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Flexible, diamond-based microelectrodes fabricated using the diamond growth side for neural sensing

Microsystems & Nanoengineering 2020年第1期6卷 742-753页

作者： Bin Fan Cory A.Rusinek Cort H.Thompson Monica Setien Yue Guo Robert Rechenberg Yan Gong Arthur J.Weber Michael F.Becker erin purcell Wen Li Department of Electrical and Computer Engineering Michigan State UniversityEast LansingMIUSA Fraunhofer USA Center for Coatings and Diamond Technologies East LansingMIUSA Department of Biomedical Engineering Michigan State UniversityEast LansingMIUSA Department of Physiology Michigan State UniversityEast LansingMIUSA

Diamond possesses many favorable properties for biochemical sensors,including biocompatibility,chemical inertness,resistance to biofouling,an extremely wide potential window,and low double-layer *** hardness of diamond,however,has hindered its applications in neural implants due to the mechanical property mismatch between diamond and soft nervous ***,we present a flexible,diamond-based microelectrode probe consisting of multichannel boron-doped polycrystalline diamond(BDD)microelectrodes on a soft Parylene C *** developed and optimized a wafer-scale fabrication approach that allows the use of the growth side of the BDD thin film as the sensing *** to the nucleation surface,the BDD growth side exhibited a rougher morphology,a higher sp^(3) content,a wider water potential window,and a lower background *** dopamine(DA)sensing capability of the BDD growth surface electrodes was validated in a 1.0 mM DA solution,which shows better sensitivity and stability than the BDD nucleation surface *** results of these comparative studies suggest that using the BDD growth surface for making implantable microelectrodes has significant advantages in terms of the sensitivity,selectivity,and stability of a neural ***,we validated the functionality of the BDD growth side electrodes for neural recordings both in vitro and in *** biocompatibility of the microcrystalline diamond film was also assessed in vitro using rat cortical neuron cultures.

关键词： neural film diamond

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