检索结果-南通市图书馆

100pT/cm single-point MEMS magnetic gradiometer from a commercial accelerometer

Microsystems & Nanoengineering 2020年第1期6卷 602-614页

作者： Josh Javor Alexander Stange corey pollock Nicholas Fuhr David J.Bishop Department of Mechanical Engineering Boston UniversityBostonMA 02215USA Division of Materials Science and Engineering Boston UniversityBostonMA 02215USA Department of Electrical and Computer Engineering Boston UniversityBostonMA 02215USA Department of Physics Boston UniversityBostonMA 02215USA Department of Biomedical Engineering Boston UniversityBostonMA 02215USA

Magnetic sensing is present in our everyday interactions with consumer electronics and demonstrates the potential for the measurement of extremely weak biomagnetic fields,such as those of the heart and brain.In this work,we leverage the many benefits of microelectromechanical system(MEMS)devices to fabricate a small,low-power,and inexpensive sensor whose resolution is in the range of biomagnetic fields.At present,biomagnetic fields are measured only by expensive mechanisms such as optical pumping and superconducting quantum interference devices(SQUIDs),suggesting a large opportunity for MEMS technology in this work.The prototype fabrication is achieved by assembling micro-objects,including a permanent micromagnet,onto a postrelease commercial MEMS accelerometer using a pick-and-place technique.With this system,we demonstrate a room-temperature MEMS magnetic gradiometer.In air,the sensor’s response is linear,with a resolution of 1.1 nT cm^(−1),spans over 3 decades of dynamic range to 4.6µT cm^(−1),and is capable of off-resonance measurements at low frequencies.In a 1mTorr vacuum with 20 dB magnetic shielding,the sensor achieves a 100 pT cm^(−1) resolution at resonance.This resolution represents a 30-fold improvement compared with that of MEMS magnetometer technology and a 1000-fold improvement compared with that of MEMS gradiometer technology.The sensor is capable of a small spatial resolution with a magnetic sensing element of 0.25 mm along its sensitive axis,a>4-fold improvement compared with that of MEMS gradiometer technology.The calculated noise floor of this platform is 110 fTcm^(−1) Hz−1/2,and thus,these devices hold promise for both magnetocardiography(MCG)and magnetoencephalography(MEG)applications.

关键词： accelerometer magnetometer everyday

来源：

维普期刊数据库评论

在线全文

维普期刊数据库

学校读者我要写书评

暂无评论

欢迎您,

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

在线全文

请选择保存的检索档案：

请选择收藏分类：

通借通还

欢迎您,

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

在线全文

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：