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Novel transparent high-entropy sesquioxide ceramics with high physicochemical plasma etching resistance

JOURNAL OF ADVANCED CERAMICS 2025年第1期14卷 163-176页

作者： Shin, Yu-Bin Ham, Su Been Kim, Ha-Neul Kim, Mi-Ju Ko, jae-Woong Lee, jae-wook Park, Young-Jo Kim, Jung-Hyung Lee, Hyo-Chang Jung, Young Hwa Lee, Jung Woo Ma, Ho Jin Korea Inst Mat Sci Nano Mat Res Div Chang Won 51508 Gyeongsangnam South Korea Pusan Natl Univ Dept Mat Sci & Engn Pusan 46241 South Korea Korea Res Inst Stand & Sci Semicond Integrated Metrol Team Daejeon 34113 South Korea Korea Aerosp Univ Dept Semicond Sci Engn & Technol Goyang 10540 South Korea Korea Aerosp Univ Sch Elect & Informat Engn Goyang 10540 South Korea Pohang Accelerator Lab PLS II Beamline Div Pohang 37673 South Korea

High-entropy ceramics exhibit novel intrinsic properties. Hence, they have been explored for a wide range of applications ranging from thermal insulation and energy storage to advanced optical components. Recently, the semiconductor industry has faced a demand for higher-performance chips, necessitating higher aspect ratios in wafer fabrication and further miniaturization of linewidths. Therefore, novel materials with high plasma etching resistance and minimal contaminant generation are needed. The plasma-etching resistance displayed by high-entropy ceramics can be an innovative solution to this emerging challenge. In this study, we successfully fabricated single-phase high-entropy sesquioxide ceramics with high optical transparency, dense microstructure, and minimal residual pores. A structural analysis of the fabricated samples revealed a single-phase structure with excellent phase homogeneity. An evaluation of the plasma-etching resistance of high-entropy ceramics revealed for the first time a low etching rate of 8 nm/h compared with that of conventional plasma-resistant materials. These comprehensive characterizations of high-entropy ceramics indicate that they are promising candidates for significantly improving the production yield of semiconductors and for a wide range of potential applications, such as next-generation active optical ceramics.

关键词： high-entropy ceramics plasma etching resistance transparent ceramics sintering semiconductor manufacturing

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Decomposition of CCl_4 and CHCl_3 on gliding arc plasma

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Journal of Environmental Sciences 2006年第1期18卷 83-89页

作者： Antonius Indarto CHOI jae-wook LEE Hwaung SONG Hyung-keun Korea Institute of Science and Technology Clean Technology Research Center P.O. Box 131 Cheongryang Seoul 130-650 Korea Korea Institute of Science and Technology Clean Technology Research Center P.O. Box 131 Cheongryang Seoul 130-650 Korea.

Decomposition of chlorinated hydrocarbons, CCl4 and CHCl3, in gliding plasma was examined. The effects of initial concentrations, total gas flow rates, and power consumption have been investigated. The conversion result was relatively high. It reached 80% for CCl4 and 97% for CHCl3. Using atmospheric air as the carrier gas, the plasma reaction occurred at exothermic reaction and the main products were CO2, CO, and Cl2. Transformation into CCl4 was also detected for CHCl3 decomposition reaction. The conversion of CCh and CHCl3 were increased with the increasing applied frequency and decreasing total gas flow rate.

关键词： plasma gliding arc CCl4 CHCl3 decomposition reaction

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A review of C_1 chemistry synthesis using yttrium-stabilized zirconia catalyst

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Journal of Rare Earths 2008年第1期26卷 1-6页

作者： Antonius Indarto jae-wook Choi Hwaung Lee Hyung Keun Song Plasma-Catalyst Chemical Process

C1 chemistry based on synthesis gas, methane, and carbon dioxide offers many routes to industrial chemicals. The reactions related to the synthesis of gas can be classified into direct and indirect approach for making such products, such as acetic acid, dimethyl ether, and alcohol. Catalytic syngas processing is currently done at high temperatures and pressures, conditions that could be unfavorable for the life of the catalyst. Another issue of C1 chemistry is related to the methane-initiated process. It has been known that direct methane conversions are still suffering from low yields and selectivity of products resulting in unprofitable ways to produce products, such as higher hydrocarbons, methanol, and so on. However, many experts and researchers are still trying to find the best method to overcome these barriers, for example, by finding the best catalyst to reduce the high-energy barrier of the reactions and conduct only selective catalyst-surface reactions. The appli- cation of Yttria-Stabilized Zirconia （YSZ） and its combination with other metals for catalyzing purposes are increasing. The existence of an interesting site that acts as oxygen store could be the main reason for it. Moreover, formation of intermediate species on the surface of YSZ also contributes significantly in increasing the production of some specific products. Understanding the phenomena happening inside could be necessary. In this article, the use of YSZ for some C1 chemistry reactions was discussed and reviewed.

关键词： C1 chemistry methane synthesis gas methanol yttria-stabilized zirconia catalyst oxygen storage rare earths

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Room-temperature synthesis of ZrSnO4 nanoparticles for electron transport layer in efficient planar hetrojunction perovskite solar cells

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Journal of Materials Science & Technology 2020年第7期42卷 38-45页

作者： Young wook Noh In Su Jin Sang Hyun Park jae Woong Jung Department of Advanced Materials Engineering for Information&Electronics Kyung Hee University1732 Deogyeong-daeroGiheung-guYongin-siGyeonggi-do 446-701Republic of Korea

The interface engineering plays a key role in controlled optoelectronic properties of perovskite photovoltaic devices,and thus the electron transport layer(ETL)material with tailored optoelectronic properties remains a challenge for achieving high photovoltaic performance of planar perovskite solar cells(PSCs).Here,the fine and crystalline zirconium stanate(ZrSnO4)nanoparticles(NPs)was synthesized at low temperature,and its optoelectronic properties are systematically *** from the favorable electronic structure of ZrSnO4 NPs for applications in ETL,efficient electron transport and extraction with suppre s sed charge recombination are achieved at the interface of perovskite *** a result,the optimized ZrSnO4 NPs synthesized at room-temperature deliver the optimized power conversion efficiency up to 16.76%with acceptable *** work opens up a new class of ternary metal oxide for the use in ETL of the planar PSCs and should pave the way toward designing new interfacial materials for practical optoelectronic devices.

关键词： ZrSnO4 Electron transport layer Nanoparticles Perovskite solar cells

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Adsorption and photocatalytic degradation of bisphenol A using TiO2 and its separation by submerged hollowfiber ultrafiltration membrane

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Journal of Environmental Sciences 2006年第1期18卷 193-200页

作者： jae-wook Lee Tae-Ouk Kwon Ramesh Thiruvenkatachari Il-Shik Moon Department of Chemistry Engineer Seonam University Namwon 590-711 Korea Department of Chemistry Engineer Sunchon National University Suncheon 540-742 Korea

This study evaluates the adsorption ability ofbisphenol A（BPA） on titanium dioxide（TiO2） and its effect on the photocatalysis by advanced oxidation process using UV radiation and TiO2 photocatalyst. Degradation of BPA was also evaluated for the system without adsorption prior to photocatalytic reaction. The separation of TiO2 from BPA solution treated by pilot-scale photocatalytic reactor （capacity 0.16 m^3） was studied using submerged ultrafiltration （UF） membrane. It was found that although adsorption capacity of BPA was not high, adsorption played an important role in improving the efficiency ofphotocatalysis. On the other hand, during the separation of TiO2 particles from aqueous suspension, the permeate flux of the membrane was strongly affected by transmembrane pressure and TiO2 dose. The permeate turbidity was decreased below 1 NTU.

关键词： bisphenol A TiO2 adsorption membrane photocatalysis

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Methane Conversion Using Dielectric Barrier Discharge: Comparison with Thermal Process and Catalyst Effects

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Journal of Natural Gas Chemistry 2006年第2期15卷 87-92页

作者： Antonius Indarto jae-wook Choi Hwaung Lee Hyung Keun Song Korea Institute of Science and Technology Clean Technology Research CenterP.O. Box 131CheongryangSeoul 130-650Korea

The direct conversion of methane using a dielectric barrier discharge has been experimentally studied. Experiments with different values of flow rates and discharge voltages have been performed to investigate the effects on the conversion and reaction products both qualitatively and quantitatively. Experimental results indicate that the maximum conversion of methane has been 80% at an input flow rate of 5 ml/min and a discharge voltage of 4 kV. Experimental results also show that the optimum condition has occurred at a high discharge voltage and higher input flow rate. In terms of product distribution, a higher flow rate or shorter residence time can increase the selectivity for higher hydrocarbons. No hydrocarbon product was detected using the thermal method, except hydrogen and carbon. Increasing selectivity for ethane was found when Pt and Ru catalysts presented in the plasma reaction. Hydrogenation of acetylene in the catalyst surface could have been the reason for this phenomenon as the selectivity for acetylene in the products was decreasing.

关键词： plasma dielectric barrier discharge thermal process methane conversion catalyst

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Partial Oxidation of Methane with Sol-Gel Fe/Hf/YSZ Catalyst in Dielectric Barrier Discharge: Catalyst Activation by Plasma

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Journal of Rare Earths 2006年第5期24卷 513-518页

作者： Antonius Indarto jae-wook Choi Hwaung Lee Hyung Keun Song Jelliarko Palgunadi Clean Technology Research Center Korea Institute of Science and Technology KoreaDepartment of Chemical and Biological Engineering Korea University Korea Clean Technology Research Center Korea Institute of Science and Technology Korea Hydrogen Energy Research Center Korea Institute of Science and Technology Korea

A 1% Fe-30% Hf over yttria-stabilized zirconia catalyst in combination with novel plasma-assisted activation techniques for a direct partial oxidation of methane to methanol was tested using dielectric barrier discharge plasma at ambient temperature and atmospheric pressure. However, instead of methanol, the reaction products were dominated by HE, CO, CO2, C2, and H2O. A catalytically activated plasma process increased the production of methanol compared with a noncatalytic plasma process. The maximum selectivity of methanol production was achieved using a catalyst that was treated at higher applied power.

关键词： methane oxidation dielectric barrier discharge catalyst plasma activation rare earths

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Virtual Mold Technique in Thermal Stress Analysis during Casting Process

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Journal of Materials Science & Technology 2008年第3期24卷 359-363页

作者： Si-Young Kwak jae-wook Baek Jeong-Ho Nam Jeong-Kil Choi E-Design Center Korea Institute of Industrial Technology Department of Virtual Engineering Korea University of Science & Technology

It is important to analyse the casting product and the mold at the same time considering thermal contraction of the casting and thermal expansion of the mold. The analysis considering contact of the casting and the mold induces the precise prediction of stress distribution and the defect such as hot tearing. But it is difficult to generate FEM mesh for the interface of the casting and the mold. Moreover the mesh for the mold domain spends lots of computational time and memory for the analysis due to a number of meshes. Consequently we proposed the virtual mold technique which only uses mesh of the casting part for thermal stress analysis in casting process. The spring bar element in virtual mold technique is used to consider the contact of the casting and the mold. In general, a volume of the mold is much bigger than that of casting part, so the proposed technique decreases the number of mesh and saves the computational memory and time greatly. In this study, the proposed technique was verified by the comparison with the traditional contact technique on a specimen. And the proposed technique gave satisfactory results.

关键词： Casting process Thermal stress analysis Virtual mold

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Curcumin-induced cell death depends on the level of autophagic flux in A172 and U87MG human glioblastoma cells

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Chinese Journal of Natural Medicines 2020年第2期18卷 114-122页

作者： Lee Jong-Eun Yoon Sung Sik Lee jae-wook Moon Eun-Yi Department of Bioscience and Biotechnology Sejong UniversitySeoul 05006Republic of Korea

Glioblastoma is the deadliest neoplasm with the worst 5-year survival rate among all human *** promotes autophagic cell death or blocks the induction of apoptosis in eukaryotic ***,we investigated whether varying levels of autophagic flux in glioblastoma lead to different efficacies of curcumin treatment using U87 MG and A172 human glioblastoma *** number of LC3 puncta,the number of cells with LC3 puncta and the level of LC3 Ⅱ,Atg5 and Atg7 protein were higher in U87 MG cells compared with A172 *** the cells were incubated with curcumin for 24 or 48 h,the percentage of cell death was higher in A172 cells compared with U87 MG *** the level of LC3 was lower,that of curcumin-induced LC3 was higher,in A172 cells than in U87 MG *** relative increases in cell death and LC3-mediated autophagy were greater under serum starvation in A172 cells compared with U87 MG ***-induced A172 cell death was reduced by serum *** both types of cells were transfected with LC3-GFP,the percentage of cell death was higher in A172 cells than that in U87 MG *** together,the data demonstrate that curcumin-mediated tumor cell death is regulated by the basal level of autophagic flux in different glioblastoma *** suggests that prior to the use of various curcumin therapeutics,the level of basal or induced autophagic flux should be carefully examined in tumor cells for the best efficacy.

关键词： Glioblastoma A172 U87MG Autophagic flux Curcumin

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The kinetic studies of direct methane oxidation to methanol in the plasma process

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Chinese Science Bulletin 2008年第18期53卷 2783-2792页

作者： INDARTO Antonius CHOI jae-wook LEE Hwaung SONG Hyung Keun Department of Chemical and Biochemical Engineering Korea UniversitySeoul 136-701KoreaClean Technology Research Center Korea Institute of Science and Technology Seoul 130-650 Korea Clean Technology Research Center Korea Institute of Science and TechnologySeoul 130-650 Korea Clean Technology Research Center Korea Institute of Science and TechnologySeoul 130-650Korea

The research outlined here includes a study of methanol production from direct methane conversion by means of thermal and plasma method. The kinetic study, derived from thermal-based approach, was carried out to investigate thoroughly the possible intermediate species likely to be presented in the process. A set of plasma experiments was undertaken by using dielectric barrier discharge (DBD), classified as non-thermal plasma, done at atmospheric pressure and room temperature. Plasma proc- ess yields more methanol than thermal process at the same methane conversion rates and methane to oxygen feed ratios. Oxidation reaction of thermal process resulted CO and CO2 as the most dominant products and the selectivity reached 19% and 68%, respectively. Moreover, more CO and less CO2 were produced in plasma process than in thermal process. The selectivity of CO and CO2 by plasma was 47% and 20%, respectively. Ethane (C2H6) was detected as the only higher hydrocarbon with a signifi- cant concentration. The concentration of ethane reached 9% of the total products in plasma process and 17% in thermal process. The maximum selectivity of methanol, the target material of this research, was 12% obtained by plasma method and less than 5% by thermal process. In some certain points, the kinetic model closely matched with the experimental results.

关键词：等离子体热采方法部分氧化甲烷甲醇

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