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Substrate Temperature Dependent Properties of Cu Doped NiO Films Deposited by DC Reactive Magnetron Sputtering

Journal of Materials Science & Technology 2013年第7期29卷 647-651页

作者： Yarraguntla Ashok Kumar reddy akepati sivasankar reddy Pamanji Sreedhara reddy Department of Physics Sri Venkateswara UniversityTirupathi 517502India Division of Advanced Materials Engineering Kongju National UniversityBudaedongCheonan CitySouth Korea

The NiO-Cu composite films were deposited on a glass substrate at various substrate temperatures by DC reactive magnetron sputtering technique. The effect of substrate temperature on the structural, optical, morphological and electrical properties of the films was mainly investigated. X-ray diffraction studies revealed that when the substrate temperature increased to above 200 ℃, the preferred orientation tended to move to another preferred site from （220） to （111） and had a band gap values increased with increasing substrate observed that the grain size and root mean square stable cubic structure. The optical transmittance and temperature. From the morphological studies, it was roughness were increased with increasing substrate temperature. The electrical resistivity of the film decreased to 0.017 Ωcm at high substrate temperature of 400 ℃.

关键词： Sputtering NiO-Cu composite films Substrate temperature Crystallite size Electrical resistivity

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Electron beam evaporated gold doped tungsten oxide nanostructured films for sensor applications

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ChemPhysMater 2023年第2期2卷 172-179页

作者： Adilakshmi Griddaluru sivasankar reddy akepati Department of Physics Vikrama Simhapuri University CollegeAndhra PradeshKavali 524201India

Gas sensors play a vital role in monitoring environmental pollution for human health,safety,and the detection of various gasses in the *** metal oxide thin films have been widely used in sensor applications owing to their unique *** this study,pure and gold(Au)doped nanostructured tungsten trioxide(WO_(3))films were deposited on glass substrates by electron beam evaporation at room *** microstructure of the WO_(3) films changed from nanoflakes to nanorods upon variation of the wt%of *** sensing properties of WO_(3) based nanostructure films were measured using a computer-controlled *** gas sensing results showed that the Au-doped WO_(3) films exhibited a higher sensitivity than the undoped *** 15 wt%Au-doped WO_(3) nanostructure films showed high sensitivity towards ethanol and the response(sensitivity)value was *** response and recovery times for 15 wt%Au-doped WO_(3) were 8 and 10 s,respectively.

关键词： Electron beam evaporation Tungsten oxide Gold Nanostructure Gas sensors

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