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AN EXTRACTION ALGORITHM FOR A SET OF ELEMENTARY SIPHONS BASED ON MIXED-INTEGER PROGRAMMING

Journal of Systems Science and Systems Engineering 2012年第1期21卷 106-125页

作者： Shaoyong LI Zhiwu LI hesuan hu Abdulrahman AI-AHMARI Aimin AN School of Electro-Mechamcal Engmeermg Xidian University Xi＇ an 710071 P. R. China School of Ctvil Engmeertng Lanzhou University of Technology Lanzhou 730050 P. R. China College of Engineering King Saud University Riyadh 11421 Saudi Arabia

Elementary siphons are useful in the development of a deadlock prevention policy for a discrete event system modeled with Petri nets. This paper proposes an algorithm to iteratively extract a set of elementary siphons in a class of Petri nets, called system of simple sequential processes with resources （S3pR）. At each iteration, by a mixed-integer programming （MIP） method, the proposed algorithm finds a maximal unmarked siphon, classifies the places in it, extracts an elementary siphon from the classified places, and adds a new constraint in order to extract the next elementary siphon. This algorithm iteratively executes until no new unmarked siphons can be found. It finally obtains a unique set of elementary siphons and avoids a complete siphon enumeration. A theoretical analysis and examples are given to demonstrate its efficiency and practical potentials.

关键词： Petri net flexible manufacturing system deadlock prevention mixed integer programming elementary siphon

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Scheduling Dual-Arm Cluster Tools With Multiple Wafer Types and Residency Time Constraints

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IEEE/CAA Journal of Automatica Sinica 2020年第3期7卷 776-789页

作者： Jipeng Wang hesuan hu Chunrong Pan Yuan Zhou Liang Li IEEE School of Mechano-Electronic Engineering Xidian UniversityXi’an 710071China School of Computer Science and Engineering College of EngineeringNanyang Technological UniversitySingapore 639798Singapore School of Mechanical and Electrical Engineering Jiangxi University of Science and TechnologyGanzhou 341000China Department of Information Engineering Electrical Engineering and Applied MathematicsUniversity of SalernoFisciano 84084Italy

Accompanying the unceasing progress of integrated circuit manufacturing technology, the mainstream production mode of current semiconductor wafer fabrication is featured with multi-variety, small batch, and individual customization, which poses a huge challenge to the scheduling of cluster tools with single-wafer-type fabrication. Concurrent processing multiple wafer types in cluster tools, as a novel production pattern, has drawn increasing attention from industry to academia, whereas the corresponding research remains insufficient. This paper investigates the scheduling problems of dual-arm cluster tools with multiple wafer types and residency time constraints. To pursue an easy-to-implement cyclic operation under diverse flow patterns,we develop a novel robot activity strategy called multiplex swap sequence. In the light of the virtual module technology, the workloads that stem from bottleneck process steps and asymmetrical process configuration are balanced satisfactorily. Moreover, several sufficient and necessary conditions with closed-form expressions are obtained for checking the system's schedulability. Finally, efficient algorithms with polynomial complexity are developed to find the periodic scheduling, and its practicability and availability are demonstrated by the offered illustrative examples.

关键词： Cluster tools multiple wafer types scheduling semiconductor manufacturing wafer fabrication

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