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Microsphere-assisted,nanospot,non-destructive metrology for semiconductor devices

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Light(Science & Applications) 2022年第2期11卷 262-275页

作者： Soonyang Kwon Jangryul Park Kwangrak Kim Yunje cho Myungjun Lee Equipment R&D Team 4 Mechatronics ResearchSamsung Electronics Co.Ltd.1-1 Samsungjeonja-roHwaseong-siGyeonggi-do 18848Republic of Korea

As smaller structures are being increasingly adopted in the semiconductor industry,the performance of memory and logic devices is being continuously improved with innovative 3D integration schemes as well as shrinking and stacking *** to the increasing complexity of the design architectures,optical metrology techniques including spectroscopic ellipsometry(SE)and reflectometry have been widely used for efficient process development and yield ramp-up due to the capability of 3D structure ***,there has been an increasing demand for a significant reduction in the physical spot diameter used in the SE technique;the spot diameter should be at least 10 times smaller than the cell dimension(~30×40μm2)of typical dynamic random-access memory to be able to measure in-cell critical dimension(CD)*** this end,this study demonstrates a novel spectrum measurement system that utilizes the microsphere-assisted super-resolution effect,achieving extremely small spot spectral metrology by reducing the spot diameter to~210 nm,while maintaining a sufficiently high signal-to-noise *** addition,a geometric model is introduced for the microsphere-based spectral metrology system that can calculate the virtual image plane magnification and depth of focus,providing the optimal distance between the objective lens,microsphere,and sample to achieve the best possible imaging *** proof of concept was fully verified through both simulations and experiments for various ***,owing to its ultra-small spot metrology capability,this technique has great potential for solving the current metrology challenge of monitoring in-cell CD variations in advanced logic and memory devices.

关键词： metrology dimension utilize

Early gastric cancer presenting as a typical submucosal tumor cured by endoscopic submucosal dissection:A case report

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World Journal of Gastroenterology 2022年第25期28卷 2994-3000页

作者： Joon Hyun cho Si Hyung Lee Division of Gastroenterology and Hepatology Department of Internal MedicineYeungnam University College of MedicineDaegu 42415South Korea

BACKGROUND Submucosal tumor(SMT)-like gastric cancer is rare,and almost all cases undergo curative surgical treatment because the submucosal layer is usually deeply invaded by tumor cells or because histopathologic types of SMT-like gastric cancer are undifferentiated or poorly *** report has been issued on an SMT-like gastric cancer cured by endoscopic resection alone or on changes in the endoscopic features of this type of tumor over several *** SUMMARY We describe an exceptional case of a 53-year-old male with a 1.5 cm-sized SMTlike lesion covered by normal-appearing mucosa discovered by esophagogastroduodenoscopy(EGD)at the gastric *** ultrasound(EUS)visualized a homogeneous,well-circumscribed hypoechogenic lesion arising from the second sonographic layer with associated subtle obliteration of the third sonographic *** endoscopic biopsy was negative for *** patient refused to undergo an invasive procedure and was subsequently lost to *** years after initial detection,EGD revealed the lesion had become markedly erythematous,and at 4 years after initial EGD it had increased in size to 1.8 cm and developed a central ulcer and a heterogeneous EUS ***,endoscopic submucosal dissection(ESD)was performed,and histopathologic examination revealed a moderately differentiated adenocarcinoma had minutely invaded the submucosal layer(invasion depth 169μm)but without lymphovascular invasion and with negative resection ***,no additional surgical treatment was *** has been followed for 4 years after ESD without any evidence of local or distant *** This report describes an extremely rare case of early gastric cancer presenting as SMT that was cured by ESD after a treatment delay of 4 years and the endoscopic changes that occurred during this *** report highlights the importance of considering the possibility of gastric cancer when SMT is encountered in clini

关键词： Subepithelial lesion Submucosal tumor Early gastric cancer Adenocarcinoma Endoscopic mucosal dissection Case report

Management of the enteroatmospheric fistula:A case report

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World Journal of Clinical Cases 2022年第20期10卷 6954-6959页

作者： Jinbeom cho Kiyoung Sung Dosang Lee Department of Surgery College of MedicineThe Catholic University of KoreaSeoul 06591South Korea

BACKGROUND Enteroatmospheric fistula(EAF)is a catastrophic complication that can occur after open *** cause severe body fluid loss,hypercatabolism,and wound complications,leading to adverse clinical *** SUMMARY A 72-year-old female patient underwent ventral hernia *** days after the surgery,she exhibited severe abdominal pain with septic *** laparotomy revealed extensive intestinal adhesions and severe intraperitoneal *** the patient was hemodynamically unstable,a salvage operation rather than definite surgery was needed,and three surgical open drains were inserted into the peritoneal *** EAFs developed,and it was almost impossible to isolate and reduce the fistula output despite the use of vacuum-assisted closure dressings and endoscopic stent ***,we anastomosed two vascular grafts to the openings of each EAF to restore enteric *** inserted vascular grafts showed acceptable patency,and the patient could receive optimal nutritional support with elemental enteral *** underwent EAF resection 76 d after graft *** Control of the enteric effluent are key elements in achieving favorable clinical conditions which should precede definite surgery for EAFs.

关键词： Enterocutaneous fistula Enteroatmospheric fistula Ventral hernia Complication Sepsis Case report

Current guidelines for Helicobacter pylori treatment in East Asia 2022:Differences among China,Japan,and South Korea

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World Journal of Clinical Cases 2022年第19期10卷 6349-6359页

作者： Jun-Hyung cho So-Young Jin Digestive Disease Center Soonchunhyang University HospitalSeoul 04401South Korea Department of Pathology Soonchunhyang University HospitalSeoul 04401South Korea

Helicobacter pylori (H. pylori) infection is highly prevalent in East Asia. The overallseroprevalence rate of H. pylori infection is 44.2% in China, 37.6%-43.2% in Japan,and 51.0% in South Korea. H. pylori can cause peptic ulcer disease and gastriccancer. East Asian countries have high rates of gastric cancer (age-standardizedincidence rate: 20-30 per 100000). The Kyoto global consensus report emphasizedthat H. pylori gastritis should be considered the main cause for the development ofgastric cancer. H. pylori treatment guidelines in China, Japan, and South Koreahave recently been revised according to data from each of those ***, emerging antibiotic resistance is an important barrier to H. pylorieradication. The recommended H. pylori treatment regimens differ among thosethree East Asian countries. In this review, recent guidelines and up-to-dateresearch on H. pylori treatment regimens from China, Japan, and South Korea arediscussed.

关键词： Helicobacter pylori Treatment Antibiotic resistance China Japan South Korea

Stability of neodymium:YAG laser posterior capsulotomy in eyes with capsular tension rings

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International Journal of Ophthalmology(English edition) 2023年第6期16卷 891-896页

作者： Yang Kyung cho Min Sun Kim Department of Ophthalmology St.Vincent’s HospitalCollege of MedicineThe Catholic University of KoreaSeoul 06591Republic of Korea

·AIM: To evaluate the stability of neodymium(Nd):YAG laser posterior capsulotomy in eyes with capsular tension rings(CTRs).·METHODS: A total of 60 eyes that underwent cataract surgery and laser posterior capsulotomy postoperatively were included in this retrospective cohort study. To evaluate the safety and stability of capsulotomy, changes in the size of posterior capsulotomy and anterior chamber depth(ACD) in three groups: the group without CTR, the group with 12 mm CTRs, and the group with 13 mm CTRs, at 1wk, 3, 12, and 15mo after capsulotomy, were compared. ·RESULTS: In the group without CTR and the group with 12 mm CTR, there was no significant change in ACD at every post-laser follow-up. In the group with 13 mm CTR, the ACD change was significant until 3mo after capsulotomy. In all groups, there was a significant increase in the area of capsulotomy between 1wk and 3mo post-laser. Between 3 and 12mo post-laser, only the group with 13 mm CTR showed a significant increase in the area of capsulotomy(P<0.01). ·CONCLUSION: Laser posterior capsulotomy is safe in all three groups. The capsulotomy and ACD become stabilized and have not shown significant changes since 1y postlaser, even with larger CTRs. The maintenance of centrifugal capsular tension can last longer with larger CTRs, and the stability of the capsulotomy site can be reached about 12mo after capsulotomy in pseudophakic eyes with larger CTRs.

关键词： Nd:YAG laser capsulotomy capsular tension ring

Acute respiratory distress syndrome and severe pneumonitis after atezolizumab plus bevacizumab for hepatocellular carcinoma treatment:A case report

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World Journal of Gastrointestinal Oncology 2023年第5期15卷 892-901页

作者： Su Hyeon cho Ga Ram You Chan Park Sang-Geon cho Jong Eun Lee Sung Kyu choi Sung Bum cho Jae Hyun Yoon Department of Gastroenterology and Hepatology Chonnam National University Hospital and Medical SchoolGwangju 61469South Korea Department of Gastroenterology and Hepatology Hwasun Chonnam National University Hospital and Medical SchoolHwasun 58128South Korea Department of Radiology Chonnam National University Hospital and Medical SchoolGwangju 61469South Korea Department of Nuclear Medicine Chonnam National University HospitalHwasun 58128South Korea

BACKGROUND Hepatocellular carcinoma(HCC)is one of the most common cancers worldwide and has a high ***,the treatment options for advanced HCC are limited to tyrosine kinase inhibitors,such as sorafenib and *** previous regimens have an insufficient efficacy,the combination therapy of atezolizumab and bevacizumab(Ate/Bev)has been investigated,which showed an improvement in progression-free and overall ***,the adverse events of this combination therapy in advanced HCC have not been ***,we report a novel case of an unresectable HCC and acute respiratory distress syndrome(ARDS)after a combination therapy of Ate/*** SUMMARY An 82-year-old male visited our outpatient clinic for an incidentally detected liver *** magnetic resonance imaging and enhanced chest computed tomography(CT)were performed,which showed arterial hyperenhancement with washout in delayed phase suggesting HCC,and a well-defined metastatic solid nodule,respectively.F-18 fluorodeoxyglucose positron emission tomography(PET)-CT exhibited multiple hypermetabolic lesions in the iliac bone,lumbar vertebrae,and *** of the high burden of the intrahepatic tumor,transarterial radioembolization was initially performed;after 37 d,a combination therapy of Ate/Bev was *** patient visited the emergency department three days after Ate/Bev treatment complaining of *** was diagnosed with severe pneumonitis based on *** administering oxygen via a high-flow nasal cannula,the P/F ratio was only 74;therefore,the patient was diagnosed with ARDS based on the overall examination *** tidal volume with high positive end-expiratory pressure,sedative agents combined with a neuromuscular blocker,and a systemic steroid were promptly applied to manage the ***,the patient did not recover from the hypoxia and expired 31 h after being *** Clinicians should be aware of severe pneumonitis due to the immune-

关键词： Hepatocellular carcinoma Systemic therapy Adverse events Pneumonitis Atezolizumab Acute respiratory distress syndrome

Deobfuscating Mobile Malware for Identifying Concealed Behaviors

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Computers, Materials & Continua 2022年第9期72卷 5909-5923页

作者： Dongho Lee Geochang Jeon Sunjun Lee Haehyun cho Soongsil University Seoul06978Korea

The smart phone market is continuously increasing and there are more than 6 billion of smart phone users worldwide with the aid of the 5G *** them Android occupies 87%of the market ***,the widespread Android smartphones has drawn the attention of the attackers who implement and spread ***,currently the number of malware targeting Android mobile phones is ever ***,it is a critical task to find and detect malicious behaviors of malware in a timely ***,unfortunately,attackers use a variety of obfuscation techniques for malware to evade or delay *** an obfuscation technique such as the class encryption is applied to a malicious application,we cannot obtain any information through a static analysis regarding its malicious ***,we need to rely on the manual,dynamic analysis to find concealed malicious behaviors from obfuscated *** avoid malware spreading out in larger scale,we need an automated deobfuscation approach that accurately deobfuscates obfuscated malware so that we can reveal hidden malicious *** this study,we introduce widely-used obfuscation techniques and propose an effective deobfuscation method,named ARBDroid,for automatically deobfuscating the string encryption,class encryption,and API hiding *** evaluation results clearly demonstrate that our approach can deobfuscate obfuscated applications based on dynamic analysis results.

关键词： Android obfuscation deobfuscation android reversing

Byte Frequency Based Indicators for Crypto-Ransomware Detection from Empirical Analysis

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Journal of Computer Science & Technology 2022年第2期37卷 423-442页

作者： Geun Yong Kim Joon-Young Paik Yeongcheol Kim Eun-Sun cho Department of Computer Science and Engineering Chungnam National UniversityDaejeon 34134South Korea School of Computer Science and Technology Tiangong UniversityTianjin 300387China

File entropy is one of the major indicators of crypto-ransomware because the encryption by ransomware increases the randomness of file ***,entropy-based ransomware detection has certain limitations;for example,when distinguishing ransomware-encrypted files from normal files with inherently high-level entropy,misclassification is very *** addition,the entropy evaluation cost for an entire file renders entropy-based detection impractical for large *** this paper,we propose two indicators based on byte frequency for use in ransomware detection;these are termed EntropySA and DistSA,and both consider the interesting characteristics of certain file subareas termed“sample areas”(SAs).For an encrypted file,both the sampled area and the whole file exhibit high-level randomness,but for a plain file,the sampled area embeds informative structures such as a file header and thus exhibits relatively low-level randomness even though the entire file exhibits high-level *** and DistSA use“byte frequency”and a variation of byte frequency,respectively,derived from sampled *** indicators cause less overhead than other entropy-based detection methods,as experimentally proven using realistic ransomware *** evaluate the effectiveness and feasibility of our indicators,we also employ three expensive but elaborate classification models(neural network,support vector machine and threshold-based approaches).Using these models,our experimental indicators yielded an average Fl-measure of 0.994 and an average detection rate of 99.46%for file encryption attacks by realistic ransomware samples.

关键词： computer security cryptography machine learning ransomware

Soil compression influences the avoidance behavior of Allonychiurus kimi(Collembola)to cadmium and copper

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Pedosphere 2022年第3期32卷 487-494页

作者： Jino SON Yun-Sik LEE Yongeun KIM Kijong cho OJeong Eco-Resilience Institute Korea UniversitySeoul 02841(Republic of Korea) Department of Environmental Science and Ecological Engineering Korea UniversitySeoul 02841(Republic of Korea) Institute of Environment and Ecology Korea UniversitySeoul 02841(Republic of Korea)

The behavior of soil organisms inhabiting soil pore spaces can be influenced by soil compression,which can affect their avoidance behavior to *** this study,we aimed to evaluate the effect of soil compression on the avoidance behavior of Allonychiurus kimi(Collembola)to heavy metals cadmium and ***,to assess the applicability of the avoidance test guideline of the International Organization for Standardization(ISO)developed for Folsomia candida,we investigated the avoidance behavior of *** to cadmium and copper in an artificial soil with a loose structure(bulk density of 0.25 g cm^(-3)),the porous texture of which was sufficiently loose to enable *** to move between pore *** effect of soil compression on the avoidance behavior of *** to both metals was evaluated in compressed soil(bulk density of 0.64 g cm^(-3))with a uniformly compressed soil surface,and avoidance behavior was investigated at 24-h intervals over a 120-h *** that *** is unable to burrow into compressed soil,the compressed soil test can minimize the effects of differences in soil factors,such as soil porosity and bulk density,on the behavior of this *** the artificial soil,a statistically significant avoidance behavior of *** was observed at cadmium and copper concentrations greater than 50 and 200 mg kg^(-1),respectively,thereby indicating the applicability of the ISO avoidance test guidelines for *** compared at the same exposure time point,the avoidance response to both metals in compressed soil was less sensitive than that in uncompressed *** addition,we observed differences in the effects of metals on avoidance response in the compressed soil over time,with the effect of cadmium increasing with time and the effect of copper showing the opposite ***,we found that soil compression can affect the avoidance behavior of *** to cadmium and copper,and we discussed the advantages and limitations of using compressed

关键词： behavioral endpoint ecotoxicity test habitat function heavy metal pollutant springtail