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A new DRIE cut-off material in SOG MEMS process

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Journal of Semiconductors 2023年第4期44卷 98-102页

作者： Chaowei Si Yingchun Fu Guowei Han Yongmei Zhao Jin Ning Zhenyu Wei fuhua yang Institute of Semiconductors Chinese Academy of SciencesBeijing 100083China Beijing Smart-chip Microelectronics Technology Co. LtdBeijing 100083China Zhongguancun Xinhaizeyou Technology Co. LtdBeijing 100049China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing 100049China

The silicon on glasses process is a common preparation method of micro-electro-mechanical system inertial devices,which can realize the processing of thick silicon *** paper proposes that indium tin oxides(ITO)film can serve as a deep silicon etching cut-off layer because ITO is less damaged under the attack of fluoride *** has good electrical conductivity and can absorb fluoride ions for silicon etching and reduce the reflection of fluoride ions,thus reducing the foot *** removal and release of ITO use an acidic solution,which does not damage the silicon ***,the selection of the sacrificial layer has an excellent effect in maintaining the shape of the MEMS *** method is used in the preparation of MEMS accelerometers with a structure thickness of 100μm and a feature size of 4μ*** over-etching of the bottom of the silicon structure caused by the foot effect is *** difference between the simulated value and the designed value of the device characteristic frequency is less than 5%.This indicates that ITO is an excellent deep silicon etch stopper material.

关键词： SOG process DRIE cut-off layer ITO film foot effect

Lignin-derived hard carbon anode with a robust solid electrolyte interphase for boosted sodium storage performance

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Carbon Energy 2024年第9期6卷 235-244页

作者： Jingqiang Zheng Yulun Wu Chaohong Guan Danjun Wang Yanqing Lai Jie Li fuhua yang Simin Li Zhian Zhang Hunan Provincial Key Laboratory of Nonferrous Value-Added Metallurgy National Energy Metal Resources and New Materials Key LaboratorySchool of Metallurgy and EnvironmentEngineering Research Center of the Ministry of Education for Advanced Battery MaterialsCentral South UniversityChangshaChina University of Michigan-Shanghai Jiao Tong University Joint Institute Shanghai Jiao Tong UniversityShanghaiChina Helmholtz Institute Ulm UlmGermany

Hard carbon is regarded as a promising anode candidate for sodium-ion batteries due to its low cost,relatively low working voltage,and satisfactory specific ***,it still remains a challenge to obtain a high-performance hard carbon anode from cost-effective carbon *** addition,the solid electrolyte interphase(SEI)is subjected to continuous rupture during battery cycling,leading to fast capacity ***,a lignin-based hard carbon with robust SEI is developed to address these issues,effectively killing two birds with one *** innovative gas-phase removal-assisted aqueous washing strategy is developed to remove excessive sodium in the precursor to upcycle industrial lignin into high-value hard carbon,which demonstrated an ultrahigh sodium storage capacity of 359 mAh g^(-1).It is found that the residual sodium components from lignin on hard carbon act as active sites that controllably regulate the composition and morphology of SEI and guide homogeneous SEI growth by a near-shore aggregation mechanism to form thin,dense,and organic-rich *** from these merits,the as-developed SEI shows fast Na+transfer at the interphases and enhanced structural stability,thus preventing SEI rupture and reformation,and ultimately leading to a comprehensive improvement in sodium storage performance.

关键词： hard carbon lignin sodium components sodium-ion storage solid electrolyte interphase

Reliability testing of a 3D encapsulated VHF MEMS resonator

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Journal of Semiconductors 2018年第10期39卷 64-67页

作者： Fengxiang Wang Quan Yuan Xiao Kan Jicong Zhao Zeji Chen Jinling yang fuhua yang Institute of Semiconductors Chinese Academy of SciencesBeijing 100083China University of Chinese Academy of Sciences Beijing 100049China State Key Laboratory of Transducer Technology Shanghai 200050China Jiangsu Key Laboratory of ASIC Design Nantong UniversityNantong 226019China

The frequency stability of a three-dimensional（3D） vacuum encapsulated very high frequency（VHF）disk resonator is systematically investigated. For eliminating the parasitic effect caused by the parasitic capacitance of the printed circuit board（PCB）, a negating capacitive compensation method was developed. The testing results implemented at 25 ℃ for 240 h for the long-term stability indicates that the resonant frequency variation remained within ±1 ppm and the noise floor derived from Allan Deviation was 26 ppb, which is competitive with the conventional quartz resonators. The resonant frequency fluctuation of 1.5 ppm was obtained during 200 temperature cycling between -40 and 85 ℃.

关键词： 3D encapsulation VHF disk resonator frequency stability parasitic effect

Design of the low-loss waveguide coil for interferometric integrated optic gyroscopes

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Journal of Semiconductors 2017年第4期38卷 73-77页

作者： Yao Fei Tianshu yang Zhaofeng Li Wen Liu Xiaodong Wang Wanhua Zheng fuhua yang Engineering Research Center for Semiconductor Integrated Technology Institute of SemiconductorsChinese Academy of SciencesBeijing 100083China State Key Laboratory on Integrated Optoelectronics Institute of SemiconductorsChinese Academy of SciencesBeijing 100083China

With the development of manufacturing technology,the propagation loss of the planar waveguide is getting lower and lower,and the shot-noise-limited sensitivity of an HOG will be greatly *** the propagation loss is getting lower,improper coupling-out waveguide in the waveguide coil may lead to non-ignorable bending loss and crosstalk because of the small radius of curvature and *** this paper,different couplingout waveguides have been *** calculation and optimization by the beam propagation method,we found the proper coupling-out waveguide having relatively low propagation loss,which can improve the sensitivity of the HOG.

关键词： gyroscopes Sagnac effect planar waveguides integrated optics

The Effects of Childhood Trauma on College Students’Depressive Symptoms:The Mediation Role of Subjective Well-Being and the Moderation Role of Resilience

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International Journal of Mental Health Promotion 2024年第9期26卷 757-766页

作者： fuhua yang Jiaci Lin Rong Chen Chunlin Gao Maoying Cui Keli Yin School of information Yunnan University of Chinese MedicineKunming650500China Yunnan Key Laboratory of Dai and Yi Medicines Yunnan University of Chinese MedicineKunming650500China Faculty of Education Yunnan Normal UniversityKunming650500China

Background:The enduring and detrimental impact of childhood trauma on later health and well-being is now well ***,research on the relationship between childhood trauma and depressive symptoms,along with the potential risk and protective factors,is insufficient in the context of Chinese college student ***:Data on childhood trauma,depressive symptoms,resilience,and subjective well-being were collected through surveys conducted with 367 Chinese university *** data collected in this study were analyzed using SPSS 26.0 and PROCESS ***:The results revealed that subjective well-being mediated the relationship between childhood trauma and depressive symptoms among college students,with direct and indirect effects accounting for 59.46%and 40.54%of the total effect,*** pathway process between subjective well-being and depressive symptoms was moderated by resilience,whereby an increase in resilience levels corresponded to a gradual escalation in the predictive power of subjective well-being on depressive ***:The study indicates that childhood trauma significantly and positively predicts depressive symptoms among college students,and it can also directly predict depressive symptoms through the mediating effect of subjective *** levels of psychological resilience and subjective well-being among college students can mitigate depression and promote psychological *** the perspective of positive psychology,the present study provides a new perspective for the prevention and intervention of depressive symptoms among college students.

关键词： Childhood trauma depressive symptoms subjective well-being resilience

Design and Realization of Automatic Warehouse Based on S7-1500PLC

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Electrical Science & Engineering 2021年第1期3卷 4-9页

作者： fuhua yang Haitao Li Huizhou Technician Institute Department of electronic engineeringHuizhou 516003China

In order to improve the efficiency of automatic warehouse control system,the experimental platform of stereoscopic warehouse with s7-1500plc is *** manipulator is driven by stepper motor and servo motor to realize x,y and Z three-axis space *** material transmission system is built by general-purpose G120 *** KTP700 realizes control and status *** materials are identified and classified by RFID sensor and other ***15 software build PROFINET communication and PROFIBUS communication *** the GRAPH language programming can improve the visualization degree of application and solve the complex problems of program design and debugging of the warehouse control *** the design of hardware and software,a set of complete control system design scheme is formed,which has high practical value and provides an excellent teaching and experiment platform for the intelligent storage system.

关键词： Automatic warehouse S7-1500 PLC RFID sensor GRAFH language

Dopant atoms as quantum components in silicon nanoscale devices

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Journal of Semiconductors 2018年第6期39卷 43-50页

作者： Xiaosong Zhao Weihua Han Hao Wang Liuhong Ma Xiaoming Li Wang Zhang Wei Yan fuhua yang Engineering Research Center for Semiconductor Integrated Technology Beijing Engineering Center of Semiconductor MicroNano Integrated TechnologyInstitute of SemiconductorsChinese Academy of Sciences School of Electronic Electrical and Communication EngineeringUniversity of Chinese Academy of Sciences State Key Laboratory for Superlattices and Microstructures Institute of SemiconductorsChinese Academy of Sciences

Recent progress in nanoscale fabrication allows many fundamental studies of the few dopant atoms in various semiconductor nanostructures. Since the size of nanoscale devices has touched the limit of the nature, a single dopant atom may dominate the performance of the device. Besides, the quantum computing considered as a future choice beyond Moore＇s law also utilizes dopant atoms as functional units. Therefore, the dopant atoms will play a significant role in the future novel nanoscale devices. This review focuses on the study of few dopant atoms as quantum components in silicon nanoscale device. The control of the number of dopant atoms and unique quantum transport characteristics induced by dopant atoms are presented. It can be predicted that the development of nanoelectronics based on dopant atoms will pave the way for new possibilities in quantum electronics.

关键词： silicon nanoscale devices dopant atoms ionization energy dopant-induced quantum dots quantum transport

Gate-regulated transition temperatures for electron hopping behaviours in silicon junctionless nanowire transistors

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Journal of Semiconductors 2020年第7期41卷 44-48页

作者： Xinyu Wu Weihua Han Xiaosong Zhao yangyan Guo Xiaodi Zhang fuhua yang School of Microelectronics University of Chinese Academy of SciencesBeijing 100049China Engineering Research Center for Semiconductor Integrated Technology Institute of SemiconductorsChinese Academy of SciencesBeijing 100083China State Key Laboratory for Superlattices and Microstructures Institute of SemiconductorsChinese Academy of SciencesBeijing 100083China

We investigate gate-regulated transition temperatures for electron hopping behaviours through discrete ionized dopant atoms in silicon junctionless nanowire *** demonstrate that the localization length of the wave function in the spatial distribution is able to be manipulated by the gate electric *** transition temperatures regulated as the function of the localization length and the density of states near the Fermi energy level allow us to understand the electron hopping behaviours under the influence of thermal activation energy and Coulomb interaction *** is useful for future quantum information processing by single dopant atoms in silicon.

关键词： silicon junctionless nanowire transistor discrete dopant atoms gate regulation transition temperatures

Hybrid working mechanism enables highly reversible Zn electrodes

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eScience 2023年第2期3卷 83-92页

作者： Libei Yuan Junnan Hao Bernt Johannessen Chao Ye fuhua yang Chao Wu Shi-Xue Dou Hua-Kun Liu Shi-Zhang Qiao Institute for Superconducting and Electronic Materials Australian Institute for Innovative MaterialsUniversity of WollongongWollongongNew South Wales2522 Australia School of Chemical Engineering and Advanced Materials The University of AdelaideAdelaideSouth Australia5005 Australia Australian Synchrotron 800 Blackburn RdClaytonVIC3168 Australia

Zn dendrite growth and water-related side reactions have been criticized to hinder actual applications of aqueous Zn-ion *** address these issues,a series of Zn interfacial modifications of building solid/electrolyte interphase(SEI)and nucleation layers have been widely proposed,however,their effectiveness remains debat***,we report a boron nitride(BN)/Nafion layer on the Zn surface to efficiently solve Zn problems through combining the hybrid working mechanisms of SEI and nucleation *** our protective layer,Nafion exhibits the SEI mechanism by blocking water from the Zn surface and providing abundant channels for rapid Zn^(2+)þtransmission,whilst BN nanosheets induce Zn deposition underneath with a preferred(002)***,dendrite-free and side-reaction-free Zn electrode with(002)deposition under the protective layer is realized for the first time,as reflected by its high reversibility with average Coulombic efficiency of 99.2%for>3000 *** protected Zn electrode also shows excellent performance in full cells when coupling with polyaniline cathode under the strict condition of lean electrolyte *** work highlights insights for designing highly reversible metal electrodes towards practical applications.

关键词： Aqueous Zn-ion batteries Hybrid working mechanism Boron nitride Nafion