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Chinese Physics Letters 2017年第10期34卷 39-43页

作者：李超懿安俊明王九琦王亮亮张家顺李建光吴远大王玥尹小杰李勇钟飞 State Key Laboratory on Integrated Optoelectronics Institute of SemiconductorsChinese Academy of SciencesBeijing 100083 College of Material Science and Optoelectronic Technology University of Chinese Academy of SciencesBeijing 100049 College of Software Beihang UniversityBeijing 100191 Henan Shi Jia Photons Technology Co. LtdHebei 458030

An 8×10 GHz receiver optical sub-assembly （ROSA） consisting of an 8-channel arrayed waveguide grating （AWG） and an 8-channel PIN photodetector （PD） array is designed and fabricated based on silica hybrid integration technology. Multimode output waveguides in the silica AWG with 2% refractive index difference are used to obtain fiat-top spectra. The output waveguide facet is polished to 45° bevel to change the light propagation direction into the mesa-type PIN PD, which simplifies the packaging process. The experimentM results show that the single channel I dB bandwidth of AWG ranges from 2.12nm to 3.06nm, the ROSA responsivity ranges from 0.097 A/W to 0.158A/W, and the 3dB bandwidth is up to 11 GHz. It is promising to be applied in the eight-lane WDM transmission system in data center interconnection.

关键词： AWG GHz Receiver Optical Subassembly Based on Silica Hybrid Integration Technology for Data Center Interconnection The 8 PD

A 45-channel 100 GHz AWG based on Si nanowire waveguides

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Optoelectronics Letters 2017年第3期13卷 161-164页

作者：李凯丽张家顺安俊明李建光王亮亮王玥吴远大尹小杰胡雄伟 State Key Laboratory on Integrated Optoelectronics Institute of SemiconductorsChinese Academy of SciencesBeijing 100083China College of Materials Science and Opto-Electronic Technology University of Chinese Academy of SciencesBeijing 100083China

A 45-channel 100 GHz arrayed waveguide grating(AWG) based on Si nanowire waveguides is designed, simulated and fabricated. Transfer function method is used in the spectrum simulation. The simulated results show that the central wavelength and channel spacing are 1 562.1 nm and 0.8 nm, respectively, which are in accord with the designed values, and the crosstalk is about-23 dB. The device is fabricated on silicon-on-insulator(SOI) substrate by deep ultraviolet lithography(DUV) and inductively coupled plasma(ICP) etching technologies. The 45-channel 100 GHz AWG exhibits insertion loss of 6.5 dB and crosstalk of-8 dB.

关键词： AWG A 45-channel 100 GHz AWG based on Si nanowire waveguides SOI Si

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硅-有机物材料混合电光调制器的优化设计

光子学报 2016年第5期45卷 55-61页

作者：李凯丽安俊明张家顺王玥王亮亮吴远大李建光尹小杰王红杰中国科学院半导体研究所集成光电子学国家重点联合实验室北京100083

设计了一种基于绝缘上层硅的硅-有机物材料混合马赫-曾德干涉型高速电光调制器.利用光束传播法对顶层硅为220nm的绝缘上层硅基片上的3dB分束器/合束器的结构参数进行模拟,优化后附加损耗仅为0.106dB.为提高模式转换效率,在条形波导和slo... 详细信息

设计了一种基于绝缘上层硅的硅-有机物材料混合马赫-曾德干涉型高速电光调制器.利用光束传播法对顶层硅为220nm的绝缘上层硅基片上的3dB分束器/合束器的结构参数进行模拟,优化后附加损耗仅为0.106dB.为提高模式转换效率,在条形波导和slot波导之间设计了模式转换器,光耦合效率高达98.8%,实现了光模式高效转化.利用时域有限差分法模拟了slot波导平板区掺杂浓度对波导内光学损耗的影响,在几乎不产生光学损耗的情况下,得到平板区轻掺杂浓度为71017/cm3,调制器设计总损耗为0.493dB.利用薄膜模式匹配法对slot波导结构进行仿真分析,考虑slot区等效电容及平板区等效电阻对带宽的影响,优化后得到slot波导结构的限制因子为0.199.采用slot波导与强非线性有机材料LXM1结合的绝缘上层硅平台实现了强普克尔效应,得到电光调制器半波电压长度积为1.544V·mm,电学响应3dB带宽为137GHz.

关键词：硅-有机物材料混合槽式波导电光调制器马赫曾德干涉模式转换器

Design and fabrication of 25-channel 200 GHz AWG based on Si nanowire waveguides

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Optoelectronics Letters 2017年第4期13卷 241-244页

作者：李凯丽张家顺安俊明李建光王亮亮王玥吴远大尹小杰胡雄伟 State Key Laboratory on Integrated Optoelectronics Institute of Semiconductors Chinese Academy of Sciences College of Materials Science and Opto-Electronic Technology University of Chinese Academy of Sciences

A 25-channel 200 GHz arrayed waveguide grating(AWG) based on Si nanowire waveguides is designed, simulated and fabricated. Transfer function method is used in the simulation and error analysis of AWG with width fluctuations. The 25-channel 200 GHz AWG exhibits central channel insertion loss of 6.7 dB, crosstalk of-13 dB, and central wavelength of 1 560.55 nm. The error analysis can explain the experimental results of 25-channel 200 GHz AWG well. By using deep ultraviolet lithography(DUV) and inductively coupled plasma etching(ICP) technologies, the devices are fabricated on silicon-on-insulator(SOI) substrate.

关键词：阵列波导光栅硅纳米线 AWG GHz 通道设计制作等离子体刻蚀

Design and fabrication of optical power splitters with large port count

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Chinese Optics Letters 2014年第9期12卷 70-74页

作者：王亮亮安俊明张家顺吴远大李建光王红杰王玥潘盼钟飞査强尹小杰胡雄伟赵德刚 State Key Laboratory on Integrated Optoelectronics Institute of SemiconductorsChinese Academy of Sciences Henan Shi Jia Photons Technology Co. Ltd

We design and fabricate compact, low loss, and high port-count optical power splitters of 1 × 128 and 2 × 128 using silica-based planar lightwave circuit （PLC） technology on 6 inch quartz substrate. PLC technology is mainly based on plasma enhanced chemical vapor deposition, photolithography, and etching. The measured results show that the insertion loss, uniformity, and wavelength-dependent loss of 1 ~ 128 and 2 x 128 optical power splitters are less than 23, 1.43, and 0.92 dB and 23.3, 1.8, and 1.3 dB, respectively, in the wavelength range from 1.26 to 1.65/ma. The polarization-dependent losses are less than 0.16 and 0.2 dB, respectively, in the wavelengths of 1.31, 1.49, and 1.55 l/in.

关键词： Photolithography Plasma enhanced chemical vapor deposition Quartz

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浅谈在新形势下如何打造红色旅游景区

党史博采（下） 2013年第2期 38-38页

作者：尹小杰华北军区烈士陵园河北石家庄050000

近年来，红色旅游深受旅游者的青睐。在国内，红色旅游景区主要是以中国共产党建立后的革命纪念地，纪念物及其所承载的革命精神为载体，吸引人们进行参观游览，旨在实现学习革命精神，接受革命传统教育和振奋精神的主题旅游活动。但是... 详细信息

近年来，红色旅游深受旅游者的青睐。在国内，红色旅游景区主要是以中国共产党建立后的革命纪念地，纪念物及其所承载的革命精神为载体，吸引人们进行参观游览，旨在实现学习革命精神，接受革命传统教育和振奋精神的主题旅游活动。但是，当我们旅游一趟下来发现，大多数红色旅游景点无非就是刻在陈旧的展馆墙壁上的某某烈士事迹的文字，或陈展在相对应地方的烈士遗物，和讲了N次的讲解词，没有新意的感觉。

关键词：红色旅游景区革命精神革命传统教育革命纪念地旅游活动旅游景点旅游者纪念物

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光学相控阵技术研究进展

激光与光电子学进展 2018年第2期55卷 52-62页

作者：颜跃武安俊明张家顺王亮亮尹小杰吴远大王玥中国科学院半导体研究所集成光电子学国家重点联合实验室北京100083 中国科学院大学材料科学与光电技术学院北京100049

论述了光学相控阵的原理,回顾了光学相控阵的发展历程,特别是近年来硅光子相控阵的研究进展。利用与互补金属氧化物半导体(CMOS)工艺线相兼容的绝缘体上硅(SOI)技术实现了大规模的集成,目前国外报道的最大的硅光子相控阵集成了4096个阵... 详细信息

论述了光学相控阵的原理,回顾了光学相控阵的发展历程,特别是近年来硅光子相控阵的研究进展。利用与互补金属氧化物半导体(CMOS)工艺线相兼容的绝缘体上硅(SOI)技术实现了大规模的集成,目前国外报道的最大的硅光子相控阵集成了4096个阵元。在硅光子上实现的二维光束扫描角度可以达到46°×36°,光束宽度只有0.85°×0.18°,天线的损耗小于3 d B,且旁瓣抑制大于10 d B。此外,采用微机电系统(MEMS)器件实现的光学相控阵的光束扫描速度超过0.5 MHz。阐述了各种方式实现光学相控阵的优缺点,并对未来发展前景进行了展望。最后,介绍了光学相控阵在激光雷达、成像、军事上的应用。

关键词：光学器件光波导光学相控阵扫描角度绝缘体上硅

4 × 20 GHz silica-based AWG hybrid integrated receiver optical sub-assemblies

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Chinese Optics Letters 2018年第6期16卷 29-33页

作者：李超懿安俊明张家顺王亮亮李建光王玥尹小杰王红杰吴远大 State Key Laboratory of Integrated Optoelectronics Institute of Semiconductors Chinese Academy of Sciences College of Materials Science and Opto-Electronic Technology University of Chinese Academy of Sciences

Both the 4 × 20 GHz coarse wavelength division multiplexing and LAN-WDM receiver optical sub-assemblies（ROSAs） were developed. The ROSA package was hybrid integrated with a planar lightwave circuit arrayed waveguide grating（AWG） with 2% refractive index difference and a four-channel top-illuminated positive-intrinsicnegative photodetector（PD） array. The output waveguides of the AWG were designed in a multimode structure to provide flat-top optical spectra, and their end facet was angle-polished to form a total internal reflection interface to realize vertical coupling with a PD array. The maximum responsivity of ROSA was about 0.4 A/W, and its 3 dB bandwidth of frequency response was up to 20 GHz for each transmission lane. The hybrid integrated ROSA would be a cost-effective and easy-assembling solution for 100 Gb E data center interconnections.

关键词： WDM AWG GHz silica-based AWG hybrid integrated receiver optical sub-assemblies LAN