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检索条件"作者=CHI Yinsheng1, LIN Xiaohui1, ZHUANG Ping1 & CHEN Yunfei1,2.1. Department of Mechanical Engineering, southeast university, nanjing 2.0096, {2."
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Study on impurity desorption induced by femtosecond pulse laser based on a stochastic process model
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Science china(Technological Sciences) 2006年 第1期49卷 78-88页
作者: chi yinsheng1, lin xiaohui1,{2.,2.1. department of mechanical engineering, southeast university, nanjing 2.0096, china 2. Key Laboratory of MEMS of china Educational Ministry, southeast university, nanjing 2.0096, china department of mechanical{2. Southeast University Nanjing 210096 China Key Laboratory of MEMS of china Educational Ministry Southeast University Nanjing 210096 China
With the advantages on non-equilibrium heating and desorption induced by electronic transition, the femtosecond pulse laser introduces a new way for solving the problem of impurity pollution adsorbed on a solid thin f... 详细信息
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