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Improved formaldehyde gas sensing properties of well-controlled Au nanoparticle-decorated In2O3 nanofibers integrated on low power MEMS platform

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Journal of Materials Science & Technology 2020年第3期38卷 56-63页

作者： Dongha Im Donghyun Kim Dasol Jeong Woon Ik Park Myoungpyo Chun Joon-Shik Park Hyunjung Kim hyunsung jung Nano Materials&Nano Technology Center Korea Institute of Ceramic Engineering&TechnologyJinju 52851Republic of Korea Department of Mineral Resources and Energy Engineering Chonbuk National UniversityJeonju 54896Republic of Korea Smart Sensor Research Center Korea Electronic Technology InstituteSeongnam 13509Republic of Korea

Approaches for the fabrication of a low power-operable formaldehyde(HCHO)gas sensor with high sensitivity and selectivity were performed by the utilization of an effective micro-structured platform with a micro-heater to reach high temperature with low heating power as well as by the integration of indium oxide(In2O3)nanofibers decorated with well-dispersed Au nanoparticles as a sensing *** In2O3 nanofibers with the large specific surface area were prepared by the electrospinning following by calcination *** nanoparticles with the well-controlled size as a catalyst were synthesized on the surface of In2O3 *** Au-decorated In2O3 nanofibers were reliably integrated as sensing materials on the bridge-type micro-platform including micro-heaters and *** micro-platform designed to maintain high temperature with low power consumption was fabricated by a microelectromechanical system(MEMS)*** micro-platform gas sensor consisting with Au-In2O3 nanofibers were fabricated effectively to detect HCHO gases with high sensitivity and *** HCHO gas sensing behaviors were schematically studied as a function of the gas concentration,the size of the adsorbed Au nanoparticles,the applied power to raise the temperature of a sensing part and the kind of target gases.

关键词： Gold nanoparticle In2O3 nanofiber Formaldehyde Gas sensor Low power Micro-platform

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