Based on the self-terminating thermal oxidation-assisted wet etching technique,two kinds of enhancement mode Al_(2)O_(3)/GaN MOSFETs(metal-oxide-semiconductor field-effect transistors)separately with sapphire substrat...
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Based on the self-terminating thermal oxidation-assisted wet etching technique,two kinds of enhancement mode Al_(2)O_(3)/GaN MOSFETs(metal-oxide-semiconductor field-effect transistors)separately with sapphire substrate and Si sub-strate are *** is found that the performance of sapphire substrate device is better than that of silicon *** these two devices,the maximum drain current of sapphire substrate device(401 mA/mm)is 1.76 times that of silicon substrate device(228 mA/mm),and the field-effect mobility(μ_(FEmax))of sapphire substrate device(176 cm^(2)/V·s)is 1.83 times that of silicon substrate device(96 cm^(2)/V·s).The conductive resistance of silicon substrate device is 21.2Ω-mm,while that of sapphire substrate device is only 15.2Ω·mm,which is 61%that of silicon substrate *** significant difference in performance between sapphire substrate and Si substrate is related to the differences in interface and border trap near Al_(2)O_(3)/GaN *** studies show that(i)interface/border trap density in the sapphire substrate device is one order of magnitude lower than in the Si substrate device,(ii)Both the border traps in Al_(2)O_(3) dielectric near Al_(2)O_(3)/GaN and the interface traps in Al_(2)O_(3)/GaN interface have a significantly effect on device channel mobility,and(iii)the properties of gallium nitride materials on different substrates are different due to wet *** research results in this work provide a reference for further optimizing the performances of silicon substrate devices.
A nano-channel array(NCA)structure is applied to realize enhancement-mode(E-mode)AlGaN/GaN high-electron mobility transistors(HEMTs).The fabricated NCA-HEMT,consisting of 1000 channels connected in parallel with a cha...
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A nano-channel array(NCA)structure is applied to realize enhancement-mode(E-mode)AlGaN/GaN high-electron mobility transistors(HEMTs).The fabricated NCA-HEMT,consisting of 1000 channels connected in parallel with a channel width of 64 nm,shows a threshold voltage of 0.15 V and a subthreshold slope of 78 mV/dec,compared to−3.92 V and 99 mV/dec for a conventional HEMT(C-HEMT),*** the NCA-HEMT and C-HEMT show similar gate leakage current,indicating no significant degradation in gate leakage characteristics for the *** surrounding-field effect and relieved polarization contribute to the very large positive threshold voltage shift,while the work function difference makes it positive.
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