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Microsphere-assisted hyperspectral imaging:super-resolution,non-destructive metrology for semiconductor devices

Light(Science & Applications) 2024年第6期13卷 1098-1111页

作者： Jangryul Park Youngsun Choi Soonyang Kwon Youngjun lee Jiwoong Kim Jae-joon Kim Jihye lee Jeongho Ahn Hidong Kwak Yusin Yang Taeyong Jo Myungjun lee Kwangrak Kim Metrology and Inspection Equipment R&D Team Mechatronics ResearchSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department DRAM Process Development TeamSemiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department Semiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea

As semiconductor devices shrink and their manufacturing processes advance,accurately measuring in-cell critical dimensions(CD)becomes increasingly *** test element group(TEG)measurements are becoming inadequate for representing the fine,repetitive patterns in cell *** non-destructive metrology technologies like optical critical dimension(OCD)are limited due to their large spot diameter of approximately 25μm,which impedes their efficacy for detailed in-cell structural ***,there is a pressing need for small-spot and non-destructive metrology *** address this limitation,we demonstrate a microsphere-assisted hyperspectral imaging(MAHSI)system,specifically designed for small spot optical metrology with *** microsphere-assisted super-resolution imaging,this system achieves an optical resolution of 66 nm within a field of view of 5.6μm×5.6μ*** approach effectively breaks the diffraction limit,significantly enhancing the magnification of the *** MAHSI system incorporating hyperspectral imaging with a wavelength range of 400–790 nm,enables the capture of the reflection spectrum at each camera *** achieved pixel resolution,which is equivalent to the measuring spot size,is 14.4 nm/pixel and the magnification is *** MAHSI system enables measurement of local uniformity in critical areas like corners and edges of DRAM cell blocks,areas previously challenging to inspect with conventional OCD *** our knowledge,this approach represents the first global implementation of microsphere-assisted hyperspectral imaging to address the metrology challenges in complex 3D structures of semiconductor devices.

关键词： metrology resolution enable

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Water droplets play a role in Internet of Things applications

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Droplet 2024年第3期3卷 27-48页

作者： Feng Wen Chengkuo lee Department of Electrical and Computer Engineering National University of SingaporeSingapore Center for Intelligent Sensors and MEMS(CISM) National University of SingaporeSingapore i-Lab Key Laboratory of Multifunctional Nanomaterials and Smart SystemsSuzhou Institute of Nano-Tech and Nano-Bionics(SINANO)Chinese Academy of Sciences(CAS)SuzhouChina NUS Graduate School—Integrative Sciences and Engineering Programme(ISEP) National University of SingaporeSingapore

Water droplets help life in nature survive,thrive,and *** water droplet serv-ing as one of the indispensable elements in the Internet of Things(IoT),many droplet-oriented technologies,such as microfluidics,droplet manipulation,electrowetting,and energy harvesting,make rapid progress driven by material science,computer science,and ***-based wearable devices are endowed with advantages such as flexibility,sensing ability,and automation for various parameter ***,the continuous exploration of droplet manipulation has led to the emergence of a wide variety of manipulation ***,electrowetting that utilizes exter-nal fields modifying liquid–solid surfaces has found its applications in various areas,including droplet transportation,microfabrication,and *** energy gener-ation from water droplets also presents exciting opportunities for the development of novel electricity *** approaches for droplet utilization underscore the immense potentials and versatilities of droplet-based technologies in the IoT ***,this mini review presents the fundamental droplet-based technologies by summarizing their working mechanisms and methods,device structures,and *** the challenges in materials,fabrication,and system integration,this review shows the overall development roadmap in terms of improved functionality and performance and highlights the opportunities toward multifunctional,self-sustainable,and intelligent systems,which is called for IoT construction.

关键词： IoT utilize fabrication

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Investigation of acoustic attributes based on preference and perceptional acoustics of Korean traditional halls for optimal design solutions

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Building Simulation 2024年第5期17卷 723-738页

作者： Beta Bayu Santika Haram lee Jin Yong Jeon Department of Architectural Engineering Hanyang UniversitySeoul 04763R.O.Korea

Immersed in the rich tapestry of traditional culture,Gugak,the traditional Korean music stands as a captivating embodiment of artistic *** study embarked on a comprehensive evaluation of a Gugak hall,employing acoustic measurements,computer simulations,and subjective perception *** evaluation focused on the reverberance,clarity,spatial impression,and preference,unravelling the secrets that shape the immersive Gugak *** intricate computer simulations and auralization,the experience of Gugak performances was meticulously brought to life,allowing exploration under diverse conditions by adjusting stage volume ratios from -20% to+20% and modifying the interior materials,including the walls,ceiling,and lateral *** Gugak halls exhibited relatively low values of reverberation time(RT),early decay time(EDT),and binaural quality index(BQI)the dominant factor influencing the acoustic environment was the effect of sound strength(G).Musical clarity(C80)value did not show an inverse proportionality to the reverberation ***,genre differences between traditional Korean and Western classical music did not significantly affect listeners’perception and satisfaction with regards to reverberance,clarity,and spatial *** a result,Gugak halls can adhere to the same acoustic design criteria as Western orchestra halls,since this study found that people perceived them the same *** this study,sound strength was found to be strongly correlated with perception *** was possible to enhance listeners’perception and preference regarding the acoustic environment through material and structural changes to the sidewalls and *** changes improved the reinforcement of low frequencies and simultaneously enhanced the relative effect of side ***,enhancing the reflection and spatial characteristics of the materials effectively improved listener *** on these findings,an optimal des

关键词： Korean traditional hall acoustical parameters perceptual evaluation acoustic preference stage volume ratio

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Recent advances and innovations in the design and fabrication of wearable flexible biosensors and human health monitoring systems based on conjugated polymers

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Bio-Design and Manufacturing 2024年第4期7卷 476-516页

作者： Vinh Van Tran Viet-Duc Phung Daeho lee Department of Mechanical Engineering Gachon UniversitySeongnam 13120Republic of Korea Institute of Fundamental and Applied Sciences Duy Tan UniversityHo Chi Minh City 700000Vietnam Faculty of Environmental and Chemical Engineering Duy Tan UniversityDa Nang 550000Vietnam

Wearable biosensors have received great interest as patient-friendly diagnostic technologies because of their high flexibility and *** growing research and utilization of novel materials in designing wearable biosensors have accelerated the development of point-of-care sensing platforms and implantable biomedical devices in human health *** numerous potential materials,conjugated polymers(CPs)are emerging as ideal choices for constructing high-performance wearable biosensors because of their outstanding conductive and mechanical ***,CPs have been extensively incorporated into various wearable biosensors to monitor a range of target ***,fabricating highly reliable CP-based wearable biosensors for practical applications remains a significant challenge,necessitating novel developmental strategies for enhancing the viability of such ***,this review aims to provide consolidated scientific evidence by summarizing and evaluating recent studies focused on designing and fabricating CP-based wearable biosensors,thereby facilitating future *** the superior properties and benefits of CPs,this review aims to clarify their potential applicability within this ***,the fundamentals and main components of CP-based wearable biosensors and their sensing mechanisms are discussed in *** recent advancements in CP nanostructures and hybridizations for improved sensing performance,along with recent innovations in next-generation wearable biosensors are *** wearable biosensors have been—and will continue to be—an ideal platform for developing effective and user-friendly diagnostic technologies for human health monitoring.

关键词： Conjugated polymers Wearable biosensors E-skin electronics Implantable biosensors Conductive polymer hydrogels

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Effect of Eu3+,Bi3+,and Li+ doping on luminescent property of GdNbO4

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Journal of Rare Earths 2024年第1期42卷 66-75页

作者： S.W.Wi Y.S.lee Department of Physics and Integrative Institute of Basic Sciences Soongsil University

We investigated the emission properties of Eu3+-doped GdNbO4-based oxide phosphors,aiming at improving the Eu3+emission by codoping of Bi3+and Li+.Eu3+singly doped,Eu3+and Bi3+doubly doped,and Eu3+,Bi3+,and Li+triply doped GdNbO4were prepared using a high-temperature solid-state reaction *** red-orange emissions from Eu3+in the singly doped samples are significantly improved by the codoping of Bi3+,mainly due to the energy transfer from Bi3+to Eu3+.The additional codoping of Li+is found to increase the Eu3+emission *** improvement might be attributed to the increase in the photoluminescent quantum yield originating from larger grain sizes and better crystallinity.A detailed analysis of the X-ray diffraction pattern and the asymmetric ratio estimated from the photoluminescence spectra show that the local lattice environment around Eu3+in GdNbO4does not change significantly with the codoping of Bi3+and Li+.Our results indicate that Li+doping is a promising way to improve the emission properties of rare-earth ion-doped GdNbO4phosphors.

关键词： Eu 3+ GdNbO 4 Codoping of Li + Photoluminescence Sensitizer Rare earths

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Novel Perovskite Oxide Hybrid Nanofibers Embedded with Nanocatalysts for Highly Efficient and Durable Electrodes in Direct CO_(2) Electrolysis

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Nano-Micro Letters 2024年第5期16卷 214-230页

作者： Akromjon Akhmadjonov Kyung Taek Bae Kang Taek lee Department of Mechanical Engineering KAISTDaejeon 34141Republic of Korea KAIST Graduate School of Green Growth and Sustainability Daejeon 34141Republic of Korea

The unique characteristics of nanofibers in rational electrode design enable effec-tive utilization and maximizing material properties for achieving highly efficient and sustainable CO_(2) reduction reactions( CO_(2)RRs)in solid oxide elec-trolysis cells(SOECs).However,practical appli-cation of nanofiber-based electrodes faces chal-lenges in establishing sufficient interfacial contact and adhesion with the dense *** tackle this challenge,a novel hybrid nanofiber electrode,La_(0.6)Sr_(0.4)Co_(0.15)Fe_(0.8)Pd_(0.05)O_(3-δ)(H-LSCFP),is developed by strategically incorporating low aspect ratio crushed LSCFP nanofibers into the excess porous interspace of a high aspect ratio LSCFP nanofiber framework synthesized via electrospinning *** consecutive treatment in 100% H_(2) and CO_(2) at 700°C,LSCFP nanofibers form a perovskite phase with in situ exsolved Co metal nanocatalysts and a high concentration of oxygen species on the surface,enhancing CO_(2) *** SOEC with the H-LSCFP electrode yielded an outstanding current density of 2.2 A cm^(-2) in CO_(2) at 800°C and 1.5 V,setting a new benchmark among reported nanofiber-based *** twinning of the H-LSCFP reveals improved contact adhesion and increased reaction sites for CO_(2)*** present work demonstrates a highly catalytically active and robust nanofiber-based fuel electrode with a hybrid structure,paving the way for further advancements and nanofiber applications in CO_(2)-SOECs.

关键词： Nanofibers Fuel electrodes Digital twinning CO_(2)reduction reaction Solid oxide electrolysis cells

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Tetradentate Pt(Ⅱ)complex as a singlet exciton sensitizing host for highly efficient green fluorescent organic light-emitting diodes

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Science China Materials 2024年第8期67卷 2618-2627页

作者： Unhyeok Jo Seung Chan Kim Chan Hee Ryu Kang Mun lee Jae-Min Kim Jun Yeob lee School of Chemical Engineering Sungkyunkwan University2066Seobu-roJangan-guSuwon-siGyeonggi-do 16419Republic of Korea Department of Chemistry Institute for Molecular Science and Fusion TechnologyKangwon National UniversityChuncheonGangwon 24341Republic of Korea Department of Advanced Materials Engineering Chung-Ang University4726Seodong-daeroDaedeok-myeonAnseong-siGyeonggi-do 17546Republic of Korea SKKU Advanced Institute of Nano Technology Sungkyunkwan University2066Seobu-roJangan-guSuwonGyeonggi 16419Republic of Korea SKKU Institute of Energy Science and Technology Sungkyunkwan University2066Seobu-roJangan-guSuwonGyeonggi 16419Republic of Korea

Efficient green fluorescent organic light-emitting diodes were designed with a phosphorescent metal complex as a singlet exciton sensitizing host(SESH)for achieving high efficiency and low efficiency roll-off through exciton and polaron *** Pt(Ⅱ)complex(Pt-Trz)possessing a tetradentate ligand with a bulky blocking group not only suppresses the severe formation of excimer or dimer itself but also transfers radiative excitons to fluorescent dopant *** SESH assisted fluorescence(SESHF)device with Pt-Trz as the host exhibits the maximum external quantum efficiency of 13.3%and a lower efficiency roll-off compared with exciplex host device which is a general approach for harvesting triplet *** exciton dynamics modeling unravels that the SESHF device effectively utilizes triplet excitons in the host by intersystem crossing and resonance energy transfer from the triplet state of the host to the singlet state of the terminal *** quenching rates of the SESHF device are reduced by 11 times for triplet-triplet annihilation and 1.8 times for tripletpolaron annihilation compared with the exciplex device,which demonstrates that Pt-Trz could be a platform to be used as an efficient host for fluorophores.

关键词： singlet annihilation polaron

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Effect of Meteorological Data Assimilation on Regional Air Quality Forecasts over the Korean Peninsula

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Journal of Meteorological Research 2024年第2期38卷 262-284页

作者： Yunjae CHO Hyun Mee KIM Eun-Gyeong YANG Yonghee lee Jae-Bum lee Soyoung HA Department of Atmospheric Sciences Yonsei UniversitySeoul 03722Republic of Korea Air Quality Forecasting Center National Institute of Environmental ResearchIncheon 22689Republic of Korea National Center for Atmospheric Research BoulderCO 80305USA University of Maryland Baltimore County BaltimoreMD 21250USA Global Modeling and Assimilation Office NASA Goddard Space Flight CenterGreenbeltMD 20771USA

The Weather Research and Forecasting model coupled with Chemistry(WRF-Chem),a type of online coupled chemistry-meteorology model(CCMM),considers the interaction between air quality and meteorology to improve air quality *** data assimilation(DA)can be used to reduce uncertainty in meteorological field,which is one factor causing prediction uncertainty in the *** this study,WRF-Chem and three-dimensional variational DA were used to examine the impact of meteorological DA on air quality and meteorological forecasts over the Korean *** nesting model domains were configured over East Asia(outer domain)and the Korean Peninsula(inner domain).Three experiments were conducted by using different DA domains to determine the optimal model domain for the meteorological *** the meteorological DA was performed in the outer domain or both the outer and inner domains,the root-mean-square error(RMSE),bias of the predicted particulate matter(PM)concentrations,and the RMSE of predicted meteorological variables against the observations were smaller than those in the experiment where the meteorological DA was performed only in the inner *** indicates that the improvement of the synoptic meteorological fields by DA in the outer domain enhanced the meteorological initial and boundary conditions for the inner domain,subsequently improving air quality and meteorological *** to the experiment without meteorological DA,the RMSE and bias of the meteorological and PM variables were smaller in the experiments with *** effect of meteorological DA on the improvement of PM predictions lasted for approximately 58-66 h,depending on the ***,the uncertainty reduction in the meteorological initial condition by the meteorological DA contributed to a reduction of the forecast errors of both meteorology and air quality.

关键词： meteorological data assimilation regional air quality forecast particulate matter concentration optimal model domain forecast error WRF-Chem

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Size effects of polydopamine-coated BaTiO_(3) nanoparticles on the piezoelectric performance of P(VDF-TrFE)/BaTiO_(3) composite

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Journal of Materiomics 2024年第4期10卷 857-869页

作者： Hyeokjun Si Donghyun lee Donghyuck Park Jeonghoon Oh Junseo Gu Inje lee Kwanlae Kim Department of Manufacturing Systems and Design Engineering(MSDE) Seoul National University of Science and Technology(SeoulTech)Seoul01811Republic of Korea

The size effect of the polydopamine(PDA)-coated BaTiO_(3)(BTO)(BTO@PDA)nanoparticles(NPs)on the interfacial compatibility between BTO NPs and the polymer matrix and the resultant piezoelectric performance of the composite films remain *** this study,BTO and BTO@PDA NPs of various sizes were incorporated into a P(VDF-TrFE)matrix to prepare two series of P(VDF-TrFE)/BTO and P(VDF-TrFE)/BTO@PDA ***,the effects of the NP size on the dielectric,ferroelectric,and piezoelectric properties of the composite films were comprehensively *** the size of the BTO@PDA NPs increased,residual hole defects were clearly observed in the cross section of the composite *** deteriorated interfacial compatibility due to the large size of the BTO@PDA NPs was also confirmed by the increased dielectric permittivity of the composite film,which was induced by the intensified interfacial *** P(VDF-TrFE)/BTO@PDA composite with NPs of the smallest size(100 nm)exhibited superior piezoelectric performance owing to the excellent interfacial compatibility between the fillers and the *** piezoelectric performance was significantly enhanced by the reduced leakage current during electrical poling and reduced trap ***,the pulse waveform originating from the radial artery was precisely measured using the optimised P(VDF-TrFE)/BTO@PDA composite film.

关键词： Barium titanate and titanates Piezoelectric properties Composites Sensors

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A Simple Embedding Method for the Laplace-Beltrami Eigenvalue Problem onImplicit Surfaces

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Communications on Applied Mathematics and Computation 2024年第2期6卷 1189-1216页

作者： Young Kyu lee Shingyu Leung Department of Mathematics The Hong Kong University of Science and TechnologyClear Water BayHong KongChina

We propose a simple embedding method for computing the eigenvalues and eigenfunctions of the Laplace-Beltrami operator on implicit *** approach follows an embedding approach for solving the surface eikonal *** replace the differential operator on the interface with a typical Cartesian differential operator in the surface *** proposed algorithm is easy to implement and *** will give some two-and three-dimensional numerical examples to demonstrate the effectiveness of our proposed approach.

关键词： Laplace-Beltrami operator Level set method Implicit representation Eigenvalues Numerical PDEs

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