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Spatially-separated and photo-enhanced semiconductor corrosion processes for high-efficient and contamination-free electrochemical nanoimprint lithography

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Science China Chemistry 2022年第4期65卷 810-820页

作者： Hantao Xu Lianhuan Han Jian-Jia Su Zhong-Qun Tian dongping zhan Key Laboratory of Physical Chemistry of Solid Surfaces(PCOSS) Engineering Research Center of Electrochemical Technologies of Ministry of EducationDepartment of ChemistryCollege of Chemistry and Chemical EngineeringXiamen UniversityXiamen 361005China Department of Mechanical and Electrical Engineering School of Aerospace EngineeringXiamen UniversityXiamen 361005China

Free of any thermoplastic or photocuring resists, electrochemical nanoimprint lithography(ECNL) has emerged as an alternative nanoimprint way to fabricate three-dimensional micro/nano-structures(3D-MNSs) directly on a semiconductor wafer by a spatially-confined corrosion reaction induced by the metal/semiconductor contact potential. However, the consumption of electron acceptors in the ultrathin electrolyte between imprint mold and semiconductor wafer will slow down or even cease the corrosion rate. To solve this problem, we change the short-circuited corrosion cell into a spatially-separated primary cell: the imprint mold compacted gallium arsenide(GaAs) wafer in the anodic chamber while the platinum(Pt) plate connected to the imprint mold in the cathodic chamber. Thus, the GaAs corrosion rate will be stabilized in its limiting steady-state current density because of the abundant source of electron acceptors in the catholic chamber. The corrosion processes can be photo-enhanced by white-light illumination. Consequently, both the accuracy and the efficiency are promoted dramatically, which are demonstrated by the excellent performance of the fabricated binary optical elements. Moreover, the contamination problem caused by the electron acceptors is totally avoided. All the results prove that this novel ECNL mode is competitive and prospective in imprinting 3D-MNSs directly on semiconductor wafer.

关键词： nanoimprint lithography electrochemical microfabrication semiconductor corrosion semiconductor microdevices 3D functional micro/nano-structures

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A loyal but quiet rose of electrochemistry

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Science China Chemistry 2018年第8期61卷 977-978页

作者： dongping zhan State Key Laboratory of Physical Chemistry of Solid Surfaces(PCOSS) Collaborative Innovation Centre of Chemistry for Energy Materials(i Ch EM) and Department of Chemistry College of Chemistry and Chemical Engineering Xiamen University

Nowadays is a blooming spring of electrochemistry benefiting from its proven but accessible experimental methods.This is a historical phenomenon when a new science is born and keeps growing,especially,in the prosperous Nano Age.However,scientists will think over the fundamentals and breed the next prosperity of science and technology when the jollification calms down.

关键词：电气化学玫瑰安静忠诚 Nano 新科学试验性科学家

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Bipolar electrochemistry in confined nanospace

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Science China Chemistry 2018年第4期61卷 379-380页

作者： dongping zhan State Key Laboratory of Physical Chemistry of Solid Surfaces Collaborative Innovation Centre of Chemistry for Energy MaterialsDepartment of ChemistryCollege of Chemistry and Chemical EngineeringXiamen University

Nanopores employ a confined space for electrochemical sensing of high-throughput individual biomolecules in solution.The most general mechanism of nanopore sensing is based on a volume exclusion effect.However,the increasing demands on revealing the single-molecule/particle chemistry and biophysics require the nanopores not only provide structural/conformational/sequencing information,but

关键词：电气化学双极

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Electrochemical hydrogen-storage capacity of graphene can achieve a carbon-hydrogen atomic ratio of 1:1

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Science China Chemistry 2022年第2期65卷 318-321页

作者： Quanfeng He Lanping Zeng Lianhuan Han Juan Peng Matthew M.Sartin Yuan-Zhi Tan dongping zhan Zhong-Qun Tian State Key Laboratory of Physical Chemistry of Solid Surfaces Fujian Science&Technology Innovation Laboratory for Energy Materials of ChinaEngineering Research Center of Electrochemical Technologies of Ministry of EducationGraphene Industry and Engineering Research InstituteDepartment of ChemistryCollege of Chemistry and Chemical EngineeringDepartment of Mechanical and Electrical EngineeringSchool of Aerospace EngineeringXiamen UniversityXiamen 361005China Department of Chemistry College of Chemistry and Chemical EngineeringNingxia UniversityYinchuan 750021China

As a promising hydrogen-storage material,graphene is expected to have a theoretical capacity of 7.7 wt%,which means a carbon-hydrogen atomic ratio of 1:1.However,it has not been demonstrated yet by experiment,and the aim of the U.S.Department of Energy is to achieve 5.5 wt%in 2025.We designed a spatially-confined electrochemical system and found that the storage capacity of hydrogen adatoms on single layer graphene(SLG)is as high as 7.3 wt%,which indicates a carbon-hydrogen atomic ratio of 1:1 by considering the sp^(3) defects of SLG.First,SLG was deposited on a large-area polycrystalline platinum(Pt)foil by chemical vapor deposition(CVD);then,a micropipette with reference electrode,counter electrode and electrolyte solution inside was impacted on the SLG/Pt foil(the working electrode)to construct the spatially-confined electrochemical system.The SLG-uncovered Pt atoms act as the catalytic sites to convert protons(H^(+))to hydrogen adatoms(H_(ad)),which then spill over and are chemically adsorbed on SLG through surface diffusion during the cathodic scan.Because the electrode processes are reversible,the H_(ad) amount can be measured by the anodic stripping charge.This is the first experimental evidence for the theoretically expected hydrogen-storage capacity on graphene at ambient environment,especially by using H+rather than hydrogen gas(H_(2))as the hydrogen source,which is of significance for the practical utilization of hydrogen energy.

关键词： graphene hydrogen storage surface electrochemistry adsorption desorption spillover surface diffusion

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Effect of tempering temperature on the microstructure and properties of ultrahigh-strength stainless steel

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Journal of Materials Science & Technology 2019年第7期35卷 1240-1249页

作者： Yangpeng zhang dongping zhan Xiwei Qi Zhouhua Jiang School of Metallurgy Northeastern UniversityShenyang110819China School of Materials Science and Engineering Northeastern UniversityShenyang110819China

The microstructure, precipitation and mechanical properties of Ferrium S53 steel, a secondary hardening ultrahigh-strength stainless steel with 10% Cr developed by QuesTek Innovations LLC, upon tem pering were studied by scanning electron microscopy (SEM), transm ission electron microscopy (TEM), X-ray diffraction (XRD), and tensile and impact tests. Based on these results, the influence of the tem pering temperature on the microstructure and properties was discussed. The results show th at decom position occurred when the retained austenite was tem pered above 440 ℃ and that the hardening peak at 482 ℃ was caused by the joint strengthening of the precipitates and martensite transformation. Due to the high Cr content, the trigonal M7C3 carbide precipitated w hen the steel was tem pered at 400 ℃, and M7C3 and M2C (5 -10 nm in size) coexisted w hen it was tem pered at 482 ℃. When the steel was tem pered at 630 ℃, M2C and M23C6 carbides precipitated, and the sizes w ere greater than 50 nm and 500 nm, respectively, but no M7C3 carbide formed. When the tempering tem perature was above 540 ℃, austenitization and large-size precipitates w ere the main factors affecting the strength and toughness.

关键词： Age hardening Austenite Precipitation Tempering Strengthening mechanism M7C3

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Evolution of Microstructures and Mechanical Properties of Zr-Containing Y-CLAM During Thermal Aging

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Acta Metallurgica Sinica(English Letters) 2020年第6期33卷 881-891页

作者： dongping zhan Guoxing Qiu Changsheng Li Yongkun Yang Zhouhua Jiang Huishu zhang School of Metallurgy Northeastern UniversityShenyang 110819China State Key Laboratory of Rolling and Automation Northeastern UniversityShenyang 110819China School of Metallurgical Engineering Xi'an University of Architecture and TechnologyXi'an 710055China School of Metallurgy Engineering Liaoning Institute of Science and TechnologyBenxi 117004China

The thermal stability and mechanical properties of China low activation martensitic steel with Zr and Y were investigated via thermal aging at 550 °C for 8000 h. The Laves phase content monotonically increased with thermal aging, and the volume fraction of the Laves phases stabilized in the alloy after 3000 h of thermal aging. The observed degradation in mechanical properties was because of the coarsening of M23C6 carbides and matrix grains during the earlier stages of thermal aging. The precipitation of Laves phases and V3Zr3C particles increased the strength and hardness of the alloy. Grain coarsening was the primary reason for the decrease in impact properties, and the ductile-to-brittle transition temperature increased from-71 to -48 °C after 8000 h of thermal aging.

关键词： Thermal stability Zr-containing RAFM Precipitation Microstructures Mechanical properties

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Copper/cuprous sulfide electrode: preparation and performance

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Science China Chemistry 2015年第6期58卷 1039-1043页

作者： Lina Xiao Ding Yuan Pei Li Li Huang Bing-Wei Mao dongping zhan State Key Laboratory for Physical Chemistry of Solid Surfaces Department of Chemistry College of Chemistry and Chemical Engineering Xiamen University

Cuprous sulfide(Cu2S) is a direct band-gap p-type semiconductor with excellent ionic/electronic hybrid conductivity. Although Cu/Cu2S/sulfide or polysulfide system is adopted as counter electrode of quantum-dots-sensitized solar cells(QDSSC), the electrode process is seldom reported. Here, the electrochemical growth of Cu2 S film on a copper(Cu) surface, the redox behaviors of sulfide and polysulfide, and the all-in-solid charge-transfer properties of Cu2 S film are investigated. It is clarified that the copper electrode simultaneously undergoes an activated process, a membrane growth process, and a redox phase transformation process. The solid charge-transfer capability of Cu2 S is quantified with a high exchange-current density of 2.27 A/cm2, which elucidates that the Cu/Cu2 S electrode is a qualified material for counter electrodes of QDSSC. These results aid understanding of the physicochemical mechanism of QDSSC with a polysulfide electrolyte and Cu/Cu2 S counter electrode.

关键词：铜电极硫化亚铜氧化还原行为多硫化物性能制备交换电流密度物理化学机制

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The coupling effect of slow-rate mechanical motion on the confined etching process in electrochemical mechanical micromachining

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Science China Chemistry 2018年第6期61卷 715-724页

作者： Lianhuan Han Yuchao Jia Yongzhi Cao Zhenjiang Hu Xuesen Zhao Shusen Guo Yongda Yan Zhongqun Tian dongping zhan Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education Harbin Institute of Technology Center for Precision Engineering Harbin Institute of Technology State Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS) Collaborative Innovation Centre of Chemistry for Energy Materials(iChEM) and Department of Chemistry College of Chemistry and Chemical Engineering Xiamen University

By introducing the mechanical motion into the confined etchant layer technique(CELT), we have developed a promising ultraprecision machining method, termed as electrochemical mechanical micromachining(ECMM), for producing both regular and irregular three dimensional(3 D) microstructures. It was found that there was a dramatic coupling effect between the confined etching process and the slow-rate mechanical motion because of the concentration distribution of electrogenerated etchant caused by the latter. In this article, the coupling effect was investigated systemically by comparing the etchant diffusion, etching depths and profiles in the non-confined and confined machining modes. A two-dimensional(2 D) numerical simulation model was proposed to analyze the diffusion variations during the ECMM process, which is well verified by the machining experiments. The results showed that, in the confined machining mode, both the machining resolution and the perpendicularity tolerance of side faces were improved effectively. Furthermore, the theoretical modeling and numerical simulations were proved valuable to optimize the technical parameters of the ECMM process.

关键词：机械运动电气化学蚀刻剂机器制造技术参数制造方法微观结构模拟模型

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Nanofabrication of the gold scanning probe for the STM-SECM coupling system with nanoscale spatial resolution

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Science China Chemistry 2017年第5期60卷 649-655页

作者： Fang-Fang Wang Wei Wang Xi He Lianhuan Han Jian-zhang Zhou Zhong-Qun Tian Zhao-Wu Tian dongping zhan State Key Laboratory of Physical Chemistry of Solid Surfaces College of Chemistry and Chemical EngineeringXiamen University Chemical Engineering and Environmental Engineering College of Chemistry Liaoning Shihua University

Scanning probe is the key issue for the electrochemical scanning probe techniques(EC-SPM) such as EC-scanning tunnel microscopy(STM), EC-atomic force microscopy(AFM) and scanning electrochemical microscopy(SECM), especially the insulative encapsulation of the nanoelectrode probe for both positioning and electrochemical feedbacks. To solve this problem,we develop a novel fabrication method of the gold nanoelectrodes: firstly, a micropipette with nanomter-sized orifice was prepared as the template by a laser puller; secondly, the inside wall of micropipette apex was blocked by compact and conic Au nano-piece through electroless plating; thirdly, the Au nano-piece was grown by bipolar electroplating and connected with a silver wire as a current collector. The fabricated Au nanoelectrode has very good voltammetric responses for the electrodic processes of both mass transfer and adsorption. The advantage lies in that it is well encapsulated by a thin glass sealing layer with a RG value lowered to 1.3, which makes it qualified in the SECM-STM coupling mode. On one hand, it can serve as STM tip for positioning which ensures the high spatial resolution; on the other hand, it is a high-quality nanoelectrode to explore the local chemical activity of the substrate. The nanofabrication method may promote the SPM techniques to obtain simultaneously the physical and chemical images with nanoscale spatial resolution, which opens a new approach to tip chemistry in electrochemical nanocatalysis and tip-enhanced spectroscopy.

关键词： scanning probe SECM bipolar nanoelectrode electrochemical imaging

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菜籽油脱胶和脱臭工艺优化

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中国油脂 2024年第6期49卷 18-23,29页

作者：洪坤强罗质叶展雷芬芬钟武何东平武汉轻工大学食品科学与工程学院武汉430023 国家市场监管重点实验室武汉430023 江南大学食品学院江苏无锡214122

为了对菜籽油适度精炼提供参考,以菜籽原油(磷含量693.00mg/kg)为原料,采用磷脂酶A_(1)(PLA_(1))进行预脱胶,再采用磷脂酶C(PLC)进行复脱胶,所得脱胶油采用低温短时两级捕集回流脱臭工艺进行脱臭。以磷含量为指标,通过单因素试验和响应... 详细信息

为了对菜籽油适度精炼提供参考,以菜籽原油(磷含量693.00mg/kg)为原料,采用磷脂酶A_(1)(PLA_(1))进行预脱胶,再采用磷脂酶C(PLC)进行复脱胶,所得脱胶油采用低温短时两级捕集回流脱臭工艺进行脱臭。以磷含量为指标,通过单因素试验和响应面试验对PLA_(1)预脱胶工艺条件进行优化。以生育酚损失率为指标,通过单因素试验和正交试验对脱臭工艺条件进行优化。另外,对比了不同脱胶方法(PLA_(1)-PLC复合脱胶、PLC脱胶、水化脱胶)和不同脱臭工艺(低温短时两级捕集回流脱臭工艺和常规脱臭工艺)的效果。结果表明:PLA_(1)预脱胶最优工艺条件为柠檬酸(45g/100mL)添加量3.3mL/kg、PLA_(1)(10U/mL)添加量44.0mL/kg、脱胶温度54.0℃、脱胶时间1.4h,在此条件下PLA_(1)-PLC复合脱胶菜籽油中磷含量相比菜籽原油下降了(99.01±0.05)%;与其他脱胶方法相比,PLA_(1)-PLC复合脱胶法脱胶效率高;脱臭最优工艺条件为脱臭温度220℃、脱臭时间80min,在此条件下生育酚损失率在10%以下,且各生育酚单体的相对含量基本不变;与常规脱臭工艺相比,低温短时两级捕集回流脱臭工艺具有能耗和生育酚损失率低的优点。综上,PLA_(1)-PLC复合脱胶和低温短时两级捕集回流脱臭工艺可以较好地改善菜籽油的品质,具有良好的市场应用前景。

关键词：菜籽油 PLA_(1)预脱胶 PLC复脱胶低温短时两级捕集回流脱臭

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