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Mechanical Characterization of Electroplated Ni Films by Micro-tensile Testing

Chinese Journal of Mechanical Engineering 2009年第4期22卷 557-561页

作者： ZHANG Duanqin chu jinkui Key Laboratory for Micro/Nano Technology and System of Liaoning Province Dalian University of Technology Dalian 116024 China

Mechanical properties of structural materials are particularly important for design, performance realization and reliability analysis of microelectromechanical systems （MEMS）. Furthermore, accurate database of mechanical properties at the micro scale can provide indispensable reference for establishing MEMS standard. Electroplated nickel film is one of the most favored structural materials used in MEMS, thus its mechanical properties has been studied for many years. However, the measured values show large scatter in Yotmg＇s modulus of nickel film. Young＇s modulus and yield stress of electroplated nickel film are measured by using a micro-tensile testing instrument. The tensile load applied on the specimen is measured by a load cell with accuracy 0.25 mN directly, without additional friction. Through measuring the axial stiffness coefficient of the tensile instnunent in situ, the tensile strain of the specimen is obtained by using two-serial spring model. The electroplated nickel films were fabricated from sulfarnate baths, and the gauge section is 500μm long and 10μm wide nominally, and thickness range between 25 μm and 50μm. The obtained Young＇s modulus from tensile testing is 83＋6 GPa for nickel specimens electroplated at current density of 20 mA/cm2 and it increases to 124＋5 GPa as current density is decreased to 10 mA/cm2. The phenomena are interpreted in terms of porosity of microstructure. The higher current density produced rnicrostucture with low density and high volume fraction of pores, and the microstructure of high porosity corresponds to a lower modulus. The measured values of Young＇s modulus are consistent with those of calculated from the exponential empirical formula between Young＇s modulus and porosity. The micro-tensile testing instrument can also be used for mechanical measurement of other MEMS films.

关键词： electroplated nickel micro-tensile testing Young's modulus porosity

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Relationship between coupler curve properties of a 4-bar linkage and its dimensional types

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Science China(Technological Sciences) 2004年第4期47卷 479-487页

作者： chu jinkui WANG Liding WU Chen Key Laboratory for Dalian University of Technology Precision & Non-traditional Machining of Ministry of Education Dalian 116023 China Key Laboratory for Dalian University of Technology Precision & Non-traditional Machining of Ministry of Education Dalian 116023 China Key Laboratory for Dalian University of Technology Precision & Non-traditional Machining of Ministry of Education Dalian 116023 China

Three types of 4-bar linkages can trace the same coupler curve according to the cognate mechanism law. Based on the investigation of the relationship between dimensions of a linkage and the harmonic component characteristic parameters of the coupler curve of the linkage, it was found that six types of linkages are related to the same coupler curve, and they belong to two groups of cognate mechanisms, in which the coupler curves have the same shape and are symmetric. The relationships among the dimensional types of these six mechanisms are presented. The corresponding examples have also proved these conclusions. This work enriches the cognate mechanism law, and can result in more candidate mechanisms for mechanism dimensional synthesis.

关键词： 4-bar linkages, cognate mechanisms, dimensional type.

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Real-Time Position and Attitude Estimation for Homing and Docking of an Autonomous Underwater Vehicle Based on Bionic Polarized Optical Guidance

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Journal of Ocean University of China 2020年第5期19卷 1042-1050页

作者： CHENG Haoyuan chu jinkui ZHANG Ran GUI Xinyuan TIAN Lianbiao The Key Laboratory for Micro/Nano Technology and System of Liaoning Province Dalian University of TechnologyDalian 116024China

As an important tool for marine exploration, the autonomous underwater vehicle(AUV) must home in and dock at a docking station(DS) to be recharged, repaired, or to exchange information at set intervals. However, the complex and hostile underwater environment makes this process challenging. This study proposes a real-time method based on polarized optical guidance for determining the position and attitude of the AUV relative to its DS. Four polarized artificial underwater landmarks are positioned at the DS, which are recognized by the AUV vision system. Compared with light intensity, the polarization of a light beam is known to be better maintained at greater propagation distances, especially in underwater environments. The proposed method, which is inspired by the ability of marine animals to communicate, calculates the pose parameters in less than 10 ms without any other navigational information. The simulation results reveal that the angle errors are small and the position errors are no more than 0.116 m within 100 m in the coastal ocean. The results of underwater experiments further demonstrate the feasibility of the proposed method, which extends the operating distance of the AUV beyond what is currently possible while maintaining the precision of traditional optical guidance.

关键词： polarization optical guidance AUV underwater docking position and attitude estimation

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Bioinspired Polarized Optical Flow Enables Turbid Underwater Target Motion Estimation

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Journal of Ocean University of China 2024年第4期23卷 915-923页

作者： CHENG Haoyuan ZHAO Shujie ZHU Jinchi YU Hao chu jinkui College of Engineering Ocean University of ChinaQingdao 266100China Key Laboratory for Micro/Nano Technology and System of Liaoning Province Dalian University of TechnologyDalian 116024China

Underwater target motion estimation is a challenge for ocean military and scientific *** this work,we propose a method based on the combination of polarization imaging and optical flow for turbid underwater target *** imaging can reduce the influence of backscattered light and obtain high-quality images *** optical flow shows the motion and structural information of the *** use polarized optical flow to obtain the optical flow field and estimate the target *** experimental results of different targets under varying water turbidity levels illustrate that our method is realizable and *** precision is verified by comparing the results with the precise displacement data and calculating two error *** proposed method based on polarized optical flow can obtain accurate displacement information and a good recognition *** target segmentation based on the Otsu method further proves the superiority of the polarized optical flow under turbid *** study is valuable for target detection and motion estimation in scattering environments.

关键词： turbid underwater motion estimation polarization imaging optical flow

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Replication of large area nanoimprint stamp with small critical dimension loss

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Science China(Technological Sciences) 2012年第3期55卷 600-605页

作者： MENG FanTao GUAN Le WANG ZhiWen HAN ZhiTao chu jinkui Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education Dalian University of TechnologyDalian 116024China Key Laboratory for Micro/Nano Technology and System of Liaoning Province Dalian University of TechnologyDalian 116024China

In this paper,the replication process of large area nanoimprint stamp with small critical dimension(CD) loss was investigated,using the thin residual layer nanoimprint lithography(NIL) *** residual layer thickness was optimized by changing the spin-coated resist *** dependences of the residual layer etching rate on gas flow,chamber pressure,and RF power were investigated,and the optimized process conditions were *** means of the thin residual layer NIL technique and optimized residual layer etching process,large area stamp with small CD loss and multi-orientation patterns was successfully replicated on 2-inch SiO2/Si *** CD loss was controlled within 5 *** replicated stamp showed high performance in the patterning with thermal *** replication process reported in this work could also be used to fabricate large area nanostructures with small CD loss.

关键词： nanoimprint stamp replication small critical dimension loss nanoimprint lithography multi-orientation patterns

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Large-area ultracompact pixelated aluminumwire-grid-based metamaterials for Vis-NIR full-Stokes polarization imaging

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Photonics Research 2023年第11期11卷 1975-1986页

作者： YUANYI FAN jinkui chu RAN ZHANG chuANLONG GUAN JIANYING LIU State Key Laboratory of High-performance Precision Manufacturing Dalian University of TechnologyDalian 116024China Key Laboratory for Micro/Nano Technology and System of Liaoning Province Dalian University of TechnologyDalian 116024China

The study of pixelated metamaterials that integrate both the functions of linear and circular polarization filters is rapidly growing due to the need for full-Stokes polarization imaging. However, there is a lack of large-area, ultracompact pixelated full-Stokes metamaterials with excellent performance, especially circular polarization filters with a high extinction ratio, a broad operating bandwidth, and a low-cost, high-quality, efficient manufacturing process, which limits the practical applications of pixelated full-Stokes metamaterials. In this study, we propose a universal design and fabrication scheme for large-area, ultracompact pixelated aluminum wire-grid-based metamaterials used in Vis-NIR full-Stokes polarization imaging. The aluminum wire-grid was designed as a linear polarization filter with an average linear polarization extinction ratio of 36,000 and a circular polarization filter with an average circular polarization extinction ratio of 110 in Vis-NIR. A large-area, ultracompact 320 × 320pixelated aluminum wire-grid-based full-Stokes metamaterial was fabricated using nanoimprint lithography and nano transfer printing with the advantages of low cost and high efficiency. This metamaterial was used to achieve full-Stokes polarization imaging with errors within 8.77%, 12.58%, 14.04%, and 25.96% for Stokes parameters S_(0), S_(1), S_(2), and S_(3), respectively. The inversion errors of the compensated Stokes parameters can be reduced to0.21%, 0.21%, 0.42%, and 1.96%, respectively.

关键词： polarization Stokes lithography

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平面含复铰及齿轮-连杆运动链的拓扑描述和结构自动综合

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机械工程学报 2015年第13期51卷 95-100,115页

作者：褚金奎邹炎火大连理工大学机械工程学院大连116024 中国科学院海西院泉州装备制造研究所泉州362200

平面含复铰及齿轮-连杆运动链的拓扑结构自动综合可为机构方案创新设计提供各种优选类型,是研究机构结构组成的有效方法,是构思、发明新机构的基础。研究平面含复铰和齿轮-连杆运动链的多色拓扑图描述及借助拓扑图描述实现的单开链迭加... 详细信息

平面含复铰及齿轮-连杆运动链的拓扑结构自动综合可为机构方案创新设计提供各种优选类型,是研究机构结构组成的有效方法,是构思、发明新机构的基础。研究平面含复铰和齿轮-连杆运动链的多色拓扑图描述及借助拓扑图描述实现的单开链迭加结构自动综合方法。详细地讨论平面含复铰和齿轮-连杆运动链的双色拓扑图和三色拓扑图描述,为机构的分析与综合提供良好的数学工具。借助于相应的多色拓扑图描述,给出综合相应输入参数的基于单开链迭加的平面含复铰及齿轮-连杆运动链结构自动综合方法,并给出相应的综合实例来验证该自动综合方法的有效性及可靠性。

关键词：平面含复铰及齿轮-连杆运动链多色拓扑图结构自动综合单开链迭加法

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Stephenson六杆链回路及其缺陷的自动识别

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计算机辅助设计与图形学学报 2005年第7期17卷 1581-1587页

作者：郭晓宁褚金奎浙江大学CAD&CG国家重点实验室杭州310027 大连理工大学机械工程学院大连116024

回路缺陷是连杆机构综合中最基本、最困难的问题·将Stephenson六杆链看作由一个基础四杆链和双杆组组成,基于基础四杆链和双杆组的两个公共副之间的距离,提出了Stephenson六杆链回路识别的原理和模型,给出了回路识别准则,实现了回路和... 详细信息

回路缺陷是连杆机构综合中最基本、最困难的问题·将Stephenson六杆链看作由一个基础四杆链和双杆组组成,基于基础四杆链和双杆组的两个公共副之间的距离,提出了Stephenson六杆链回路识别的原理和模型,给出了回路识别准则,实现了回路和回路缺陷的自动识别,为计算机辅助Stephenson六杆机构综合中尺度方案的优选提供了理论依据和技术方法·另外,此回路识别模型还可直接用来解决机构综合中的曲柄和运动顺序问题·

关键词： Stephenson六杆链回路缺陷距离曲线限制线

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基于傅里叶级数理论的连杆机构轨迹综合方法

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机械工程学报 2010年第13期46卷 31-41页

作者：褚金奎孙建伟大连理工大学精密与特种加工教育部重点实验室大连116023

探讨傅里叶级数在平面和空间连杆机构中的几何意义,给出平面和空间连杆机构连杆曲线的统一数学表达式。借助傅里叶级数理论,对该表达式的谐波成分进行理论分析,发现连杆曲线谐波成分与其相应连杆转角函数谐波特征参数和机构尺寸参数的... 详细信息

探讨傅里叶级数在平面和空间连杆机构中的几何意义,给出平面和空间连杆机构连杆曲线的统一数学表达式。借助傅里叶级数理论,对该表达式的谐波成分进行理论分析,发现连杆曲线谐波成分与其相应连杆转角函数谐波特征参数和机构尺寸参数的内在联系。通过连杆机构基本尺寸型与连杆转角函数的关系,提出建立连杆曲线数值图谱,以及推导连杆机构实际尺寸、连杆上点的位置和安装尺寸参数理论公式的一般方法。建立由平面机构到空间机构在形式上和内容上统一的连杆机构轨迹综合理论。从而为连杆机构轨迹综合提供了一种有效的通用方法。最后通过空间连杆机构轨迹综合算例,说明了本方法的有效性。

关键词：连杆机构傅里叶级数轨迹综合数值图谱

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用快速傅里叶变换进行球面四杆机构连杆轨迹综合

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机械工程学报 2008年第7期44卷 32-37页

作者：孙建伟褚金奎大连理工大学精密与特种加工教育部重点实验室大连116023 大连理工大学辽宁省微纳米技术及系统重点实验室大连116023

根据给出的球面四杆机构连杆轨迹的数学模型,借助傅里叶级数这一数学工具,对连杆轨迹的谐波成分进行理论分析,发现连杆轨迹的谐波成分与其相应转角函数谐波特征参数和机构尺寸参数的内在联系。确定球面四杆机构的基本尺寸型,在此基础上... 详细信息

根据给出的球面四杆机构连杆轨迹的数学模型,借助傅里叶级数这一数学工具,对连杆轨迹的谐波成分进行理论分析,发现连杆轨迹的谐波成分与其相应转角函数谐波特征参数和机构尺寸参数的内在联系。确定球面四杆机构的基本尺寸型,在此基础上建立包含600余万组机构基本尺寸型的球面四杆机构连杆轨迹的谐波特征参数数值图谱库。利用傅里叶级数理论建立球面四杆机构处于空间任意位置时连杆曲线的数学方程,推导出计算机构的实际安装尺寸、连杆上点的位置和机构安装尺寸参数的理论计算公式。利用建立的谐波特征参数数值图谱和推导的理论公式解决了球面四杆机构的轨迹综合问题,最后给出算例证明本方法的可行性。

关键词：球面机构四杆机构轨迹发生器谐波成分

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