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DTFab:A Digital Twin based Approach for Optimal Reticle Management in Semiconductor Photolithography

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Journal of Systems Science and Systems Engineering 2023年第3期32卷 320-351页

作者： Chandrasekhar Komaralingam Sivasubramanian Robert Dodge Aditya Ramani David Bayba mani Janakiram Eric Butcher Joseph Gonzales Giulia Pedrielli School of Computing and Augmented Inteligence Arizona State UniversityTempeAZUSA Intel Corporation ChandlerAZUSA

Photolithography is among the key phases in chip *** is also among the most expensive with manufacturing equipment valued at the hundreds of millions of *** is paramount that the process is ran efficiently,guaranteeing high resource utilization and low product cycle times.A key element in the operation of a photolithography system is the effective management of the reticles that are responsible for the imprinting of the circuit path on the *** reticles means determining which are appropriate to mount on the very expensive scanners as a function of the product types being released to the *** the importance of the problem,several heuristic policies have been developed in the industry practice in an attempt to guarantee that the expensive tools are never ***,such policies have difficulties reacting to unforeseen events(e.g.,unplanned failures,unavailability of reticles).On the other hand,the technological advance of the semiconductor industry in sensing at system and process level should be harnessed to improve on these"expert policies".In this manuscript,we develop a system for the real time reticle management that not only is able to retrieve information from the real system,but also is able to embed commonly used policies to improve upon *** develop a new digital twin for the photolithography process that efficiently and accurately predicts the system performance,thus allowing our system to make predictions for future behaviors as a function of possible *** results demonstrate the validity of the developed model,and the feasibility of the overall approach demonstrating a statistically significant improvement of performance as compared to the current policy.

关键词： Semiconductor manufacturing reinforcement learning reticle management digital twin

Nitrogenous and carbonaceous aerosols in PM_(2.5) and TSP during pre-monsoon:Characteristics and sources in the highly polluted mountain valley

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Journal of Environmental Sciences 2022年第5期34卷 10-24页

作者： Hemraj Bhattarai Lekhendra Tripathee Shichang Kang Pengfei Chen Chhatra mani Sharma Kirpa Ram Junming Guo Maheswar Rupakheti Earth System Science Programme and Graduate Division of Earth and Atmospheric Sciences The Chinese University of Hong KongHong KongChina State Key Laboratory of Cryospheric Science Northwest Institute of Eco-environment and ResourcesChinese Academy of Sciences(CAS)Lanzhou 730000China Key Laboratory of Tibetan Environment Changes and Land Surface Processes Institute of Tibetan Plateau ResearchCASBeijing 100101China CAS Center for Excellence in Tibetan Plateau Earth Sciences Beijing 100085China Himalayan Environment Research Institute(HERI) Kathmandu 44602Nepal Central Department of Environmental Sciences Tribhuvan UniversityKathmandu 44613Nepal Institute of Environment and Sustainable Development Banaras Hindu UniversityVaranasi 221005India Institute for Advanced Sustainability Studies Potsdam 14467Germany

This study reports for the first time a comprehensive analysis of nitrogenous and carbona-ceous aerosols in simultaneously collected PM_(2.5) and TSP during pre-monsoon(March-May 2018)from a highly polluted urban Kathmandu Valley(KV)of the Himalayan *** mean mass concentration of PM_(2.5)(129.8 μg/m^(3))was only-25%of TSP mass(558.7 μg/m^(3))indicating the dominance of coarser mode ***,the mean concentration as well as fractional contributions of water-soluble total nitrogen(WSTN)and carbonaceous species reveal their predominance in find-mode *** mean mass concentration of WSTN was 17.43±4.70 μg/m^(3)(14%)in PM_(2.5) and 24.64±8.07 μg/m^(3)(5%)in ***,the fractional contribution of total carbonaceous aerosols(TCA)is much higher in PM_(2.5)(~34%)than that in TSP(~20%).The relatively low OC/EC ratio in PM_(2.5)(3.03±1.47)and TSP(4.64±1.73)suggests fossil fuel combustion as the major sources of carbonaceous aerosols with contributions from secondary organic ***-day air mass back trajectories sim-ulated with the HYSPLIT model,together with MODIS fire counts indicate the influence of local emissions as well as transported pollutants from the Indo-Gangetic Plain region to the south of the Himalayan *** component analysis(PCA)also suggests a mixed contribution from other local anthropogenic,biomass burning,and crustal *** re-sults highlight that it is necessary to control local emissions as well as regional transport while designing mitigation measures to reduce the KV's air pollution.

关键词： Nitrogenous aerosol Carbonaceous aerosols Major ions Particulate pollution Kathmandu Valley(KV)

Cardiometabolic risk factors in young Indian men and their association with parameters of insulin resistance and beta-cell function

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World Journal of Cardiology 2022年第8期14卷 462-472页

作者： Yashdeep Gupta Alpesh Goyal mani Kalaivani Nikhil Tandon Department of Endocrinology and Metabolism All India Institute of Medical SciencesNew Delhi 110029DelhiIndia Department of Biostatistics All India Institute of Medical SciencesNew Delhi 110029DelhiIndia

BACKGROUND There is an unmet need to evaluate the burden of cardiometabolic risk factors in young South Asian adults,who are not preselected for *** To evaluate young North Indian men(aged 20-50 years)for burden of cardiometabolic risk factors,in relation to parameters of homeostatic model assessment for insulin resistance(HOMA-IR)and beta-cell function(oral disposition index[oDI]).METHODS Study participants were invited in a fasting ***,anthropometric,and medical data were collected,and 75 g oral glucose tolerance test was performed with serum insulin and plasma glucose estimation at 0,30,and 120 *** were divided into quartiles for HOMA-IR and oDI(category 1:Best HOMA-IR/oDI quartile;category 3:Worst HOMA-IR/oDI quartile)and composite HOMA-IR/oDI phenotypes(phenotype 1:Best quartile for both HOMA-IR and oDI;phenotype 4:Worst quartile for both HOMA-IR and oDI)were *** We evaluated a total of 635 men at a mean(±SD)age of 33.9±5.1 years and body mass index of 26.0±3.9 kg/m^(2).Diabetes and prediabetes were present in 34(5.4%)and 297(46.8%)participants,***/obesity,metabolic syndrome,and hypertension were present in 388(61.1%),258(40.6%),and 123(19.4%)participants,*** prevalence of dysglycaemia,metabolic syndrome,and hypertension was significantly higher in participants belonging to the worst HOMA-IR and oDI quartiles,either alone(category 3 vs 1)or in combination(phenotype 4 vs 1).The adjusted odds ratios for dysglycaemia(6.5 to 7.0-fold),hypertension(2.9 to 3.6-fold),and metabolic syndrome(4.0 to 12.2-fold)were significantly higher in individuals in the worst quartile of HOMA-IR and oDI(category 3),compared to those in the best quartile(category 1).The adjusted odds ratios further increased to 21.1,5.6,and 13.7,respectively,in individuals with the worst,compared to the best composite HOMA-IR/oDI phenotypes(phenotype 4 vs 1).CONCLUSION The burden of cardiometabolic risk factors is hi

关键词： Cardiometabolic Insulin resistance Asian Disposition index Men Young

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Journal of Ocean Engineering and Science 2022年第4期7卷 321-326页

作者： H.I.Abdel-Gawad M.Tantawy M.S.mani Rajan Department of Mathematics Faculty of ScienceCairo UniversityGizaEgypt Department of Basic Sciences Faculty of EngineeringOctober 6 UniversityGizaEgypt Department of Physics University College of EngineeringAnna UniversityRamanathapuramIndia

The oscillatory motion on the ocean surface is a combination of a variety of different types of *** regularized waves are among ***,it is shown that they arise as solutions of the(1+2)-dimensional Benjamin-Bona-Mahony equation(BBME).Numerous works on(1+1)-dimensional BBME were carried in the *** this paper,we consider the(1+2)-dimensional non-autonomous BBME,with time-dependent *** model equation is completely *** objective is to find the exact solutions and investigate the relevant *** solve this issue,the extended unified method is used to find the exact solutions in the form of semi-self similar and self similar *** solve this issue,simi-larity transformations are ***,the generalized unified methods(GUM)are also used in the symbolic *** numerical results of these solutions are evaluated and are shown *** wave patterns of regularized waves in shallow water,near ocean shores,are ***-tory waves and vector of lumps with troughs are *** time-dependent coefficients are used,here,to control the different wave patterns that take the forms of the multi-U shaped wave with basins with a *** pattern formation occurs,which is in the form of two layers of lumps with *** tunneling is also *** waves patterns are *** stability of the steady state solutions is *** is found that the stability depends significantly on the dispersion coefficient.

关键词： (1+2)-dimensional Benjamin-Bona-Mahony equation Extended unified method Wave patterns Similariton solutions

Coupling of piezocatalysis and photocatalysis for efficient degradation of methylene blue by Bi_(0.9)Gd_(0.07)La_(0.03)FeO_(3) nanotubes

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Journal of Advanced Ceramics 2022年第7期11卷 1069-1081页

作者： Angom Devadatta mani Jie LI Ziquan WANG Jiale ZHOU Huaicheng XIANG Jinlai ZHAO Libo DENG Haitao YANG Lei YAO Shenzhen Key Laboratory of Special Functional Materials Shenzhen Engineering Laboratory for Advanced Technology of CeramicsGuangdong Research Center for Interfacial Engineering of Functional MaterialsCollege of Materials Science and EngineeringShenzhen UniversityShenzhen 518071China Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province College of Optoelectronic EngineeringShenzhen UniversityShenzhen 518060China cCollege of Chemistry and Environmental Engineering Shenzhen UniversityShenzhen 518071China

Photocatalytic degradation of organic pollutants is of great significance for wastewater remediation but is still hindered by the poor catalytic efficiency of the ***,we report a strategy to simultaneously introduce piezocatalysis and to enhance the intrinsic photocatalysis in a single catalyst,which improved the performance for catalytic degradation of methylene blue(MB)***,piezoelectric BiFeO_(3)(BFO)nanotube doped with different contents of Gd and La(Bi_(0.9)(GdxLa_(1−x))0.1FeO_(3))were produced by *** doping led to a higher concentration of surface oxygen vacancy(OV)in Bi_(0.9)Gd_(0.07)La_(0.03)FeO_(3),which effectively increased the piezoelectric field due to the deformation of BFO,and suppressed the recombination of photon-generated electron–hole *** Bi_(0.9)Gd_(0.07)La_(0.03)FeO_(3)nanotube showed excellent catalytic performance under simultaneous light irradiation and ultrasonic excitation,giving an extraordinary 95%degradation of MB within 90 *** findings suggest that the piezoelectric effect combined with defect engineering can enhance the catalytic performance of Bi_(0.9)Gd_(0.07)La_(0.03)FeO_(3)*** could potentially be extended to other catalytic systems for high-performance pollutant treatment.

关键词： photocatalysis piezocatalysis sonophotocatalysis oxygen vacancy(OV)

Effect of multilayer CrN/CrAlN coating on the corrosion and contact resistance behavior of 316L SS bipolar plate for high temperature proton exchange membrane fuel cell

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Journal of Materials Science & Technology 2022年第2期97卷 134-146页

作者： S.Pugal mani P.Agilan M.Kalaiarasan K.Ravichandran N.Rajendran Y.Meng Department of Analytical Chemistry University of MadrasChennai-25India Department of Chemistry Anna UniversityChennai-25India State Key Laboratory of Tribology Tsinghua UniversityBeijing 100084China

Stainless steels have received wide attention as a substitute material for bipolar plates in high temperature proton exchange membrane fuel cell(HT-PEMFC).In the present work,the CrN,CrAlN and multilayer CrN/CrAlN coatings were deposited on 316 L SS to increase the corrosion resistance and decrease the interfacial contact *** deposited coatings exhibited face centered cubic phase structure and it was verified from the X-ray diffraction pattern.X-ray photo electron spectroscopy results showed the formation of both CrN and CrAlN layers on 316 L ***/CrAlN coating is more helpful in water management due to low surface roughness and high contact angle in the HT-PEMFC *** corrosion resistance behavior of all the samples were studied in 85%H_(3)PO_(4)solution at 140℃purged with H_(2)(HT-PEMFC anode)and O_(2)(HT-PEMFC cathode)*** results showed that all the coatings considerably improved the performance of 316 L SS and superior corrosion resistance was observed for CrN/CrAlN multilayer coating,whose protective efficiency was 98.12%and 96.14%in the two simulated HT-PEMFC *** results of electrochemical impedance spectroscopic studies demonstrated higher impedance for CrN/CrAlN *** morphological studies performed after corrosion studies revealed that protection ability of CrN/CrAlN coating still remained acceptable.A very low interfacial contact resistance value of 6 mΩ cm^(2) at 140 N/cm;was observed for CrN/CrAlN ***,after corrosion studies,the interfacial contact resistance value of CrN/CrAlN coated 316 L was much lower than that of CrN and CrAlN coatings due to the increased oxidation *** maximum power density of about 0.93 W/cm^(2) at 2 A/cm^(2) and output voltage of 0.96 V was observed for CrN/CrAlN coating.

关键词： Bipolar plate 316L SS Corrosion Contact resistance Contact angle Surface roughness

A dental perspective on the successes and limitations of the disaster victim identification response to the Nepal earthquake

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Forensic Sciences Research 2022年第3期7卷 366-370页

作者： Samarika Dahal Gopal Kumar Chaudhary mani Raj Maharjan Eugen Dolma Walung Department of Oral Pathology&Forensic Dentistry Maharajgunj Medical CampusInstitute of MedicineKathmanduNepal Department of Forensic Medicine Maharajgunj Medical CampusInstitute of MedicineKathmanduNepal

This article describes the forensic odontological analysis of the events of the 2015 Nepal *** identifies the problems encountered in the aftermath,lessons learned,and prospective future advances aimed at reducing the subjectivity in disaster victim identification(DVI).During a crisis,dental practitioners,particularly forensic odontologists,can make a substantial contribution to DVI,as highlighted in this *** also promotes best practices in forensic dentistry that may be used by anyone in situations with few resources or people to deal with comparable scenarios.

关键词： Forensic sciences earthquake forensic dentistry identification Nepal

Streptomyces ghanaensis VITHM1 mediated green synthesis of silver nanoparticles： Mechanism and biological applications

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Frontiers of Chemical Science and Engineering 2016年第4期10卷 542-551页

作者： mani Abirami Krishnan Kannabiran Biomolecules and Genetic Division School of Biosciences and Technology VIT University Tamil Nadu 623014 India

We present the microbial green synthesis of silver nanoparticles （hiPs） by Streptomyces ghanaensis VITHM1 strain （MTCC No. 12465）. The secondary metabolites in the cell free supernatant of this bacterium when incubated with 1 mmol/L AgNO3, mediated the biological synthesis of AgNPs. The synthesized AgNPs were characterized by UV-visible spectrum, X-ray diffrac- tion （XRD）, atomic force microscope, scanning electron microscopy equipped with energy dispersive spectroscopy, transmission electron microscopy, FT-IR spectroscopy, dynamic light scattering and zeta potential. They were highly stable and, spherical in shape with the average size of 30-50 nm. The secondary metabolites involved in the formation of AgNPs were identified gas chromatographymass spectrography. The 3D structure of the unit cell of the synthesized AgNPs was determined using XRD data base. The synthesized AgNPs exhibited significant antibacterial activity against tested bacterial pathogens, and did not show haemolysis on human red blood cells. This green synthesis could provide a new platform to explore and use AgNPs as antibacterial therapeutic agents.

关键词： Streptomyces ghanaensis VITHM1 nanopar-ticles 3D structure antibacterial activity

Atmospheric particle-bound mercury in the northern Indo-Gangetic Plain region:Insights into sources from mercury isotope analysis and influencing factors

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Geoscience Frontiers 2022年第1期13卷 85-95页

作者： Junming Guo Lekhendra Tripathee Shichang Kang Qianggong Zhang Jie Huang Chhatra mani Sharma Pengfei Chen Rukumesh Paudyal Dipesh Rupakheti State Key Laboratory of Cryospheric Science Northwest Institute of Eco-Environment and ResourcesChinese Academy of SciencesLanzhou 730000China Himalayan Environment Research Institute(HERI) KathmanduNepal Key Laboratory of Tibetan Environment Changes and Land Surface Processes Institute of Tibetan Plateau ResearchChinese Academy of SciencesBeijing 100101China Center for Excellence in Tibetan Plateau Earth Sciences Chinese Academy of SciencesBeijing 100085China University of Chinese Academy of Sciences Beijing 100039China Central Department of Environmental Science Tribhuvan UniversityKathmanduNepal

Lumbini is a world heritage site located in the southern plains region of Nepal, and is regarded as a potential site for evaluating transboundary air pollution due to its proximity to the border with India. In this study, 82 aerosol samples were collected between April 2013 and July 2014 to investigate the levels of particulate-bound mercury(PBM) and the corresponding seasonality, sources, and influencing *** PBM concentration in total suspended particulate(TSP) matter ranged from 6.8 pg m^(-3) to351.7 pg m^(-3)(mean of 99.7 ± 92.6 pg m^(-3)), which exceeded the ranges reported for remote and rural sites worldwide. The Hg content(PBM/TSP) ranged from 68.2 ng g^(-1) to 1744.8 ng g^(-1)(mean of 446.9 ±312.7 ng g^(-1)), indicating anthropogenic enrichment. The PBM levels were higher in the dry season(i.e.,winter and the pre-monsoon period) than in the wet season(i.e., the monsoon period). In addition, the δ^(202) Hg signature indicated that waste/coal burning and traffic were the major sources of Hg in Lumbini during the pre-monsoon period. Meanwhile, precipitation occurring during photochemical processes in the atmosphere may have been responsible for the observed Δ^(199) Hg values in the aerosol samples obtained during the monsoon period. The PBM concentration was influenced mostly by the resuspension of polluted dust during dry periods and crop residue burning during the post-monsoon period. The estimated PBM deposition flux at Lumbini was 15.7 lg m^(-2) yr^(-1). This study provides a reference dataset of atmospheric PBM over a year, which can be useful for understanding the geochemical cycling of Hg in this region of limited data.

关键词： Particle-bound mercury Seasonality Mercury isotopes Deposition flux Indo-Gangetic Plain