检索结果-南通市图书馆

检索条件"作者=D.Piyabongkarn"

共 1 条记录，以下是1-10 订阅

全选清除本页清除全部题录导出标记到"检索档案"

详细简洁

排序：

An Active Control System for Extending the Travel Range of MEMS-Based Electrostatic Microactuators

An Active Control System for Extending the Travel Range of M...

引用

2003年中国智能自动化会议

作者： B．J．Nelson d.piyabongkarn R.Rajamani Institute of Robotics and Intelligent Systems Swiss Federal Institute of Technology(ETH)Zurich Switzerland department of Mechanical Engineering University of Minnesota Minneapolis U.S.A

Electrostatic parallel-plate/transverse comb microactuators have had a fundamental limitation in that the allowable travel range is limited to 1/3 of the total gap between comb capacitor plates. Travel beyond this allowable range results in "pull-in" instability, independent of mechanical design parameters such as stiffness and mass. This paper focuses on the development of an active control system that stabilizes electrostatic microactuators and allows travel almost over the entire available gap between comb capacitor plates, providing a practical approach to extending travel range of electrostatic microactuators for applications that require high fill factors. The challenges to be addressed include the nonlinear dynamics of microactuators and system parameters that vary with each fabricated device.A nonlinear model inversion technique is used to address the nonlinear dynamics, which allows the use of traditional linear controller design methodologies for obtaining a desired linear system response. An adaptive controller is developed to provide improved position tracking in the presence of device parameter variations caused by fabrication imperfections. The control system is implemented on a special MEMS electrostatic microactuator fabricated using deep Reactive Ion Etching (dRIE) on Silicon-On-Insulator (SOI) wafers. The use of dRJE allows the fabrication of high aspect ratio devices that can produce large electrostatic forces with low actuation voltages. Experimental results demonstrate that the resulting system is capable of travelling 4.0μm over a 4.5μm full range without "pull in." Good tracking performance is obtained over a wide frequency band.

关键词：

来源： cnki会议评论

在线全文

cnki会议

学校读者我要写书评

暂无评论

全选清除本页清除全部题录导出标记到“检索档案”

共1页 << < 1 > >>

回到顶部

执行限定条件

欢迎您,

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

机构

作者

语言

在线全文

请选择保存的检索档案：

请选择收藏分类：

通借通还

欢迎您,

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

机构

作者

语言

在线全文

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：