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Structural and optoelectronic properties of sprayed Sb:SnO_2 thin films:Effects of substrate temperature and nozzle-to-substrate distance

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Journal of Semiconductors 2011年第10期32卷 1-9页

作者： A.R.Babar S.S.Shinde A.V.moholkar C.H.Bhosale K.Y.Rajpure Electrochemical Materials Laboratory Department of PhysicsShivaji University

The influence of substrate temperature and nozzle-to-substrate distance（nSD） on the structural,morphological, optical and electrical properties of Sb：SnO_2 thin films prepared by chemical spray pyrolysis has been *** structural,morphological,optical and electrical properties were characterized by using XRD,SEM, UV-visible spectrophotometry and Hall effect measurement *** was seen that the films are polycrystalline, having a tetragonal crystal structure with strong orientation along the（200） *** pyramidal crystallites formed due to coalescence were observed from SEM *** values of highest conductivity,optical transmittance and figure of merit of about 1449（Ω·cm）^（-1）,70%and 5.2×10^（-3）□/Ω,respectively,were observed for a typical film deposited using optimal conditions（substrate temperature = 500℃and nSD = 30 cm）.

关键词： substrate temperature nSD structural optoelectronic properties

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Physical properties of sprayed antimony doped tin oxide thin films:The role of thickness

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Journal of Semiconductors 2011年第5期32卷 10-17页

作者： A.R.Babar S.S.Shinde A.V.moholkar C.H.Bhosale J.H.Kim K.Y.Rajpure Electrochemical Materials Laboratory Department of PhysicsShivaji UniversityKolhapur-416 004India Department of Materials Science and Engineering Chonnam National University300 Yongbong-DongBuk-GuGwangju500-757South Korea

Transparent conducting antimony doped tin oxide （Sb：SnO2） thin films have been deposited onto pre- heated glass substrates using a spray pyrolysis technique by varying the quantity of spraying solution. The structural, morphological, X-ray photoelectron spectroscopy, optical, photoluminescence and electrical properties of these films have been studied. It is found that the films are polycrystalline in nature with a tetragonal crystal structure having orientation along the （211） and （112） planes. Polyhedrons like grains appear in the FE-SEM images. The average grain size increases with increasing spraying quantity. The compositional analysis and electronic behaviour of Sb：SnO2 thin films were studied using X-ray photoelectron spectroscopy. The binding energy of Sn3ds/2 for all samples shows the Sn^4＋ bonding state from SnO2. An intensive violet luminescence peak near 395 nm is observed at room temperature due to oxygen vacancies or donor levels formed by Sb^5＋ ions. The film deposited with 20 cc solution shows 70 % transmittance at 550 nm leading to the highest figure of merit （2.11 × 10^-3 Ω^-1）. The resistivity and carrier concentration vary over 1.22 × 10^-3 to 0.89 × 10^-3Ω cm and 5.19 ×10^20 to 8.52 × 10^20 cm^-3, respectively.

关键词： semiconductors microstructure optical properties electrical properties

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