EFFECT OF PIEZOELECTRIC LAYERS ON THE SIZE-DEPENDENT PULL-IN INSTABILITY ANALYSIS OF ELECTROSTATICALLY ACTUATED MEMS
作者单位：Department of Engineering MechanicsSchool of Civil EngineeringShandong University Department of Mechanics and Engineering ScienceCollege of EngineeringPeking University
会议名称：《2015全国压电和声波理论及器件技术研讨会》
会议日期：2015年
学科分类：080704[工学-流体机械及工程] 08[工学] 0807[工学-动力工程及工程热物理]
基 金：supported by the National Natural Science Foundation of China(11202117) Natural Science Fund of Shandong Province(BS2012ZZ006)
关 键 词：Pull-in voltage Piezoelectric layer Size effect Modified couple stress theory
摘 要：With piezoelectric layers attached,the electrostatically actuated microbeam-based MEMS（Micro-Electro-Mechanical Systems）is modelled to study the pull-in instability based on a modified couple stress *** nonlinear differential governing equation and boundary conditions of the beam are derived by using Hamilton’s *** results show that the piezoelectric layers can decrease the pull-in voltage by only applying very small voltage on the *** study may be helpful to characterize the mechanical and electrostatic properties of small size MEMS,or guide the design of microbeam-based devices for a wide range of potential applications.