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An Innovative Method to Improve Model Accuracy by Implementing Multi-models Scheme for 28nm Node and Below

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Journal of Microelectronic Manufacturing 2019年第3期2卷 17-22页

作者： Qingchen Cao Tianhui Li Shuying Wang deyuan xiao SiEn (QingDao) Integrated Circuits Co. Ltd Qingdao University

As the process comes into 28nm node and below,lithography struggles stronger between high resolution (high NA) and enough process window especially for hole layers (Contacts and Vias).Taking more care of process window may result in lower image quality of structures and bigger uncertainty in OPC model accuracy.Besides,it is difficult to cover all kinds of test structures within acceptable accuracy in one OPC model because of distinct difference of image quality of different patterns.To solve these problems,this paper introduces an innovative method of applying multi-models in one layer OPC.According to different characteristic features,multiple models are applied respectively and the fitting on these features with poor resolution can be improved by re-optimizing based on related model.A practice for 28 nm Via layer modeling calibration is given,and it shows an evident improvement of model accuracy through the implementing of multiple models scheme.

关键词： Image quality lithography OPC model multi-model

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新生儿期先天性心脏病患儿的临床特征分析

岭南心血管病杂志 2024年第1期30卷 45-50页

作者：胡小龙陈晓程鹏李德元张小华南昌大学第一附属医院新生儿科南昌330006 江西省儿童医院南昌330006

目的了解新生儿期先天性心脏病(congenital heart disease, CHD)患儿的临床特点,为临床早期诊治提供依据。方法本研究为单中心回顾性研究,对南昌大学第一附属医院2016年1月1日至2021年8月31日收治且经超声心动图确诊为CHD的新生儿的... 详细信息

目的了解新生儿期先天性心脏病(congenital heart disease, CHD)患儿的临床特点,为临床早期诊治提供依据。方法本研究为单中心回顾性研究,对南昌大学第一附属医院2016年1月1日至2021年8月31日收治且经超声心动图确诊为CHD的新生儿的临床资料进行分析。结果 297例确诊为CHD的新生儿中,男婴148例(49.83%),出生体质量为(2 617±741)g;足月儿121例(40.74%),早产儿144例(48.49%),过期产儿32例(10.78%);试管婴儿21例(7.07%),双胎46例(15.49%);低出生体质量儿140例(51.85%),出生窒息55例(18.51%)。经皮血氧饱和度低于90%的患儿54例(18.18%);发绀21例(7.07%);闻及杂音58例(19.52%),杂音多见于室间隔缺损。非发绀型CHD明显多于发绀型;非发绀型CHD构成比依次为房间隔缺损、动脉导管未闭和室间隔缺损。申请超声心动图检查的指征中孕母有流产史及妊娠期糖尿病最为常见。不同类别的非发绀型CHD患儿血气分析、心肌酶谱及凝血功能无明显差异。291例非发绀型CHD患儿均在抗感染、营养心脏及输血等治疗后好转出院。6例发绀型CHD有5例放弃治疗后死亡,1例转至他院行手术治疗。结论新生儿CHD以非发绀型最为常见,房间隔缺损占比较高。当孕母存在导致胎儿CHD的高危因素或新生儿有早产、心脏杂音、血氧下降及发绀等情况时应及时安排超声心动图检查及早诊断。轻型的左向右分流CHD患儿予抗感染、营养支持等治疗即可,对于危重CHD新生儿应迅速转移到设备齐全、技术力量强的小儿心脏中心进行救治。

关键词：先天性心脏病新生儿治疗

微藻配施枯草芽孢杆菌对烟田土壤化学性质和细菌群落的影响

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江西农业大学学报 2024年第1期46卷 241-250页

作者：赵诣王振华杨磊彭德元向东符昌武刘毅覃潇秦红灵李强湖南农业大学农学院湖南长沙410128 湖南省烟草公司张家界市公司湖南张家界427000 湖南中烟工业有限责任公司湖南长沙410014 中国科学院亚热带生态农业研究所湖南长沙410125

【目的】研究微藻与枯草芽孢杆菌的共生关系及其对土壤细菌群落的影响。【方法】设置微藻(M)、枯草芽孢杆菌(B)、微藻和枯草芽孢杆菌(MB)及空白对照(CK)4个处理,在室内连续恒温培养35 d,测定土壤化学性质,运用荧光定量PCR和Illumina Mi... 详细信息

【目的】研究微藻与枯草芽孢杆菌的共生关系及其对土壤细菌群落的影响。【方法】设置微藻(M)、枯草芽孢杆菌(B)、微藻和枯草芽孢杆菌(MB)及空白对照(CK)4个处理,在室内连续恒温培养35 d,测定土壤化学性质,运用荧光定量PCR和Illumina Miseq测序等分子生物学技术,分析土壤细菌群落丰度和组成的演替规律,揭示微藻配施枯草芽孢杆菌对土壤化学性质和细菌群落的影响。【结果】与CK处理相比,微藻配施枯草芽孢杆菌显著提高土壤铵态氮、硝态氮、DOC含量和pH,在培养第35天分别增加11.93%、17.80%、5.58%和2.75%。微藻配施枯草芽孢杆菌显著增加土壤细菌群落丰富度和多样性,改善土壤细菌群落结构,显著增加变形菌门(Proteobacteria)、硝化螺旋菌属(Nitrospira)和芽孢杆菌属(Bacillus)的相对丰度。冗余分析(RDA)结果显示,土壤pH、有效磷和硝态氮含量是引起土壤细菌群落结构变化的主要环境因子。微藻配施枯草芽孢杆菌促进土壤细菌群落间的正向相互作用,显著增加网络拓扑参数节点数、边数、平均度,网络更加复杂。【结论】微藻配施枯草芽孢杆菌能有效改良土壤养分,调节养分变化规律,显著增加土壤细菌多样性,优化土壤细菌群落结构,促进细菌群落间的相互作用。

关键词：微藻枯草芽孢杆菌土壤化学性质细菌群落

Planar split dual gate MOSFET

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Science in China(Series F) 2008年第4期51卷 440-448页

作者： xiao deyuan CHEN Gary LEE Roger LIU Yung SHEN ChiCheong Memory Technology Development Center Semiconductor Manufacturing International (Shanghai) Corp.Shanghai 201203 China

A new planar split dual gate （PSDG） MOSFET device, its characteristics and experimental results, as well as the three dimensional device simulations, are reported here for the first time. Both theoretical calculation and 3D simulation, as well as the experiment data, show that the two independent split dual gates can provide dynamical control of the device characteristics, such as threshold voltage （Vt） and sub-threshold swing （SS）, as well as the device saturated current. The PSDG MOSFET transistor leakage current （loft） can be reduced as much as 78% of the traditional single gate MOSFET. The PSDG is fabricated and fully compatible with our conventional 0.18 μm logic process flow.

关键词： novel device MOSFET planar split dual gate tunable sub-threshold swing

Photothermal-chemical synthesis of P-S-H ternary hydride at high pressures

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Chinese Physics B 2022年第6期31卷 650-655页

作者：叶婷婷曾鸿程鹏姚德元潘孝美张晓丁俊峰 Key Laboratory of Materials Physics Institute of Solid State PhysicsHFIPSChinese Academy of SciencesHefei 230031China University of Science and Technology of China Hefei 230026China Frontiers Science Center for Transformative Molecules School of Chemistry and Chemical EngineeringShanghai Jiao Tong UniversityShanghai 200240China

The recent discovery of room temperature superconductivity(283 K)in carbonaceous sulfur hydride(C-S-H)has attracted much interest in ternary hydrogen rich materials.In this report,ternary hydride P-S-H was synthesized through a photothermal-chemical reaction from elemental sulfur(S),phosphorus(P)and molecular hydrogen(H_(2))at high pressures and room temperature.Raman spectroscopy under pressure shows that H_(2)S and PH_(3) compounds are synthesized after laser heating at 0.9 GPa,and a ternary van der Waals compound P-S-H is synthesized with further compression to 4.6 GPa.The P-S-H compound is probably a mixed alloy of PH_(3) and(H_(2)S)_(2)H_(2) with a guest-host structure similar to the C-S-H system.The ternary hydride can persist up to 35.6 GPa at least and shows two phase transitions at approximately 23.6 GPa and 32.8 GPa,respectively.

关键词： hydride superconductor high pressure Raman spectroscopy

靶向肿瘤内皮细胞糖酵解在抗肿瘤血管生成中作用的研究进展

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现代肿瘤医学 2022年第10期30卷 1880-1883页

作者：黄晓符德元扬州大学医学院江苏扬州225000 苏北人民医院甲状腺乳腺外科江苏扬州225000

致密且紊乱的血管形成是肿瘤的重要特征。过去几十年里,抗血管生成领域的研究主要集中于对血管内皮生长因子(vascular endothelial growth factor,VEGF)抑制剂的开发,诸如贝伐珠单抗等药物已走向临床,但却暴露出易耐药、疗效欠佳等诸多... 详细信息

致密且紊乱的血管形成是肿瘤的重要特征。过去几十年里,抗血管生成领域的研究主要集中于对血管内皮生长因子(vascular endothelial growth factor,VEGF)抑制剂的开发,诸如贝伐珠单抗等药物已走向临床,但却暴露出易耐药、疗效欠佳等诸多问题。近期肿瘤内皮细胞(tumor endothelial cell,TEC)的糖代谢重编程给我们带来新的思路。通过阻断TEC的糖酵解过程,可帮助肿瘤血管正常化。本文将就其中分子机制及其在肿瘤治疗领域的研究进展进行综述,并探讨其与免疫治疗联合应用的可行性,以期为肿瘤治疗提供新的策略。

关键词：有氧糖酵解内皮细胞抗血管生成肿瘤

Research and clinical translation of trilayer stent-graft of expanded polytetrafluoroethylene for interventional treatment of aortic dissection

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Regenerative Biomaterials 2022年第1期9卷 650-664页

作者： Gang Wang Caiyun Gao Benhao xiao Jie Zhang Xunyuan Jiang Qunsong Wang Jingzhen Guo deyuan Zhang Jianxiong Liu Yuehui Xie Chang Shu Jiandong Ding State Key Laboratory of Molecular Engineering of Polymers Department of Macromolecular ScienceFudan UniversityShanghai 200438China R&D Center Lifetech Scientific(Shenzhen)Co.Ltd.Shenzhen 518057China Department of Vascular Surgery the Second Xiangya Hospital of Central South UniversityChangsha 410011China State Key Laboratory of Cardiovascular Diseases Center of Vascular SurgeryFuwai HospitalNational Center for Cardiovascular DiseasesChinese Academy of Medical Science and Peking Union Medical CollegeBeijing 100037China

The aortic dissection(AD)is a life-threatening disease.The transcatheter endovascular aortic repair(EVAR)affords a minimally invasive technique to save the lives of these critical patients,and an appropriate stent-graft gets to be the key medical device during an EVAR procedure.Herein,we report a trilayer stent-graft and corresponding delivery system used for the treatment of the AD disease.The stent-graft is made of nitinol stents with an asymmetric Z-wave design and two expanded polytetrafluoroethylene(ePTFE)membranes.Each of the inner and outer surfaces of the stent-graft was covered by an ePTFE membrane,and the two membranes were then sintered together.The biological studies of the sintered ePTFE membranes indicated that the stent-graft had excellent cytocompatibility and hemocompatibility in vitro.Both the stent-graft and the delivery system exhibited satisfactory mechanical properties and operability.The safety and efficacy of this stent-graft and the corresponding delivery system were demonstrated in vivo.In nine canine experiments,the blood vessels of the animals implanted with the stent-grafts were of good patency,and there were no thrombus and obvious stenosis by angiography after implantation for 6months.Furthermore,all of the nine clinical cases experienced successful implantation using the stent-graft and its postrelease delivery system,and the 1-year follow-ups indicated the preliminary safety and efficacy of the trilayer stent-graft with an asymmetric Z-wave design for interventional treatment.

关键词： aortic dissection stent-graft expanded polytetrafluoroethylene delivery system for interventional treatment clinical translation of biomaterials

Solution-processed lead-free bulk 0D Cs3Cu2I5 single crystal for indirect gamma-ray spectroscopy application

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Photonics Research 2021年第3期9卷 351-356页

作者： Qiang Xu Juan Wang Qindong Zhang xiao Ouyang Maheng Ye Weiting Xie Xuewen Yan deyuan Li xiaoping Ouyang xiaobing Tang xiaodong Zhang Department of Nuclear Science and Engineering Nanjing University of Aeronautics and AstronauticsNanjing 211106China Shaanxi Engineering Research Center of Controllable Neutron Source School of ScienceXijing UniversityXi'an 710123China Institute of Nuclear and New Energy Technology Tsinghua UniversityBeijing 100084China China Institute for Radiation Protection Taiyuan 030012China Northwest Institute of Nuclear Technology Xi'an 710024China

Bulk scintillators that are with high density,low cost,and fine pulse-height energy spectral resolution,and are nonhygroscopic and user friendly,are desired for high-energy gamma-ray spectroscopy application.Recently,low-cost solution-processed perovskite nanoscintillators have been demonstrated with outstanding performances for indirect low-energy X-ray detection;however,the stability and thickness are not suitable for high-energy gamma-ray detection.Here,we report scintillation performances of a low-cost solution-processed bulk 0D Cs3Cu2I5 single crystal.The self-trapped exciton emission results in a large Stokes shift (109 nm) that is reabsorption free.A broad X-ray excited emission matches well with the sensitivity of a silicon photodiode.The unique Cs+ surrounded isolated [Cu2I5]3-cluster scintillator provides ultra-stability in air and strong radiation hardness under high-dose gammaray exposure from a 60Co source.This solution-processed Cs3Cu2I5 scintillator is expected with low-cost and has detection performances comparable to commercial alkali-halide scintillator products.

关键词： spectroscopy stability crystal

Challenges of 22 nm and beyond CMOS technology

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Science in China(Series F) 2009年第9期52卷 1491-1533页

作者： HUANG Ru WU HanMing KANG JinFeng xiao deyuan SHI XueLong AN Xia TIAN Yu WANG RunSheng ZHANG LiangLiang ZHANG Xing WANG YangYuan Department of Microelectronics Peking University Beijing 1000871 China Semiconductor Manufacturing International Corporation (SMIC) Beijing 100176 China

It is predicted that CMOS technology will probably enter into 22 nm node around 2012. Scaling of CMOS logic technology from 32 to 22 nm node meets more critical issues and needs some significant changes of the technology, as well as integration of the advanced processes. This paper will review the key processing technologies which can be potentially integrated into 22 nm and beyond technology nodes, including double patterning technology with high NA water immersion lithography and EUV lithography, new device architectures, high K/metal gate （HK/MG） stack and integration technology, mobility enhancement technologies, source/drain engineering and advanced copper interconnect technology with ultra-low-k process.

关键词： CMOS technology 22 nm technology node device architectures metal gate^high K dielectrics ultra low K dielectrics