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Dust Plasma Effect on the Etching Process of Si[100] by Ultra Low Frequency RF Plasma

Journal of Modern Physics 2013年第2期4卷 215-225页

作者： Ahmed Rida Galaly farouk Fahmi elakshar Engineering Science Department Faculty of Community Umm Al-Qura University Mecca Saudi Arabia Physics Department Faculty of Science Al-Azhar University Cairo Egypt

Dust-plasma interactions play vital roles in numerous observed phenomena in the space environment, their scope in the industrial laboratory has grown rapidly in recent times to include such diverse areas as materials processing, microelectronics, lighting and nuclear fusion. The etching processes of Si wafer has been studied using Ultra low frequency RF plasma (ULFP) at (1 KHz) by two different techniques namely: ion etching using inert gas only (e.g., argon gas), and ion chemical etching using an active gas (beside the inert gas) such as oxygen. In the case of large dust particle, the dust might act as a floating body in the plasma collecting equal fluxes of electrons and ions. The velocity of the ions flux out from the mesh (cathode) and cause ion sputtering for the sample (Si-Wafer) measured, moreover the rate coefficient for collection of electrons and ions by dust (K) is calculated here, the presence of dust, however, may itself cause loss process. As the plasma density increases, the etching rate increases and the volumetric rate of loss of electron and ions due to dust particle increases (K). A comparison between the volumetric rate of loss (K) due to ion chemical etching (75% Ar/25% O2) and ion etching (Pure Ar) has been carried out.

关键词： Dust Plasma Ultra Low Frequency Ion Etching Ion Chemical Etching Volumetric Rate of Loss

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Decaying of Nitrogen Second Positive System by Addition of H<sub>2</sub>Gas in Air DB Discharge

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Journal of Modern Physics 2013年第2期4卷 160-167页

作者： Doaa M. El-Zeer Ahmed Samir farouk elakshar Abdo A. Garamoon Center of Plasma Technology Al-Azhar University Cairo Egypt Physics Department Faculty of Science Al-Azhar University Cairo Egypt

Effects of addition of H2 gas in air DB discharge on its optical and electrical characteristics have been studied. Optical emission spectroscopy is used to investigate the effect of hydrogen admixing on the emission intensity of the nitrogen second positive systems (300 - 420 nm) and the relative population density of states. An obvious decaying of the emission intensity of the nitrogen second positive bands with the introduction of H2 has been observed. It has been concluded that quenching of the nitrogen excited state is the responsible reason of this decaying. Mechanisms of excitation and ionization processes of nitrogen molecules in this mixture have been studied. Processes which are responsible for the decaying of the population density of have been reported. Addition of H2 to air improves the electrical characteristics of the DB discharge. An abrupt increasing in the electron density, reached about thirty fold at H2 flow rate of 3 L/min, as a result of increasing the ionization processes has been reported. The breakdown voltage of the discharge decreased from 1.87 kV to about 1.25 kV by the addition of H2 at flow rate of 3 L/min.

关键词： Nitrogen Second Positive DBD H2 Addition Intensity Decaying

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Wastewater Decontamination from Microorganisms by Electrospraying Corona Discharge

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Journal of Modern Physics 2013年第12期4卷 1632-1637页

作者： Mohamed Elsawah Mohamed Ali Safwat Hassaballah Nasser Morgan Ahmed Samir farouk elakshar Abdou Garamoon 1Center of Plasma Technology Al Azhar University Cairo Egypt 2Physics Department Faculty of Science Al-Azhar University Cairo Egypt Botany and Microbiology Department Faculty of Science Al-Azhar University Cairo Egypt Center of Plasma Technology Al Azhar University Cairo Egypt

A novel water treatment technique, based on a combination of electrospraying and pulsed corona discharge, has been used for bio-decontamination of wastewater. The electrospraying process has been found to increase the surface area of the treated wastewater, and hence increases the efficiency of the corona treatment process. The phase diagram of the discharge, which characterizes the discharge regimes, has been identified experimentally. The survival ratio of the microorganisms has been investigated experimentally as a function of the applied voltage and the numbers of treatment runs using air and oxygen as working gases. Microorganism surface has been examined using scanning electron microscope (SEM), which enabled in understanding the decontamination mechanisms of the treated microorganism. A complete decontamination has been achieved after only one run for an applied voltage higher than 16 kV when the discharge system was operated in oxygen gas. Optical emission spectrum of the electrosprayed water confirmed the existence of OH-radicals responsible for decontamination process.

关键词： Wastewater Decontamination Electrospraying Pulsed Corona Discharge Low Temperature Plasma for Biodecontaination Environmental Applications of Plasmas Wastewater Treatment

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Experimental Study of Electric and Spectroscopic Characteristics of Electric Discharge in LPG

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Journal of Modern Physics 2014年第15期5卷 1450-1458页

作者： Ahmed Abd Elradi Nasser N. Morgan Sobhy Ghalab Mansour Elsabagh Safwat Hassaballa Ahmed Samir farouk F. elakshar Abdou A. Garamoon Center of Plasma Technology Al Azhar University Cairo Egypt

Electric discharge has been carried out in LPG using DC high voltage (0.4 - 3 KV) at gas pressure in the range of 1 to 25 torr. The electric and spectroscopic characteristics of the discharge were studied at different discharge conditions. Deviations from Paschen’s law were observed as a result of the change of the distance between the two the electrodes. Two discharge modes, namely glow discharge and spark discharge modes, has been observed in the discharge current waveforms. The discharge current waveforms indicate a repetitive pulsed behaviour with frequencies of 5 kHz to 5 MHz depending upon the applied voltage and the gas pressure. The emitted spectra from the discharge are also studied near both the cathode and the anode using different electrode materials. Hα line and C2 Swan band system are observed, which confirms the conversion of LPG to hydrogen and carbon clusters.

关键词： Liquefied Petroleum Gas Electric Discharge Hydrogen Production Propane Decomposition Butane Decomposition

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