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Wavelength-multiplexed multi-mode EUV reflection ptychography based on automatic differentiation

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Light(Science & Applications) 2024年第10期13卷 2156-2167页

作者： Yifeng Shao Sven Weerdenburg Jacob Seifert h.paul Urbach Allard P.Mosk Wim Coene Imaging Physics Department Applied Science FacultyDelft University of TechnologyLorentzweg 1Delft 2628 CJThe Netherlands Nanophotonics Debye Institute for Nanomaterials Science and Center for Extreme Matter and Emergent PhenomenaUtrecht UniversityP.0.Box 80000Utrecht 3508 TAThe Netherlands Research Department ASML Netherlands B.VDe Run 6501Veldhoven 5504DRThe Netherlands

Ptychographic extreme ultraviolet(EUV)diffractive imaging has emerged as a promising candidate for the next generationmetrology solutions in the semiconductor industry,as it can image wafer samples in reflection geometry at the *** technique has surged attention recently,owing to the significant progress in high-harmonic generation(hhG)EUV sources and advancements in both hardware and software for *** this study,a novel algorithm is introduced and tested,which enables wavelength-multiplexed reconstruction that enhances the measurement throughput and introduces data diversity,allowing the accurate characterisation of sample *** tackle the inherent instabilities of the hhG source,a modal approach was adopted,which represents the crossdensity function of the illumination by a series of mutually incoherent and independent spatial *** proposed algorithm was implemented on a mainstream machine learning platform,which leverages automatic differentiation to manage the drastic growth in model complexity and expedites the computation using GPU *** optimising over 2oo million parameters,we demonstrate the algorithm's capacity to accommodate experimental uncertainties and achieve a resolution approaching the diffraction limit in reflection *** reconstruction of wafer samples with 20-nm high patterned gold structures on a silicon substrate highlights our ability to handle complex physical interrelations involving a multitude of *** results establish ptychography as an efficient and accurate metrology tool.

关键词： metrology mode approaching

Recent advances in metasurface design and quantum optics applications with machine learning,physics-informed neural networks,and topology optimization methods

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Light(Science & Applications) 2023年第8期12卷 1494-1509页

作者： Wenye Ji Jin Chang he-Xiu Xu Jian Rong Gao Simon Groblacher h.paul Urbach Aurele J.L.Adam Department of Imaging Physics Delft University of TechnologyLorentzweg 12628 CJ DelftThe Netherlands Department of Quantum Nanoscience Delft University of TechnologyLorentzweg 12628 CJ DelftThe Netherlands Shaanxi Key Laboratory of Flexible Electronics(KLoFE) Northwestern Polytechnical University(NPU)127 West Youyi RoadXi'an 710072China SRON Netherlands Institute for Space Research Niels Bohrweg 42333 CA LeidenThe Netherlands

As a two-dimensional planar material with low depth profile,a metasurface can generate non-classical phase distributions for the transmitted and reflected electromagnetic waves at its ***,it offers more flexibility to control the wave front.A traditional metasurface design process mainly adopts the forward prediction algorithm,such as Finite Difference Time Domain,combined with manual parameter ***,such methods are time-consuming,and it is difficult to keep the practical meta-atom spectrum being consistent with the ideal *** addition,since the periodic boundary condition is used in the meta-atom design process,while the aperiodic condition is used in the array simulation,the coupling between neighboring meta-atoms leads to inevitable *** this review,representative intelligent methods for metasurface design are introduced and discussed,including machine learning,physics-information neural network,and topology optimization *** elaborate on the principle of each approach,analyze their advantages and limitations,and discuss their potential *** also summarize recent advances in enabled metasurfaces for quantum optics *** short,this paper highlights a promising direction for intelligent metasurface designs and applications for future quantum optics research and serves as an up-to-date reference for researchers in the metasurface and metamaterial fields.

关键词： optics quantum topology

Optical vortices and vector beams

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Photonics Research 2016年第5期4卷 1-OVB1页

作者： Xiaocong Yuan Siyuan Yu h.paul Urbach Nanophotonics Research Centre Shenzhen University Merchant Venturers School of Engineering University of Bristol Optics Research Group Delft University of Technology

Amplitude, phase and polarization are essential parameters of an optical field. In the past decade, with the enhancement of techniques in manipulating phase and polarization states in complex optical fields, optical vortices and vector beams are investigated in a closely coupled fashion in terms of efficient beam generation and manipulation, stable transmission and novel detection aimed at various applications. In this special issue 6 invited papers demonstrate a number of typical topics in the field, with emphasis on the vectorial beam generation and optical communication systems utilising orbital angular momentum(OAM).

关键词： In OAM

A vectorial model for the nonlinear gradient force exerted on metallic Rayleigh nanoparticles

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Chinese Optics Letters 2024年第2期22卷 207-213页

作者：朱政张聿全闵长俊 Aurèle J.LAdam h.paul Urbach 袁小聪 Research Center for humanoid Sensing Research Institute of Intelligent SensingZhejiang LabHangzhou 311100China Nanophotonics Research Center Institute of Microscale Optoelectronics&State Key Laboratory of Radio Frequency Heterogeneous IntegrationShenzhen UniversityShenzhen 518060China Optics Research Group ImPhys DepartmentFaculty of Applied SciencesDelft University of TechnologyDelft 2628 CJThe Netherlands

Optical tweezers have proved to be a powerful tool with a wide range of *** gradient force plays a vital role in the stable optical trapping of *** scalar method is convenient and effective for analyzing the gradient force in traditional optical ***,when the third-order nonlinear effect of the nano-object is stimulated,the scalar method cannot adequately present the optical response of the metal nanoparticle to the external optical ***,we propose a theoretical model to interpret the nonlinear gradient force using the vector *** combining the optical Kerr effect,the polarizability vector of the metallic nanoparticle is derived.A quantitative analysis is obtained for the gradient force as well as for the optical potential *** vector method yields better agreement with reported experimental *** suggest that this method could lead to a deeper understanding of the physics relevant to nonlinear optical trapping and binding phenomena.

关键词： gradient forces nonlinear effect metallic nanoparticles

Comment on “Efficient full-path optical calculation of scalar and vector diffraction using the Bluestein method”

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Light(Science & Applications) 2021年第1期10卷 2-2页

作者： Yi feng Shao hpaul Urbach Optics Research Group Imaging Physics DepartmentFaculty of Applied SciencesDelft University of TechnologyLorentzweg 12628 CJ DelftThe Netherlands

The calculation of light diffraction is of great importance for many essential optical applications,including optical lithography,optical tweezers,and super-resolution imaging,and is a research topic that has been extensively studied over the past few *** both scalar and vector diffraction can be formulated as Fourier transforms,the standard method is to use the fast Fourier transform(FFT)***,the use of the FFT requires a fixed sampling relation between the discretization of the input field and that of the output *** the vectorial case,this requirement often causes a significant waste of computational resources,which hinders real-time applications.

关键词： field. scalar calculation

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SETI爱好者

中国国家天文 2010年第11期4卷 127-128页

作者： h.paul Shuch

就在此时此刻，全天可能有几十个外星文明正在几十个频率上向地球发送着信号——而我们却茫然无知。

关键词： SETI 爱好外星文明地球

胡安·德富卡洋中脊热液体系中地震引起的变化

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海洋地质动态 2001年第3期17卷 17-19页

作者： h.paul Johnson 周立君

众所周知，太平洋东北部洋中脊的热液排放受地震扰动的影响，但是这些扰动起因于海底火山活动，直到现在，也没有观察到热液体系受非岩浆作用的构造事件的影响。这里我们报道了 1999年 6月在明显为构造成因的震群之前、期间和之后从胡... 详细信息

众所周知，太平洋东北部洋中脊的热液排放受地震扰动的影响，但是这些扰动起因于海底火山活动，直到现在，也没有观察到热液体系受非岩浆作用的构造事件的影响。这里我们报道了 1999年 6月在明显为构造成因的震群之前、期间和之后从胡安·德富卡海岭的几个热液喷口测量的热液排放的温度。排放流体温度在第一次地震之后 4～ 11d开始上升，第一次上升之后，在到达较高温度值之前喷口温度波动了约一个月。我们也观察到了从热液体系中输出的流体在至少 80d内提高了 10倍，并沿着整个海岭段延伸。与相对温和的构造活动对应的这样一个大的热量响应是令人吃惊的，并提出了过剩热量和流体的来源问题以及对喷口生物群体的可能影响。

关键词：热液排放地震扰动海底火山活动岩浆作用构造活动太平洋

通过分析羽状流的分布来评价大陆坡上甲烷水合物的分解

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海洋地质 2015年第4期31卷 1-14页

作者： h.paul Johnson Una K.Miller Marie S.Salmi 龚焕燊不详广州大学

卡斯卡迪亚古陆边缘沉积层中含有丰富的碳库，其来源一方面是物质从陆地的不断输入，另一方面是来自海水表层生产力。该碳资源中有一部分是以固态的天然气水合物形式存在于沉积层的孔隙中，之前有研究表明在温哥华岛和卡斯卡迪亚古陆边... 详细信息

卡斯卡迪亚古陆边缘沉积层中含有丰富的碳库，其来源一方面是物质从陆地的不断输入，另一方面是来自海水表层生产力。该碳资源中有一部分是以固态的天然气水合物形式存在于沉积层的孔隙中，之前有研究表明在温哥华岛和卡斯卡迪亚古陆边缘的俄勒冈州区域都有大量甲烷资源的存在。卡斯卡迪亚古陆边缘多道地震反射剖面表明该区域沉积层中普遍存在似海底反射（BSR），这意味着天然气水合物从3000m水深的形变前缘到500m水深的天然气水合物稳定区上临界位置都有分布。在本研究中我们汇总了卡斯卡迪亚古陆边缘经过一系列由不同的研究目的而进行的勘探确定存在甲烷羽状流的点位，同时也包含一些商业渔民主动提供的点位信息。高密度羽状流这一反常现象的出现和大陆架（小于180m）结构以及甲烷水合物稳定区域（MhSD）上限深度有关，甲烷水合物稳定区在东北太平洋区域一般为500m左右。在卡斯卡迪亚古陆坡观测到的这一异常现象可能是由于中层深度海水变暖引起的，这表明现代气候变暖已经开始使得对气候变化非常敏感的卡斯卡迪亚古陆边缘地带沉积层中的水合物开始出现失稳状态。针对北美大西洋斜坡相似的羽状流图像的重新分析表明在很多纬度范围内观测到的羽状流深度和MhSD之间联系不大。

关键词：甲烷水合物羽状流大陆坡天然气水合物古陆边缘分解评价地震反射剖面

ST2 Negatively Regulates TLR2 Signalling,But is not Involvedin BLP-Induced Tolerance

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微循环学杂志 2009年第4期 122-122页

作者： Julliette M.Buckley h.paul Redmond Department of Academic Surgery University College Cork

Introduction:Activation of TLR signalling is critical for host innate immunity against bacterial *** orphan receptor ST2 functions as a negative regulator of TLR4 signalling and maintains LPS tolerance.

关键词： ST2 Negatively Regulates TLR2 Signalling,But is not Involvedin BLP-Induced Tolerance BLP TLR