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Low-thermal-budget electrically active thick polysilicon for CMOS-First MEMS-last integration

Microsystems & Nanoengineering 2024年第3期10卷 395-407页

作者： Aron Michael ian yao-hsiang chuang Chee Yee Kwok Kazuo Omaki UNSW SydneyNSW 2052Australia

Low-thermal-budget,electrically active,and thick polysilicon films are necessary for building a microelectromechanical system(MEMS)on top of a complementary metal oxide semiconductor(CMOS).However,the formation of these polysilicon films is a challenge in this ***,for the first time,the development of in situ phosphorus-doped silicon films deposited under ultrahigh-vacuum conditions(~10^(−9)Torr)using electron-beam evaporation(UHVEE)is *** process results in electrically active,fully crystallized,low-stress,smooth,and thick polysilicon films with low thermal *** crystallographic,mechanical,and electrical properties of phosphorus-doped UHVEE polysilicon films are *** films are compared with intrinsic and boron-doped UHVEE silicon *** spectroscopy,X-ray diffraction(XRD),transmission electron microscopy(TEM)and atomic force microscopy(AFM)are used for crystallographic and surface morphological *** curvature,cantilever deflection profile and resonance frequency measurements are employed to study the mechanical properties of the ***,resistivity measurements are conducted to investigate the electrical properties of the *** vertical,high-aspectratio micromachining of UHVEE polysilicon has been developed.A comb-drive structure is designed,simulated,fabricated,and characterized as an actuator and inertial sensor comprising 20-μm-thick in situ phosphorus-doped UHVEE films at a temperature less than 500℃.The results demonstrate for the first time that UHVEE polysilicon uniquely allows the realization of mechanically and electrically functional MEMS devices with low thermal budgets.

关键词： budget thick thermal

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COVID-19 outbreaks in residential care homes in Hong Kong and effectiveness of vaccine against severe outcomes

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Infectious Medicine 2023年第1期2卷 1-10页

作者： Mei Hung Joanna Leung Kin Hang Kung ian Siu-kiu Yau Yan Yee Fung Kirran Nazesh Mohammad Cheong Chi Andrew Lau Ka Wing Albert Au Shuk Kwan chuang Centre for Health Protection Department of HealthKowloonHong KongChina

Background:COVID-19 outbreaks in residential care homes for the elderly(RCHEs)and for persons with disability(RCHDs)have caused significant morbidity and mortality during 5th epidemic in Hong *** article reviewed COVID-19 outbreaks situation and estimated the effectiveness of receiving at least two-dose of COVID-19 vaccine in preventing severe ***:To estimate attack rates and vaccination coverage,documentation on COVID-19 infection and their vaccination records of residential care homes(RCH)residents reported between December 31,2021 and May 31,2022 were reviewed,and infected cases were follow-up for 4 weeks for severe outcomes or *** between vaccination coverage against attack rate by types of homes was *** RCH residents with available information were included in the analysis of vaccine effectiveness against severe outcomes and ***:COVID-19 vaccination coverage was low in RCHDs(median 0.46,IQR:0.24-0.76)and very low in RCHEs(median 0.08,IQR:0.00-0.19).Higher attack rates were recorded among RCHE residents(median 0.84,IQR:0.64-0.93)and higher case fatality rate(CFR:28.1%)than in RCHDs(median 0.58,IQR:0.31-0.84;CFR:3.9%).The attack rate decreased when vaccination coverage increased for both RCHEs(ρ=−0.131,p<0.001)and RCHDs(ρ=−0.333,p<0.001).Comparing with infected residents who were unvaccinated/vaccinated with one-dose,receiving at least two-dose was estimated to be effective in reducing severe outcomes in 31%and 36%of infected RCHE and RCHD residents respectively;with greater reduction in mortality among RCHD than RCHE residents(54%and 38%,respectively).Vaccine effectiveness of two-dose of BNT162b2 against severe outcomes and death are higher than that of ***:Increasing COVID-19 vaccination could have significant impact on reducing the risk of COVID-19 outbreaks in *** least two-dose of COVID-19 vaccine is still effective in reducing severe outcomes and death among infected residents in

关键词： COVID-19 Attack rates Long-term care facilities Vaccine effectiveness Severe outcomes Hong Kong China

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猪非典型瘟病毒GX01-2018株全基因组分子特征的分析

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中国兽医科学 2019年第4期49卷 484-492页

作者：尹彦文施开创孙文超莫胜兰陆文俊屈素洁广西动物疫病预防控制中心广西南宁530001 温州大学病毒学研究所浙江温州325035

猪非典型瘟病毒(APPV)被证实是新生仔猪先天性震颤的致病因子。为了解广西APPV流行毒株的分子遗传特征,采用RT-PCR分段扩增APPV阳性病料,经克隆、测序、拼接,获得1株APPV的全基因序列,遂被命名为GX01-2018株。结果显示,GX01-2018株基因... 详细信息

猪非典型瘟病毒(APPV)被证实是新生仔猪先天性震颤的致病因子。为了解广西APPV流行毒株的分子遗传特征,采用RT-PCR分段扩增APPV阳性病料,经克隆、测序、拼接,获得1株APPV的全基因序列,遂被命名为GX01-2018株。结果显示,GX01-2018株基因组全长11 565 bp,包括一个编码3 635个氨基酸的阅读框(ORF)。同源性分析显示,GX01-2018株与国内代表毒株广西GX-CH_2016株、江西JX-JM01-2018A01株、广东China/GD-SD/2016株、广东GD株核苷酸序列的同源性分别为98.2%、92.9%、83.4%、90.8%。GX01-2018株与国外代表毒株美国000515株、德国Bavaria_S5/9株、奥地利AUT-2016_C株、荷兰NL1株核苷酸序列的同源性分别为87.8%、90.7%、90.5%、90.7%。上述国内外代表毒株间Npro、Erns、E2基因核苷酸序列的同源性分别为79.1%～97.2%、83.0%～98.4%、83.1%～96.8%。基于APPV全基因组以及E2、Npro、Erns基因核苷酸序列绘制遗传进化树,获得相似的进化树图。来自广西的GX01-2018株与欧洲型毒株位于一个分支,而同样来自广西的GX04/2017株与美洲型毒株位于另一个分支。表明APPV流行毒株具有遗传多样性,来自同一地区的流行毒株出现较大的遗传变异。

关键词：猪非典型瘟病毒基因组序列遗传变异遗传多样性分子特征

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超薄磁盘保护膜的制备技术

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真空 2005年第5期42卷 17-21页

作者：李艳琴丁万昱邓新绿董闯徐军陈小猛大连理工大学三束材料表面改性国家重点实验室大连辽宁116024

类金刚石薄膜和氮化硅薄膜都是性能很好的绝缘材料,可以用于对磁盘进行保护,在本文中主要讨论了它们各自的制备方法。随着巨磁阻读写磁头(g ian tm agneto-res istive heads)技术的引入,磁盘的存储密度以每年100%的速度在增加,这就要求... 详细信息

类金刚石薄膜和氮化硅薄膜都是性能很好的绝缘材料,可以用于对磁盘进行保护,在本文中主要讨论了它们各自的制备方法。随着巨磁阻读写磁头(g ian tm agneto-res istive heads)技术的引入,磁盘的存储密度以每年100%的速度在增加,这就要求磁盘保护膜的厚度要尽量的小,所以对制备方法有一定的要求。对类金刚石磁盘保护膜,可以使用等离子体磁控溅射沉积、磁过滤阴极弧沉积、等离子体化学气相沉积来制备;对氮化硅磁盘保护膜,可以使用射频反应溅射沉积来制备。

关键词：类金刚石氮化硅磁盘保护膜

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CEPC Technical Design Report

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Radiation Detection Technology and Methods 2024年第1期8卷 I0003-I0016,1-1091页

作者： Waleed Abdallah Tiago Carlos Adorno de Freitas Konstantin Afanaciev Shakeel Ahmad Ijaz Ahmed Xiaocong Ai Abid Aleem Wolfgang Altmannshofer Fabio Alves Weiming An Rui An Daniele Paolo Anderle Stefan Antusch Yasuo Arai Andrej Arbuzov Abdesslam Arhrib Mustafa Ashry Sha Bai Yu Bai Yang Bai Vipul Bairathi Csaba Balazs Philip Bambade Yong Ban Tripamo Bandyopadhyay Shou-Shan Bao Desmond P.Barber Ayse Bat Varvara Batozskaya Subash Chandra Behera Alexander Belyaev Michele Bertucci Xiao-Jun Bi Yuanjie Bi Tianjian Bian Fabrizio Bianchi Thomas Biekotter Michela Biglietti Shalva Bilanishvili Deng Binglin Denis Bodrov Anton Bogomyagkov Serge Bondarenko Stewart Boogert Maarten Boonekamp Marcello Borri Angelo Bosotti Vincent Boudry Mohammed Boukidi Igor Boyko Ivanka Bozovic Giuseppe Bozzi Jean-Claude Brient Anastasiia Budzinskaya Masroor Bukhari Vladimir Bytev Giacomo Cacciapaglia Hua Cai Wenyong Cai Wujun Cai Yijian Cai Yizhou Cai Yuchen Cai Haiying Cai Huacheng Cai Lorenzo Calibbi Junsong Cang Guofu Cao Jianshe Cao Antoine Chance Xuejun Chang Yue Chang Zhe Chang Xinyuan Chang Wei Chao Auttakit Chatrabhuti Yimin Che Yuzhi Che Bin Chen Danping Chen Fuqing Chen Fusan Chen Gang Chen Guoming Chen Hua-Xing Chen Huirun Chen Jinhui Chen Ji-Yuan Chen Kai Chen Mali Chen Mingjun Chen Mingshui Chen Ning Chen Shanhong Chen Shanzhen Chen Shao-Long Chen Shaomin Chen Shiqiang Chen Tianlu Chen Wei Chen Xiang Chen Xiaoyu Chen Xin Chen Xun Chen Xurong Chen Ye Chen Ying Chen Yukai Chen Zelin Chen Zilin Chen Gang Chen Boping Chen Chunhui Chen Hok Chuen Cheng Huajie Cheng Shan Cheng Tongguang Cheng Yunlong Chi Pietro Chimenti Wen Han Chiu Guk Cho Ming-Chung Chu Xiaotong Chu Ziliang Chu Guglielmo Coloretti Andreas Crivellin Hanhua Cui Xiaohao Cui Zhaoyuan Cui Brunella D'Anzi Ling-Yun Dai Xinchen Dai Xuwen Dai Antonio De Maria Nicola De Filippis Christophe De La Taille Francesca De Mori Chiara De Sio Elisa Del Core Shuangxue Deng Wei-Tian Deng Zhi Deng Ziyan Deng Bhupal Dev Tang Dewen Biagio Di Micco Ran Ding Siqin Dingl Yadong Ding Haiyi Dong Jianin AGH University of Science and Technology Faculty of Physics and Applied Computer ScienceKrakow Anhui University HefeiAnhui Applied Physics Department Federal Urdu University of ArtsScience and TechnologyIslamabad Banaras Hindu University Institute of ScienceVaranasi Bandirma Onyedi Eylul University Bandirma Beihang University Beijing Beijing Computational Science Research Center Beijing Beijing Conveyi LTD Beijing Beijing Glass Research Institute Co. LtdBeijing Beijing Institute of Technology Beijing Beijing Normal University Beijing Brown University ProvidenceRI Budker Institute of Nuclear Physics Novosibirsk Cadi Ayyad University Laboratory of Fundamental and Applied PhysicsPolydisciplinary FacultyMarrakech Cairo University Giza Center for Theory and Computation National Tsing Hua UniversityHsinchu Central China Normal University WuhanHubei Central South University ChangshaHunan Centro de Fisica Teorica de Particulas Universidade Tecnica de LisboaLisboa Chengdu KaitengSifang Digital Radio&TV Equipment Co. LtdChengduSichuan China academy of engineering physics MianyangSichuan China building materials academy Beijing China Center of Advanced Science and Technology Beijing China Institute of Atomic Energy Beijing China Jiliang University HangzhouZhejiang China Nuclear Instrument CO. LTDBeijing China University of Geosciences Beijing China University of Geosciences WuhanHubei China University of Mining and Technology XuzhouJiangsu China West Normal University NanchongSichuan Chongqing University Department of PhysicsChongqing Chulalongkorn University Bangkok City University of Hong Kong Department of PhysicsHong Kong Cockcroft Institute Daresbury Cornell University IthacaNY CPPM(AMU/IPhU&CNRS/INP) Marseille Dalian Minzu University DalianLiaoning Dalian University of Technology Department of PhysicsDalian Deutsches Elektronen-Synchrotron DESY Hamburg Dzhelepov Laboratory of Nuclear Problems of Joint Institute for Nuclear Research(DLNP JINR) Dubna East China University Of Science And Technol

The Circular Electron Positron Collider(CEPC)is a large scientific project initiated and hosted by China,fostered through extensive collaboration with international *** complex comprises four accelerators:a 30 GeV Linac,a 1.1 GeV Damping Ring,a Booster capable of achieving energies up to 180 GeV,and a Collider operating at varying energy modes(Z,W,H,and tt).The Linac and Damping Ring are situated on the surface,while the subterranean Booster and Collider are housed in a 100 km circumference underground tunnel,strategically accommodating future expansion with provisions for a potential Super Proton Proton Collider(SPPC).The CEPC primarily serves as a Higgs *** its baseline design with synchrotron radiation(SR)power of 30 MW per beam,it can achieve a luminosity of 5×10^(34)cm^(-2)s^(-1)per interaction point(IP),resulting in an integrated luminosity of 13 ab^(-1)for two IPs over a decade,producing 2.6 million Higgs *** the SR power to 50 MW per beam expands the CEPC's capability to generate 4.3 million Higgs bosons,facilitating precise measurements of Higgs coupling at sub-percent levels,exceeding the precision expected from the HL-LHC by an order of *** Technical Design Report(TDR)follows the Preliminary Conceptual Design Report(Pre-CDR,2015)and the Conceptual Design Report(CDR,2018),comprehensively detailing the machine's layout,performance metrics,physical design and analysis,technical systems design,R&D and prototyping efforts,and associated civil engineering ***,it includes a cost estimate and a preliminary construction timeline,establishing a framework for forthcoming engineering design phase and site selection *** is anticipated to begin around 2027-2028,pending government approval,with an estimated duration of 8 *** commencement of experiments and data collection could potentially be initiated in the mid-2030s.

关键词： initiated exceeding precise

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