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Highly-sensitive wafer-scale transfer-free graphene mEmS condenser microphones

microsystems & Nanoengineering 2024年第1期10卷 267-275页

作者： Roberto Pezone Sebastian Anzinger gabriele Baglioni huto.o.suryo.wasisto.pasqualina m.sarro.peter g.steeneken Sten Vollebregt Laboratory of Electronic Components Technology and Materials(ECTM)Department of MicroelectronicsDelft University of TechnologyDelftThe Netherlands Infineon Technologies Ag Am Campeon 1-15Neubiberg 85579Germany Kavli Institue of Nanoscience Department of Quantum NanoscienceDelft University of TechnologyDelftthe Netherlands Department of Precision and microsystems Engineering(PmE) Delft University of TechnologyDelftThe Netherlands

Since the performance of micro-electro-mechanical system(mEmS)-based microphones is approaching fundamental physical,design,and material limits,it has become challenging to improve *** works have demonstrated graphene’s suitability as a microphone *** potential for achieving smaller,more sensitive,and scalable onchip mEmS microphones is yet to be *** address large graphene sizes,graphene-polymer heterostructures have been proposed,but they compromise performance due to added polymer mass and *** work demonstrates the first wafer-scale integrated mEmS condenser microphones with diameters of 2R=220-320μm,thickness of 7 nm multi-layer graphene,that is suspended over a back-plate with a residual gap of 5μ*** microphones are manufactured with mEmS compatible wafer-scale technologies without any transfer steps or polymer layers that are more prone to contaminate and wrinkle the *** designs,all electrically integrated are fabricated and characterized allowing us to study the effects of the introduction of a back-plate for capacitive *** devices show high mechanical compliances C_(m)=0.081-1.07μmPa^(−1)(10-100×higher than the silicon reported in the state-of-the-art diaphragms)and pull-in voltages in the range of 2-9.5 *** addition,to validate the proof of concept,we have electrically characterized the graphene microphone when subjected to sound *** estimated sensitivity of S_(1kHz)=24.3-321 mV Pa^(−1)for a V_(bias)=1.5 V was determined,which is 1.9-25.5×higher than of state-of-the-art microphone devices while having a~9×smaller area.

关键词： transfer plate approaching

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Nanoelectromechanical Sensors Based on Suspended 2D materials

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Research 2020年第1期2020卷 1612-1636页

作者： max C.Lemme Stefan Wagner Kangho Lee Xuge Fan gerard J.Verbiest Sebastian Wittmann Sebastian Lukas Robin J.Dolleman Frank Niklaus Herre S.Jvan der Zant georg S.Duesberg peter g.steeneken Chair of Electronic Devices RWTH Aachen UniversityOtto-Blumenthal-Str.252074 AachenGermany Amo gmbH Advanced Microelectronic Center Aachen(AMICA)Otto-Blumenthal-Str.2552074 AachenGermany Institute of Physics Faculty of Electrical Engineering and Information TechnologyUniversität der Bundeswehr MünchenWerner-Heisenberg-Weg 3985577 NeubibergGermany Division of micro and Nanosystems KTH Royal Institute of TechnologyMalvinas Vag 1010044 StockholmSweden Department of Precision and microsystems Engineering Delft University of TechnologyMekelweg 22628 CD DelftNetherlands Infineon Technologies Ag Wernerwerkstraße 293049 RegensburgGermany nd Institute of Physics RWTH Aachen UniversityOtto-Blumenthal-Str.52074 AachenGermany Kavli Institute of Nanoscience Delft University of TechnologyLorentzweg 12628 CJ DelftNetherlands

The unique properties and atomic thickness of two-dimensional(2D)materials enable smaller and better nanoelectromechanical sensors with novel *** the last decade,many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors,microphones,accelerometers,and mass and gas *** this review,we explain the different sensing concepts and give an overview of the relevant material properties,fabrication routes,and device operation ***,we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.

关键词： Sensors enable accelerometer

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Sensitive capacitive pressure sensors based on graphene membrane arrays

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microsystems & Nanoengineering 2020年第1期6卷 176-184页

作者： makars Siskins martin Lee Dominique Wehenkel Richard van Rijn Tijmen W.de Jong Johannes R.Renshof Berend C.Hopman Willemijn S.J.m.peters Dejan Davidovikj Herre S.J.van der Zant peter g.steeneken Kavli Institute of Nanoscience Delft University of TechnologyLorentzweg 12628 CJ DelftThe Netherlands Applied Nanolayers B.V. Feldmannweg 172628 CT DelftThe Netherlands Department of Precision and microsystems Engineering Delft University of TechnologyMekelweg 22628 CD DelftThe Netherlands

The high flexibility,impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical ***,for capacitive pressure sensors,the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial ***,we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small,freestanding double-layer graphene *** fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene,even after high-temperature *** sensors are readout using a low-cost battery-powered circuit board,with a responsivity of up to 47:8aF Pa^(−1) mm^(−2),thereby outperforming the commercial sensors.

关键词： graphene arrays thereby

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