Advanced Analysis Center Korea Institute of Science and TechnologySeoul 02792Republic of Korea Research Resources Division Korea Institute of Science and TechnologySeoul 02792Republic of Korea

Achieving historically anticipated improvement in the performance of integrated circuits is challenging,due to the increasing cost and complexity of the required technologies with each new *** overcome this limitation,the exploration and development of novel interconnect materials and processes are highly desirable in the microelectronics ***(Mo)is attracting attention as an advanced interconnect material due to its small resistivity size effect and high cohesive energy;however,effective processing methods for such materials have not been widely ***,we investigate the electrochemical behavior of ions in the confined nanopores that affect the electrical properties and microstructures of nanoscale Mo and Mo-Co alloys prepared via template-assisted *** in an electrolyte allow the deposition of extremely pure metal materials,due to their interac-tion with metal ions and *** this study,boric acid and tetrabutylammonium bisulfate(TBA)were added to an acetate bath to inhibit the hydrogen evolution *** accelerated the reduction of Mo at the surface by inducing surface conduction on the *** Mo nanowires with a 130 nm diameter synthesized through high-aspect-ratio nanopore engineering exhibited a resistivity of(63.0±17.9)μΩ*** also evaluated the resistivities of Mo-Co alloy nanowires at various compo-sitions toward replacing irreducible conventional barrier/liner *** intermetallic compound formed at a Mo composition of 28.6 at%,the resistivity of the Mo-Co nanowire was(58.0±10.6)μΩcm,indicat-ing its superior electrical and adhesive properties in comparison with those of conventional barriers such as TaN and ***,density functional theory and non-equilibrium Green's function calcula-tions confirmed that the vertical resistance of the via structure constructed from Mo-based materials was 21%lower than that of a conventional Cu/Ta/TaN structure.

关键词： Molybdenum Molybdenum-cobalt Interconnect Microstructure Electrodeposition Density functional theory

Catalpa bignonioides extract improves exercise performance through regulation of growth and metabolism in skeletal muscles

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Asian Pacific Journal of Tropical Biomedicine 2024年第2期14卷 47-54页

作者： Hoibin Jeong Dong-joo Lee Sung-Pil Kwon SeonJu Park Song-Rae Kim Seung Hyun Kim jae-Il Park Deug-chan Lee Kyung-Min choi WonWoo Lee Ji-Won Park Bohyun Yun Su-Hyeon Cho Kil-Nam Kim Seoul Center Korea Basic Science InstituteSeoul 02841Republic of Korea Chuncheon Center Korea Basic Science InstituteChuncheon 24341Republic of Korea Research&Development Center Chungdam CDC JNPharm LLC.Chuncheon 24341Republic of Korea Department of Biomedical Technology Kangwon National UniversityChuncheon 24341Republic of Korea Yonsei Institute of Pharmaceutical Sciences College of PharmacyYonsei UniversityIncheon 21983Republic of Korea Gwangju Center Korea Basic Science InstituteGwangju 61751Republic of Korea Honam National Institute of Biological Resources 99Gohadoan-gilMokpo-siJeollanam-do58762Republic of Korea Department of Bio-analysis Science University of Science&TechnologyDaejeon34113Republic of Korea

Objective:To evaluate the effects of Catalpa bignonioides fruit extract on the promotion of muscle growth and muscular capacity in vitro and in ***:Cell viability was measured using the 3-(4,5-dimethylthiazol-2-yl)-2,5-diphenyltetrazolium bromide *** proliferation was assessed using a 5-bromo-2’-deoxyuridine(BrdU)assay *** blot analysis was performed to determine the protein expressions of related *** effects of Catalpa bignonioides extract were investigated in mice using the treadmill exhaustion test and whole-limb grip strength *** composition analysis was performed using high-performance liquid chromatography(HPLC).Results:Catalpa bignonioides extract increased the proliferation of C2C12 mouse myoblasts by activating the Akt/mTOR signaling *** also induced metabolic changes,increasing the number of mitochondria and glucose metabolism by phosphorylating adenosine monophosphate-activated protein *** an in vivo study,the extract-treated mice showed improved motor abilities,such as muscular endurance and grip ***,HPLC analysis showed that vanillic acid may be the main component of the Catalpa bignonioides extract that enhanced muscle ***:Catalpa bignonioides improves exercise performance through regulation of growth and metabolism in skeletal muscles,suggesting its potential as an effective natural agent for improving muscular strength.

关键词： Catalpa bignonioides Skeletal muscle Cell proliferation Mitochondria Energy metabolism C2C12

Chinese Prescription Kangen-karyu as Potential Anti-Alzheimer’s Disease Therapeutic:Analyses of BACE1 and GSK-3βInhibitory Activities

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Journal of Integrative Medicine（双语） 2021年第2期10卷 37-42页

作者： Chan Hum Park Min Jo Kim Hyun Ah Jung jae sue choi Jin Pyeong Jeon Takako Yokozawa Institute of New Frontier Research Team Hallym Clinical and Translational Science InstituteHallym UniversityChuncheon24252Republic of Korea Department of Medicinal Crop Research National Institute of Horticultural and Herbal ScienceRural Development AdministrationEumseong369-873Republic of Korea Department of Food Science and Human Nutrition Chonbuk National UniversityJeonju561-756Republic of Korea Department of Food and Life Science Pukyong National UniversityBusan 608-737Republic of Korea Institute of New Frontier Stroke Research Team College of MedicineHallym UniversityChuncheon24252Republic of Korea Department of Neurosurgery College of MedicineHallym UniversityChuncheon24252Republic of Korea Graduate School of Science and Engineering for Research University of ToyamaToyama930-8555Japan

Inhibition ofβ-site amyloid precursor protein-cleaving enzyme 1(BACE1)or glycogen synthase kinase-3β(GSK-3β)is estimated to be the central therapeutic approach for Alzheimer’s disease(AD).In this study,water extract of Kangenkaryu,its crude drug and chemical composition used in oriental medicine were evaluated regarding their BACE1 and GSK-3βinhibitory *** resonance energy transfer was used to characterize the BACE1 inhibitory effect of Kangen-karyu,its crude drug and chemical ***-3βactivity was determined using the Kinase-Glo Luminescent Kinase Assay *** water extract of Kangen-karyu inhibited BACE1 and GSK-3βin concentration-dependent manners when compared with reference drugs,quercetin and *** six components of Kangen-karyu,the water extracts of Salviae Miltiorrhizae Radix or Cyperi Rhizoma exhibited significant inhibitory effects on BACE1 and GSK-3β.Among the constituents of Salviae Miltiorrhizae Radix extract,salvianolic acid C,salvianolic acid A,rosmarinic acid,and magnesium lithospermate B significantly inhibited *** addition,they inhibited GSK-3βwith an IC50 value range of 6.97 to 135.35μ*** these results,one of the effectiveness and its mechanisms of action of Kangen-karyu against AD may be the inhibition of BACE1 and GSK-3β,and one of the active ingredients of Kangen-karyu is Salviae Miltiorrhizae Radix and its constituents.

关键词： Alzheimer’s disease β-Site amyloid precursor protein-cleaving enzyme 1 Glycogen synthase kinase-3β Kangen-karyu Salviae Miltiorrhizae Radix Salvianolic acid C Salvianolic acid B

Real-Time Tunable Gas Sensing Platform Based on SnO_(2) Nanoparticles Activated by Blue Micro-Light-Emitting Diodes

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Nano-Micro Letters 2024年第12期16卷 103-119页

作者： Gi Baek Nam Jung-El Ryu Tae Hoon Eom Seung Ju Kim Jun Min Suh Seungmin Lee Sungkyun choi Cheon Woo Moon Seon Ju Park Soo Min Lee Byungsoo Kim Sung Hyuk Park Jin Wook Yang Sangjin Min Sohyeon Park Sung Hwan Cho Hyuk Jin Kim Sang Eon Jun Tae Hyung Lee Yeong jae Kim jae Young Kim Young Joon Hong Jong-In Shim Hyung-Gi Byun Yongjo Park Inkyu Park Sang-Wan Ryu Ho Won Jang Department of Materials Science and Engineering Seoul National UniversitySeoul 08826Republic of Korea Research Laboratory of Electronics Department of Mechanical EngineeringMassachusetts Institute of TechnologyCambridgeMA 02139USA Ming Hsieh Department of Electrical and Computer Engineering University of Southern CaliforniaLos AngelesCA 90089USA Department of Display Materials Engineering Soonchunhyang UniversityAsan 31538Republic of Korea Department of Photonics and Nanoelectronics BK21 FOUR ERICA-ACE CenterHanyang University ERICAAnsan 15588Republic of Korea Department of Nanotechnology and Advanced Materials Engineering Sejong UniversitySeoul 05006Republic of Korea Department of Electronics Information and Communication EngineeringKangwon National UniversitySamcheok 25913Republic of Korea Advance Institute of Convergence Technology Seoul National UniversitySuwon 16229Republic of Korea Department of Mechanical Engineering Korea Advanced Institute of Science and TechnologyDaejeon 34141Republic of Korea Department of Physics Chonnam National UniversityGwangju 500-757Republic of Korea

Micro-light-emitting diodes(μLEDs)have gained significant interest as an activation source for gas sensors owing to their advantages,including room temperature operation and low power ***,despite these benefits,challenges still exist such as a limited range of detectable gases and slow *** this study,we present a blueμLED-integrated light-activated gas sensor array based on SnO_(2)nanoparticles(NPs)that exhibit excellent sensitivity,tunable selectivity,and rapid detection with micro-watt level power *** optimal power forμLED is observed at the highest gas response,supported by finite-difference time-domain ***,we first report the visible light-activated selective detection of reducing gases using noble metal-decorated SnO_(2)*** noble metals induce catalytic interaction with reducing gases,clearly distinguishing NH3,H2,and ***-time gas monitoring based on a fully hardwareimplemented light-activated sensing array was demonstrated,opening up new avenues for advancements in light-activated electronic nose technologies.

关键词： Micro-LED Gas sensor array Low power consumption Metal decoration Real-time detection

Optimal sequential therapy using tyrosine kinase inhibitors as the first-line treatment in patients with metastatic renal cell carcinoma: A nationwide multicenter study

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Asian Journal of Urology 2024年第3期11卷 450-459页

作者： Jung Ki Jo Seong Il Seo MinYong Kang Jinsoo Chung Cheol Kwak Sung-Hoo Hong Cheryn Song jae Young Park Chang Wook Jeong Seok Hwan choi Sung Han Kim Eu Chang Hwang Chan Ho Lee Hakmin Lee Department of Urology Medical and Digital EngineeringCollege of MedicineHanyang UniversitySeoulRepublic of Korea Department of Urology Samsung Medical CenterSungkyunkwan University School of MedicineSeoulRepublic of Korea Department of Urology National Cancer CenterGoyangRepublic of Korea Department of Urology Seoul National University HospitalSeoulRepublic of Korea Department of Urology Kangnam St Mary’s HospitalSeoulRepublic of Korea Department of Urology Asan Medical CenterSeoulRepublic of Korea Department of Urology Korea University Ansan HospitalAnsanRepublic of Korea Department of Urology Kyungpook National University HospitalDaeguRepublic of Korea Department of Urology Chonnam National University Hwasun HospitalHwasunRepublic of Korea Department of Urology Inje University Busan Paik HospitalBusanRepublic of Korea Department of Urology Seoul National University Bundang HospitalSeongnamRepublic of Korea

Objective:The purpose of the study was to identify the best sequence of therapy beginning with a tyrosine kinase inhibitor(TKI)as the first-line therapy for patients with metastatic renal cell carcinoma(mRCC)in terms of overall survival(OS),progression-free survival(PFS),and rates of discontinuation and adverse effects during the treatment ***:This is a retrospective,nationwide multicenter study of patients with mRCC after diagnosis at 10 different tertiary medical centers in Korea from January 1992 to December *** focused on patients at either“favorable”or“intermediate”risk according to the International mRCC Database Consortium criteria,and they were followed up(median 335 days).Finally,a total of 1409 patients were selected as the study *** generated a Cox proportional hazard model adjusted for covariates,and the different therapy schemes were statistically tested in terms of OS as well as *** addition,frequencies of discontinuation and adverse events were compared among the therapy ***:Of the primary patterns of treatment sequences(24 sequences),“sunitinib epazopanib”and“sunitinibeeverolimuseimmunotherapy”showed the most beneficial results in both OS and PFS with significantly lower hazards than“sunitinib”,which is the most commonly treated agent in *** that the“TKIeTKI”structure showed relatively higher discontinuation rates with higher adverse effects,the overall beneficial sequence would be“sunitinibeeverolimuseimmunotherapy”.Conclusion:Among several sequential therapy starting with TKIs,“sunitinibeeverolimuse immunotherapy”was found to be the best scheme for mRCC patients with“favorable”or“intermediate”risks.

关键词： Tyrosinekinase inhibitor Metastaticrenalcell carcinoma Overall survival Progression-free survival

KoNA:Korean Nucleotide Archive as A New Data Repository for Nucleotide Sequence Data

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Genomics, Proteomics & Bioinformatics 2024年第1期22卷 161-167页

作者： Gunhwan Ko jae Ho Lee Young Mi Sim Wangho Song Byung-Ha Yoon Iksu Byeon Bang Hyuck Lee Sang-Ok Kim Jinhyuk choi Insoo Jang Hyerin Kim Jin Ok Yang Kiwon Jang Sora Kim Jong-Hwan Kim Jongbum Jeon jaeeun Jung Seungwoo Hwang Ji-Hwan Park Pan-Gyu Kim Seon-Young Kim Byungwook Lee Korea Bioinformation Center Korea Research Institute of Bioscience&BiotechnologyDaejeon 34141Republic of Korea

During the last decade,the generation and accumulation of petabase-scale high-throughput sequencing data have resulted in great challenges,including access to human data,as well as transfer,storage,and sharing of enormous amounts of *** promote data-driven biological research,the Korean government announced that all biological data generated from government-funded research projects should be deposited at the Korea BioData Station(K-BDS),which consists of multiple databases for individual data ***,we introduce the Korean Nucleotide Archive(KoNA),a repository of nucleotide sequence *** of July 2022,the Korean Read Archive in KoNA has collected over 477 TB of raw next-generation sequencing data from national genome *** ensure data quality and prepare for international alignment,a standard operating procedure was adopted,which is similar to that of the International Nucleotide Sequence Database *** standard operating procedure includes quality control processes for submitted data and metadata using an automated pipeline,followed by manual *** ensure fast and stable data transfer,a high-speed transmission system called GBox is used in ***,the data uploaded to or downloaded from KoNA through GBox can be readily processed using a cloud computing service called *** seamless coupling of KoNA,GBox,and Bio-Express enhances the data experience,including submission,access,and analysis of raw nucleotide *** not only satisfies the unmet needs for a national sequence repository in Korea but also provides datasets to researchers globally and contributes to advances in *** KoNA is available at https://***/kona/.

关键词： Korea BioData Station Nucleotide sequence Next-generation sequencing repository Genomics Deposition and access of big data