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Effect of Rf power on the structural.and optical.properties of ZnS thin fil.s prepared by Rf-sputtering

Journal.of Semiconductors 2018年第12期39卷 26-31页

作者： C.M.Samba Val. M.chaik H.Ait Dads H.El.Aakib M.El.aagoubi M.Aggour A.Outzourhit l.boratory of Nanomaterial. for Energies and Environments Faculty of Sciences Semlalia Cadi Ayyad University l.boratory of Renewabl. Energy and Environment Faculty of Science Kenitra Ibn Tofail University

Zinc sul.hide(ZnS) thin fil.s have grown on gl.ss and Si substrates by reactive cathodic radio frequency(Rf) sputtering. The Rf power was varied in the range of 100 to 250 W, whil. the deposition time is set at75 min. The optical. structural. and morphol.gical.properties of these thin fil.s have been studied. The optical.properties(mainl. thickness, refractive index,absorption coefficient, and optical.band gap) were investigated by optical.transmittance measurements in the wavel.ngth range of ul.raviol.t-visibl.-near infrared spectroscopy and spectroscopy infrared with fourier transform. fourier(fT-IR) and XRD anal.sis indicated that al. sputtering ZnS fil.s had a singl.-phase with a preferred orientation al.ng the(111) pl.ne of the zinc sphal.rite phase(ZB). The crystal.ite size ranged from 11.5 to 48.5 nm with Rf power getting a maximum of 200 W. UV-visibl. measurements exhibited that the ZnS fil. had more than 80% transmission in the visibl. wavel.ngth region. In addition, it has been observed that the band gap energy of ZnS fil.s is decreased sl.ghtl. from 3.52 to 3.29 eV, and as the Rf power is increased, the fil. thickness increases with the speed of deposit growth. Scanning el.ctron microscopy observations reveal.d the types of smooth-surfaced fil.s. The measurements(fT-IR) reveal.d at wave number1118 and 465.02 cmabsorption bands corresponding to the symmetrical.and asymmetric vibration of the Zn-S stretching mode. X-ray refl.ctometry measurements of ZnS fil.s have shown that the density of the fil.s is(3.9 g/cm~3) cl.se to that of sol.d ZnS.

关键词： ZnS thin fil.s by sputtered Rf-sputtering ZnS ZnS buffer l.yer for sol.r cel.

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