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Power absorption,plasma parameters and wave structure in inductive RF plasma source with low value external magnetic field

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Plasma Science and Technology 2020年第11期22卷 60-73页

作者： Elena KRALKINA Konstantin VAVILIN Ilya ZADIRIEV alexander nikonov Physical Electronics Department Faculty of PhysicsLomonosov Moscow State UniversityMoscow 119991Russia

The efficiency of radio-frequency(RF)power absorption,RF magnetic field structure and plasma parameters were measured in cylindrical inductive RF plasma sources 20 cm in diameter and 22,32,53 cm in length with a low value external magnetic *** experiments were carried out in argon at pressures of 13-140 m *** RF power supply changed from 200 W to 800 *** spiral antenna was used for sustaining the *** was shown that efficiency of RF power absorption depended nonlinearly on the external magnetic field *** maximal values of the RF power absorption efficiency,the axial distributions of longitudinal Bzand azimuthal Bφcomponents of RF magnetic field manifested the formation of the partially standing wave with a half wavelength close to 8 *** the same conditions,the axial dependence of the radial RF magnetic field component Brdiffered *** was concluded that the Bz and Bφamplitudes were largely determined by the RF field of Trivelpiece-Gould wave,while Br amplitude represented the radial RF field of the helicon wave.

关键词： radio-frequency plasma helicon Trivelpiece-Gould waves inductive discharge

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Comparison of pulse-modulated and continuous operation modes of a radio-frequency inductive ion source

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Plasma Science and Technology 2023年第2期25卷 131-145页

作者： Ilya ZADIRIEV Elena KRALKINA Konstantin VAVILIN alexander nikonov Georgy SHVIDKIY Physical Electronics Department Faculty of PhysicsLomonosov Moscow State UniversityMoscow 119991Russia

The paper describes an experimental study of the characteristics of a pulse-modulated radiofrequency(RF)discharge sustained at low pressures,typical of the operating modes of RF gridded ion *** motivation for the study is the question of whether the RF pulsemodulated mode can increase the efficiency of the ion *** ion current values extracted from an RF inductive ion source operating in continuous and pulse-modulated modes were *** experimental data were also compared with the parameter calculations based on a0D numerical model of the *** measurements showed that the pulse-modulated operation mode of the RF ion source had a noticeable advantage when the power of the RF generator was 140 W or ***,as the generator power increased,the advantage was lost because the pulse-modulated operation mode,having a higher RF power instant value,entered the region of existence sooner than the continuous mode,where the ion production cost begins to grow with RF power.

关键词： discharge plasma radio frequency(RF) pulse electrons ions

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Plasma treatment for enhancement of the sorption capacity of carbon fabric

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Plasma Science and Technology 2021年第12期23卷 150-160页

作者： IIya ZADIRIEV Elena KRALKINA Vladimir SAMOILOV Victoria ELCHANINOVA Valentina GORINA Ilya IVANENKO Konstantin VAVILIN alexander nikonov Physical Electronics Department Faculty of PhysicsLomonosov Moscow State University119991 MoscowRussia Research Institute for Graphite-Based Structural Materials‘Nllgrafit’ 1524 MoscowRussia

In this work we carried out an experimental investigation into enhancement of the sorption capacity of carbon fabric using plasma treatment *** fabric is based on viscose fiber and is hydrophobic by *** of the fabric sorption capacity is required for its application in *** this purpose,two plasma treatment methods were considered,*** nonequilibrium radiofrequency(RF)discharge and a vacuum RF plasma source with an external magnetic *** treated by atmospheric discharge demonstrated aging effects during the first week after *** sorption capacity of samples treated by the RF plasma source was stable over the same period and reached values as high as *** of the beam created by the vacuum RF plasma source were analyzed and dependences of the fabric sorption capacity and specific surface area on plasma treatment time were *** found that sorption capacity reached its maximum value after 30 min of treatment and did not change significantly if processing was continued,while the specific surface area reached its maximum after 3 min of treatment and quickly decreased after *** was found that the micropore structure of the fabric remained almost the same during plasma *** volume of mesopores in a unit of the fabric mass(specific volume)doubled during the first 5 min of treatment and returned to initial values after 30 min of *** sorption capacity continued to increase even when the specific surface area decreased after reaching its peak *** indicates the important role of surface functional groups formed on carbon fibers during plasma *** is consistent with the results of x-ray photoelectron spectroscopy analysis showing changes in surface oxidation during plasma treatment.

关键词： carbon fabric sorption plasma treatment radiofrequency

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