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Efficient measurement and optical proximity correction modeling to catch lithography pattern shift issues of arbitrarily distributed hole layer

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Frontiers of Mechanical Engineering 2024年第4期19卷 45-54页

作者： Yaobin feng Jiamin liu Zhiyang SONG Hao JIANG Shiyuan liu State Key Laboratory of Inteligent Manufacturing Equipment and Technology Huazhong University of Science and TechnologyWuhan 430074China Optics Valley Laboratory Wuhan 430074China

With the continued shrinking of the critical dimensions(CDs)of wafer patterning,the requirements for modeling precision in optical proximity correction(OPC)increase *** requirement extends beyond CD controlling accuracy to include pattern alignment accuracy because misalignment can lead to considerable overlay and metal-via coverage issues at advanced nodes,affecting process window and *** paper proposes an efficient OPC modeling approach that prioritizes pattern-shift-related elements to tackle the issue *** method integrates careful measurement selection,the implementation of pattern-shift-aware structures in design,and the manipulation of the cost function during model tuning to establish a robust *** experiments are performed on a via layer fabricated using a negative tone *** demonstrate that pattern shifts can be constrained within a range of+1 nm,remarkably better than the original range of±3 ***,simulations reveal notable differences between post OPC and original masks when considering pattern shifts at locations sensitive to this *** validation confirms the accuracy of the proposed modeling approach,and a firm consistency is observed between the simulation results and experimental data obtained from actual design structures.

关键词： computational lithography optical proximity correction modeling pattern shift metrology

Plant-derived nanovesicles as an emerging platform for cancer therapy

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Acta Pharmaceutica Sinica B 2024年第1期14卷 133-154页

作者： Hanzhe liu Guo-feng Luo Zhengjun Shang The State Key Laboratory Breeding Base of Basic Science of Stomatology(Hubei-MOST)&Key Laboratory of Oral Biomedicine Ministry of Education School and Hospital of StomatologyWuhan UniversityWuhan 430079China

Plant-derived nanovesicles(PDNVs)derived from natural green products have emerged as an attractive nanoplatform in biomedical *** are usually characterized by unique structural and biological functions,such as the bioactive lipids/proteins/nucleic acids as therapeutics and targeting groups,immune-modulation,and long-term *** the rapid development of nanotechnology,materials,and synthetic chemistry,PDNVs can be engineered with multiple functions for efficient drug delivery and specific killing of diseased cells,which represent an innovative biomaterial with high biocompatibility for fighting against *** this review,we provide an overview of the state-of-theart studies concerning the development of PDNVs for cancer *** original sources,methods for obtaining PDNVs,composition and structure are introduced *** an emphasis on the featured application,the inherent anticancer properties of PDNVs as well as the strategies in constructing multifunctional PDNVs-based nanomaterials will be discussed in ***,some scientific issues and technical challenges of PDNVs as promising options in improving anticancer therapy will be discussed,which are expected to promote the further development of PDNVs in clinical translation.

关键词： Naturally occurring nanovesicles Plant Nanotechnology Drug delivery Cancer therapy

Remaining Useful Life Prediction Method for Multi-Component System Considering Maintenance:Subsea Christmas Tree System as A Case Study

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China Ocean Engineering 2024年第2期38卷 198-209页

作者： WU Qi-bing CAI Bao-ping FAN Hong-yan WANG guan-nan RAO Xi GE Weifeng SHAO Xiao-yan liu Yong-hong CNOOC Safety Technology Services Co. Ltd.Tianjin 300456China College of Mechanical and Electronic Engineering China University of PetroleumQingdao 266580China CNOOC EnerTech Safety&Environmental Protection BranchTianjin 300456China

Maintenance is an important technical measure to maintain and restore the performance status of equipment and ensure the safety of the production process in industrial production,and is an indispensable part of prediction and health ***,most of the existing remaining useful life(RUL)prediction methods assume that there is no maintenance or only perfect maintenance during the whole life cycle;thus,the predicted RUL value of the system is obviously lower than its actual operating *** complex environment of the system further increases the difficulty of maintenance,and its maintenance nodes and maintenance degree are limited by the construction period and working conditions,which increases the difficulty of RUL *** RUL prediction method for a multi-omponent system based on the Wiener process considering maintenance is *** performance degradation model of components is established by a dynamic Bayesian network as the initial model,which solves the uncertainty of insufficient data *** on the experience of experts,the degree of degradation is divided according to Poisson process simulation random failure,and different maintenance strategies are used to estimate a variety of condition maintenance *** example of a subsea tree system is given to verify the effectiveness of the proposed method.

关键词： remaining useful life Wiener process dynamic Bayesian networks maintenance subsea Christmas tree system

Clinical application of COVID-19 vaccine in liver transplant recipients

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Hepatobiliary & Pancreatic Diseases International 2024年第4期23卷 339-343页

作者： feng-Chao liu Man Xie Wei Rao Division of Hepatology Liver Disease CenterThe Affiliated Hospital of Qingdao UniversityQingdao 266000China Organ Transplantation Center The Affiliated Hospital of Qingdao UniversityQingdao 266000China Institute of Organ Donation and Transplantation of Qingdao University Qingdao 266000China Department of Gastroenterology The Affiliated Hospital of Qingdao UniversityQingdao 266000China

Background:Solid organ transplant(SOT)activities,such as liver transplant,have been greatly influenced by the pandemic of coronavirus disease 2019(COVID-19),a disease caused by severe acute respiratory syndrome coronavirus 2(SARS-CoV-2).Immunosuppressed individuals of liver transplant recipients(LTRs)tend to have a high risk of COVID-19 infection and related ***,COVID-19 vaccination has been recommended to be administered as early as possible in *** sources:The keywords“liver transplant”,“SARS-CoV-2”,and“vaccine”were used to retrieve articles published in ***:The antibody response following the 1st and 2nd doses of vaccination was disappointingly low,and the immune responses among LTRs remarkably improved after the 3rd or 4th dose of *** the 3rd or 4th dose of COVID-19 vaccine increased the antibody titer,a proportion of patients remained ***,recent studies showed that SARS-CoV-2 vaccine could trigger adverse events in LTRs,including allograft rejection and liver ***:This review provides the recently reported data on the antibody response of LTRs following various doses of vaccine,risk factors for poor serological response and adverse events after vaccination.

关键词： Liver transplant COVID-19 SARS-CoV-2 Vaccine Antibody response

Cogeneration of Innovative Audio-visual Content: A New Challenge for Computing Art

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Machine Intelligence Research 2024年第1期21卷 4-28页

作者： Mengting liu Ying Zhou Yuwei Wu feng Gao Advanced Institute of Information Technology Peking UniversityHangzhou311215China School of Electronic and Computer Engineering Shenzhen Graduate SchoolPeking UniversityShenzhen 518000China Peng Cheng Laboratory Shenzhen 518000China School of Arts Peking UniversityBeijing 100871China

In recent years,computing art has developed rapidly with the in-depth cross study of artificial intelligence generated con-tent(AIGC)and the main features of ***-visual content generation has gradually been applied to various practical tasks,including video or game score,assisting artists in creation,art education and other aspects,which demonstrates a broad application *** this paper,we introduce innovative achievements in audio-visual content generation from the perspective of visual art genera-tion and auditory art generation based on artificial intelligence(Al).We outline the development tendency of image and music datasets,visual and auditory content modelling,and related automatic generation *** objective and subjective evaluation of generated samples plays an important role in the measurement of algorithm *** provide a cogeneration mechanism of audio-visual content in multimodal tasks from image to music and display the construction of specific stylized *** are still many new op-portunities and challenges in the field of audio-visual synesthesia generation,and we provide a comprehensive discussion on them.

关键词： Artificial intelligence(AI)art audio-visual artificial intelligence generated content(AIGC) multimodal artistic evalu-ation

A Novel Multi-Stream Fusion Network for Underwater Image Enhancement

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China Communications 2024年第2期21卷 166-182页

作者： Guijin Tang Lian Duan Haitao Zhao feng liu Jiangsu Key Laboratory of Image Processing and Image Communication Nanjing University of Posts and TelecommunicationsNanjing 210003China Jiangsu Key Laboratory of Wireless Communications Nanjing University of Posts and TelecommunicationsNanjing 210003China

Due to the selective absorption of light and the existence of a large number of floating media in sea water, underwater images often suffer from color casts and detail blurs. It is therefore necessary to perform color correction and detail restoration. However,the existing enhancement algorithms cannot achieve the desired results. In order to solve the above problems, this paper proposes a multi-stream feature fusion network. First, an underwater image is preprocessed to obtain potential information from the illumination stream, color stream and structure stream by histogram equalization with contrast limitation, gamma correction and white balance, respectively. Next, these three streams and the original raw stream are sent to the residual blocks to extract the features. The features will be subsequently fused. It can enhance feature representation in underwater images. In the meantime, a composite loss function including three terms is used to ensure the quality of the enhanced image from the three aspects of color balance, structure preservation and image smoothness. Therefore, the enhanced image is more in line with human visual ***, the effectiveness of the proposed method is verified by comparison experiments with many stateof-the-art underwater image enhancement algorithms. Experimental results show that the proposed method provides superior results over them in terms of MSE,PSNR, SSIM, UIQM and UCIQE, and the enhanced images are more similar to their ground truth images.

关键词： image enhancement multi-stream fusion underwater image

Zircon Hf Isotope Mapping for Understanding Crustal Architecture and Its Controls on Mineralization during Early Cretaceous in the Southern Great Xing'an Range,NE China

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Journal of Earth Science 2024年第1期35卷 41-50页

作者： feng Yuan Huanan liu Shengjin Zhao Mingjing Fan State Key Laboratory of Geological Processes and Mineral Resources Collaborative Innovation Center for Exploration of Strategic Mineral ResourcesSchool of Earth ResourcesChina University of GeosciencesWuhan 430074China State Key Laboratory of Geological Processes and Mineral Resources School of Earth Sciences and ResourcesChina University of GeosciencesBeijing100083China No.10 Institute of Geological Exploration Inner Mongolia Bureau of Geology and Mineral ResourcesChifeng 024000China Key Laboratory of Metallogeny and Mineral Assessment Institute of Mineral ResourcesChinese Academy of Geological SciencesBeijing 100037China

Voluminous Early Cretaceous granitoids and associated large-scale ore deposits are distributed within the southern Great Xing'an Range(SGXR),NE *** on previously published geochronology and zircon Hf-isotope data,Hf isotope mapping is undertaken to improve our understanding of crustal architecture and its controls on ore *** ore-related Early Cretaceous granitoids were sourced predominantly from juvenile crust,with the involvement of variable proportions of ancient crustal *** crustal architecture,as inferred from Hf isotopic contour maps,indicates two distinct Hf isotopic domains in SGXR,including(1)a higher-ε_(Hf)(+7 to+11)juvenile crust containing minor ancient crustal material,and(2)a lower-ε_(Hf)(+2 to+6)juvenile crust containing a greater proportion of ancient crustal *** Hf isotopic maps identify links between crustal architecture and regional *** deposits and other deposits with significant Cu production are restricted mainly to the higher-ε_(Hf)juvenile crustal regions in the northern and eastern *** dominated by other metals(e.g.,Mo,Sn,W,Pb,Zn,and Ag)occur mainly in the lower-ε_(Hf)juvenile crustal regions in the southern and western *** between juvenile crust-derived melts and ancient crustal components played an important role on the distribution of various ore metals.

关键词： Hf isotope mapping crustal architecture large-scale Early Cretaceous granitoids distribution of ore deposits southern Great Xing'an Range zircon

Strategic regulation of nitrogen-containing intermediates for enhanced nitrate reduction over Co_(3)O_(4)/SiC catalyst having multiple active centers

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Journal of Energy Chemistry 2024年第9期96卷 291-299页

作者： Ming-Hao guan Hao-Nan Xu Jin liu Tao Wu An-Hui Lu State Key Laboratory of Fine Chemicals Liaoning Key Laboratory for Catalytic Conversion of Carbon ResourcesSchool of Chemical EngineeringDalian University of TechnologyDalian 116024LiaoningChina

Regulating the intermediates involved in the electrocatalytic nitrate reduction reaction(NO_(3)RR)is crucial for the enhancement of reaction ***,it remains a great challenge to regulate the reaction intermediates through active site manipulation on the surface of the ***,a family of n%-Co_(3)O_(4)/SiC(n=5,8,12,20)catalysts with a delicate percentage of Co^(2+)and Co^(3+)were prepared for NO_(3)*** found that Co^(3+)primarily acts as the active site for NO_(3)^(−)reduction to NO_(2)^(−),while Co^(2+)is responsible for the conversion of NO_(2)^(−)to NH_(3).Moreover,the conversion of these intermediates over the active sites is autonomous and separately *** processes synergistically accomplish the reduction of nitrate ions to synthesize *** the experimental studies and density functional theory(DFT)calculations,it is discovered the pathway(^(*)NHO→^(*)NHOH→^(*)NH_(2)OH→^(*)NH_(2)→^(*)NH_(3))is more favorable due to the lowerΔG value(0.25 eV)for the rate-limiting step(^(*)NO→^(*)NHO).The NH_(3)yield rate of 8%-Co_(3)O_(4)/SiC reached 1.08 mmol/(cm^(2)h)with a Faradaic efficiency of 96.4%at−0.89 V versus the reversible hydrogen electrode(RHE),surpassing those of most reported non-noble NO_(3)RR *** strategy not only provides an efficient catalyst for NO_(3)RR but also serves as an illustrative model for the regulation of multi-step reaction intermediates through the design of distinct active sites,thereby presenting a new approach to enhance the efficiency of intricate reactions.

关键词： Electrocatalysis Nitratereduction Co_(3)O_(4)/SiC catalysts Intermediates control

Cu,N codoped carbon nanosheets encapsulating ultrasmall Cu nanoparticles for enhancing selective 1,2-propanediol oxidation

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Journal of Energy Chemistry 2024年第4期91卷 27-35页

作者： Yonghai feng Min Yu Minjia Meng Lei liu Dewei Rao Institute for Advanced Materials School of Materials Science and EngineeringJiangsu UniversityZhenjiang 212013JiangsuChina School of Chemistry and Chemical Engineering Jiangsu UniversityZhenjiang 212013JiangsuChina

In the selective oxidation of biomass-based 1,2-propanediol(PDO)with oxygen as the terminal oxidant,it is challenging to improve the lactic acid(LA)selectivity for nonnoble metal nanoparticles(NPs)due to their limited oxygen reduction rate and easy C-C *** the high economic feasibility of nonnoble metals,i.e.,Cu,in this work,copper and nitrogen codoped porous carbon nanosheets encapsulating ultrafine Cu nanoparticles(Cu@Cu-N-C)were developed to realize highly selective of PDO oxidation to *** carbon-encapsulated ultrasmall Cu^(0)NPs in Cu@Cu-N-C have high PDO dehydrogenation activity while N-coordinated Cu(Cu-N)sites are responsible for the high oxygen reduction ***,the performance of catalytic PDO conversion to LA is optimized by a proposed pathway of PDO→hydroxylacetone→lactaldehyde→***,the enhanced LA selectivity is 88.5%,and the PDO conversion is up to 75.1%in an O_(2)-pressurized reaction system(1.0 MPa O_(2)),superior to other Cu-based catalysts,while in a milder nonpressurized system(O_(2)flow rate of 100 mL min-1),a remarkable LA selectivity(94.2%)is obtained with 39.8%PDO conversion,2.2 times higher than that of supported Au nanoparticles(1%Au/C).Moreover,carbon encapsulation offers Cu@Cu-N-C with strong leaching resistance for better recycling.

关键词： Selective oxidation Copper and nitrogen doped carbon 1,2-Propanediol Ultrasmall Cu nanoparticles Lactic acid