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Mechanically resilient,alumina-reinforced carbon nanotube arrays for in-plane shock absorption in micromechanical devices

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微系统与纳米工程(英文) 2023年第3期9卷 73-81页

作者： eunhwan jo Hojoon Lee Jae-Ik Lee jongbaeg Kim School of Mechanical Engineering Yonsei University50 Yonsei-roSeodaemun-guSeoul 03722Republic of Korea Department of Neurosurgery Massachusetts General HospitalHarvard Medical School25 Shattuck StBostonMA 02115USA

Microelectromechanical systems(MEMS)are of considerable interest due to their compact size and low power consumption when used in modern electronics.MEMS devices intrinsically incorporate three-dimensional(3D)microstructures for their intended operations;however,these microstructures are easily broken by mechanical shocks accompanying high-magnitude transient acceleration,inducing device malfunction.Although various structural designs and materials have been proposed to overcome this limit,developing a shock absorber for easy integration into existing MEMS structures that effectively dissipates impact energy remains challenging.Here,a vertically aligned 3D nanocomposite based on ceramic-reinforced carbon nanotube(CNT)arrays is presented for in-plane shock-absorbing and energy dissipation around MEMS devices.This geometrically aligned composite consists of regionally-selective integrated CNT arrays and a subsequent atomically thick alumina layer coating,which serve as structural and reinforcing materials,respectively.The nanocomposite is integrated with the microstructure through a batch-fabrication process and remarkably improves the in-plane shock reliability of a designed movable structure over a wide acceleration range(0-12,000g).In addition,the enhanced shock reliability through the nanocomposite was experimentally verified through comparison with various control devices.

关键词： shock plane arrays

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Formation of sub-100-nm suspended nanowires with various materials using thermally adjusted electrospun nanofibers as templates

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Microsystems & Nanoengineering 2023年第1期9卷 263-270页

作者： Yongkeun Oh Dae-Sung Kwon eunhwan jo Yunsung Kang Sangjun Sim jongbaeg Kim School of Mechanical Engineering Yonsei UniversitySeoul03722Republic of Korea

The air suspension and location specification properties of nanowires are crucial factors for optimizing nanowires in electronic devices and suppressing undesirable interactions with substrates.Although various strategies have been proposed to fabricate suspended nanowires,placing a nanowire in desired microstructures without material constraints or high-temperature processes remains a challenge.In this study,suspended nanowires were formed using a thermally aggregated electrospun polymer as a template.An elaborately designed microstructure enables an electrospun fiber template to be formed at the desired location during thermal treatment.Moreover,the desired thickness of the nanowires is easily controlled with the electrospun fiber templates,resulting in the parallel formation of suspended nanowires that are less than 100 nm thick.Furthermore,this approach facilitates the formation of suspended nanowires with various materials.This is accomplished by evaporating various materials onto the electrospun fiber template and by removing the template.Palladium,copper,tungsten oxide(WO3),and tin oxide nanowires are formed as examples to demonstrate the advantage of this approach in terms of nanowire material selection.Hydrogen(H2)and nitrogen dioxide(NO2)gas sensors comprising palladium and tungsten oxide,respectively,are demonstrated as exemplary devices of the proposed method.

关键词： nanowires template fibers

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