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microsphere-assisted hyperspectral imaging:super-resolution,non-destructive metrology for semiconductor devices

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Light(Science & Applications) 2024年第6期13卷 1098-1111页

作者： Jangryul Park Youngsun Choi Soonyang Kwon Youngjun Lee Jiwoong kim Jae-joon kim Jihye Lee Jeongho Ahn Hidong Kwak Yusin Yang Taeyong Jo myungjun Lee Kwangrak kim metrology and Inspection Equipment R&D Team Mechatronics ResearchSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department DRAM Process Development TeamSemiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department Semiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea

As semiconductor devices shrink and their manufacturing processes advance,accurately measuring in-cell critical dimensions(CD)becomes increasingly *** test element group(TEG)measurements are becoming inadequate for representing the fine,repetitive patterns in cell *** non-destructive metrology technologies like optical critical dimension(OCD)are limited due to their large spot diameter of approximately 25μm,which impedes their efficacy for detailed in-cell structural ***,there is a pressing need for small-spot and non-destructive metrology *** address this limitation,we demonstrate a microsphere-assisted hyperspectral imaging(mAHSI)system,specifically designed for small spot optical metrology with *** microsphere-assisted super-resolution imaging,this system achieves an optical resolution of 66 nm within a field of view of 5.6μm×5.6μ*** approach effectively breaks the diffraction limit,significantly enhancing the magnification of the *** mAHSI system incorporating hyperspectral imaging with a wavelength range of 400–790 nm,enables the capture of the reflection spectrum at each camera *** achieved pixel resolution,which is equivalent to the measuring spot size,is 14.4 nm/pixel and the magnification is *** mAHSI system enables measurement of local uniformity in critical areas like corners and edges of DRAm cell blocks,areas previously challenging to inspect with conventional OCD *** our knowledge,this approach represents the first global implementation of microsphere-assisted hyperspectral imaging to address the metrology challenges in complex 3D structures of semiconductor devices.

关键词： metrology resolution enable

Integration of earth-abundant cocatalysts for high-performance photoelectrochemical energy conversion

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Journal of Energy Chemistry 2024年第1期88卷 336-355,I0008页

作者： Joonhee ma Sang Hyun Ahn Soo Young kim Department of materials Science and Engineering Korea UniversitySeoul 02841Republic of Korea School of Chemical Engineering and materials Science Chung-Ang University84 Heukseok-roDongjak-guSeoul 06974Republic of Korea

Photoelectrochemical(PEC)energy conversion has emerged as a promising and efficient approach to sustainable energy harvesting and *** utilizing semiconductor photoelectrodes,PEC devices can harness solar energy and drive electrochemical reactions such as water splitting or carbon dioxide(CO_(2))reduction to generate clean fuels and value-added ***,PEC energy conversion faces several challenges such as high overpotential,sluggish reaction kinetics,charge carrier recombination,and stability issues,which limit its practical ***,significant research has been conducted to improve the overall conversion efficiency of PEC *** particularly promising approach is the use of cocatalysts,which involves introducing specific cocatalysts onto the photoelectrode surface to promote charge separation,improve reaction kinetics,and reduce the overpotential,thereby enhancing the overall performance of PEC energy *** review provides a comprehensive overview of the recent developments in the earth-abundant cocatalysts for PEC water splitting and CO_(2) *** main earth-abundant catalysts for the PEC water splitting include transition-metal dichalcogenide(TmD)-based materials,metal phosphides/carbides,and metal oxides/***,PEC-CO_(2)RR was divided into C_(1) and C_(2+)based on the final product since various products could be produced,focusing on diverse earth-abundant materials-based *** addition,we provide and highlight key advancements achieved in the very recent reports on novel PEC system design engineering with ***,the current problems associated with PEC systems are discussed along with a suggested direction to overcome these obstacles.

关键词： Solar energy Photo-electrochemical Water splitting CO_(2)reduction Cocatalysts

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On breakthroughs and limits: Resolving structural fine-tuning of photosynthetic supercomplexes

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molecular Plant 2024年第2期17卷 224-226页

作者： Eunchul kim marcel Dann Division of Environmental Photobiology National Institute for Basic BiologySOKENDAlOkazaki 444-8585Japan Department of basic biology The Graduate University for Advanced StudiesSOKENDAlOkazaki 444-8585Japan bio-Inspired Energy Conversion Technical University of DarmstadtSchnittspahnstraBe 1064287 DarmstadtGermany

Dynamic regulation of photosynthetic supercomplexes is a key strategy allowing plants to adjust their light-harvesting system in response to varying environmental light conditions(bassi and Dall'Osto,2021).State transition(i.e.,acclimative re-distribution of peripheral antennae between photosystems[PSs]I and II)is one such regulation mechanism that maintains excitation balance between PSl and PSll.

关键词： complexes breakthrough maintain

Complexed amino acid minerals vs. bis-glycinate chelated minerals:Impact on the performance of old laying hens

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Animal Nutrition 2024年第1期16卷 395-408页

作者： marcos J.b.Santos maria C.m.m.Ludke Leandro m.Silva Carlos b.V.Rabello mércia R.barros Fabiano S.Costa Clariana S.Santos Jamille S.S.Wanderley Department of Animal Science Rural Federal University of Pernambuco Department of Veterinary Science Rural Federal University of Pernambuco

The present study was to evaluate the effect of trace minerals(Zn, mn, and Cu) from complexed amino acid minerals(ZmCAA) and bis-glycinate chelated minerals(ZmCGly) in laying hen diets on performance,internal and external egg quality, yolk mineral deposition, intestinal morphometry, and bone characteristics. From 78 to 98 weeks of age, 400 White LSL-Lite strain laying hens were distributed in a randomized design with 4 treatments with 10 replicates per treatment. Treatments were distributed in a 2 ×2 factorial arrangement using either Zn, mn, and Cu of ZmCAA or ZmCGly source at 2 levels: low(20, 20,and 3.5 mg/kg of Zn, mn, and Cu, respectively) or high(40, 40, and 7 mg/kg of Zn, mn, and Cu,respectively). The analysis of variance was performed, and in cases where differences were observed, the means were compared using Tukey?s test(P mineral supplementation had a significant impact on the performance of laying hens. Hens fed ZmCAA had higher egg production(P = 0.01), egg weight(P = 0.02), egg mass(P = 0.01), and lower feed conversion ratio(P =0.05) compared to those fed ZmCGly. The ZmCAA supplementation showed higher albumen height(P =0.01), albumen weight(P = 0.01), and eggshell thickness(P mn(PmCAA. Tibia weight(P = 0.04)and bone densitometry(P bia were higher with ZmCAA supplementation. In the small intestine, ZmCAA resulted in longer villi(P = 0.02) and shorter crypt depth(P = 0.01) in the *** and ileum measurements were influenced by the level and source of trace minerals(P mCAA exhibited superior performance, egg quality, deposition of trace minerals in the egg yolk, and bone density compared to hens fed ZmCGly. In this study, older laying hens supplemented with ZmCAA at lower levels demonstrated adequate levels of supplementation.

关键词： bis-glycinates metal-amino acids Radiodensity Trace minerals

Living donor liver transplantation can be a rescue treatment for hepatocellular carcinoma

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Hepatobiliary Surgery and Nutrition 2024年第4期13卷 742-744页

作者： Jongman kim Department of Surgery Samsung Medical CenterSungkyunkwan University School of MedicineSeoulRepublic of Korea

For intermediate-stage hepatocellular carcinoma(HCC)in the barcelona Clinic Liver Cancer(bCLC),transarterial chemoembolization(TACE)is advised as the initial *** term“bCLC intermediate-stage HCC”(bCLC stage b)refers to a group of patients with varying liver functions and single big nodules or many nodules that do not have distant metastases or vascular invasion(1).In general,tumors beyond the milan criteria(single tumor>5 cm or≥4 nodules)are classified as bCLC intermediate-stage ***,not every patient with intermediate-stage HCC in bCLC is a good candidate for TACE alone;this is especially true for patients who have a substantial tumor bulk,multinodular dissemination,or decreased liver *** refractory cases cannot get full TACE treatment.

关键词： Living liver donors outcomes guidelines barcelona Clinic Liver Cancer staging(bCLC staging)

Anomaly Detection Using Data Rate of Change on medical Data

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Computers, materials & Continua 2024年第9期80卷 3903-3916页

作者： Kwang-Cheol Rim Young-min Yoon Sung-Uk kim Jeong-In kim AI Convergence Research Institute Chosun UniversityGwangju61452Republic of Korea Interdisciplinary Program of Architectural Studies Chonnam UniversityGwangju61186Republic of Korea AINTCHAIN SOFT Co. Ltd.Mokpo-si58750Republic of Korea bK21 Human Resources Development Project Group Chosun UniversityGwangju61452Republic of Korea

The identification and mitigation of anomaly data,characterized by deviations from normal patterns or singularities,stand as critical endeavors in modern technological landscapes,spanning domains such as Non-Fungible Tokens(NFTs),cyber-security,and the burgeoning *** paper presents a novel proposal aimed at refining anomaly detection methodologies,with a particular focus on continuous data *** essence of the proposed approach lies in analyzing the rate of change within such data streams,leveraging this dynamic aspect to discern anomalies with heightened precision and *** empirical evaluation,our method demonstrates a marked improvement over existing techniques,showcasing more nuanced and sophisticated result ***,we envision a trajectory of continuous research and development,wherein iterative refinement and supplementation will tailor our approach to various anomaly detection scenarios,ensuring adaptability and robustness in real-world applications.

关键词： Anomaly data anomaly detection medical anomaly data cyber security rate of change

Vastly Synergistic Fe_(2)CuNiS_(4)-Nanoarchitectures Anchored 2D-Nano-Sandwich Derived from Flower-Like-CuFeS_(2)/N-Graphene and Cube-Like-NiFeS_(2)/N-CNTs for Water Oxidation and Nitrophenol Reduction

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Energy & Environmental materials 2024年第6期7卷 274-289页

作者： Gopiraman mayakrishnan Ramkumar Vanaraj Junpeng Xiong muhammad Farooq Azeem Ullah Keqin Zhang Seong Cheol kim Ick Soo kim Nano Fusion Technology Research Group Division of Molecules and PolymersInstitute for Fiber Engineering(IFES)Interdisciplinary Cluster for Cutting Edge Research(ICCER)Shinshu UniversityTokida 3-15-1UedaNagano 386-8567Japan School of Chemical Engineering Yeungnam UniversityGyeongsan 38541Korea Graduate School of medicine Scienceand TechnologyShinshu UniversityTokida 3-15-1UedaNagano 386-8567Japan National Engineering Laboratory for modern Silk College of Textile and Clothing EngineeringSoochow UniversitySuzhou 215123China

Surface area,pore properties,synergistic behavior,homogenous dispersion,and interactions between carbon matrix and metal-nanostructures are the key factors for achieving the better performance of carbon-metal based(electro)***,the traditional hydro-or solvothermal preparation of(electro)catalysts,particularly,bi-or tri-metallic nanostructures anchored graphene(G)or carbon nanotubes(CNTs),often pose to poor metal–support interaction,low synergism,and patchy *** first,bimetallic flower-like-CuFeS_(2)/NG and cube-like-NiFeS_(2)/NCNTs nanocomposites were prepared by solvothermal *** resultant bimetallic nanocomposites were employed to derive the 2D-nano-sandwiched Fe_(2)CuNiS_(4)/NGCNTs-SW(electro)catalyst by a very simple and green urea-mediated“mix-heat”*** desired physicochemical properties of Fe_(2)CuNiS_(4)/NGCNTs-SW such as multiple active sites,strong metal-support interaction,homogenous dispersion and enhanced surface area were confirmed by various microscopic and spectroscopic *** the best of our knowledge,this is the first urea-mediated“mix-heat”method for preparing 2D-nano-sandwiched carbon-metal-based(electro)*** Fe_(2)CuNiS_(4)/NGCNTs-SW was found to be highly effective for alkaline-mediated oxygen evolution reaction at low onset potential of 284.24 mV,and the stable current density of 10 mA cm^(−2) in 1.0 m KOH for 10 ***,the Fe_(2)CuNiS_(4)/NGCNTs-SW demonstrated excellent catalytic activity in the reduction of 4-nitrophenol with good kapp value of 87.71×10^(−2)s^(-1)and excellent reusability over five ***,the developed urea-mediated“mix-heat”method is highly efficient for the preparation of metal-nanoarchitectures anchored 2D-nano-sandwiched(electro)catalysts with high synergism,uniform dispersion and excellent metal-support interaction.

关键词： (electro)catalyst metal-sulfide nanoarchitectures mix-heat N-graphene/NCNTs synergistic effect urea

Surface-functionalized hole-selective monolayer for high efficiency single-junction wide-bandgap and monolithic tandem perovskite solar cells

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Journal of Energy Chemistry 2024年第1期88卷 317-326,I0008页

作者： Devthade Vidyasagar Yeonghun Yun Jae Yu Cho Hyemin Lee Kyung Won kim Yong Tae kim Sung Woong Yang Jina Jung Won Chang Choi Seonu kim Rajendra Kumar Gunasekaran Seok beom Kang Kwang Heo Dong Hoe kim Jaeyeong Heo Sangwook Lee School of materials Science and Engineering Kyungpook National UniversityDaegu 41566Republic of Korea Department of materials Science and Engineering and Optoelectronics Convergence Research CenterChonnam National UniversityGwangju 61186Republic of Korea Department of materials Science and Engineering Korea UniversitySeoul 02841Republic of Korea Department of Nanotechnology and Advanced materials Engineering Sejong UniversitySeoul 05006Republic of Korea

Carbazole moiety-based 2PACz([2-(9H-carbazol-9-yl)ethyl]phosphonic acid)self-assembled monolayers(SAms)are excellent hole-selective contact(HSC)materials with abilities to excel the charge-transferdynamics of perovskite solar cells(PSCs).Herein,we report a facile but powerful method to functionalize the surface of 2PACz-SAm,by which reproducible,highly stable,high-efficiency wide-bandgap PSCs can be *** 2PACz surface treatment with various donor number solvents improves assembly of 2PACz-SAm and leave residual surface-bound solvent molecules on 2PACz-SAm,which increases perovskite grain size,retards halide segregation,and accelerates hole *** surface functionalization achieves a high power conversion efficiency(PCE)of 17.62%for a single-junction wide-bandgap(~1.77 e V)*** also demonstrate a monolithic all-perovskite tandem solar cell using surfaceengineered HSC,showing high PCE of 24.66%with large open-circuit voltage of 2.008 V and high fillfactor of 81.45%.Our results suggest this simple approach can further improve the tandem device,when coupled with a high-performance narrow-bandgap sub-cell.

关键词： Perovskite solar cells 2PACz monolithic tandem solar cells Wide bandgap

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Five-phase Synchronous Reluctance machines Equipped with a Novel Type of Fractional Slot Winding

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CES Transactions on Electrical machines and Systems 2024年第3期8卷 264-273页

作者： S.m.Taghavi Araghi A.Kiyoumarsi b.mirzaeian Dehkordi Department of Electrical Engineering Faculty of EngineeringUniversity of IsfahanIsfahanIran

multi-phase machines are so attractive for electrical machine designers because of their valuable advantages such as high reliability and fault tolerant ***,fractional slot concentrated windings(FSCW)are well known because of short end winding length,simple structure,field weakening sufficiency,fault tolerant capability and higher slot fill *** five-phase machines equipped with FSCW,are very good candidates for the purpose of designing motors for high reliable applications,like electric cars,major transporting buses,high speed trains and massive ***,in comparison to the general distributed windings,the FSCWs contain high magnetomotive force(mmF)space harmonic contents,which cause unwanted effects on the machine ability,such as localized iron saturation and core *** manuscript introduces several new five-phase fractional slot winding layouts,by the means of slot shifting concept in order to design the new types of synchronous reluctance motors(SynRels).In order to examine the proposed winding’s performances,three sample machines are designed as case studies,and analytical study and finite element analysis(FEA)is used for validation.

关键词： Finite element analysis Five-phase machine Fractional slot concentrated winding(FSCW) machine slot/pole combination mmF harmonics Synchronous reluctance machine Winding factor

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